Page 1 Dimension 3100 Manual NanoScope Software Version 5 004-320-000 (standard) 004-320-100 (cleanroom) Copyright © [2004] Veeco Instruments Inc. All rights reserved. Document Revision History: DImension 3100 Manual Ref. Revision Date Section(s) Affected Approval 03/09/04 All. C. Kowalski 05/15/03 Fluid Cell L. Burrows 06/01/00 All.
Page 2 Copyright: Copyright © 2004 Veeco Instruments Inc. All rights reserved. Trademark Acknowledgments: The following are registered trademarks of Veeco Instruments Inc. All other trademarks are the property of their respective owners.
Page 3: Table Of Contents
1.1.1 Dimension 3100 SPM Features ........
Page 4 4.3 Installing the Dimension 3100 System ......57 4.3.1 Install the Dimension 3100 SPM Unit ......57 4.3.2 Install the Control Station .
Page 5 7.2.17 Withdraw ..........117 Rev. D Dimension 3100 Manual...
Page 6 9.4.4 Optimization of Scanning Parameters ......146 Dimension 3100 Manual Rev. D...
Page 7 10.6.4 Unable to Locate Particulate Samples ......174 Rev. D Dimension 3100 Manual...
Page 8 13.4.1 Obtaining a Good Force Curve ....... . . 220 viii Dimension 3100 Manual Rev. D...
Page 9 15.3.3 Drive Amplitude ..........265 Rev. D Dimension 3100 Manual...
Page 10 17.2.4 Set Up Contact AFM ......... 314 Dimension 3100 Manual...
Page 11 18.3 Warranty ..........349 Index 351 Rev. D Dimension 3100 Manual...
Page 12 Dimension 3100 Manual Rev. D...
Page 13 Figure 2.1a Safety Symbols Key ........19 Figure 2.5a Dimension 3100 SPM Footprint ......27 Figure 2.8a Log into Windows NT.
Page 14 Figure 4.4c NanoScope IIIa Controller (rear view) ....63 Figure 4.4d Dimension 3100 Controller (rear view)....64 Figure 4.4e Dimension 3100 Controller (front view) .
Page 15 Figure 9.1a Tapping Cantilever in Free Air ......132 Figure 9.1b Tapping Cantilever on Sample Surface ....133 Rev. D Dimension 3100 Manual...
Page 16 Figure 13.2a Force Calibration Z Waveform ..... . . 206 Figure 13.2b Piezo Travel in Force Calibration Mode ....207 Dimension 3100 Manual Rev. D...
Page 17 Figure 16.1a LiftMode Principles ....... .273 Figure 16.1b Extender Electronics Module ......274 Rev. D Dimension 3100 Manual xvii...
Page 18 Figure 17.6b Vertical Calibration Line ......324 Figure 17.6c Calibration Line Distance Prompt ..... 324 xviii Dimension 3100 Manual Rev. D...
Page 19 Maintenance, Troubleshooting and Warranty ....337 Figure 18.1a Change the Illuminator Bulb......341 Rev. D Dimension 3100 Manual...
Page 20 List of Figures Dimension 3100 Manual Rev. D...
Page 21: System Overview
A separate motor drive controls the height of the microscope and tip relative to the sample surface. This manual details facility requirements, installation requirements and procedures, maintenance requirements and procedures, and applications used with the Dimension 3100 Scanning Probe Microscope. This chapter discusses the following: •...
Page 22: System Overview
• Applications: Section 1.6 • Maintenance and Troubleshooting: Section 1.7 System Overview There are two typical conﬁgurations of the Dimension 3100 Scanning Probe Microscope (see Chapter 3 for detailed information). • VT-103-3K with ELCON • VT-102 The conﬁgurations provide options for acoustic and mechanical vibration isolation, as well as various options for positioning control station components.
Page 23: Control Station Overview
The Dimension 3100 ships with a high quality tower-style Pentium PCI computer system. Control Station Overview The Dimension 3100 SPM control station consists of four components: input and display devices (keyboard, trackball, mouse and monitors), computer, NanoScope controller and Dimension 3100 controller.
Page 24: Computer
System Overview Control Station Overview 1.2.2 Computer The computer is the main control unit of the Dimension 3100 SPM system; it supports a 100MB Zip® disc drive, CD-ROM, CDRW, or DVDRW drive and 1.44MB ﬂoppy disc drive (see Figure 1.2b). The computer receives data from the input devices, and controls external hardware via the standard ports and the input/output (I/O) bus.
Page 25: Nanoscope Iiia Controller
25-pin D cable connection between the rear of the NanoScope IIIa and the computer (see Figure 1.2c). The NanoScope IIIa connects to the back of the Dimension 3100 via a 37-pin D cable connection from the front of the controller (see Figure 1.2c).
Page 26: Dimension 3100 Controller
Control Station Overview 1.2.4 Dimension 3100 Controller The Dimension 3100 controller controls the vacuum and air supply and optics illumination. The Dimension 3100 controller is controlled via a serial cable connection between it and the computer (see Figure 1.2d). The Dimension 3100 controller features gauges on the front panel to indicate vacuum and positive pressures.
Page 27: Dimension 3100 Spm Overview
Illumination can be computer or manually controlled. The knob located on the front of the Dimension 3100 controller regulates manual illumination control. For computer control, there is an “illumination” parameter in the Other Controls panel to control brightness. The illuminator control knob must be in the “off”...
Page 28: Figure 1.3A D3100 Microscope Electronics Box (Rear View)
For more information, contact Veeco. The Dimension 3100 Microscope Electronics Box houses the following components: Main SPM Circuit Board This smaller circuit board mounts on a larger board and contains switches to route feedback signals from the head.
Page 29: Optics And Motors Overview
3.5mm clearance between the tip and sample. 1.3.3 Stage System The improved Dimension 3100 X-Y stage provides substantially better positioning repeatability (3µm unidirectional and 4-6µm bidirectional) than its predecessor, the Dimension 3000. The stage is more than twice as fast for moving from one location to another.
Page 30: Figure 1.3B Dimension Spm Head
Preamp Board The preamp board is located inside the Dimension 3100 SPM microscope head. The preamp board contains a preampliﬁer circuit for both photodetector signals, a laser diode power supply circuit that regulates the output of the laser, and ±12 volt regulators for the preamp circuit. The voltage regulators include current limiting to protect the circuit.
Page 31: Figure 1.3C Quad Photodetector Arrangement
Dimension SPM head. The electrodes are oriented as shown when viewing the Dimension 3100 SPM from the front. With the Scan angle parameter in the control panel set to 0.00, the fast-scan direction is parallel to the front or in the direction of the X-axis.
Page 32: Figure 1.3D Dimension Head Scanner
System Overview Dimension 3100 SPM Overview Figure 1.3d Dimension Head Scanner The end of the scanner allows easy removal of the imaging probe assembly. This permits loading the tip on a separate ﬁxture such that head removal becomes unnecessary. Table 1.3a Scanner Piezo Tube Specifications Speciﬁcation...
Page 33: Cantilever Holder
System Overview Dimension 3100 SPM Overview 1.3.5 Cantilever Holder The cantilever holder is a small printed circuit card or acrylic block that holds the cantilever ﬁrmly at the proper angle. The standard cantilever holder is used for operation in air, while a clear glass cantilever holder is used for ﬂuid cell operations.
Page 34: Video Zoom Microscope
System Overview Dimension 3100 SPM Overview Table 1.3b Cantilever Holder Specifications Holders Speciﬁcations Standard TappingMode, Contact AFM, MFM Optional STM and Force Modulation Fluid Cell Fluid Contact AFM, Fluid TappingMode Figure 1.3f Fluid Cell Cantilever Holder Probe Clip Spring Lever...
Page 35: Sample Size & Handling
Focus tracking and automated engagement Sample Size & Handling Samples may be up to 8 inches in diameter and 0.5-inch thick using a multipurpose, 8-inch chuck. For samples thicker than 0.5", contact Veeco. Table 1.4a Sample Specifications Speciﬁcations Wafers and disk media: 8-inch dia. x 0.5"...
Page 36: Facilities Specifications
Dimension 3100 SPM. Applications Several applications can be applied using the Dimension 3100 SPM. For speciﬁc information regarding these applications, please refer to the appropriate chapters in this manual. The following is a list of common applications used with the Dimension 3100 SPM: •...
Page 37: Safety
Chapter 2 Safety This chapter details the safety requirements involved in installation of the Dimension 3100 Scanning Probe Microscope. Speciﬁcally, these safety requirements include safety precautions, environmental conditions, and equipment safety applications. Training and compliance with all safety requirements is essential during installation and operation of the Dimension 3100 SPM.
Page 38: Safety
• Start the NanoScope Software: Section 2.8.3 • Select Realtime: Section 2.8.4 • Begin Stage Initialization: Section 2.8.5 • Software Power-up Checklist: Section 2.8.6 • Hazard Labels: Section 2.9 • Laser Warning Labels: Section 2.9.1 Dimension 3100 Manual Rev. D...
Page 39: Safety Requirements
Ce symbole indique un risque de la matière corrosive. La matière corrosive peut causer des dommages sérieux au matériel. Dieses Symbol bedeutet “Gefahr durch Korrosive Materialien”. Korrosive Materialien können erhebliche Schäden am Gerät oder anderen Gegenständen verursachen. Rev. D Dimension 3100 Manual...
Page 40: Safety Precautions
Safety Precautions Safety Precautions Because the Dimension 3100 SPM features independently motorized components, it is crucial that operators become familiar with precautions to avoid injury to themselves and/or damage to samples. This section of the manual should be read by ALL persons working with or around the system.
Page 41 CAUTION: Please contact Veeco before attempting to move the Dimension 3100 SPM system. ATTENTION: Il est impératif de contacter Veeco avant de déplacer le Dimension 3100 SPM. VORSICHT: Bitte kontaktieren Sie Veeco bevor Sie das Dimension 3100 SPM System transportieren.
