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ZEISS
5.5 Selecting Focal CC in the Software
Info
Focal CC must be turned off when pumping the specimen chamber to vacuum.
Info
When Focal CC is selected in the software, quiet vacuum mode is not available.
Fig. 7: The Charge Compensation section looks slightly different for GeminiSEM (left) and Sigma
(right)
Prerequisite
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Procedure
1. In the View menu of SmartSEM, select SEM
Instruction Manual ZEISS Focal CC | en-US | Rev. 2 | 349561-8021-000
The Focal CC is installed on your system, refer to Installation [
SmartSEM V06.03 or higher is installed on your system.
The specimen chamber is at high vacuum with the column valve opened.
Status.
5 First Operating Steps | 5.5 Selecting Focal CC in the Software
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