Saving The Image; Modifying Gun Parameters; Selecting The Gun Mode - Zeiss GeminiSEM Series Instruction Manual

Field emission scanning electron microscope
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5.4.8 Saving the Image

Procedure
1. In the Toolbar, click the Freeze:Unfreeze/Scanning icon.
2. From the Menu Bar, select File > Save Image.
3. To change the save path, click Change Directory.
4. To confirm the selected path, click Select Folder.
5. Enter the filename in the Filename input field.
6. Click Save <file name>.tif.
7. To continue imaging, click the Freeze:Unfreeze/Scanning icon.

5.5 Modifying Gun Parameters

5.5.1 Selecting the Gun Mode

The microscope can operate in different gun modes:
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Normal Gun Mode In Normal gun mode, the temperature of the Schottky emitter (gun / filament) and the extraction
voltage are optimized for a long lifetime of the Schottky emitter. Normal gun mode is suitable for
most applications.
Imaging Gun Mode In Imaging gun mode, the temperature of the Schottky emitter and the extraction voltage are re-
duced in comparison to the Normal gun mode. This leads to a reduction of the energy spread of
the primary electrons. Overall, the probe current in Imaging gun mode is about half the probe cur-
rent in Normal gun mode.
Imaging gun mode is especially useful at low kV or at high magnifications to reduce chromatic
aberration and to achieve a better resolution. Switching from Normal gun mode to Imaging gun
mode is useful for reducing the probe current without any need for beam adjustments.
Analytic Gun Mode In Analytic gun mode, the temperature of the Schottky emitter and the extraction voltage are in-
creased. This leads to a higher probe current. Overall, the probe current in Analytic gun mode is
about twice the probe current in Normal gun mode.
The Analytic gun mode is especially useful for applications which require high intensities (e.g.
WDX).
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
5 Commissioning and First Operating Steps | 5.5 Modifying Gun Parameters
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A red dot at the right bottom of the Image Area indicates that the image is frozen.
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The Export TIFF dialog is displayed.
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A file explorer window is displayed.
Normal
Imaging
Analytic
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