Figure 15.4B Fast Scan Linearization: Arg - Veeco 004-210-000 Instruction Manual

Calibration, Maintenance, Troubleshooting and Warranty
Linearity Correction Procedure
Adjusting Fast Arg
1. Once the beginning third of the scan is equal to the end third, check to see if the center needs
adjusting.
2. If the center features are too large for the box, decrease the Fast arg value. If the center
features are too small, increase the Fast arg value. Change args by 0.2 to 0.5 units at a time.
3. Changes affect the entire scan, so continue to resize the zoom box after each change.
4. After an adjustment in Fast arg is made, Fast mag0 may need readjusting. Repeat Fast
mag0 adjustment procedure until the rulings are evenly spaced across the Fast-axis.
5. After setting Fast mag0 and Fast arg, insert the values for Slow mag0 and Slow arg. These
values serve as close starting points before adjusting the slow linearities.
Adjusting Slow Mag0
1. Follow the same instructions as for Fast mag0.
2. After a parameter change, wait until a new third of a scan begins before setting new
parameters and resizing the zoom box.
3. Move the resized box to the end of the scan and prepare to measure the end promptly.
4. Adjust the zoom box to fit the beginning third of the scan and check against the end third.
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Figure 15.4b Fast Scan Linearization: Arg

Arg Too Small
Note: Setting the slow linearities requires a lot of time.
Note: You may type in a new parameter value before the scan starts again.
Note: Be careful not to confuse scan top and bottom with beginning and ending, as
the scan direction alternates.
MultiMode SPM Instruction Manual
Arg Too Large
Rev. B