Page 42 Safety Safety Precautions WARNING: The Dimension 3100 SPM contains a diode laser with an output of less than 1.0mW at 670nm. AVERTISSEMENT:Le microscope “Dimension 3100 SPM” est équipé d’une diode laser dont la puissance de sortie est inférieure à 1mW à 670nm.
Page 43: Microscope
Safety Safety Precautions WARNING: The Dimension 3100 SPM uses a halogen lamp to illuminate samples. Exposure to non-ionizing radiation from this lamp is well within the current exposure guidelines published by the American Conference of Governmental Industrial Hygienists (ACGIH). Typical IR exposure to the user from the sample illuminator is less than 3 mW/cm .
Page 44 The movements of all axes are slow, but are capable of exerting high forces. A hand caught in the stage of a Dimension 3100 SPM could be injured severely. ATTENTION: La platine des microscopes est automatisée dans les directions X, Y et Z, et est programmable.
Page 45 VORSICHT: Vermeiden Sie es, Flüssigkeiten auf dem Probentisch oder über elektronische Bauteile, insbesondere den Mikroskopkopf, zu verschütten. Wenn es notwendig ist, Flüssigkeiten zu verwenden, benutzen Sie dem Bedarf entsprechend nur geringe Mengen. Rev. D Dimension 3100 Manual...
Page 46: Sample Safeguards
Sperrvorrichtungen zu umgehen. Ergonomics The Dimension 3100 SPM design promotes compatibility in the integration of user personnel and equipment within a semiconductor manufacturing environment. Speciﬁcally, the ergonomics of the Dimension 3100 SPM design prevent personal injury, equipment damage, and minimizes procedural errors.
Page 47: Environmental Conditions
Safety Environmental Conditions Environmental Conditions Environmental conditions that may affect the performance of the Dimension 3100 SPM are vibration and noise. See Chapter 3 for detailed condition speciﬁcations. Equipment Safety Applications 2.5.1 Dimension 3100 SPM Facility Requirements Figure 2.5a Dimension 3100 SPM Footprint 14.2"...
Page 48: Pre Power-Up Checklist
Verify that clean dry air is available at 60-100 psi to the vibration isolation table. Verify that vacuum is available at ≥24" Hg to the system (IS3K-2 acoustic hood only). A vacuum _______ 5. pump is integrated into the Dimension 3100 controller for use with enclosures other than the IS3K-2. Module Installation _______ 1.
Page 49 ______ Install the control station by completing the following: _______ Set the table to be used as the control station next to the Dimension 3100 SPM. _______ Place the input and display devices on the user console (monitors [2], mouse, keyboard and trackball).
Page 50: Turn On The Dimension 3100 Spm (Service And Installation Only)
5. Turn on the NanoScope controller using the power switch located on the rear of the NanoScope controller. 6. Turn on the Dimension 3100 controller using the power switch on the rear of the Dimension 3100 controller. Dimension 3100 Manual...
Page 51: Power-Up Checklist (Service And Installation Only)
5. Turn on the monitors (2) using the push-button switches located on the front of the monitors. 6. Turn on the NanoScope controller using the power switch located on the rear of the NanoScope controller. 7. Turn on the Dimension 3100 controller using the power switch on the rear of the Dimension 3100 controller. Rev. D...
Page 52: Power-Up Checklist (Normal Usage)
1. Press to log into Windows NT (see Figure 2.8a). CTRL DELETE Note: The screen begins with the panel split across both screens. 2. Drag the panel to one screen for use (see Figure 2.8a). Dimension 3100 Manual Rev. D...
Page 53: Log On
2. Password: (Leave blank) Note: If you are unable to log on, verify with the process engineer that the password has not been changed. The system is shipped from the factory with a blank password. Rev. D Dimension 3100 Manual...
Page 54: Start The Nanoscope Software
This allows the stage controller and computer to locate home positions and reset the coordinate system of the stage. If the Focus Surface and Locate Tip icons grayed out, the stage needs to be initialized. Dimension 3100 Manual Rev. D...
Page 55: Begin Stage Initialization
Begin stage initialization if necessary. Hazard Labels The Dimension 3100 SPM hazard labeling system identiﬁes possible hazard areas. Caution must be taken according to the label warnings when working with associated areas. The following labels appear on the Dimension 3100 SPM: Rev.
Page 56: Laser Warning Labels
Figure 2.9c) indicates that the area to which the label is afﬁxed is affected by a laser. The Noninterlocked Protective Housing Label is afﬁxed to the manual access door. Figure 2.9c Noninterlocked Protective Housing Label Dimension 3100 Manual Rev. D...
Page 57: Facilities Requirements
Chapter 3 Facilities Requirements This chapter details facility site requirements, safety requirements, and conﬁguration options for the Dimension 3100 Scanning Probe Microscope. Speciﬁcally, this chapter details environmental requirements and equipment facilities drawings. Compliance with the following requirements and speciﬁcations is essential before beginning installation.
Page 58: Optional Configurations
3.1a). The VT-103-3K is comprised of an air table, on which the Dimension 3100 microscope rests (not shown) and an acoustic hood which can be raised to access the instrument, and lowered to seal the instrument during operation. The ELCON is a compact control station console used to house the computer and control electronics underneath, and the monitors, mouse and keyboard on top.
Page 59: Figure 3.1B Vt-102
This conﬁguration consists of two basic elements: the VT-102 which is an air table for vibration isolation, and a typical “table top” version of the control station (computer, control electronics, and accessories). The VT-102 is a compact air table on which the Dimension 3100 microscope rests and does not include an acoustic hood.
Page 60: Is3K-2
The keyboard and mouse (not shown) sit on the small ledge at the front of the instrument. Finally, the Dimension 3100 microscope (not shown) rests on top of the vibration isolation table inside the IS3K-2 acoustic hood. The entire acoustic hood can raise and lower during installation.
Page 61: Facilities Requirements
475 mm Air and 13.5" Vacuum 343 mm 4005 Top View Front View Side View Weight: 150 lbs. for Dimension 3100 SPM assembly only. Note: Vibration and acoustic isolation is strongly recommended (see Section 3.5). Rev. D Dimension 3100 Manual...
Page 62: Acoustic/Vibration Isolation Systems
An appropriate seat should be used which brings the user’s knees to within 3-4 inches (76-102mm) of the bottom of the keyboard tray. Figure 3.3a IS3K-2 - Front View 4009 62.0" 1575 mm 4" 101.6 mm 4.25" 108 mm External Vacuum Supply Module Dimension 3100 Manual Rev. D...
Page 63: Figure 3.3B Is3K-2 - Side View
Open 127 mm 42.0" Closed 106 mm 4010 30.0" Electical 765 mm and Vacuum Hook-up Figure 3.3c IS3K-2 - Top View 30.5" 775 mm 42.0" 1066 mm 9.0" 228.6 mm External Vacuum Supply 4011 Module Rev. D Dimension 3100 Manual...
Page 64: Figure 3.3D Is3K-2 Leveling Feet Location - Bottom View
76 mm 4012 Figure 3.3e IS3K-2 Footprint Requirements - Top View 6.0" 6.0" 152 mm 152 mm 6.0" 152 mm IS3K-2 39.0" 991mm External Vacuum Supply Module 40.0" 1016 mm 4013 Operator Service FRONT Access Access Dimension 3100 Manual Rev. D...
Page 65: Vt-103-3K Dimensions, Utilities And Clearance
3.3.2 VT-103-3K Dimensions, Utilities and Clearance An isolation hood/table is required for acoustic and vibration isolation of the Dimension 3100. The table must be moved to its ﬁnal location before Veeco personnel can install and train on the SPM. Figure 3.3f VT-103-3K - Front View 4006 50.0"...
Page 66: Dimensions And Utilities
The vibration isolation table may be supplied in lieu of the VT-103-3K or IS3K-2 for selected applications that do not require acoustic isolation for the desired performance level.The table must be moved to its ﬁnal location before Veeco personnel can install and train on the SPM. Figure 3.3i VT-102 Vibration Isolation Table 24.0"...
Page 67: Computer/Controller Facility Requirements
60" min. 4004 1524 mm Top View Front View Weight: 170 lbs. nominal total; 140 typically on table top. Note: Dimensions shown for computer and controller equipment are approximate and subject to change without notice. Rev. D Dimension 3100 Manual...
Page 68: Elcon Console
914 mm Power: 1,800W; MOUSE 1 phase; 100V, KEYBOARD 120V or 240V TRACK BALL Min. Door width 37.0" required: 36" 940 mm Top View DISPLAY CONTROL MONITOR MONITOR 48.7" 1,237 mm 31.7" 805 mm Front View Dimension 3100 Manual Rev. D...
Page 69: Facilities Requirements Summary
Facilities Requirements Summary If the Dimension 3100 system is used in a clean room with raised ﬂoors a pedestal must be provided to support leveling feet on the IS3K-2 or VT-103-3K. House vacuum is optional in all cases. If used, connections should accept a 1/8"...
Page 70: Acoustic/Vibration Specifications
BBN Criterion C - 1000X Microscopes. Aligners, Steppers to 1.5µm Geometries BBN Criterion D - Steppers, E-Beams to 0.3µm Geometries, CD Inspection Equipment. Most SEMs to 50,000X BBN Criterion E - Anticipated Adequate for Future Fabrication and Test Equipment for Low Submicron Geometries Dimension 3100 Manual Rev. D...
Page 71: General Facilities Guidelines
Facilities Requirements General Facilities Guidelines General Facilities Guidelines The following list contains general facilities recommendations for the Dimension 3100 system: • For the VT-103-3K and VT-102 vibration isolation systems, you must provide either clean dry air or nitrogen with a pressure capacity of 80psi in order to ﬂoat the air tables.
