6
General Maintenance
To Disassemble the CI Ion Source
To Disassemble the CI Ion Source
118
Materials needed
• Gloves, clean, lint-free
•
Large (8650-0030)
•
Small (8650-0029)
• Hex ball driver, 1.5 mm (8710-1570)
• Hex ball driver, 2.0 mm (8710-1804)
• Wrench, open-end, 10 mm (8710-2353)
• Nut driver, 5.5 mm (8710-1220)
• Tweezers (8710-2460)
Procedure
1 Remove the CI ion source. See
page 94.
2 Remove the filament. See
page 126.
3 Remove the ion focus lens and insulator. (See
4 Remove the two screws from the ion focus lens insulator and
separate it from the ion focus lens.
5 Remove the two screws from the RIS bayonet mount and
remove the repeller assembly.
6 Disassemble the repeller assembly by removing the ceramic
insulator and heater assembly from the repeller. (See
Figure
7 Take the repeller off the source body.
"To Remove a Filament"
31.)
"To Change the Ion Source"
Figure
Operation Manual
on
on
31.)