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OPTO-EDU A63.7015 Instruction Manual

OPTO-EDU A63.7015 Instruction Manual

Tungsten filament scanning electron microscope, se, 20x~150000x

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A63.7015
Tungsten Filament Scanning Electron
Microscope, SE, 20x~150000x
Instruction Manual
To ensure the safety and obtain satisfactory performance, please study this instruction manual thoroughly before start to use the instrument.
Opto-Edu
1 / 16
sale@optoedu.com

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Summary of Contents for OPTO-EDU A63.7015

  • Page 1 A63.7015 Tungsten Filament Scanning Electron Microscope, SE, 20x~150000x Instruction Manual To ensure the safety and obtain satisfactory performance, please study this instruction manual thoroughly before start to use the instrument. Opto-Edu 1 / 16 sale@optoedu.com...
  • Page 2 Fix the stage on the bracket and turn it clockwise to fix it in place. 6. Slowly close the cabin door, press the vacuum button at the same time to vacuum, wait until the cabin door is sucked and let go. Opto-Edu 2 / 16 sale@optoedu.com...
  • Page 3 6. Click the "stop" button on the software after the image is taken to close the software. 7. Press and hold EXCHANGE to release the vacuum. (Complete in 40 seconds) 8. Turn off the power switch. Opto-Edu 3 / 16 sale@optoedu.com...
  • Page 4 3). Confirm whether the electron beam current value in the upper left corner of the image display window has risen to (above 100uA). -The tungsten filament needs to be replaced when the current value is 40~60uA (no picture) Opto-Edu 4 / 16 sale@optoedu.com...
  • Page 5 ※The image cannot be seen at all 1). Confirm the filament value (beam current value in the upper left corner of the image display window) 2. Use when looking for sample observation points (640x480) full screen mode, wider field of view. Opto-Edu 5 / 16 sale@optoedu.com...
  • Page 6 ※If you choose a magnification of 3,000 times or more, The product is relatively flat and the you need to adjust it in conjunction with "Stigmation". inclination angle is large. Opto-Edu 6 / 16 sale@optoedu.com...
  • Page 7 (6) Aperture rod adjustment (For A63.7015 Only) 1. Aperture adjustment The diaphragm is divided into four gears (30, 50, 50, 100um), The size is in order from the inside to the outside according to the red circle in the picture.
  • Page 8 When SE -> BSE is changed, because of the spot size, An unstable image like the one on the right may appear, While adjusting the spot size 5. Stigmation Adjust the resolution. (Click the 50% button) Opto-Edu 8 / 16 sale@optoedu.com...
  • Page 9 Note: The adjustment range of X and Y is plus or minus 20%, and the astigmatism is positive In the range of minus 20%, a clear image cannot be obtained and the edge value is A clear image is obtained indicating that the diaphragm is contaminated. Opto-Edu 9 / 16 sale@optoedu.com...
  • Page 10 10. Image Storage - Click the save icon , after the image acquisition is completed, you will be prompted to set the storage path. After selecting the path, the software automatically names and saves the file. Opto-Edu 10 / 16 sale@optoedu.com...
  • Page 11 “EXCHANGE” button 11 on the device to release the vacuum, and then you can replace the sample and observe again. 12. If testing is not required, press button 12 on the device to power off the SEM. Opto-Edu 11 / 16 sale@optoedu.com...
  • Page 12 1. The Measuring Tools function can measure and store parameters such as length, angle, area, etc. - Click the "Pause" button after finishing (Photo mode 1, 2 or 3) Measure the bar and store the picture, select the measurement tool ※ Click Can delete, and edit mark data. Opto-Edu 12 / 16 sale@optoedu.com...
  • Page 13 Check and replace the empty pump oil. Replenish The replenishment of vacuum pump oil means that when the vacuum pump oil is not deteriorated or polluted, the oil volume is lower than the standard position and the Opto-Edu 13 / 16 sale@optoedu.com...
  • Page 14: Troubleshooting

    Please turn off the power before troubleshooting. ⚫ Please reconfirm the precautions before troubleshooting. If you are unable to determine how to implement the fault maintenance, please immediately ⚫ Stop working and contact our company. Opto-Edu 14 / 16 sale@optoedu.com...
  • Page 15 Check if the 220V plug that supplies the power to the device is disconnected from the power supply box Check if the switch of E.L.B (leakage protector) on the back of " A63.7015 (A63.7006)" is If it is confirmed that the switch on the back of the device was turned on before, and the...
  • Page 16: Communication Failure

    ⚫ Check if the " A63.7015 (A63.7006)" device is turned on ⚫ Check if necessary, programs are executing ⚫ Check if your computer has virus. 2.3. Communication failure Problem The error message "Cannot find Active Scan facility" pops up Reason...