Page 73: Installation
Chapter 4 Installation This chapter details the installation procedure for the Dimension 3100 Scanning Probe Microscope (SPM) system from receiving to full installation. Speciﬁcally, the following topics are discussed in this chapter: • Shipping and Receiving: Section 4.1 • Equipment Requirements: Section 4.1.1...
Page 74: Shipping And Receiving
Installation Shipping and Receiving Shipping and Receiving 4.1.1 Equipment Requirements The following equipment is necessary for successful installation of the Dimension 3100 SPM system. Verify the following is on-hand before beginning installation: Equipment Received • Dimension 3100 Manual • Dimension 3100 Controller •...
Page 75 Installation Shipping and Receiving Cables Received • Controller-to-Dimension 3100 Cable, 37-pin D • Dimension 3100 DC Power Cable • Fiber Optic Cable • Frame Grabber Video Cable (BNC to BNC) • Power Cords (3) • Serial Cable, 9-pin D, 12' •...
Page 76: Uncrating The System
Uncrating the System Uncrating the System 4.2.1 Uncrate the Dimension 3100 SPM System 1. Using scissors, cut and remove the plastic shipping band encircling the Dimension 3100 shipping crate. 2. Lift the cardboard shipping box off of the Dimension 3100 microscope.
Page 77: Installing The Dimension 3100 System
1. Place the vibration isolation table, or the microscope platform, at the desired location. 2. Place the vibration isolation pad on the isolation table. 3. Place the Dimension 3100 microscope in the operating location on the vibration isolation table or other platform.
Page 78: Figure 4.3B Secure The Chuck To The Stage
Installation Installing the Dimension 3100 System 8. Align the two sets of three mounting holes on the long edges of the flexure with the three mounting holes of the chuck base and the three mounting holes on the X-Y stage. Align one...
Page 79: Install The Control Station
Installing the Dimension 3100 System 4.3.2 Install the Control Station 1. Set up a table to be used as the control station next to the Dimension 3100 microscope. Note: Keep the control station in close proximity to the Dimension 3100 unit without touching the vibration isolation table.
Page 80: Connecting The Dimension 3100 System
Verify that the machine is powered-down and locked-out before attempting to make any connections. 4.4.1 Dimension 3100 Control Station Connections Connect the Display and Input Devices 1. Connect the monitor power cords (2) to the power strip, but do not initiate power.
Page 81: Figure 4.4A Computer (Rear View)
Installation Connecting the Dimension 3100 System Figure 4.4a Computer (rear view) Computer USB port Video 2 Video 1 COM 4 COM 3 Rev. D Dimension 3100 Manual...
Page 82 Installation Connecting the Dimension 3100 System Note: The computer ships with the network board disabled to avoid error messages for computers not used on a network. 1. To use the computer on a network, select My Computer > Control > Panel > System >...
Page 83: Figure 4.4B Nanoscope Iiia Controller (Front View)
Installation Connecting the Dimension 3100 System Connect the NanoScope Controller Note: The NanoScope III and IIIa are addressed in this manual. For information regarding a NanoScope IV, please refer to your NanoScope IV Controller Manual (004-115-000). Connect extensions to the NanoScope III (IIIa) Controller. See Table 4.4b,...
Page 84: Figure 4.4D Dimension 3100 Controller (Rear View)
Table 4.4c Figure 4.4d list of extensions, connection information and connection location. Note: The Dimension 3100 cables are bundled through the cable clamp provided if the system includes a vibration isolation table. (See section titled Route the VT103 Air Table Cabling at the end of the chapter).
Page 85: Figure 4.4E Dimension 3100 Controller (Front View)
Status 1 2 3 4 5 6 7 8 9 3908 2. To set illumination, toggle the manual control switch on the front of the Dimension 3100 controller to ON for manual control or OFF for computer control (see Figure 4.4e).
Page 86: Dimension 3100 Microscope External Components Connections
Dimension 3100 Microscope Electronics Box Connections 1. Connect the external microscope components to the Electronics Box. See Table 4.4d Figure 4.4f for list of extensions, connection information and connection location. Table 4.4d Dimension 3100 Microscope Electronics Box Connections Part Cable Function Number Vacuum Hose...
Page 87: Figure 4.4G Vacuum Power Switch
Remaining Dimension 3100 Cables 3907 1. Route all cables connected to the Dimension 3100 microscope through the slot located in the far right region of the VT103 vibration isolation table. 2. Position the Dimension 3100 microscope in the desired location.
Page 88: System Power-Up
3. Turn on the NanoScope IIIa controller using the power switch located on the rear of the NanoScope IIIa controller. 4. Turn on the Dimension 3100 controller, using the power switch on the rear of the Dimension 3100 controller. Dimension 3100 Manual...
Page 89: Stage System
Chapter 5 Stage System The Dimension 3100 Scanning Probe Microscope (SPM) features a large sample stage capable of positioning large samples such as silicon wafers and computer hard drive media, as well as small samples. The X-Y stage consists of a pair of stacked, perpendicular slides and uses an open loop (unencoded) architecture with stepper motors to drive the stage to user-speciﬁed coordinates.
Page 90: Mounting Of Samples
5.1.2 Magnetic Pucks Samples may also be secured to the stage using magnetic pucks. This system allows for easy mounting and removal of small samples. For detailed mounting instructions, see Chapter Dimension 3100 Manual Rev. D...
Page 91: Axis Orientation Motorized X-Y Stages
Mounting of Samples 5.1.3 Axis Orientation—Motorized X-Y Stages When viewing the Dimension 3100 SPM from the front, stage movements are deﬁned over two axes of motion: X (left-right), and Y (front-back). For X-axis movements, lesser (decreasing) coordinates are located to the left. For Y-axis movements, positive (increasing) coordinates are...
Page 92: Stage Menu Commands
To load or unload a sample from the stage using the Load New Sample function, complete the following: 1. Select Load New Sample from the Stage pop-down menu. The screen displays a dialog box (see Figure 5.2a). Figure 5.2a Stage Load/Unload Prompt Stage Load/Unload? Cancel Dimension 3100 Manual Rev. D...
Page 93: Locate Tip
Moving to tip position Note: As the objective moves positions, the tip should begin to come into focus. When the focus position is attained, the screen displays trackball instructions for achieving a focus (see Figure 5.2c). Rev. D Dimension 3100 Manual...
Page 94: Focus Surface
When the surface is already partially in focus (or close to it), use the Autofocus feature. To use the Focus Surface feature complete the following: 1. Select Focus Surface from the Stage menu. The screen displays trackball instructions for achieving a focus (see Figure 5.2d). Dimension 3100 Manual Rev. D...
Page 95: Figure 5.2D Focus Surface Prompt
7. For samples which are difficult to bring into focus, move to an edge of the sample, which is easy to find in the optical image, and bring the top of the edge into focus. 8. Move the sample back to the desired X-Y position. 9. Verify that the surface remains in focus. Rev. D Dimension 3100 Manual...
Page 96: Move To (X,Y)
3. Enter the X and Y coordinates of the desired move to position, then click Move. 4. The stage moves to the new position. Should it become necessary to halt movement, click on the Pause button (see Figure 5.2f). Figure 5.2f Abort Motion Prompt Stage Press <Pause> to abort motion Dimension 3100 Manual Rev. D...
Page 97: Set Reference
1. Select the Focus Surface function under the Stage menu to focus on the sample and move the sample to the desired origin. 2. Select the Set Reference option under the Stage menu. The screen offers five options to the operator (see Figure 5.2g). Rev. D Dimension 3100 Manual...
Page 98: Figure 5.2G Set Reference Prompt
(see Figure 5.2h). The left image depicts two closely located points to deﬁne the X-axis. The right image depicts a more accurate reference line deﬁned by two, widely spaced points. Figure 5.2h Deﬁning the X-Axis Dimension 3100 Manual Rev. D...
Page 99: Programmed Move
The name of the move program currently loaded is displayed in the Program name panel (in the above example, the program is called “move”). Moves are ﬁrst programmed using the Teach function. Later they may be executed using the Run function. Rev. D Dimension 3100 Manual...
Page 100: Figure 5.2K Editing Or Creating New Program Prompts
6. Use the controls to position the stage and sample to the desired location(s) to be programmed into the computer. Note: These controls are identical to the Focus Surface controls explained in Chapter 5 of this manual. Dimension 3100 Manual Rev. D...
Page 101: Figure 5.2M Teach Mode Prompt
4. Select the Remove Step option. Note: When individual program steps are removed, all subsequent steps are “moved up” by one count. 5. Click Save to save the edited version of program. Rev. D Dimension 3100 Manual...
Page 102 100 frames at 256 samples each. To run a series of programmed moves, complete the following: 1. Select Stage > Programmed Move. 2. Select the Program name field, and enter the name of the program to be run. Dimension 3100 Manual Rev. D...
Page 103: Initialize
To initialize the stage, complete the following: 1. Before beginning initialization, verify that the stage is clear of loose items and debris. 2. Select Stage > Initialize. The dialog box offers two options (see Figure 5.2p). Rev. D Dimension 3100 Manual...
Page 104: Figure 5.2P Stage Initialize/Cancel Prompt
Optics should move to end of travel 6. Next, the camera zoom optics assembly zooms. When the camera zooms in to the limit of its travel, click Ok to continue (see Figure 5.2t). Figure 5.2t Stage Zoom Prompt Stage Zoom in Dimension 3100 Manual Rev. D...
Page 105: Spm Parameters
Stage Zoom out 5.2.8 SPM Parameters The SPM parameters menu lists the most important Z-axis parameter values for loading/unloading the stage and engaging samples. These values are explained in more detail in Chapter Rev. D Dimension 3100 Manual 85/(86 Blank)
Page 107: Cantilever Preparation
Chapter 6 Cantilever Preparation The Dimension 3100 Scanning Probe Microscope comes furnished with etched silicon cantilever substrates for TappingMode AFM and silicon nitride cantilevers for Contact AFM modes. The cantilever probes should be inspected under the microscope when used for the ﬁrst time to gain a better understanding of how the probes and substrates are connected and separated.
