OPTO-EDU A63 .7080 Instruction Manual
  1. Manuals
  2. Brands
  3. OPTO-EDU Manuals
  4. Microscope
  5. A63 .7080
  6. Instruction manual

OPTO-EDU A63 .7080 Instruction Manual

Scanning electron microscope
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
A 6 3 . 7 0 8 0
Scanning Electron Microscope
Std FEG SEM
Instruction Manual

Advertisement

Table of Contents
loading

Related Manuals for OPTO-EDU A63 .7080

Summary of Contents for OPTO-EDU A63 .7080

  • Page 1 A 6 3 . 7 0 8 0 Scanning Electron Microscope Std FEG SEM Instruction Manual...

  • Page 2: Table Of Contents

    OPTO-EDU (BEIJING) CO., LTD. Content Overview ....................4 1.1. Product Features ..................4 1.2. Main uses and scope of application ............5 1.3. Model & Product Name .................5 1.4. Composition of the model No. and its representative meaning ..5 1.5. Main technical data ................6 1.6.
  • Page 3 OPTO-EDU (BEIJING) CO., LTD. 2.4. Vacuum system ..................13 2.5. Electrical cabinet control ..............14 2.5.1. Electrical cabinet ................14 2.5.2. Computer System................15 Use and operation of electron microscope software ..... 17 3.1. Familiar with the basic use of Windows 7 ........17 3.2.
  • Page 4 OPTO-EDU (BEIJING) CO., LTD. 4.3. Monitoring and Recording in Operation ..........38 4.3.1. Working of the vacuum system ...........38 4.3.2. Software Working Status ..............39 4.4. Operating procedures, methods & precautions for shutdown ..39 4.4.1. Daily standby status ..............39 4.4.2. Shutdown Status ................39 4.4.3.

  • Page 5: Overview

    OPTO-EDU (BEIJING) CO., LTD. Overview 1.1. Product Features A63.7080 Scanning Electron Microscope Std FEG SEM, is a digital Field Emission Gun scanning electron microscope (referred to as A63.7080). It is a large- scale precision electronic optical instrument for studying the microstructure of objects.

  • Page 6: Main Uses And Scope Of Application

    OPTO-EDU (BEIJING) CO., LTD. formats, and conversion between different image formats. The optional image processing software enhanced a series of image processing functions such as particle size analysis, on the basis of standard image processing software. 1.2. Main uses and scope of application...

  • Page 7: Main Technical Data

    OPTO-EDU (BEIJING) CO., LTD. 1.5. Main technical data Resolution 1.5nm@ 15kV or 30kV Magnification 15x~500000x Electron Gun Schottky Field Emission Gun Accelerating Voltage 0~30kV Lens System Electromagnetic lens Objective Diaphragm Include 3 diaphragm, out of vacuum room, position customized Specimen Room Include 6 interface, can connect WDS、 EDS、 BSE and etc.

  • Page 8: Requirements For Power Supply

    OPTO-EDU (BEIJING) CO., LTD. 1.7.3. Requirements for power supply 1.7.3.1. Requirement for power A63.7080’s main body (excluding X-ray analysis equipment), need to supply: AC 220V, 50Hz, 15A, with UPS power supply, at least two power output sockets (220V, 50Hz, 10A and 220V, 50Hz, 16A respectively) ). The experimental indoor air equipment switch is: AC 220V, 40A.

  • Page 9: Impact On The Environment And Energy

    OPTO-EDU (BEIJING) CO., LTD. equipment is in your environment (adjacent, upstairs, downstairs, etc.), it is good for measuring or correcting problems. 1.8. Impact on the environment and energy The X-ray radiation of A63.7080 meets the standards required by the state and does not affect the environment and energy 1.9.

  • Page 10: System Composition And Working Principle

    OPTO-EDU (BEIJING) CO., LTD. System composition and working principle 2.1. Overall structure A63.7080 interacts with an electron beam with a certain energy to excite a physical signal. The imaging signal is collected, digitized, and the like by means of a computer system and an electrical control system to form an image.

  • Page 11: Schottky Field Emission Electron Gun

    OPTO-EDU (BEIJING) CO., LTD. 2.2.1. Schottky field emission electron gun The Schottky field emission electron gun is a high-brightness electron source consisting of a very fine single crystal tungsten wire tip and four electrodes. The four electrodes are the suppression pole, the absorption pole, the focusing pole and the anode, and the tungsten wire tip acts on the electric field.

  • Page 12: Signal Detecting System

    OPTO-EDU (BEIJING) CO., LTD. 2.2.6. Signal Detecting System The signal detection system collects low energy secondary electrons and high energy backscattered electrons. When the grid at the front end of the detector is applied with a positive voltage, low-energy secondary electrons are attracted into the detector, and a positive voltage of 10KV is applied to the scintillator to accelerate the secondary electrons.

