Fine-Tuning For X-Y Calibration; Prepare System For Fine-Tuning; Measure Horizontally At 440V Scan Size - Veeco 004-210-000 Instruction Manual

Calibration, Maintenance, Troubleshooting and Warranty

Fine-tuning for X-Y Calibration

15.7

Fine-tuning for X-Y Calibration

Fine-tuning is usually performed at two Scan size settings: 150 and 440V. Both horizontal and
vertical measurements of sample features are made, then compared with actual distances. Based
upon this comparison, computer parameters are fine tuned. To fine tune your SPM for maximum X-
Y measuring accuracy, review each of the steps below.
15.7.1

Prepare System for Fine-Tuning

1. Set the Scan size parameter on the Scan Controls panel to the maximum value (440V).
2. Verify that the Scan angle is set at 0.00 degrees.
3. Mount a calibration reference into the SPM and begin imaging. This may consist of a generic
(e.g., 10µm, silicon) reference, or a sample having features of known dimensions (e.g.,
grating, etc.).
4. Optimize the image quality.
15.7.2

Measure Horizontally at 440V Scan Size

1. Set the Scan size parameter on the Scan Controls panel to the maximum value (440V).
Verify that the Scan angle is set to 0.00 degrees. Engage the surface.
2. Select two widely-spaced features on the sample image of known separation. Use the mouse
to draw a horizontal line between them. (For example, on a 10µm silicon reference, draw the
line from the left side of one pit to the left side of another pit as far away as possible.) The
screen will display the measured distance between pits next to the line.
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Note: If you are using an "A" scanner to image atomic-scale features, substitute
graphite or mica for the silicon calibration reference. See
directions in atomic-scale calibration of the X- and Y-axes.
Note: Your calibration and fine-tuning procedures are no better than the procedures
and references used. Choose both carefully!
MultiMode SPM Instruction Manual
Section 15.9 for
Rev. B