Related Manuals for Zeiss GeminiSEM Series
Summary of Contents for Zeiss GeminiSEM Series
- Page 1 Instruction Manual ZEISS GeminiSEM Series Field Emission Scanning Electron Microscopy Analytical Power for the Sub-Nanometer World...
- Page 2 ZEISS. No program, documentation, or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of ZEISS has been procured to do so, nor may be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-up copy for safety purposes.
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Page 3: Table Of Contents
2.4.5 Lockout/Tagout Equipment 2.4.6 Safety Labels Technical Data and Conformity 31 Product Specification | GeminiSEM 300 Product Specification | GeminiSEM 450 Product Specification | GeminiSEM 500 Installation Requirements 3.4.1 Layout and Connections 3.4.2 System Layout Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 4 4.3.1.4 BSD Detector 4.3.1.5 BSD Detector 4.3.1.6 aBSD Detector 4.3.2 Control Panel Software Description 87 User Interface Graphical Control Elements User Access Levels and User Privileges SmartSEM Program Suite Transport and Storage 93 Installation 96 Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 5 Setting up the HE-SE2 Detector 8.5.5 Setting up the AsB Detector 8.5.6 Setting up the AsB4 Detector 8.5.7 Setting up the aBSD/BSD Detector 8.5.8 Setting up the CL Detector 8.5.9 Setting up the EsB Detector Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 6 10.5.1 Lubricating the Rod 10.6 Apertures 10.6.1 Cleaning the Beamsleeve Apertures Shutdown and Disposal 154 11.1 Putting the Microscope Out of Operation 11.2 Disposal 11.2.1 Disposing of Solid Waste (Consumables) 11.2.2 Disposing of the Microscope Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 7 Table of Contents Parts and Tools 155 12.1 Consumables 12.2 Spare Parts 12.3 Tools and Accessories Index 157 Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 8: Glossary
Used to measure the probe current in the microscope. Focus Wobble Function that sweeps the focus of the objective lens backwards and forward through the focus on the specimen plane. When the aperture is misaligned a lateral shift is observed. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 9 Compensates astigmatism (lens aberration), so that the electron beam becomes rotationally symmetrical. Suppressor Electrode (anode) that suppresses unwanted thermionic emission from the shank of the Schottky field emitter. X-ray Type of high energy electromagnetic radiation, that is generated during the operation of electron microscopes. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 10: About This Document
The manual is designed for operators who have been trained to operate the microscope by a ZEISS service representative. Basic operator training and safety instructions will be provided within the scope of initial start-up by ZEISS. Operators of the microscope must not deviate from the instructions provided in this manual. -
Page 11: Text Conventions And Link Types
Airlock Input text The font Courier highlights text to be entered by the user. Link Types Link Type Meaning See Safety Instructions and Additional Leads to the chapter Safety Instructions and Additional Information [} 12]. Information. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 12: Safety Instructions And Additional Information
Risk of property damage NOTICE indicates a property damage message. INFO INFO indicates useful additional information and tips that can help you to make your daily work easier. There is no risk for health or property involved. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 13: Related Documents
For details on technical data, refer to the documents Product Specification and Installation Requirements. Material Safety Data Sheets Material safety data sheets (MSDS) of chemicals used in combination with the microscope are contained in the document folder delivered with the microscope. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 14: Safety
This application enables an accelerated material removal by a focused electron beam in combination with process gas. INFO Not for therapeutic, treatment or medical diagnostic evidence. Not all products are available in every country. Contact your local ZEISS representative for more information. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 15: Safety Procedures
The microscope is only to be used by operators who have been trained by a ZEISS service representative. Basic operator training and safety instructions will be provided within the scope of initial start-up by ZEISS. Make sure that everyone working with the microscope only performs the tasks for which he/ she is trained. -
Page 16: Requirements For Personnel
ZEISS service representative or organization. 2.2.4 Safe Handling of Spare Parts Using spare parts that are not provided by ZEISS can be hazardous or can lead to property damage: ¢ Only genuine parts supplied by ZEISS are to be used in servicing the microscope. -
Page 17: Prevention Of Hazards
2 Safety | 2.3 Prevention of Hazards ¢ Unless authorized by ZEISS, all spare parts should be installed by a ZEISS service representative. 2.3 Prevention of Hazards | 2.3 Prevention of Hazards This section summarizes possible hazards and recommended safety procedures. 2.3.1 Biological Hazards... -
Page 18: Chemical Hazards
When disposing of aggressive or toxic chemicals, there is a threat of damage to the environment. When disposing of waste that has been generated during a service operation (e.g. used rotary pump oil), comply with all national and local safety and environmental protection regulations. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 19: Electrical Hazards
Hazardous voltage inside the microscope Contact may cause burn or electrical shock. Do not remove any parts. Only authorized ZEISS service representatives are allowed to service the microscope. Do not try to service the microscope yourself. Disconnect power before opening. -
Page 20: High Pressure Hazards
Do not remove any parts around the column and chamber that are essential for radiation protection. Use genuine ZEISS parts exclusively. Ensure that all local safety and X-ray protection regulations are met. Only authorized ZEISS service representatives are allowed to service the microscope. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 21: Suffocation Hazards
