General Maintenance
6
To Disassemble the EI Ion Source
Screws
Washers
Bayonet mount
Repeller insulator
Clocking button
Repeller cap
Repeller
Ring heater assembly
RIS Extraction source body
Filaments
Extractor lens insulator
RIS Extraction lens
Ion focus insulator
Ion focus
Screws
Figure 29
Disassembling the EI ion source
Operation Manual
115