Page 108: Silicon Cantilever Substrates
The cantilevers are stored tip-side-up, and the silicon is very brittle. The cantilever will break off of the substrate if contacted. 6.1.1 Wafer Tool Kit A wafer tool kit for working with silicon cantilever substrates is included with the Dimension 3100 SPM system. The kit contains the following: •...
Page 109: Figure 6.1A Silicon Cantilever Substrates In Wafer
It may be helpful to tip the substrate to one side to help grasp it in the tweezers. CAUTION: Silicon is extremely brittle.Be very careful to avoid any contact with the probe lever because it will immediately snap off. Rev. D Dimension 3100 Manual...
Page 110: Tip Shape Of Etched Silicon Probes
From the tip side, the cross-section of the tip near the lever is approximated by an inverted ‘kite’ shape. All of these subtleties arise from the etching process used to make the tip, which employs caustic solutions to perform wet anisotropic etching of the silicon. Dimension 3100 Manual Rev. D...
Page 111: Figure 6.1C Silicon Probe Tip Profile Artifact (Front-To-Back)
This method does not work well in small openings of less than 5 microns where, depending on the depth of the step, other tip edges may contact other faces of the small opening. Wall angle measurements are best measured in open areas for these reasons. Rev. D Dimension 3100 Manual...
Page 112: Figure 6.1D Silicon Probe Tip Step Profile Artifact (Side-To-Side)
70 -> 80 deg. in the image. Figure 6.1e depicts the resultant effect of the angled back ridge on the step angle measurement for a deeper trench depth. This is tip and topography dependent. Dimension 3100 Manual Rev. D...
Page 113: Silicon Nitride Cantilever Substrates
4. Apply downward pressure with the tweezers until the strip breaks free from the silicon ring (see Figure 6.2a). Figure 6.2a Silicon Nitride Cantilevers in a Wafer Press here to break out strip Position glass slide underneath for support Rev. D Dimension 3100 Manual...
Page 114 7. While holding down the next substrate on the strip with the wooden end of a cotton swab, grip the overhanging piece with a pair of wide tweezers and rotate downward until the cantilever substrate breaks off. 8. Repeat this process until as many cantilever substrates as required are removed. Dimension 3100 Manual Rev. D...
Page 115: Figure 6.2B Substrate Break-Off
For most applications use the 200µm cantilever with the wider legs. For atomic scale images, the 100µm triangular cantilever with the wider legs yields good results. Rev. D Dimension 3100 Manual...
Page 116: Tip Shape Of Silicon Nitride Probes
(towards the cantilever holder). The steepest measurable angle from side to side (parallel to the edge of the probe's substrate) is approximately 55°. Both of these ﬁgures assume that the measurement does not have interference from other edges. Dimension 3100 Manual Rev. D...
Page 117: Figure 6.2D Silicon Nitride Cantilevers (Profile)
The result is a noticeably sharper point at the end of the pyramid. Regrettably, along with the increased sharpness of the tip comes a slight increase in double tip effect experienced with the oxide sharpened process. Rev. D Dimension 3100 Manual 97/(96 Blank)
Page 119: Head, Probe, & Sample Preparation
Chapter 7 Head, Probe, & Sample Preparation This chapter includes information regarding the Dimension 3100 Scanning Probe Microscope (SPM) setup and operation procedures for Contact Mode and TappingMode. Speciﬁcally, this chapter details removal and installation of the microscope head, mounting the cantilever, changing the tip, loading and positioning samples, focusing the optics, and general information regarding engaging and withdrawing the tip.
Page 120: System Information
If during the engage sequence the sum signal changes to a value outside the interlocked limits, the downward motion stops, preventing damage to scanners had the Z-stage continued downward. Dimension 3100 Manual Rev. D...
Page 121: Laser Requirements
Proben auf dem Probenteller liegen. Vermeiden Sie unter allen Umständen, in das reflektierte Laserlicht zu schauen. Alle Bediener des Mikroskops sollten größte Vorsicht walten lassen um zu vermeiden, in den von der Probenoberfläche reflektierten Laserstrahl zu schauen. Rev. D Dimension 3100 Manual...
Page 122: Basic Afm Operation
Figure 7.2b). The cantilever holder stand is a 2.5-inch diameter black anodized aluminum cylinder that ships with the Dimension 3100 SPM for easy installation of the substrate onto the cantilever holder. The cantilever holder stand has three stations for different tip holders: 1) standard AFM, 2) ﬂuid imaging AFM and 3) STM.
Page 123: Load The Cantilever Holder
3. Press down and slide back the spring clip of the standard AFM cantilever holder (see Figure 7.2c). Rev. D Dimension 3100 Manual...
Page 124: Figure 7.2C Standard Afm Cantilever Holder
Single crystal silicon substrates are installed face-up so the tip points away from the AFM cantilever holder. This ensures that the cantilever and tip face toward the sample once the cantilever holder is mounted on the head. Dimension 3100 Manual Rev. D...
Page 125: Remove The Dimension Spm Head
An object in this path could damage the scanner and/or tip. Rev. D Dimension 3100 Manual...
Page 126: Replace The Dimension Spm Head
Dimension head. There is a diagram printed on top of the Dimension head illustrating which direction the laser moves when turning the laser control knobs clockwise. Dimension 3100 Manual Rev. D...
Page 127: Figure 7.2E Dimension Head Laser Control Knobs
You can see the laser spot by removing the SPM head from the dovetail (without unplugging the cable between the SPM head and the Dimension base) and holding the SPM head over the granite or piece of paper. Rev. D Dimension 3100 Manual...
Page 128: Figure 7.2F Etched Silicon Tip Laser Alignment
SPM head and the Dimension base. Dropping the head will likely result in damage and Veeco factory repair. 2. Verify the laser beam is visible on the surface below. If it is not, turn the rear-right laser control knob counter-clockwise until the laser spot appears on the surface below.
Page 129: Figure 7.2G Photodetector Adjustment Knobs
SPM head and the Dimension base. Dropping the head will likely result in damage and Veeco factory repair. 2. Verify the laser beam is visible on the surface below. If it is not, turn the rear-right laser control knob counter-clockwise until the laser spot appears on the surface below.
Page 130: Figure 7.2H Silicon Nitride Laser Alignment
8. Move the laser onto the tip-end of the cantilever by reversing the direction of the rear-right laser control knob clockwise until the spot disappears from the surface below. 9. The laser is now on one of the two cantilevers. To determine which cantilever the laser is on: Dimension 3100 Manual Rev. D...
Page 131: Adjust Photodetector
• Contact Mode AFM: 4 - 6V • TappingMode: 1.5 - 2.5V Note: If the laser sum signal is low, either the laser is not aligned or the photodetector knob needs adjusting (described in Step Rev. D Dimension 3100 Manual...
Page 132: Figure 7.2I Vision System Window
ﬁrst center the laser on the screen on the head using the photodetector adjustment knobs, then use the detector schematic on the image monitor to ﬁnish positioning the laser. Dimension 3100 Manual Rev. D...
Page 133: Locate Tip
4. Focus on the cantilever using the trackball. You can zoom in using the Zoom button on the trackball. 5. Quit the Locate Tip sequence by pressing on the keyboard or clicking at the ENTER bottom of the Locate Tip dialog box. Rev. D Dimension 3100 Manual...
Page 134: Load The Sample
Place the calibration sample or other small sample on one of the 1.5cm diameter metal disks used for sample mounting. The Dimension 3100 SPM ships with several steel sample disks that you may attach to a magnetic sample holder located in the Dimension Chuck Spare Parts Kit. Also provided with the instrument are red and white colored double-sided adhesive patches, or “sticky tabs,”...
Page 135: Focus Surface
CAUTION: Since the command Focus Surface moves the scanner vertically, be careful when making this adjustment to ensure that the tip does not hit the sample surface. Rev. D Dimension 3100 Manual...
Page 136: Cantilever Tune (Tappingmode Only)
7.2.15 Set Initial Scan Parameters 1. In the Scan Controls panel, set the following: • Initial Scan Size is set to 1µm (or desired scan size). Veeco recommends you always initially engage with small scan sizes. • X and Y Offsets are set to 0.
Page 137: Engage
1. To access the stage parameters panel, select SPM Parameters from the Stage pop-down menu. 2. For initial set-up, use the following values. When done, click to close the SPM Parameters window. Rev. D Dimension 3100 Manual...
Page 138: Figure 7.3A Default Spm Stage Parameters
This parameter deﬁnes how high the tip moves above the sample when Stage > Load New Sample is executed. After the Z-stage is raised, the sample stage moves as far forward in the Y direction (towards you) as possible. Dimension 3100 Manual Rev. D...
Page 139: Contact Afm
Chapter 8 Contact AFM This chapter covers procedures for operating the Dimension 3100 Scanning Probe Microscope (SPM) in Contact Mode AFM. It is assumed that the operator has previously prepared a Contact Mode tip and aligned the laser per instructions provided in Chapter 7 of this manual.
Page 140: Basic Contact Mode Afm Operation
1. Align the laser using the laser control knobs. 2. Verify the laser beam is positioned on the back of the cantilever, with a spot visible in the Dimension head filter screen and a sum signal of 4-6V. Dimension 3100 Manual Rev. D...
Page 141: Adjust Photodetector
3. Use the trackball with the bottom left button depressed to focus on the tip end of the cantilever. 8.1.7 Focus Surface 1. Select Stage > Focus Surface or click on the Focus Surface icon. 2. Focus on the sample surface using the trackball with the bottom-left button depressed. Rev. D Dimension 3100 Manual...