  • Page 13: Large Sample Stage

    OPTO-EDU (BEIJING) CO., LTD. standard sample stage has a similar sample stage operation and the range of motion is as follows:：  Horizontal X,Y=50mm  Vertical Z=25mm  Inclination T=-5°~ +90°  Rotation R=360°Continous The sample locking device can be used to lock the sample table and the sample chamber after the sample stage is inserted to reduce the effects of vibration.

  • Page 14: Vacuum System

    OPTO-EDU (BEIJING) CO., LTD. the sample under different conditions. 2.4. Vacuum system The electron optical lens barrel and the sample chamber must be operated under a certain vacuum state, and the realization and control of the entire system vacuum is completed by the vacuum system. The vacuum system is mounted below the sample chamber and is connected directly to the barrel via a vacuum line.

  • Page 15: Electrical Cabinet Control

    OPTO-EDU (BEIJING) CO., LTD. Field Emission Gun Ion Pump 1 Transition Chamber Ion Pump 2 Condenser Valve 1 Electron Optical Tube Objective Sample Chamber Valve 3 Vacuum Meter Vacuum Meter Vibration Reduction Molecular Pump Mechanical Pump Figure 2-2 Vacuum System The vacuum control part is installed on the front and rear panels of the main frame, and can be fully controlled from low vacuum to high vacuum.

  • Page 16: Computer System

    OPTO-EDU (BEIJING) CO., LTD. parts: SEM control electric system, vacuum power supply and field emission gun power supply. The power switch of the SEM control electrical system, the power switch of the vacuum system and the power switch of the field emission gun are relatively independent and are controlled by respective power button switches.
  • Page 17 OPTO-EDU (BEIJING) CO., LTD. and image format selectable settings; supports a variety of common image formats, and conversion between different image formats; the software integrates some common image processing functions, which is more convenient to use. The computer operating system can be installed with electronic mirror image processing software, which is a more powerful independent image processing software;...

  • Page 18: Use And Operation Of Electron Microscope Software

    OPTO-EDU (BEIJING) CO., LTD. Use and operation of electron microscope software 3.1. Familiar with the basic use of Windows 7 The A63.7080 operating software is installed on the Windows 7 operating system and complies with all applications of the Windows 7 operating system.

  • Page 19: Software Scan Control Window

    OPTO-EDU (BEIJING) CO., LTD. 3.2.1. Software Scan Control Window Figure 3-3、3-4 show main function & meaning of software Menu bar Key bar Function field Main field Status field Figure 3-3 Scan Control Window www.cnoec.com.cn Page 18 of 51 sale@cnoec.com...
  • Page 20 OPTO-EDU (BEIJING) CO., LTD. Figure 3-4 Scan Control Function Note Mouse operation: After clicking the active block on the toolbar, drag the mouse to fine tune the corresponding parameters; After double-clicking the active block on the toolbar, drag the mouse to thicken the corresponding parameters;...

  • Page 21: Starting And Shut Down

    OPTO-EDU (BEIJING) CO., LTD. 3.2.2. Starting and Shut down Figure 3-5 Click“SE” 1. Run the SEM operating software. 2. Click “SE” in the upper right corner of the control interface to open the SEM operating software. (The configuration information when the last use is opened by default) Figure 3-6 Click“VAC”To Closc...
  • Page 22 OPTO-EDU (BEIJING) CO., LTD. Table 3-1 Function Keys Meaning www.cnoec.com.cn Page 21 of 51 sale@cnoec.com...

  • Page 23: Electronic Gun Control

    OPTO-EDU (BEIJING) CO., LTD. 表 3-1（续） 3.2.4. Electronic Gun Control The main function area of the control software has multiple tabs (Beam, Align, Image, AUX, Status), and the Beam tab is the gun control area, as shown in Figure 3-8. Divided into vacuum control zone, gun parameter setting zone, error prompt zone, including all functions of electronic gun parameter setting and monitoring.
  • Page 24 OPTO-EDU (BEIJING) CO., LTD. Vacuum Settin Gun Setting Error Hint Figure 3-8 Electron Gun Function Window Figure 3-9 Advance Function Window www.cnoec.com.cn Page 23 of 51 sale@cnoec.com...

  • Page 25: Electrical Alignment

    OPTO-EDU (BEIJING) CO., LTD. The advanced function window includes four pages: Power Set, Power Monitor, Diagram, and Options. On the Power Set page, you can fine-tune the gun parameters (recommended for users). The Power Monitor page displays the current filament current value and the voltage values of the electrodes. The Diagram page displays the current vacuum valve status.

