Calibrating The Stigmator; Power Circuit; Checking The Position Of The Circuit Breakers - Zeiss GeminiSEM Series Instruction Manual

7 Troubleshooting | 7.4 Power Circuit
6. Activate the Spot checkbox.
7. Click Cal I Probe.
8. To confirm, click Yes.
9. To store the calibration, click Save.
10. Deactivate the Spot checkbox.

7.3.3 Calibrating the Stigmator

If the image shifts when you change the stigmator, then you need to set the stigmator balance.
The calibration needs to be done for only one single probe current, e.g. 30kV:10pA.
The SEM stigmator calibration is an alignment process that enables you to remove effects caused
by astigmatism. Astigmatism causes a circular beam to become elliptical. As a result, the focused
live image appears to be blurred in one direction (line focus).
Procedure 1. From the Panel Configuration Bar, select SEM Stig Calibration.
2. In the Wobble section, select Stig X or Stig Y.
3. Set the stigmator balance period via the Stig Bal Period scroll bar.
4. Set the stigmator balance amplitude via the Stig Bal Amplitude scroll bar.
5. Adjust the stigmator via the Stig Centre navigation box.
6. If the focused live image is still blurred in one direction or the image still shifts when you

7.4 Power Circuit

7.4.1 Checking the Position of the Circuit Breakers

NOTICE
Persisting electrical problems
Tripped circuit breakers may be a hint for an electrical problem in the microscope.
4
No.
F1
F2
F3
F4
F5
124
à
The Probe Current Calibration window is displayed.
à
The SEM Stig Calibration panel is displayed.
INFO: If the image appears to be blurred in X direction, then select Stig X.
INFO: A good starting value is 1000. For higher scan speeds (slower), increase the value.
For lower scan speeds (faster), reduce the value.
INFO: A good starting value is 100 %. For bigger magnifications, decrease the value.
change the stigmator, then repeat the procedure.
If a circuit breaker keeps tripping, de-energize the microscope completely and contact your
ZEISS service representative for assistance.
Value
10 A
10 A
10 A
10 A
10 A
Circuit
Power supply unit
RED (X20) & Green (X26) accessories
PC, WDX, EDX, AUX 3–4
Pre-Vacuum pump (X25) & Yellow (X22) ac-
cessories
Aux 1-2 + 2 Spare labeled FIB,GIS (Crossbeam
relevant only)
Internal heaters
Circuit surge protection off
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
ZEISS