Page 142: Show All Items
Without “X” Parameter will not display 3. Click the “minus box” in the upper left corner of the panel, and click Show all items. The panel will once again appear in normal Realtime mode. Dimension 3100 Manual Rev. D...
Page 143: Set Initial Scan Parameters
3. Set the Scan Angle to 0. 4. Set X and Y Offsets to 0. Figure 8.1c Suggested Scan Controls Settings Other Controls Panel Keep the Z limit at its maximum value. Figure 8.1d Suggested Other Controls Settings Rev. D Dimension 3100 Manual...
Page 144: Figure 8.1E Suggested Feedback Controls Settings
300nm initially. 3. Set Line direction to either Trace or Retrace. 4. On the Channel 2 panel, verify Data type is set to Off to disable the panel. Figure 8.1f Suggested Channel Controls Settings Dimension 3100 Manual Rev. D...
Page 145: Engage
Veeco website (www.veeco.com) for more information. Silicon Nitride Cantilevers Silicon nitride cantilevers for the Dimension 3100 SPM are available in two process variations: standard and sharpened. Sharpened silicon nitride cantilevers (Model DNPS) are almost identical in appearance to the standard silicon nitride cantilevers, but have a slightly sharper end at the very tip.
Page 146: Figure 8.2A Force Curve
These contaminants often form a capillary bridge between the tip and sample, generating large adhesive forces, also referred to as capillary forces (see Figure 8.2a). For more force curve information, see Chapter Figure 8.2a Force Curve Approach Jump to contact Contact Adhesion Pull-off Dimension 3100 Manual Rev. D...
Page 147: Optimization Of Scanning Parameters
To collect accurate topographical data, set the Data type parameter to Height. Topographical Deﬂection data is only reasonable on very smooth, ﬂat samples. Topograhpical Deﬂection data is used infrequently and only for high resolution work. Rev. D Dimension 3100 Manual...
Page 148: Gain Settings
5. Set the LookAhead gain to 0.7 initially for samples with step-like features oriented perpendicular to the fast scan direction. Otherwise, it should be left at 0.00. Note: The LookAhead gain includes information from the previous scan line to determine the current gain setting. Dimension 3100 Manual Rev. D...
Page 149: Scan Size And Scan Rate
Highpass ﬁlter distorts the height information in the image. As a result, this ﬁlter must be Off when accurate height information is desired. The Highpass ﬁlter is typically used only for atomic images. Rev. D Dimension 3100 Manual...
Page 150: Force Calibration Mode
Force Calibration Mode The Force Calibration command in the View > Force Mode > Calibration menu allows you to check the interaction between the cantilever and the sample surface. For detailed information regarding Force Calibration, see Chapter Dimension 3100 Manual Rev. D...
Page 151: Tappingmode Afm
Chapter 9 TappingMode AFM This chapter details procedures for operating the Dimension 3100 SPM in TappingMode in air. For information regarding TappingMode in ﬂuids, see Chapter 10. For information regarding loading a TappingMode tip and aligning the SPM laser see Chapter 7 of this manual.
Page 152: Principles Of Tappingmode
“return signal,” deﬂects in a regular pattern over a photodiode array, generating a sinusoidal, electronic signal. Figure 9.1a Tapping Cantilever in Free Air Laser beam Return signal Cantilever Dimension 3100 Manual Rev. D...
Page 153: Basic Tappingmode Afm Operation
The following is a general outline of basic operational procedures involved in TappingMode AFM. For more detailed instructions, refer to Chapter 7 of this manual. 9.2.1 Select Mode of Operation • Select Microscope > Proﬁle. • Select TappingMode as the mode of operation. Rev. D Dimension 3100 Manual...
Page 154: Head, Cantilever And Sample Preparation
3. Use the trackball with the bottom left button depressed to focus on the tip end of the cantilever. Note: You may need to adjust the illumination and zoom to clearly see the probe. Dimension 3100 Manual Rev. D...
Page 155: Focus Surface
The initial Cantilever Tune panel appears with the Frequency Sweep (a plot of cantilever response as a function of applied oscillation frequency) on the display monitor. • Choose either the manual or automatic tuning method (see Automatic Tuning Manual Cantilever Tuning). Rev. D Dimension 3100 Manual...
Page 156: Figure 9.2A Auto Tune Control Panel
7. Center the peak on the frequency sweep plot shown on the display monitor using the Zoom In and Offset commands after identifying the maximum amplitude peak with the lowest frequency in the frequency response plot. Dimension 3100 Manual Rev. D...
Page 157: Figure 9.2B Cantilever Tune Control Panels For Main Controls
9.2c). Figure 9.2b Cantilever Tune Control Panels for Main Controls 10. Specify the RMS amplitude after tuning the cantilever to its resonant frequency. The desired operating amplitude depends on the sample and other scanning conditions. Rev. D Dimension 3100 Manual...
Page 158: Figure 9.2C Cantilever Tune Frequency Sweep
0.05 KHz/div 11. Click . The parameters set in the Cantilever Tune control panel appear in the Realtime control panel. 12. Click on to exit the Cantilever Tune command and leave the parameters CANCEL unchanged. Dimension 3100 Manual Rev. D...
Page 159: Show All Items
Without “X” Parameter will not display 3. Click the “minus box” in the upper left corner of the panel, and click Show all items. The panel will once again appear in normal Realtime mode. Rev. D Dimension 3100 Manual...
Page 160: Set Initial Scan Parameters
3. Set the Scan Angle to 0. 4. Set X and Y Offsets to 0. Figure 9.2f Suggested Scan Controls Settings Other Controls Panel Verify the Z Limit is at the maximum value. Figure 9.2g Suggested Other Controls Settings Dimension 3100 Manual Rev. D...
Page 161: Engage
5. After engaging, it may be necessary to recheck the Cantilever Tune parameters. Select View > Sweep > Cantilever Tune. In the Tip Offset box, enter 200nm and click OK. Adjust the Drive frequency if necessary. Rev. D Dimension 3100 Manual...
Page 162: Optimize Scan Parameters
3. Use the Focus Surface command to move the SPM up if you desire more clearance between the tip and sample. CAUTION: Never withdraw samples without verifying that the tip has adequate clearance during the entire sample removal sequence. Dimension 3100 Manual Rev. D...
Page 163: Advanced Tappingmode Afm Operation
TappingMode AFM Advanced TappingMode AFM Operation Advanced TappingMode AFM Operation This section discusses the more subtle aspects involved in operating the Dimension 3100 in TappingMode. 9.4.1 Resonating Techniques Without a thorough understanding of principles associated with cantilever resonating techniques, you may generate distorted data. Understanding the Cantilever Tune process and the effects of real-time scan parameters is critical for effective operation of the microscope.
Page 164: Figure 9.4B Scope Trace With High Scan Rate
Integral gain and a twofold decrease in the Scan rate. The tip now tracks the surface when it descends into the pit as well as when it exits. The Trace and Retrace lines now coincide closely. Dimension 3100 Manual Rev. D...
Page 165: Decreasing The Cantilever Drive Frequency
Figure 9.4d Suggested Range of Drive Frequencies Drive Frequency should be within this range. Cantilever Response 12.54 nm/div Setpoint Center Frequency - 338.8723 KHz 5.0 KHz/div Rev. D Dimension 3100 Manual...
Page 166: Optimization Of Scanning Parameters
Scan rate as the Scan size is increased. Use Scan rates of 0.5-1.0 Hz for large scans on samples with tall features. High scan rates help reduce drift, but only use them on ﬂat samples with small scan sizes. Dimension 3100 Manual Rev. D...
Page 167: Surface Tune
The drive frequency can be adjusted to compensate for such a shift by using the Offset command located above the Cantilever Tune plot. The phrase response curve can be adjusted as well. Rev. D Dimension 3100 Manual...
Page 168: Troubleshooting
ﬁrm contact with the back wall of the groove and is pushed ﬁrmly against one side of the groove. Dimension 3100 Manual Rev. D...
Page 169: Fluid Imaging
Contact Veeco for more information. This chapter details basic operation of the Dimension 3100 SPM in ﬂuid, using both Contact Mode and TappingMode. Methods of preparing the sample for ﬂuid operation are also included.
Page 170 • Troubleshooting: Section 10.6 • Cantilever Tune Plot Looks Poor: Section 10.6.1 • Laser Sum Signal Absent or Weak: Section 10.6.2 • Poor Image Quality: Section 10.6.3 • Unable to Locate Particulate Samples: Section 10.6.4 Dimension 3100 Manual Rev. D...
Page 171: Basic Principles
ﬂuid. In addition, minor adjustments must be made to correct for refractive effects as the laser beam transits air-ﬂuid boundaries. This chapter assumes familiarity with standard operation of the Dimension 3100 AFM in air. If you are not familiar with air operation of the AFM in Contact Mode, please follow the procedures...
Page 172: Tip Suggestions
ﬁnd which cantilevers work best for their sample. The application note “Choosing AFM Probes for Biological Applications” discusses the appropriate probes for different ﬂuid imaging applications. Contact Veeco for a copy. Note: For additional information on selecting a cantilever, please refer to the Veeco website (www.veeco.com). Removing Organic Contamination CAUTION: When cleaning the cantilever holder, take care to avoid scratching the glass surfaces in the center of the cantilever holder.
Page 173: Rubber Protective Skirt
Note: For a list of articles describing biological applications of AFM, including sample preparation techniques, contact Veeco. CAUTION: Do not attempt to operate the standard air tip holder in a fluid environment.
Page 174: Larger Samples
1. Place the sample in a plastic petri dish. Note: If you wish to construct a custom sample holder, please contact Veeco for more information. 2. Secure the sample to the bottom of the petri dish lid or other sample holder with epoxy or other non water-soluble adhesive.
Page 175: Precautions
Throughout all procedures outlined in the following sections, you will work with ﬂuids on and around the Dimension 3100 SPM. When handling ﬂuids, keep a quantity of ﬁlter paper and/or paper towels nearby for wicking away any spilled ﬂuid. The Dimension head is designed to be immersed in no more than 3mm of ﬂuid when used with a protective skirt.