Outside Germany, the user of the microscope has to comply with the local regulations of the country where the microscope is operated. Radiation Protection For questions regarding radiation protection, contact the ZEISS Radiation Safety Officer, Carl Zeiss AG, 73447 Oberkochen, Germany phone: +49 (0) 7364 20 0 2.3.8 Suffocation Hazards... -
Page 22: Safety Equipment
Fig. 2.1: Protective cover panels Electron optical column protective cover panels Specimen chamber protective cover panels Plinth protective cover panels Operation of the microscope is only allowed with attached protective cover panels. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 23: Main Switch
The EMO button must be pressed in an emergency to cut off mains power from the microscope and all devices connected to the AC Unit. The EMO button must always be readily accessible and operable. Up to three additional EMO buttons may be connected. Fig. 2.3: EMO button Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 24: Locking Devices
= no is indicated in the SmartSEM user interface. EHT and SE2 detector voltages are blocked. 2.4.4.2 Vacuum Locking Device The vacuum locking device ensures that gun vacuum and system vacuum are better than the required thresholds. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 25: Interlock System Of Optional Airlock
¢ must close off the connections to the corresponding media when needed, ¢ must be lockable in their off position in order to prevent accidental reactivation. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 26: Safety Labels
Appropriate safety labels on the microscope warn operators of hazards. Each safety label is affixed close to the point where a particular hazard exists. Several labels also provide legal information. Labels Attached to the Front Side of the Microscope Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 27 Reorder no. 347800-0033-000-02en Damage by collision At the front of the chamber door. Collision of internal parts possible at short working distances. ¢ Before opening, move the stage to a long working distance. Reorder no. 347800-0033-000-04en Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 28 Reorder no. 347800-0033-000-07en At the rear of the microscope plinth close to the High leakage current additional earth connection Contact can cause electric shock or burn. ¢ Only operate with separate ground connection. Reorder no. 347800-0033-000-06en Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 29 Reorder no. 347800-0033-000-08en Underneath the cover panels of the microscope there are some more safety labels, which are addressed to authorized ZEISS service representatives. These safety labels are described in the documents for ZEISS service representatives. Position and Figure of the Type Plate...
- Page 30 The acceleration voltage of this electron microscope is limited to 30 kV. ¢ The local dose rate at a distance of 0.1 m from the accessible surface of the electron microscope does not exceed 1 μS/h. Reorder no. 347800-0033-000-12en Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 31: Technical Data And Conformity
Focus wobble: For assistance in aperture alignment, with adjustable amplitude and speed Rotation compensation: Automatic correction of apparent image rotation with changes in working distance Beam shift For precise adjustment of image position at high magnifications Width: 200 µm at 20 kV and WD = 8.5 mm Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 32 Specimen current monitor with integrated Touch Alarm (Audible touch alarm warning with on-screen message) Specimen mounts: One carousel 9x specimen holder (for stubs) included in base tool configuration, wide range of specimen holders available as option Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 33 Filtering grid adjustable from 0 V to −1.5 kV for energy filtering The InLens SE detector and the EsB detector can be used in parallel Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 34 High efficiency variable pressure SE detector (included in optional VP configuration) InLens SE and optional InLens EsB detector available in VP mode Optional 5 segment multi-mode solid state BSE detector For more details refer to the document Product Specification GeminiSEM 300. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 35: Product Specification | Geminisem
Hysteresis correction: for the removal of lens hysteresis. Column: Compact column design, integrated Mu-metal shielding to limit sensitivity to stray fields. Factory aligned column for minimum astigmatism and beam shift. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 36 Eight accessory ports on the chamber are provided, three of them for analytic applications with take-off angle of 35°. Analytical working 8.5 mm distance Specimen stage Type: 5-axes motorized eucentric, controlled from the SmartSEM user interface, operated by a dual joystick control box. Mounting: Drawer-type door. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 37 Allows you to quickly transfer the specimen into the specimen chamber without breaking the system vacuum. Moreover, the use of an airlock minimizes contamination of the specimen chamber and reduces pumping times thus speeding up the specimen exchange procedure. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 38 Modified instrument resolution because of the 2 mm additional height of the AsB detector is indicated in the resolution values. The WD indication is automatically corrected, i.e. the displayed WD is real distance between specimen surface and AsB detector bottom side. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 39 High efficiency variable pressure SE detector (included in optional VP configuration) InLens SE and optional InLens EsB detector available in VP mode Optional 5 segment multi-mode solid state BSE detector For more details refer to the document Product Specification GeminiSEM 450. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 40: Product Specification | Geminisem
