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10 Troubleshooting | 10.1 Overview
Keyword
Drift
Gun
Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000
10 Troubleshooting
10.1 Overview
|
10.1
Overview
The following table provides hints for solving common problems. If you cannot
solve the problem or if you are unsure about a certain technical difficulty, contact
your local ZEISS service representative.
WARNING
Hazardous voltage inside the microscope
Contact may cause burn or electrical shock.
u
Do not remove any parts.
u
Only authorized ZEISS service representatives are allowed to service the
microscope.
u
Do not try to service the microscope yourself.
u
Disconnect power before opening.
Symptom
Specimen seems to be
moving.
Gun is switched off
automatically.
Cause
¢
Charging effects.
¢
Non-conducting
specimen.
Stub not correctly fixed
by screw.
Gun has been switched
off automatically for
safety reasons since gun
vacuum is worse than
2 × 10⁻⁸ mbar.
Remedy
¢
Ensure proper
conduction of the
specimen.
¢
Optimize specimen
preparation.
¢
Apply a charge
compensation
method.
Fix the stub correctly.
Refer to Baking out the
Gun Head [} 148].
143
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