Page 176 En cas de fuite, nettoyer et sécher immédiatement les surfaces touchées. VORSICHT: Vermeiden Sie bitte, korrosive Flüssigkeiten auf freiliegende Oberﬂächen zu verspritzen; andernfalls wären Beschädigungen die Folge! Falls Sie Flüssigkeit verspritzt haben, säubern und trocknen Sie alle betroffenen Flächen sorgfältig. Dimension 3100 Manual Rev. D...
Page 177: Operating Principles
1. To mount a probe in the holder, turn the holder over so that the leaf spring and four sockets are facing down and plug the holder onto the appropriate docking station of the cantilever installation fixture. 2. Grip the tip holder by the edges and gently push down on the holder. Rev. D Dimension 3100 Manual...
Page 178: Install The Fluid Tip Holder
6. Set the head back into the dovetail and lock into place by releasing the knurled head clamp screw, located at the upper-right of the Z-stage, until the thread is just loosened. Dimension 3100 Manual Rev. D...
Page 179: Install The Protective Skirt
Figure 10.5a Tip Holder Installed With Protective Skirt Maximum Fluid Depth protective skirt 7 mm sample fluid tip holder cantilever substrate 10.5.6 Align Laser Use the technique for aligning the laser onto the cantilever discussed in Chapter 7 of this manual. Rev. D Dimension 3100 Manual...
Page 180: False Reflections
ﬂuid. Note: Immersed samples may tend to dry out during imaging due to evaporation; therefore, keep a quantity of ﬂuid nearby to periodically replenish lost ﬂuid. Dimension 3100 Manual Rev. D...
Page 181 ﬂuid and positioned one millimeter above the sample surface. All that remains is to tune the cantilever. Verify that the Microscope is Dry Verify that all Dimension 3100 surfaces are free of spilled ﬂuid. Wick away moisture and droplets with ﬁlter paper. Rev. D...
Page 182: Lower Probe Into Fluid
Turn the detector mirror adjustment screws to center the laser spot on the laser detector as described in Chapter Set several parameters: • For Contact Mode: Vertical Deﬂection signal = roughly -1V, and Setpoint = 0V. (These are typical starting parameters). • For TappingMode: Vertical Deﬂection signal = 0V. Dimension 3100 Manual Rev. D...
Page 183: Locate Tip
When focusing on the sample surface in air before adding ﬂuid to the sample area, the following procedure is necessary: 1. Align laser 2. Locate tip 3. Focus surface 4. Add fluid 5. Readjust laser alignment Rev. D Dimension 3100 Manual...
Page 184 When focusing on the sample surface directly in ﬂuid, the following procedure is necessary: a. Align laser (in air) b. Locate tip (in fluid) c. Focus surface (hit engage several times) d. Focus surface (beyond surface by another 300µm) e. Realign laser f. Realign laser in photodetector Dimension 3100 Manual Rev. D...
Page 185: Cantilever Tune (Tappingmode Only)
The system tolerates some deviation in the shape of the peak. Manual Cantilever Tune is the counterpart to the step used in standard (air) TappingMode to ﬁnd the resonant frequency of the cantilever. In liquid, however, the cantilever resonance is largely Rev. D Dimension 3100 Manual...
Page 186 3. In the Cantilever Tune panel, set the Drive frequency parameter to 10kHz and the Sweep width parameter to 20kHz. 4. Set the Drive amplitude to 200mV. 5. Zero the Amplitude setpoint. 6. Set the Amplitude limit to 2.5V. Dimension 3100 Manual Rev. D...
Page 187: Figure 10.5D Cantilever Tune Control Panels For Main Controls
Operate at a frequency lower than the resonant frequency to avoid shifting the resonant frequency upon approach of the tip to the surface (see Figure 10.5e). Figure 10.5d Cantilever Tune Control Panels for Main Controls Rev. D Dimension 3100 Manual...
Page 188: Figure 10.5E Cantilever Tune Frequency Sweep
0.50 KHz/div 11. Click . The parameters set in the Cantilever Tune control panel appear in the Realtime control panel. 12. Click on to exit the Cantilever Tune command and leave the parameters CANCEL unchanged. Dimension 3100 Manual Rev. D...
Page 189: Show All Items
Without “X” Parameter will not display 3. Click the “minus box” in the upper left corner of the panel, and click Show all items. The panel will once again appear in normal Realtime mode. Rev. D Dimension 3100 Manual...
Page 190: Set Initial Scan Parameters
3. For Contact Mode, in the Feedback Controls panel set the Deflection Setpoint to 0V. It is not necessary to enter a value for Amplitude Setpoint for TappingMode because this value is automatically determined during the engage process. Dimension 3100 Manual Rev. D...
Page 191: Engage
Chapter Note: The cantilever will typically adhere to the sample surface much less in ﬂuid; therefore, it is often possible to image at much smaller contact forces in liquid than in air. Rev. D Dimension 3100 Manual...
Page 192: Clean Cell And Protective Skirt
10.5.19 Clean Cell and Protective Skirt When you are ﬁnished scanning, remove and clean the ﬂuid probe holder and protective skirt, following the procedure described in Section 10.5.1. In the Feedback Panel, set Z Modulation to Disabled. Dimension 3100 Manual Rev. D...
Page 193: Troubleshooting
If the sample is short-lived and must be imaged quickly, mask the tip against contamination by bringing the tip into gentle contact with an uncontaminated substrate surface. Set the Dimension 3100 in Contact Mode by switching the AFM mode parameter on the Other Controls panel to Contact. Engage the substrate surface using a zero scan size.
Page 194: Unable To Locate Particulate Samples
If you suspect this problem, simply shift the imaging site to a location outboard of the tip and cantilever. You should ﬁnd more individual samples there. Dimension 3100 Manual Rev. D...
Page 195: Scanning Tunneling Microscopy (Stm)
Operation of STS: Section 11.4.1 • Troubleshooting Operation of STM: Section 11.5 • Head and Microscope-Related Problems: Section 11.5.1 • Head Engages Immediately: Section 11.5.2 • Etching Tungsten Tips: Section 11.6 • Procedure: Section 11.6.1 Rev. D Dimension 3100 Manual...
Page 196: Introduction
0.02nm. The STM tip is held using a dedicated STM tip holder which plugs into the end of the Dimension head’s tube (see Figure 11.1a). Dimension 3100 Manual Rev. D...
Page 197: Basic Stm Operation
3. Load the calibration standard (sample) onto the stage using a magnetic puck. Ensure that the standard is in electrical contact with the stage surface. This usually necessitates using an electrically conductive epoxy (silver-based) to affix the sample to the surface of the puck (e.g., Dynaloy 325). Rev. D Dimension 3100 Manual...
Page 198 Dimension-series microscopes due to their much larger stages and frames. Customers desiring to image atomic features should use Veeco’s dedicated STM microscope, which is equipped with a much smaller, more rigid frame.
Page 199 48nA for a very brief period of time. • If none of the above procedures improves the quality of the signal, replace the tip and try again. If that doesn't work, call Veeco for technical assistance. Rev. D Dimension 3100 Manual...
Page 200: Stm-Specific Information And Operations
This section provides greater insight into the operation of the STM. Dimension 3100 Manual Rev. D...
Page 201: Stm Hardware
Special low-noise preamps have been developed for spectroscopic functions. The preamps which are included on scan heads designated as either AI or Veeco, have no voltage drop due to the tunneling current.
Page 202: Fine Points Of Stm Operation
This constant height provides a reference from which to measure and record the ﬂuctuations in the tunneling current. The current mode is most useful for imaging atoms with relatively small scan sizes. Dimension 3100 Manual Rev. D...
Page 203: Stm-Specific Menu Parameters
First, increase the Integral gain until oscillations start to appear, and then, back off a little. Next, adjust the Proportional and LookAhead gains. High frequency fuzz will appear on the signal when the Proportional gain is set too high. Setting the LookAhead gain too Rev. D Dimension 3100 Manual...
Page 204 The Filter parameter (if available) provides the option of ﬁltering the tunneling current signal. A lowpass ﬁlter with a cut-off frequency of 25KHz can be applied to the analog tunneling signal in hardware. Typically, the ﬁlter is selected for atomic-scale images; otherwise, no ﬁltering should be selected. Dimension 3100 Manual Rev. D...
Page 205 Although the microscope will accept any 0.010" diameter tip, tips made of platinum iridium (PtIr) and tungsten are used most often. PtIr tips are supplied by Veeco while tungsten tips can be electrochemically etched from tungsten wire by following instructions at the end of this chapter. In general, most of the discussion in this manual involving tips and noise reduction applies to both types of tips, but there are some applications which are tip speciﬁc.
Page 206: Figure 11.3B Scan Derating Graph
Derating parameters in the Microscope > Calibrate > Scanner dialog box. As described in the following paragraphs, the Head Autocalibrate command in the Ofﬂine > Utility menu can be used to calculate the sensitivity and derating parameters of STM heads. Dimension 3100 Manual Rev. D...
Page 207: Spectroscopy With The Stm
The spectroscopic plots should aid in comparative studies between samples or between different regions on a sample, but they will not reveal the precise make-up of that sample. Rev. D Dimension 3100 Manual...
Page 208: Troubleshooting Operation Of Stm
This section deals with problems related to the scan heads or the microscope. If a problem exists with a scan head, try a second one under the same conditions, if possible. Otherwise, the following list of symptoms and cures may be helpful: Dimension 3100 Manual Rev. D...
Page 209: Head Engages Immediately
Samples with resistances 1 Megohm or greater will be difﬁcult to image even with high bias voltages. Measuring the bulk conductivity of the sample with probes may not tell the whole story. Probes may easily penetrate oxide or contamination layers on the sample surface yielding reasonable Rev. D Dimension 3100 Manual...