  • Page 26: Image Electrical Displacement

    OPTO-EDU (BEIJING) CO., LTD. 表 3-2 电对中功能 3.2.6. Image electrical displacement Figure 3-4 电位移调节 3.2.7. Main function area The main function area of the scan control window is shown in Figure 3 12. In the function area, the function bar for adjusting brightness, contrast, adjusting focus and magnification is included, which can easily adjust various parameters.
  • Page 27 OPTO-EDU (BEIJING) CO., LTD. Figure 3-5 Scan Control Window Table 3-3 Scan Control Function www.cnoec.com.cn Page 26 of 51 sale@cnoec.com...

  • Page 28: Image Acquisition

    OPTO-EDU (BEIJING) CO., LTD. 3.3. Image acquisition 3.3.1. Overview of the Software Interface The software control interface is shown in Figure 3 13, including the menu bar, toolbar, Figure image display area, and scan control area. After opening the control software, follow the corresponding function adjustment to get the Figure image in the figure image display area.

  • Page 29: Scan Settings

    OPTO-EDU (BEIJING) CO., LTD. Figure 3-6 Software Control Window 3.3.2. Scan Settings During the adjustment of the Figure image, right-click on the Figure image area to see the interface shown in Figure 3 14. Click on the corresponding option to make the relevant settings. Click on "settings" to set the detector type, scan speed, sync mode, etc., as shown in Figure 3 15.

  • Page 30: File Management Menu

    OPTO-EDU (BEIJING) CO., LTD. 3.3.3. File Management Menu Click on the menu bar "file" to save or print the Figure image as shown in Figure 3 16. There is a shortcut to save the Figure image in the toolbar. As shown in Figure 3 17, you can select the storage location and name the Figure image file.

  • Page 31: Getting Images

    OPTO-EDU (BEIJING) CO., LTD. 3.3.4. Getting images The toolbar of the software interface has a shortcut to scan the Figure image, as shown in Figure 3 19, and the functions are shown in the table. Figure 3-12 Scan Button Table 3-4 Scan Image Button Meaning www.cnoec.com.cn...

  • Page 32: Sem Microscope Operation Procedure

    OPTO-EDU (BEIJING) CO., LTD. SEM Microscope Operation Procedure 4.1. Preparation and inspection before use 4.1.1. Power Supply Check Check whether the power supply (AC 220V) is normal, the cable connection is correct, and the ground wire is connected properly before A63.7080 is turned on.

  • Page 33: Starting The Electron Microscope From The Off State

    OPTO-EDU (BEIJING) CO., LTD. electron microscope. Just open the V1 block valve, the electron microscope control software will automatically adjust the brightness, contrast, auto focus and other operations. You can immediately see the figure image in the figure window, which is easy to operate. Fast. To start the electron microscope from the off state, you need to click the "hot start"...

  • Page 34: Placing Or Replacing Samples

    OPTO-EDU (BEIJING) CO., LTD. 4.2.2.3. Handling precautions In order to prevent the instrument from malfunctioning, the instrument is equipped with a chain protection device. However, some incorrect operation will still cause the instrument to malfunction. To this end, in addition to strict...

  • Page 35: Turning On The Gun Power Supply

    OPTO-EDU (BEIJING) CO., LTD. shutoff valve V1. 2. Click “Deflating” on the software interface and the vacuum system will automatically deflate the sample chamber. 3. After the deflation is completed, the sample chamber door is loose and the sample chamber is in an atmospheric state.

  • Page 36: How To Get Images

    OPTO-EDU (BEIJING) CO., LTD. 4.2.5. How to get images After starting the electron microscope, open the V1 block valve and you can see the figure image in the figure window of the software control interface. In actual use, in order to obtain the desired Figure image, relevant adjustments, such as axis, astigmatism, brightness contrast, etc., are required.
  • Page 37 OPTO-EDU (BEIJING) CO., LTD. When adjusting the objective lens to close the axis, follow the steps below： 1. Use the active selection and fast scan mode to create a “feature point” on the Figure image. 2. Select a range of about 5000 times the low magnification; click the wobbler button to observe the movement of the image.

  • Page 38: Adjusting Sample Position

    OPTO-EDU (BEIJING) CO., LTD. 5. Double magnification scan 6. Image split scan Changing the scanning speed 4.2.5.5.2. Refer to picture 3-2 software control panel Adjusting the magnification 4.2.5.5.3. Refer to picture 3-2 software control panel Astigmatism 4.2.5.5.4. Refer to picture 3-2 software control panel Electric Displacement Adjustment 4.2.5.5.5.