1 kV, 2 kV, 3 kV, 5 kV and continuously varied between 50 V and 100 V in steps of 1 V. Airlock enabled specimen holder designed to ensure optimum electrical field geometry included. Bias wobble: For assistance of precise tilt alignment of specimen. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 41 Specimen weight: Up to 0.5 kg. Specimen current monitor with integrated Touch Alarm (Audible touch alarm warning with on-screen message). Specimen mounts: One carousel 9x specimen holder (for stubs) included in base tool configuration; various specimen holders available as option Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 42 Filtering grid adjustable from 0 V to −1.5 kV for energy filtering The InLens SE detector and the EsB detector can be used in parallel Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 43 High efficiency variable pressure SE detector (included in optional VP configuration) InLens SE and optional InLens EsB detector available in VP mode Optional 5 segment multi-mode solid state BSE detector For more details refer to the document Product Specification GeminiSEM 500. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 44: Installation Requirements
The provided electrical connection must be in accordance with the applicable electrical codes for the country of installation. In order to avoid disturbance from other installed machines ZEISS recommends using a separate power connection to the main distribution panel. Protection class... - Page 45 Parameter Requirement Water flow rate 60–70 l/h Pressure Adjustable up to 3 bar Water temperature 20–22 °C Stability 0.5 °C/10 min Heat dissipation 1 kW Connection hose 6 mm inside diameter. Two pieces 10 m each are delivered. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 46 Typical flow rate Less than 1 l/min during normal operation Approximately 12 l/min at 0.6 MPa pressure during air leveling system inflation Pressure 0.6–0.8 MPa (6–8 bar) Quality Oil-free Connection hose 6 mm inside diameter. 10 m are delivered with the workstation. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 47 Measured in time domain and at specimen chamber height (1.0 m – 1.5 m). DC component: 0.5 mG / 5 min or less AC component: less than 1 mG peak to peak between 10 Hz and 1 kHz Acoustic noise Up to 120 Hz: less than 52 dB 120–450 Hz: less than 43 dB Above 450 Hz: less than 47 dB Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 48: Layout And Connections
Static vibration damper Equipotential bonding bar Pre-vacuum pump Pressure reducer (water, nitrogen, compressed air) Computer workplace Main shut-off valves Emergency Off (EMO) button (optional) Water supply Water runback Nitrogen supply Compressed air supply Exhaust line Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 49: System Layout
Fig. 3.2: System layout Description Size (mm) appr. Distribution of load (kg) Footprints Plinth + column 822 × 1082 × 1757 4 × 222.5 4 × Ø 80 mm Table + PC 1650 × 1000 × 838 4 × 24.3 4 × Ø 50 mm 1100 × 1000 × 838 Static damping block 180 × 180 × 160 1 × 12.0 180 mm × 180 mm Pre-vacuum pump 432 × 265 × 295 1 × 24.5 200 mm × 180 mm Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 50 3 Technical Data and Conformity | 3.4 Installation Requirements Description Size (mm) appr. Distribution of load (kg) Footprints – Chiller (optional, 530 × 640 × 740 4 × 22.5 on wheels water- or air-cooled)* – Compressor* 281 × 139 × 239 1 × 25.0 281 mm × 139 mm *Actual measurements are country dependent (different manufacturers). Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 51: Declaration Of Conformity
– EMC requirements – Part 1: General requirements CE Marking The CE conformity marking is located on the type plate of the machinery or the optional accessory, respectively. Unauthorized modifications of the machinery or the optional accessory will cancel this declaration. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 52: Device Description
GeminiSEM 500) [} 61] or Electron Optical Column | Gemini II Column (GeminiSEM 450) [} 63] Specimen chamber with door handle Plinth with ON/STANDBY/OFF buttons Monitors Work desk Dual joystick Refer to Dual Joystick [} 74] Personal Computer (PC) Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 53 Information will be provided by the manufacturer ¢ Plasma Cleaner Refer to the instruction manual Plasma Cleaner ¢ Electrostatic Beam Blanker for SEM Refer to the instruction manual Beam Blanker ¢ Further options on request Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 54: Main Components
Fig. 4.4: Schematics of the vacuum system of a microscope with Gemini II column Gun with filament Gun head Multihole aperture (Gemini I column), single hole aperture (Gemini II column) Column chamber valve Vent valve Turbo pump Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 55 SmartSEM user interface. Gun and EHT can be switched on. Quiet Mode The automatically controlled Quiet Mode is optionally available. This option allows switching off the pre-vacuum pump after specimen exchange when the vacuum threshold is achieved. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 56: Vacuum System With Variable Pressure
VPSE detector and highest chamber pressures of up to 500 Pa. In XVP mode, the partial pressure in the specimen chamber is between 5 and 500 Pa (350 µm beamsleeve aperture) or between 5 and 150 Pa (800 µm beamsleeve aperture). Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 57 “System vacuum” in the SmartSEM user interface. As long as the detected pressure in the specimen chamber is not ready for operation, the column chamber valve is closed in order to separate the specimen chamber from the column. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 58 The pressure in the specimen chamber is measured by the Pirani gauge . As long as the detected pressure in the specimen chamber is not ready for operation, the column chamber valve is closed in order to separate the specimen chamber from the column. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 59: Operating Principle Of The Vacuum Modes
Configuration in Working with Variable Pressure [} 131]. Electron detection is provided via VPSE detector. If you have a backscatter detector mounted on the beamsleeve, this detector can also be used in this mode, but without beamsleeve bias. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 60: Beam Gas Path Length (Bgpl)
