5. If the end of the scan is larger than the beginning, decrease the Slow mag1 value. If the end is
too small, increase the value of Slow mag1.
6. Wait one complete frame with the new value before readjusting the Slow mag1 value.
7. Check the final result by capturing an image and checking it with the Offline > Modify >
Zoom window. The scanner is now ready for calibration of the X and Y parameters.
15.5
X-Y Calibration using Capture Calibration and
Autocalibration
15.5.1
Capture Calibration
Scanners are calibrated by setting parameters in the NanoScope software using the Capture
Calibration command. The basic calibration procedure using version 5.XX software and a 10µm
calibration reference (see
software are similar. Note that "E" scanners require a 1µm cross-ruling.
1. With the Scan rate set at 2.44Hz and Number of samples parameter at 256, a full Capture
Calibration will require about 70 minutes.
Note:
2. Using the mouse, click on Realtime > Capture > Capture Calibration. The Capture
Calibration dialog box will display (see
3. If this is a first-time calibration, or if the microscope's calibration has not been checked
within the last three months, verify that all parameters are selected.
Rev. B
Calibration, Maintenance, Troubleshooting and Warranty
X-Y Calibration using Capture Calibration and Autocalibration
Figure
15.1c) is described in this section. Earlier versions of NanoScope
Increasing the Number of samples, or decreasing the Scan rate will
significantly increase the required time.
Figure 15.5a Capture Calibration Dialog Box
MultiMode SPM Instruction Manual
Figure
15.5a).
289
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