  • Page 39: Sample Preparation

    OPTO-EDU (BEIJING) CO., LTD. 4.2.6.4. Sample tilt T Rotate the knob on the door of the sample chamber marked with “T”, the sample is tilted, the angle of inclination is 0-90°, and there is a scale indication. 4.2.6.5. ample Grounding The sample forms a loop through the sounder and ground.

  • Page 40: Software Working Status

    OPTO-EDU (BEIJING) CO., LTD. machine should be stopped according to the operation steps, and the manufacturer should be notified in time for maintenance. 4.3.2. Software Working Status For details, see the software log. Operating procedures, methods & precautions for shutdown 4.4.

  • Page 41: Maintenance

    OPTO-EDU (BEIJING) CO., LTD. Maintenance  A63.7080 requires very limited user maintenance and is very demanding. Under normal circumstances, the user cannot open the panel to prevent the high voltage and the circuit board from being exposed to the outside, causing damage to the operator. At the same time, if there is no guidance from the manufacturer's engineers, the user cannot move the overall position of A63.7080 to avoid damage to the instrument and make...

  • Page 42: Cleaning The Objective Diaphragm And Rod

    OPTO-EDU (BEIJING) CO., LTD. 7. Install the sample stage on the sample chamber, push in gently, and click “Pump”. 8. 8. Wait until the vacuum system has completed the ultra-high vacuum and other work can be performed. 5.1.2. Cleaning the objective diaphragm and rod After working for a period of time A63.7080, the objective diaphragm is...
  • Page 43 OPTO-EDU (BEIJING) CO., LTD. blower and place it on a clean, lint-free cloth. 7. Use a bamboo stick to remove the rubber “O” ring from the light rod. 8. Apply a small amount of polishing paste on a lint-free cloth, polish the polished rod, especially in the groove where the light is placed, and carefully polish it with a thin bamboo stick against the lint-free cloth;...
  • Page 44 OPTO-EDU (BEIJING) CO., LTD. redness, and the dirt on the visible light ray changes from yellow to black, and then gradually disappears. Repeat the burning for 1-2 times, each time for a few seconds, until the surface of the enamel is smooth, be careful not to burn for a long time, so as not to damage the glare.

  • Page 45: Other Maintenance Work

    OPTO-EDU (BEIJING) CO., LTD. 5.1.3. Other maintenance work Maintenance of A63.7080 also includes cleaning the liner, cleaning the scanning coil, the objective lens lower boots and the entire electron optical tube, or moving the A63.7080 to other places. These maintenance work must be performed by a professional engineer appointed by the manufacturer.

  • Page 46: Transportation And Storage

    OPTO-EDU (BEIJING) CO., LTD. Transportation and Storage 6.1. Lifting and transportation precautions A63.7080 should prevent inversion, rain and strong earthquakes during hoisting, handling and transportation to prevent severe cold and exposure. 6.2. Storage conditions, storage period and precautions A63.7080 should be stored in a dry, ventilated, non-corrosive gas house before opening the box to prevent inversion, rain, cold and exposure.

  • Page 47: Unpacking And Inspection

    OPTO-EDU (BEIJING) CO., LTD. Unpacking and Inspection 7.1. Unpacking Precautions 1. Before opening the A63.7080, carefully check the laboratory conditions to ensure that the installation and commissioning requirements are met. 2. The A63.7080 unpacking environment is guaranteed to be dry, ventilated and free of corrosive gases.

  • Page 48: Instrument Appearance Inspection

    OPTO-EDU (BEIJING) CO., LTD. 7.2.2. Instrument appearance inspection Under the condition of sufficient light, visual observation, the appearance of the instrument should be free of large scratches and stains. www.cnoec.com.cn Page 47 of 51 sale@cnoec.com...

  • Page 49: Other

    After the training, the user signs the report and handed it over to the OPTO-EDU installer to bring it back to the company for filing.

  • Page 50: Contact Information

     Address ： F-1501 Wanda Plaza, No. 18 Shijingshan Road, Beijing 100043, China 8.2. User feedback In order to improve product quality, OPTO-EDU conscientiously implements the ISO9000 quality system improvement requirements. After the installation, acceptance and training of the instrument, please fill out the “Customer Satisfaction Information Questionnaire”...

  • Page 51: Appendix: Abbreviations, Glossary Of Terminology

    OPTO-EDU (BEIJING) CO., LTD. Appendix: Abbreviations, Glossary of Terminology Abbreviations & Glossary of Terminology Chinese English 解释 Refers To 扫描电镜 Scanning Electron Microscope 场发射 Field Emission Gun A63.7080 A63.7080 A63.7080 Scanning Electron Microscope 镜筒 COLUMN Electron optical tube column 分辨率...

Table of Contents