WD minus length of the beamsleeve, which is 6.17 mm. NOTICE Risk of property damage: Short Beam Gas Path Length (BGPL) Risk of damaging the beamsleeve and/or the specimen. Do not use a BGPL of less than 1 mm. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 61: Electron Optical Column | Gemini I Column
Lower detector: InLens SE detector Objective lens Focuses the electron beam on to the specimen surface. Scanning coils Deflect the beam across the specimen surface in what is usually referred to as a raster scan. Specimen Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 62 (EHT). Signal Detection When the primary electron beam hits the specimen, certain interaction products are released, which can be recorded by specific detectors. For more information see Principle of Signal Detection [} 66]. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 63: Electron Optical Column | Gemini Ii Column (Geminisem 450)
EsB detector InLens SE detector Objective lens Focuses the electron beam on to the specimen surface. Scanning coils Deflect the beam across the specimen surface in what is usually referred to as a raster scan. Specimen Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 64 Size of Anode Aperture Probe Current Typical Application 90 μm 3 pA – 100 nA Combined high resolution and analytical investigations with high throughput ¢ 300 nA high current configuration Size of Anode Aperture Probe Current Typical Application 150 μm 3 pA – 300 nA Special high-current applications Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 65: Gun Modes
Normal gun mode. INFO After switching the gun mode, you can immediately work with the selected gun mode. For applications, which require a high probe current stability, wait 24 hours until a stability of 0.2 %/h is reached. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 66: Detectors
STEM detector and give a bright field image. Electrons scattered under higher angles are detected by outer areas of the STEM detector and produce dark field images. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 67: Detectors Overview
HV, VP, Nano VP, XVP Compositional contrast Orientation contrast BSD detector* Compositional contrast HV, VP, Nano VP, XVP Topography Channeling contrast (crystal orientation) aBSD detector* Angular resolved BSE HV, VP imaging Compositional contrast Topography Channeling contrast (crystal orientation) Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 68: Inlens Se Detector
Position The annular shaped in-column detector is located above the objective lens. Fig. 4.9: Schematics of the InLens SE detector InLens SE detector Beam path Objective lens Specimen Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 69 Without the field of the electrostatic lens, which attracts the secondary electrons, the efficiency of the InLens SE detector is reduced. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 70: Se2 Detector
BSEs reach the scintillator contributing to the image generation. This produces a pseudo-backscattered image, which shows pronounced topography, but largely cancels surface properties and material contrast. INFO For all standard applications, the collector bias should be set to +300 V. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 71: Vpse Detector
SE detection in VP mode is pressure-dependent. The higher the pressure, the stronger the signal, but the worse the resolution. Therefore, optimum pressure (as low as possible, but sufficient to compensate for charging) should always be selected for every application. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 72: Chamber Ccd Camera
If a diode detector is selected, then by default the chamber CCD camera is disabled: Fig. 4.13: Chamber CCD camera disabled as indicated by a pause sign (e.g. if a diode detector is selected). Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 73: Specimen Stage
(vertical movement in the image) Height Vertical movement (movement towards or away from the focal plane of the image) Rotation Stage rotation parallel to the X-Y plane Tilt Stage tilt about an axis parallel to the X axis Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 74: Dual Joystick
At higher magnifications the stage movement is slower. The stage is moving with its maximum speed when viewing the specimen with the CCD (Charge Coupled Device) camera. The different axes can also be moved simultaneously. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 75: Optional Components And Accessories
Below a landing energy of 1.5 kV, the filtering grid has the additional function of selecting the desired energy of the BSEs. The operator can select the threshold energy of inelastically scattered BSEs to enhance contrast and resolution. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 76: Cl Detector
The detector can be used during energy-dispersive X-ray spectrometer (EDS) measurements and wavelength-dispersive spectrometer (WDS) measurements at any valid magnification. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 77: Asb Detector
The AsB detector is equipped with four diodes, which can be controlled independently via a menu. Compositional mode images show the atomic contrast of the specimen , whereas topography mode images show surface details. INFO BSE imaging is only possible at acceleration voltages above 1.5 kV. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 78: Bsd Detector
(BSD4). With BSD4 you can collect four channels in parallel, which can be displayed in Quad mode. Each channel can have an arbitrary combination of segments. So you can collect compositional images, topographical images, and custom combinations at once. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 79: Bsd Detector
It has five separate diode segments, one inner concentric ring and four outer quadrants. The inner segment S1 provides mostly material contrast whereas the four outer quadrants S2 to S5 provide more topographical contrast. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 80 (BSD4). With BSD4 you can collect four channels in parallel, which can be displayed in Quad mode. Each channel can have an arbitrary combination of segments. So you can collect compositional images, topographical images, and custom combinations at once. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 81: Absd Detector