Page 210 If the Realtime image appears to be ﬂat, but captured images reveal detail, then try rotating the sample 90° in the microscope. The Realtime image leveling software tends to hide features that are parallel to the X-scan direction. Dimension 3100 Manual Rev. D...
Page 211 Setpoint Current—Raising the Setpoint current will effectively raise the gain of the feedback loop which can be quite helpful for large scans. It will also bring the tip closer to the surface but only by a small amount (i ≈ e -s ). Rev. D Dimension 3100 Manual...
Page 212: Etching Tungsten Tips
Scanning Tunneling Microscopy (STM) Etching Tungsten Tips 11.6 Etching Tungsten Tips You can purchase tungsten tips from Veeco or make them yourself. This section describes the process of etching tungsten tips for use with the NanoScope. Materials Required • Variac auto transformer •...
Page 213 As your experience in etching grows, you will get better at throwing out the bad ones. 14. Repeat the etching procedure. Replace the etching solution when a fairly large amount of residue is present. Typically, you can etch 60 to 80 tips in a 40ml solution. Rev. D Dimension 3100 Manual...
Page 214 Scanning Tunneling Microscopy (STM) Etching Tungsten Tips Dimension 3100 Manual Rev. D...
Page 215: Lateral Force Mode
Section 12.3.7 12.1 Introduction The Dimension 3100 SPM is capable of measuring frictional forces on the surfaces of samples using a special measurement known as lateral force microscopy (LFM). The name derives from the fact that cantilevers scanning laterally (perpendicular to their lengths) are torqued more as they transit high-friction sites;...
Page 216: Basic Lfm Operation
The trace and retrace LFM signals may not be the same magnitude. The tip will never be exactly perpendicular to the sample. In most cases, internal stress in the material of the cantilever will cause the cantilever to have a natural bias in some direction. Dimension 3100 Manual Rev. D...
Page 217: Advanced Lfm Operation
Rev. D Dimension 3100 Manual...
Page 218: Tip Selection
Figure 12.3b below illustrates the movement of the tip as it encounters friction during a scan. Figure 12.3b Example of Frictional Forces on Tip During Scan (Front View) Trace Horizontal Deﬂection Retrace = Higher Frictional Areas Dimension 3100 Manual Rev. D...
Page 219: Understanding The Color Scale
Darker colors mean less friction. The sign of the color is inverted if Retrace is monitored (see Figure 12.3c). Figure 12.3c Friction Data High Friction Trace Low Friction Retrace High Friction Rev. D Dimension 3100 Manual...
Page 220: Using Tmr Voltage To Measure Friction
The X-Y motion of an open loop scanner in trace and retrace does not overlap exactly. You can still use image subtraction, but some erroneous height data might be added to the LFM data in the ﬁnal image. This is not an issue for closed loop scanners. Dimension 3100 Manual Rev. D...
Page 221: Height Artifacts In The Signal
Height artifacts will be the same direction in the scope display (see Figure 12.3e). Figure 12.3e Height Artifacts in LFM Data High Friction Trace Low Friction Retrace High Friction Rev. D Dimension 3100 Manual 201/(198 Blank)
Page 223: Force Imaging
Menu Bar Commands: Section 13.3.6 • Force Calibration (Contact Mode AFM): Section 13.4 • Obtaining a Good Force Curve: Section 13.4.1 • Helpful Suggestions: Section 13.4.2 • Advanced Techniques: Section 13.4.3 • Interpreting Force Curves: Section 13.4.4 Rev. D Dimension 3100 Manual...
Page 224: Force Plots-An Analogy
The pull-off point of each magnet gives an additional index of its holding power. representation of this setup during a lowering cycle of one magnet is illustrated in Figure 13.1a. Dimension 3100 Manual Rev. D...
Page 225: Figure 13.1A Comparative Index Of Pulling Forces
9 10 11 Height above steel plate (cm) 1. For the sake of simplicity, forces are represented here using a common scale in kilogram units; however, force is properly measured in Newtons (1 kg = 9.8 N). Rev. D Dimension 3100 Manual...
Page 226: Force Calibration Mode
Ramp size parameter deﬁnes the total travel distance of the piezo. Therefore, you can obtain the maximum travel distance by setting the Z scan start to +220V, with the Ramp size set to 440V. Dimension 3100 Manual Rev. D...
Page 227: Figure 13.2B Piezo Travel In Force Calibration Mode
AFM performance, and determination of the sensitivity of the cantilever deﬂection voltage in terms of voltage applied to the piezo. If used correctly, Force Calibration mode provides a variety of useful information. Rev. D Dimension 3100 Manual...
Page 228: Figure 13.2C Tip-Sample Interaction During A Force Plot
Force Imaging Force Calibration Mode Figure 13.2c Tip-Sample Interaction During a Force Plot Dimension 3100 Manual Rev. D...
Page 229: Example Force Plot
(Figure 13.2a). The Z scan rate parameter in the Main Controls panel deﬁnes the rate at which the piezo completes an extension-retraction cycle (and therefore the rate at which new curves are displayed). Rev. D Dimension 3100 Manual...
Page 230: Figure 13.2D Anatomy Of A Force Curve
NanoScope display monitor. Cantilever deﬂection plots on the vertical axis of the graph. When the cantilever deﬂects downward, it plots on the graph’s downward vertical; when the cantilever deﬂects upward, it plots on the graph’s upward vertical. Dimension 3100 Manual Rev. D...
Page 231 It is possible to obtain quantitative measurements of sample elasticity. (See Radmacher, et al. 1994. Science, Vol. 265:1577-1579). Two imaging techniques measure and display elasticity at multiple points on a sample surface: force modulation and force volume imaging. Rev. D Dimension 3100 Manual...
Page 232: Force Calibration Control Panels And Menus
View > Force Mode > Step enters force mode with the parameter start mode = step and the piezo fully retracted. • View > Force Mode > Volume enters Force Volume Mode. Items in the Force Calibration Control Window are discussed individually below. Dimension 3100 Manual Rev. D...
Page 233: Main Controls (Ramp Controls)
Reverse Velocity (Advanced Mode Only) This parameter deﬁnes the piezo speed to separate the tip and sample. X Offset, Y Offset These parameters deﬁne the X and Y positions where the force plot will be collected. Rev. D Dimension 3100 Manual...
Page 234: Main Controls Panel (Display)
Without X Rotate control, the tip moves in the direction of the cantilever during indentation. Normally, it is set to about 22.0 degrees. This parameter typically ranges between 12 and 25 degrees. Dimension 3100 Manual Rev. D...
Page 235: Channel 1, 2, 3 Panels
The NanoScope software automatically calculates and enters the value from the graph after you use the mouse to draw a line to the graph. You must properly calibrate the Amplitude Sensitivity before amplitude data can be correctly displayed in nm. Rev. D Dimension 3100 Manual...
Page 236: Feedback Controls Panel
This parameter deﬁnes the amplitude of the voltage applied to the piezo system which drives the cantilever vibration. Changing the value of this parameter in Force Plot mode also changes the Drive amplitude parameter in the Image mode. Dimension 3100 Manual Rev. D...
Page 237: Scan Mode Panel (Advanced Mode Only)
An Absolute trigger permits the total force to be set using Setpoint values. Trigger Channel This parameter deﬁnes the channel to watch to determine when to reverse the ramp. Rev. D Dimension 3100 Manual...
Page 238 This parameter deﬁnes the size of Z step for Step or Motor Step modes. For Step, it the amount to move the piezo; for Motor Step it is the amount to move the motor. Auto Start When Enabled this parameter starts taking force curves upon entering Force Calibrate Mode. Dimension 3100 Manual Rev. D...
Page 239: Menu Bar Commands
Run Single: Lowers and raises tip once by a distance equal to the Z scan size, then halts. • Stop: Halts all tip movement. Note: View additional menu subcommands by accessing the advanced Force Mode command. Rev. D Dimension 3100 Manual...
Page 240: Force Calibration (Contact Mode Afm)
To minimize or calculate the contact force between the tip and sample, obtain a good force curve which shows the typical features displayed in the example curve in Figure 13.4b. However, the force curve rarely looks “typical” right after invoking Force Calibration mode. This section Dimension 3100 Manual Rev. D...
Page 241 Note: Sometimes the entire ramp will occur in the contact portion of the curve (see Figure 13.4a, between points 3 and 5). If this occurs, increase the Ramp size and/or decrease the Z scan start. Rev. D Dimension 3100 Manual...
Page 242: Helpful Suggestions
Because the Z-axis leadscrew has some backlash, it may be necessary to rotate the leadscrew several turns by clicking on the Tip Up or Tip Down buttons before obtaining movement. Dimension 3100 Manual Rev. D...
Page 243: Advanced Techniques
5. The second click on the mouse causes the system to calculate the slope of the line segment and enter the -1/slope as the Sensitivity in the panel. 6. A click of the right mouse button will remove the line segment from the screen. Rev. D Dimension 3100 Manual...
Page 244 If a high initial contact force adversely affects the sample, engage the cantilever with a very small scan size. Then, minimize the force while the tip is conﬁned to a small area of the sample where it experiences the relatively high initial engagement force. Once the force is minimized, increase the Dimension 3100 Manual Rev. D...
Page 245: Figure 13.4E Computing Contact Force
(point). The distance is then multiplied times the deﬂection sensitivity to obtain . In this example: d = (4.5 div) (1V/div) (70nm/v) = 315nm Therefore, the contact force is calculated as: F = (0.6N/m) (315nm) = 189nN Rev. D Dimension 3100 Manual...
Page 246 A simple alternative to calculating force is to follow these ﬁve steps: 1. Set sensitivity using the mouse. 2. Change units to metric. 3. Count vertical units from Setpoint to VCS min. 4. Multiply by Deflection Scale (adjacent to plot). 5. Multiply by the spring-constant, k. Dimension 3100 Manual Rev. D...
