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8 Operation | 8.4 Working with Different Apertures Configurations and Column Modes
Purpose
Procedure 1
Instruction Manual ZEISS GeminiSEM Series | en02 | 349500-8038-000
8.4 Working with Different Apertures Configurations
and Column Modes
|
8.4
Working with Different Apertures Configurations and Column Modes
8.4.1 Determining the Installed Aperture Configuration | Gemini I
Column
The achievable maximum probe current depends on the type of aperture. The type
of aperture installed on the microscope can be determined via SmartSEM.
For the Gemini column, two types of multihole apertures are available:
¢
Aperture Type = 7 hole aperture
Configuration
20 nA high resolution
¢
Aperture Type = 6 hole aperture
Configuration
100 nA high current
INFO
If you wish to change the installed configuration of your microscope, contact
your local service representative.
From the Menu Bar, select View > SEM Status.
The SmartSEM Status dialog is displayed.
2
In the Select tab, click Aperture Type.
3
Select the Display tab.
The parameter Aperture Type is displayed.
Available probe currents
3 pA – 20 nA
Available probe currents
6 pA – 100 nA
115
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