The central segment S1 provides nearly pure material contrast, the adjacent inner segment S2 provides material and topography contrast. The four outer quadrants S3 to S6 provide mostly topographical contrast. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 82 The influence to the electron optical properties is compensated automatically by the SEM, which results in correct working distance and magnification when the detector is inserted. The big advantage of a small central Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 83 Regions that contain elements with lower atomic numbers appear darker. The inner detector segments S1 and S2 provide material contrast. The outer segments S3 to S6 are more important for topographical contrast. The segments can be combined in any way. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 84 Since the detector has a limited speed, it is recommended to use scan speed 6 or higher (slower), especially at small magnifications. The lower the gain is, the faster is the detector. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 85: Control Panel
Changes the scan field to a reduced area. The size of the area is determined by the current sub scan area settings. Stigmator X | Stigmator Y Shapes the beam roundness by changing the voltages applied to the stigmation deflectors. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 86 Changes the focal point of the column by adjusting the magnitude of the objective lens voltage. ¢ Scan Speed +/− Increases (+) or decreases (−) the scan speed by doubling or halving the beam dwell time with each click step. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 87: Software Description
Enables you to choose the panels to be placed in the Docking Panel. Image Area with Data Zone Displays image information and acquisition parameters from the microscope. Mini Bar Provides quick access to recently used dialogs and to the recipe management. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 88: Graphical Control Elements
Section Forms a group of control elements with related functions. Button Enables you to start an action. Checkbox Enables you to activate or deactivate a function. Drop-down Enables you to select the desired element. list Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 89: User Access Levels And User Privileges
Only the items assigned to the novice category are accessible. These include most frequently used parameters. Expert Items assigned to the novice and expert category are accessible. These include parameters useful for advanced operators. Service All items are accessible, also including infrequently used items and calibrations. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 90 Activate Partial Vent on Standby, Z Move on vent, Protect Z, Go to HV@Shutdown, EHT Off & Log Off, and Leave Gun ON at Shutdown. ¢ Use the bakeout function Vent Enables the user to vent the specimen chamber. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 91: Smartsem Program Suite
Enables you to manage user profiles and configure instruments. SmartSEM User Accounting Enables you to record important information during individual working sessions, e.g. logon/logoff time, number of TIFF files exported etc. SmartSEM User Interface Main software application Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 92 5 Software Description | 5.4 SmartSEM Program Suite Access: Windows start menu > SmartSEM Service Program Description Calibration Wizard Service activities, for ZEISS service representatives only GeminiSEM Alignment Service activities, for ZEISS service representatives only Wizard Gun Monitor Enables you to monitor important parameters of the SEM/FESEM.
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Page 93: Transport And Storage
Devices for transporting the microscope must be rated to handle its full weight and dimensions. Note the weight information on the package and on the shipping document. Check that none of the items has been damaged during shipment. Otherwise contact your local ZEISS service representative. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 94 Guidelines for Transporting the Unpacked Workstation/Microscope A hand pallet truck has to be used to move the workstation: ¢ Ensure all hallways and corners are wide enough to be passed with the hand pallet truck. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 95 6 Transport and Storage Allowable Conditions during Storage and Transport The packed workstation has to be stored in a dry place. Allowable temperature during storage and transport: Workstation: between −10 °C and +70 °C Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 96: Installation
7 Installation 7 Installation Unpacking, installation, and first start-up are carried out by an authorized ZEISS service representative. An excerpt of the installation requirements can be found under Installation Requirements [} 44]. For more details refer to the document “Installation Requirements”. -
Page 97: Operation
Otherwise open and unlock the main shut-off valves. If the Emergency Off (EMO) option is installed, pull the EMO button to release Set the MAIN switch to the ON position. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 98: Starting The Microscope
8.1.3 Starting SmartSEM Procedure 1 Power up the computer and log in. Start the SmartSEM user interface via the ZEISS SmartSEM icon on the desktop. Alternatively, select SmartSEM > SmartSEM User Interface from the Windows start menu. The EM Server opens while loading various drivers. The EM Server implements the internal communication between software and hardware of the microscope. -
Page 99: Calling Up The Help
– Contents ¢ Context-sensitive – Shift+F1 Question mark icon in the main ¢ F1 on focus window and in modal dialogs Detailed information about using the help system is given in the Online Help directly. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 100: Obtaining A First Image
