Working With Different Aperture Configurations And Beam Modes; Determining The Installed Aperture Configuration | Gemini 1 Column And Gemini 3 Column; Determining The Installed Aperture Configuration | Gemini 2 Column - Zeiss GeminiSEM Series Instruction Manual

5 Commissioning and First Operating Steps | 5.6 Working with Different Aperture Configurations and
ZEISS

5.6 Working with Different Aperture Configurations and Beam Modes

5.6.1 Determining the Installed Aperture Configuration | Gemini 1 Column and Gemini 3
Column
The achievable maximum probe current depends on the type of installed anode aperture. The
type of aperture installed on the microscope can be determined via SmartSEM.
For the Gemini 1 column, two types of multihole aperture are available:
§
20 nA high resolution configuration
Multihole aperture type
7 hole aperture
§
100 nA high current configuration
Multihole aperture type
6 hole aperture
* Calibration value: deviation of 10 % possible
Info
If you wish to change the installed configuration of your microscope, contact your local ZEISS
service representative.
Procedure 1. From the Menu Bar, select View > SEM Status.
à
2. In the Select tab, click Aperture Type.
3. Select the Display tab.
à

5.6.2 Determining the Installed Aperture Configuration | Gemini 2 Column

The achievable maximum probe current depends on the type of installed anode aperture. The
type of aperture installed on the microscope can be determined via SmartSEM.
For the Gemini 2 column, three different column configurations are available:
§
40 nA high resolution configuration
Anode aperture diameter
55 μm
§
100 nA high current configuration
Anode aperture diameter
90 μm
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
The SmartSEM Status dialog is displayed.
The parameter Aperture Type is displayed.
Probe current
3 pA to 20 nA
Probe current
6 pA to 100 nA
Probe current
3 pA to 40 nA
Probe current
3 pA to 100 nA
Beam Modes
Typical application
High resolution
Typical application
High current
Typical application
High resolution and most an-
alytical applications
Typical application
Combined high resolution
and analytical investigations
with high throughput
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