Calibrate The Z Piezo - Veeco 004-210-000 Instruction Manual

6. Adjust the X Slow sens until the slow axis is correct.
15.10.4

Calibrate the Z Piezo

This calibration is necessary during routine maintenance.
1. Set the Scan size to 150V. Scan rate to 2.44Hz.
2. Adjust the Z center voltage to 0V +/- 5V. Use Realtime > Motor > Tip Up or Tip Down if
necessary.
3. Capture an image.
4. Use Flatten 1
5. Use Depth analysis to measure the depth of the pits. The pits are 200nm deep.
6. Change the Z scan sens until the depth measures correctly. (actual depth/measured depth) *Z
Sens = correct Z sens.
7. Select Realtime > Motor > Tip Up to move the Z Center position to 100V (+/-5V).
8. Capture an image and measure the depth of the pits.
9. Calculate the percentage of error in the measurement of the pit (see the equation in Calculate
Retracted and Extended Offset Deratings:
10. Enter the % of error in the Extended offset derating. Typical value is ~8%.
11. Select Realtime > Motor > Tip Down to move the Z Center position to -100V.
12. Capture an image and measure the depth of the pits.
13. Calculate the percentage of error in the measurement of the pit.
14. Enter the percent of error in the Retracted offset derating. Typical value is ~3%.
15. Recheck accuracy at 0V.
Rev. B
Calibration, Maintenance, Troubleshooting and Warranty
st
order to flatten the image.
MultiMode SPM Instruction Manual
Quick Guide to Piezo Tube Calibration
Section 15.8.6).
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