Delivered with the microscope Specimen holder Delivered with the microscope If necessary: carbon tape, conductive – carbon, adhesive metal tape, or similar Appropriate specimen (with conducting – properties, e.g. gold on carbon) Lint-free gloves – Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 101 To insert the stub into the specimen holder, use tweezers. To fix the stub to the specimen holder, tighten the location screw with the Allen key. Note down which fix position is occupied by the specimen. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 102: Loading The Specimen Chamber
Risk of injury: Closing the chamber door Fingers can be pinched when closing the chamber door. Use the door handle to close the chamber door. Ensure not to get your fingers caught in the chamber door gap. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 103 Risk of property damage: Observe the stage movement via camera to avoid crashing. Vent the specimen chamber: 1 In the GeminiSEM Control panel, select the Vacuum tab. 2 Click Vent. The Vent message box is displayed. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 104: Locating The Specimen
To stop the moving stage immediately, press F12 or press the Break push button of the dual joystick panel. INFO As an alternative to the Stage Navigation Bar you may also use the Stage Navigation panel, which you can access via the Panel Configuration Bar. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 105 4 Use the dual joystick to carefully move up the stage so that the stub you are using is in the center of the upper schematic. NOTICE Risk of property damage: Observe the camera image in order not to crash into the pole piece. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 106: Switching On The Gun
Set the acceleration voltage: 1 In the GeminiSEM Control panel, select the Gun tab and double-click the EHT readout. The EHT Target window is displayed. 2 In the input field field, enter 10 and click OK. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 107: Acquiring An Image
Scan Speed drop-down list, select Scan Speed = 2. INFO The lower the scan speed number, the faster the electron beam scans across the specimen. Scan Speed = 2 allows you to get an image quickly. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 108 3 Select a detail on the specimen surface. 4 To adjust the magnification, hold down the left mouse button and drag the mouse within the Image Area in left/right direction. The current magnification is indicated in the Status Bar. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 109: Optimizing The Image
3 To change the size of the scan frame, click on the small blue squares on the green border line and drag them to the desired size. 4 Focus the image in the reduced raster. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 110 4 In the Beam Alignment section, click Stigmator. 5 In the Stigmation navigation box, use the scroll bars or the red marker to obtain the sharpest possible image. 6 To deactivate the reduced raster, in the Toolbar, click the Reduced Raster icon. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 111: Saving The Image
The Export TIFF dialog is displayed. To change the save path, click Change Directory. To confirm the save path, click Select Folder. Enter the filename to the Filename input field. Click Save. To continue imaging, click the Freeze:Unfreeze/Scanning icon. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 112: Modifying Gun Parameters
The Faraday cup consists of a strongly absorbing material with a cavity covered by a small aperture. If the beam is focused in this cavity, no secondary electrons and no backscattered electrons leave the Faraday cup. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 113 Grab the crosshairs and move them into the hole of the Faraday cup. The probe current is measured continuously. The measured probe current is displayed in the Specimen I readout. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 114: Changing The Extractor Voltage
8.3.3 Changing the Extractor Voltage Purpose The extractor voltage is preset by the factory or by the ZEISS service representative. Within certain limits, the operator may carefully increase the extractor voltage in order to optimize the probe current for particular applications. -
Page 115: Working With Different Apertures Configurations And Column Modes
Procedure 1 From the Menu Bar, select View > SEM Status. The SmartSEM Status dialog is displayed. In the Select tab, click Aperture Type. Select the Display tab. The parameter Aperture Type is displayed. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 116: Determining The Installed Aperture Configuration | Gemini
Smallest possible probe currents for low dose Current applications. Fisheye For very large field of views at an EHT of 100 V. Larger WDs are suggested. Widefield For large field of view with InLens/EsB detection. Requires the SmartSEM software license Field Mode. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 117: Selecting The Beam Mode | Gemini Ii Column
In the Column section, click the Beam Modes button. The Beam Mode Selection panel is displayed. In the Beam Mode Selection panel, select the beam mode from the drop down lists. If required, adjust the Depth of Field slider. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 118: Controlling The Probe Current With Different Apertures
¢ In Fisheye mode, only the default aperture can be used. Procedure 1 In the GeminiSEM Control panel, select the Control tab. In the Beam section, select an aperture from the Aperture drop-down list. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 119: Setting Detection Parameters
In the GeminiSEM Control panel, select the Imaging tab. From the Signal A drop-down list, select InLens. Adjust the EHT and the working distance (WD) according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 120: Setting Up The Se2 Detector
Adjust the EHT, working distance (WD), and collector voltage according to the suggestions in the table in order to optimize the image. INFO For detailed information on working with the SE2 detector see Obtaining a First Image [} 100]. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 121: Setting Up The Vpse Detector
In the GeminiSEM Control panel, select the Imaging tab. From the Signal A drop-down list, select VPSE. Adjust the EHT, working distance (WD), and collector voltage according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 122: Setting Up The He-Se2 Detector
In the GeminiSEM Control panel, select the Imaging tab. From the Signal A drop-down list, select HE-SE2. Adjust the EHT, working distance (WD), and collector voltage according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 123: Setting Up The Asb Detector
1 In the SEM Controls panel, select the Detectors tab. 2 From the Signal A drop-down list, select AsB. Select Operating Mode = Quad: 1 In the SEM Controls panel, select the Scanning tab. 2 From the Operating Mode drop-down list, select Quad. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 124: Setting Up The Asb4 Detector
The AsB4 detector enables four parallel outputs for simultaneous compositional and topographical imaging. Each of the four channels can be selected separately. When ordered this detector replaces the AsB detector. The following settings are recommended for the AsB4 detector: Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 125 3 If you want to change the default setting to BSD: TOPO, click BSD: Set TOPO. Select the BSD Gain: The BSD Gain depends on the signal strength. 1 From the BSD Gain drop-down list, select the appropriate BSD Gain. Low, Medium, High, or Very High. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 126: Setting Up The Absd/Bsd Detector
Segment S1: Pure material contrast (top left), Segment S2: Material contrast and topography (top right), Segments S3 to S6: Pure topography (bottom left). For comparison: Surface contrast seen with the InLens SE detector (bottom right) Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 127 From the Panel Configuration Bar, select BSD Control. The BSD Control panel is displayed. The BSD Control panel enables you to change the polarity of the segments, select BSD modes, and set the BSD gain. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 128 From the BSD Gain drop-down list, select Low, Medium, High, or Very High. INFO Since the detector has a limited speed, it is recommended to use scan speed 6 or higher (slower), especially at small magnifications. The lower the gain is, the faster is the detector. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 129: Setting Up The Cl Detector
In the GeminiSEM Control panel, select the Imaging tab. From the Signal A drop-down list, select CL. Adjust the EHT and the working distance (WD) according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 130: Setting Up The Esb Detector
In the GeminiSEM Control panel, select the Imaging tab. From the Signal A drop-down list, select ESB. Adjust the EHT, working distance (WD), and EsB Grid according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 131: Working With Variable Pressure
To change the chamber pressure, use the VP Target scroll bar. Alternatively double-click into the VP Target field, enter desired pressure value and click OK. Refer to Working with Variable Pressure [} 131] to determine the correct pressure value. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 132: Using Nano Vp/Xvp Mode
The Panel Configuration Bar is displayed. It contains an alphabetical list of functions. Double-click Beamsleeve Configuration. The Beamsleeve Configuration wizard is displayed where you have to set the aperture size. Follow the instructions of the Beamsleeve Configuration wizard. Insert the pneumatic stop onto the beamsleeve slide. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 133: Aligning The Beamsleeve Aperture
1 Take an InLens image of the beamsleeve with a low magnification at EHT > 5 kV. 2 To display crosshairs, from the Menu Bar, select View > Crosshairs. 3 In the Annotation Bar, click the Radial Measure icon and measure the diameter. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 134: Ideal Working Conditions In Nano Vp/Xvp Mode
Beam Gas Path Length 1 mm – 3 mm 0.3 mm – Z Below BGPL of 1 mm incomplete (BGPL) charge compensation BGPL > 2 mm increasing skirt effect Pressure 60 Pa – 80 Pa 5 Pa – 500 Pa Trade off between skirt effect and charge compensation Beamsleeve bias 350 V 0 V – 400 V Discharges Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 135 ¢ When you see arcing (bright stripes in electron image, light flickering in chamberscope), reduce VPSE collector bias or beamsleeve bias. All bias voltage supplies have protective circuits to prevent serious damage to the system. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 136: Changing To Nano Vp Or Xvp Mode
In case you get these error messages, check if the slide can freely move to insert the beamsleeve completely and inspect the O-ring at the beamsleeve. ¢ If the error still exists, contact your local ZEISS service representative. 8.6.2.4 Changing to Nano VP or XVP Mode NOTICE... -
Page 137: Returning To Hv Mode
7 The EHT is turned on again, if it was on before the transition. This takes approximately 60 s. If chamber pressure was really high before, then it takes a little bit longer. The transition is indicated in the status bar of the SmartSEM software. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 138: Shutting Down The System
Power down the computer: 1 Close all programs and software. 2 From the Windows start menu, select Shut Down. At the front of the plinth, press the Standby button. The microscope switches to Standby mode. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 139: Energizing The Microscope
Prerequisites ¢ The microscope has been de-energized, refer to De-energizing the Microscope [} 139] Procedure 1 Verify the microscope has been de-energized properly. To secure the microscope against accidental re-activation, lock the energy- isolating devices. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 140: Performing An Emergency Shutdown
1 If the EMO option is installed, press the EMO button on the top of the plinth. 2 If the EMO option is not installed, set the MAIN switch at the rear side of the plinth to the OFF position. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 141: Maintenance And Repair
8 hours, 5 days a week: annually INFO Keep track of maintenance work and contact the ZEISS service representative in time. A list of ZEISS locations and authorized service partners can be found at: http://www.zeiss.com/microscopy Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 142: Change Of Consumables And Chemicals
| 9.3 Change of Consumables and Chemicals The change of consumables and chemicals has to be performed by a ZEISS service representative at mandatory intervals. Preventive maintenance shall be carried out once a year. Shorter maintenance cycles are advised in the following cases: ¢... -
Page 143: Troubleshooting
Hazardous voltage inside the microscope Contact may cause burn or electrical shock. Do not remove any parts. Only authorized ZEISS service representatives are allowed to service the microscope. Do not try to service the microscope yourself. Disconnect power before opening. - Page 144 Stage needs to be driven Refer to Initializing the be approached correctly. to a well-defined Stage [} 146]. position. SE2 image SE2 image is noisy. Scintillator is used up. Contact your local ZEISS service representative to have the scintillator replaced. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 145 Gun vacuum is worse The pumping capacity of Refer to Baking out the than 8 to 9 × 10⁻⁹ mbar. the ion getter pump Gun Head [} 148]. decreases in the course of time, thus deteriorating the gun vacuum. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 146: Chamber
If you begin to experience symptoms of asphyxia (for example: rapid breathing, loss of mental alertness and/or muscular coordination, depression of sensations, emotional instability, fatigue) leave the room immediately and inform the facility’s safety officer. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 147 In the Vacuum tab, several vacuum status messages show the current vacuum levels achieved. As soon as the appropriate vacuum level is achieved, the vacuum status message shows Vac Status = Ready. This may take up to 5 minutes. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 148: Column
Set bakeout parameters and start the bakeout: 1 If the Full service bakeout checkbox is available, deactivate the Full service bakeout checkbox. INFO Full service bakeout includes column heating that may lead to column misalignment. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 149: Calibrating The Probe Current | Gemini Ii Column
The probe current calibration is done for every gun mode independently. So if you recalibrate the probe current, do it in the gun mode in which you need the new calibration. A checkbox displays the current status within the dialog. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 150: Power Circuit
Risk of property damage: Persisting electrical problems Tripped circuit breakers may be a hint for an electrical problem in the microscope. If a circuit breaker keeps tripping, de-energize the microscope completely and contact your ZEISS service representative for assistance. Parts and Tools Value Circuit... -
Page 151: Detectors
Wear suitable gloves. Keep away from sources of ignition. Do not smoke. In case of contact with the eyes, rinse immediately with plenty of water and seek medical advice. Avoid contact with skin. Do not breathe vapor. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... -
Page 152: Apertures
Wear suitable gloves. Keep away from sources of ignition. Do not smoke. In case of contact with the eyes, rinse immediately with plenty of water and seek medical advice. Avoid contact with skin. Do not breathe vapor. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000... - Page 153 5 Put the O-ring back again onto the beamsleeve aperture. It is now ready for operation. Insert the cleaned beamsleeve aperture. Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
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Page 154: Shutdown And Disposal
Putting the Microscope Out of Operation If the microscope will not be used for an extended period of time e.g. several months, it should be put out of operation. Contact your local ZEISS service representative to have the microscope put out of operation. 11.2 Disposal |... - Page 155 12 Parts and Tools NOTICE Risk of property damage: Spare parts and consumables Using spare parts or consumables that are not provided by ZEISS can lead to property damage. Only genuine spare parts and consumables supplied by ZEISS are to be used in servicing the microscope.
- Page 156 Storage container with 8 bores for the beamsleeve apertures Plastic tweezers for handling the beamsleeves Dust blower for cleaning the beamsleeve apertures from dust particles Black spare O-rings Green spare O-rings Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 157 Column Focus wobble 109 Gemini I 61 Gemini II 63 Conformity 51 Consumables 155 Gemini I column 61 Consumables and chemicals, Gemini II column 63 changing 142 Graphical control element 88 Control panel 85 GUI 87 Gun 61, 63 Switching on 106 Declaration of conformity 51 De-energizing the microscope 139 Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 158 Putting the microscope out of operation 154 Keyboard 85 Quiet Mode 55 Loading the specimen chamber 103 Locating the specimen 105 Related documents 13 Locking device 24 Replacing the chamber door Lockout/tagout 139 seal 146 Lockout/tagout equipment 25 Requirements for personnel 16 LOTO 25, 139 Lubricating the rod 151 Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 159 Software manual 13 Solid waste, disposal 154 Spare parts 16, 155 Specimen current 113 Specimen stage 73 Stage initialization 146 Starting SmartSEM 98 Storage 94 Switching on EHT 106 Gun 106 Microscope 97, 98 Tools 156 Transmitted electrons 66 Transport 94 Troubleshooting 143 User access level 89 User interface 87 User privilege 89 Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000...
- Page 160 Carl Zeiss Microscopy GmbH Carl-Zeiss-Promenade 10 07745 Jena Germany microscopy@zeiss.com www.zeiss.com/microscopy Plus a worldwide network of distributors www.zeiss.com/microscopy ZEISS reserves the right to make modifications to this document without notice. © Jena 2018 by Carl Zeiss Microscopy GmbH - all rights reserved...