Page 247: Interpreting Force Curves
The examples in Figure 13.4f represent some of the general variations in force curves. For more information regarding force imaging, refer to Veeco’s application note Probing Nano-Scale Forces with the Atomic Force Microscope. Figure 13.4f Force Curve Examples...
Page 248: Force Calibration (Tappingmode)
SPM performance, calibrating the RMS amplitude or TM deﬂection, and conﬁguring Lift Mode. For example, as the oscillating tip is brought closer to the surface, tip motion is dampened, which shows as an immediate drop in amplitude. When plotted, the graph resembles Figure 13.5a. Dimension 3100 Manual Rev. D...
Page 249: Figure 13.5A Piezo Extension Versus Rms Amplitude And Deflection
(point 2). For TappingMode in air on a hard sample, each nanometer decrease in the cantilever position decreases the peak-to-peak vibration of the cantilever by two nanometers. Once the tip encounters Rev. D Dimension 3100 Manual...
Page 250: Obtaining A Force Plot (Tappingmode)
You are now in Image mode. 4. To switch to Force Mode, click on the Realtime > View > Force Mode > Calibration or Advanced option. At least two panels should be visible: • Main Controls • Channel 1 Panel Dimension 3100 Manual Rev. D...
Page 251 Figure 13.5b TappingMode Force Plot Parameter Settings (Force Calibrate) 6. Set the Data type parameter to Amplitude under the Channel 1 panel. 7. Adjust the Z scan start parameter to obtain a satisfactory force plot using the left-right arrow keys. Rev. D Dimension 3100 Manual...
Page 252: High Contact Force
Sharper tips are more likely to plastically deform the sample, and are less sensitive to adhesive forces, than tips that are more blunt. Experiment to determine the tip that best meets your needs. Dimension 3100 Manual Rev. D...
Page 253: Force Modulation
This cantilever holder uses a piezoelectric bimorph to oscillate the cantilever against a sample surface. The force modulation cantilever holder is similar to the standard tapping cantilever holder; however, its piezo stack is much larger, allowing larger driving amplitudes. Rev. D Dimension 3100 Manual...
Page 254: Selecting A Force Modulation Tip
It may take experimentation to ﬁnd a cantilever that matches the sample's requirements. For rubber and plastic samples Veeco recommends using 225µm long force modulation (Model # FESP) silicon cantilevers. For more delicate, samples, use 450µm long silicon cantilevers or silicon nitride cantilevers.
Page 255: Operating Principle
Note: Refer to the section on Tip Selection earlier in this chapter to help you choose an appropriate cantilever. Rev. D Dimension 3100 Manual...
Page 256 The display monitor plots the Frequency Sweep, showing cantilever oscillation amplitude versus frequency. To set the parameters controlling the Frequency Sweep plot, use the parameters in the Sweep Controls panel and the commands on the top menu bar of the display monitor. Dimension 3100 Manual Rev. D...
Page 257: Figure 13.6C Auto Tune Controls Panel
TappingMode operation. This is due to the cantilever not at resonance; therefore, its motion is mostly vertical. Vertical motion is not ampliﬁed by the beam deﬂection detection technique which is sensitive primarily to changes in cantilever angle. Rev. D Dimension 3100 Manual...
Page 258: Figure 13.6E Correctly Tuned Force Modulation Frequency
(see Figure 13.6e). n. Adjust the Drive amplitude so the maximum response amplitude is about 1V. Recenter the peak if necessary. Figure 13.6e Correctly Tuned Force Modulation Frequency Dimension 3100 Manual Rev. D...
Page 259 However, in this condition imaging may be more unstable, as the cantilever may pull off the surface unexpectedly. The setpoint value affects the force modulation contrast. Examine the contrast of the force modulation image. Rev. D Dimension 3100 Manual...
Page 260 Sometimes an oscillation that appears in the data will be due to “aliasing” as described in the next section. If you cannot adjust gains to eliminate unwanted oscillations without compromising the height image’s quality, see Section 13.6.5. Dimension 3100 Manual Rev. D...
Page 261: Notes About Artifacts
To reduce the inﬂuence of frictional effects, use a smaller Setpoint or Drive amplitude. Or, if you are using “Negative LiftMode” (see Section 13.7), use a more positive Lift Height. Rev. D Dimension 3100 Manual...
Page 262: Figure 13.6F Friction On Force Modulation Images
Not all samples lend themselves to standard force modulation imaging. Even samples with excellent elasticity contrast may not show up in force modulation if their absolute elasticity is out of instrumental range. “Negative LiftMode” may prove useful for imaging otherwise difﬁcult materials (see Section 13.7.3). Dimension 3100 Manual Rev. D...
Page 263: Force Modulation With Negative Liftmode
AFM force modulation. This method is especially suited for softer materials, yielding higher resolution. Best results using negative LiftMode are obtained on relatively smooth samples (< 500nm vertical features); however, Veeco encourages experimenting with this technique on rougher surfaces as well. A general procedure for Force Modulation with “Negative LiftMode” is...
Page 264: Obtain A Tappingmode Image
The contrast between light and dark reveals areas of high and low elasticity, with the dark area indicating harder material and the lighter areas indicating softer material. Dimension 3100 Manual Rev. D...
Page 265: Force Volume
Z-positions and at thousands of XY positions during a single image scan, correlation of surface topography to interaction force, better quantization of the interaction force, and new methods of analysis. For detailed information regarding force volume imaging, contact Veeco for a copy of Support Note 240A, Force Volume.
Page 267: Interleave Scanning
• Main Drive Amplitude and Frequency selection: Section 14.5.1 • Setpoint Selection: Section 14.5.2 • Interleave Drive Amplitude and Frequency Selection: Section 14.5.3 • Amplitude Data Interpretation: Section 14.5.4 • Cantilever Oscillation Amplitude: Section 14.5.5 Rev. D Dimension 3100 Manual...
Page 268: Preface: Interleave Scanning & Liftmode
Interleave scanning and LiftMode for obtaining magnetic and electric force data. For purposes of learning to use Interleave scanning, this section may be useful even to those users whose end application is not magnetic force microscopy. Dimension 3100 Manual Rev. D...
Page 269: Interleave Mode Description
If there are any features taller than the lift height you entered, the system will lift the tip over those features rather than crashing the tip. In Retrace Lift the tip is on the surface during the main scan, and lifts during the retrace scan line. Rev. D Dimension 3100 Manual...
Page 270: Liftmode Description
Interleave parameters to an “off” (grayed) condition. The values can be changed once engaged. If using Lift, set the Lift start height and Lift scan height. If using Interleave Mode, set the Gains and Setpoint. Dimension 3100 Manual Rev. D...
Page 271: Use Of Liftmode With Tappingmode
Lift scan for magnetic force imaging, the Drive frequency should be set to the side of the resonance; see Chapter 15. (However, certain parameters can be set independently for the interleave scan; see below.) Rev. D Dimension 3100 Manual...
Page 272: Setpoint Selection
Main and Interleave scanning. If using scan rates above a few hertz, it may be advantageous to remove or disable the ﬁlter. For more information on how to disable the ﬁlter, contact Veeco technical support.
Page 273: Amplitude Data Interpretation
Small amplitudes must be used to sense force gradients, such as Van der Waals forces, which occur over short distances (typically a few nm). As much of the cantilever travel as possible should be within the range of the force gradient. Rev. D Dimension 3100 Manual 253/(246 Blank)
Page 275: Magnetic Force Microscopy
Section 15.3.3 • Installation of the Electronics Modules: Section 15.4 • Phase Extender Module: Section 15.4.1 • Quadrex Extender: Section 15.4.2 • NanoScope IV: Section 15.4.3 • Software Setup Conﬁguration (Phase, Quadrex or NSIV): Section 15.5 Rev. D Dimension 3100 Manual...
Page 276: Magnetic Force Microscopy
2. Cantilever retraces surface topography on first retrace. 3. Cantilever ascends to Lift scan height. 4. Lifted cantilever profiles topography while responding to magnetic influences (second trace). 5. Lifted cantilever reprofiles topography while responding to magnetic influences (second retrace). Dimension 3100 Manual Rev. D...
Page 277: Amplitude Detection Techniques
By adding the Phase Extender or Quadrex Extender Electronics Modules to a NanoScope III or IIIa controller, or by using a NanoScope IV controller, the Dimension 3100 may be used for frequency modulation or phase detection with improved results (see Figure 15.1b...
Page 278: Basic Mfm Operation
(metal-evaporated video tape). Standard tape samples are provided with purchase of MFM probes, and can be obtained free of charge from Veeco. Other samples can also be used; however, you will not have the beneﬁt of comparing your results with the images shown here. Obtaining a good image of the tape sample will familiarize you with Interleave and MFM techniques and provide a check that the system is correctly tuned to image magnetic samples.
Page 279: Magnetic Force Microscopy Procedure
(perpendicular to the sample surface). The MFM then senses force gradients due to the perpendicular component of the samples’s stray ﬁeld. Tip magnetizers can be purchased from Veeco. 2. Mount a NanoProbe magnetic probe on the scanner or tip holder.
Page 280: Figure 15.2B Shift In Phase At Fixed Drive Frequency
As the tip oscillates above the sample, a gradient in the magnetic force will shift the resonance frequency f (see Figure 15.2c). Tracking the variations in oscillation amplitude while in LiftMode yields an image of the magnetic force gradients. Dimension 3100 Manual Rev. D...
Page 281: Figure 15.2C Cantilever Tune For Amplitude Detection
The lift height can be optimized later. 7. Set the remaining Interleave parameters (Setpoint, Drive Amplitude, Drive frequency, Gains) to the Main Controls values by setting the flags left of the Interleave Control column to Off. Rev. D Dimension 3100 Manual...
Page 282 Figure 15.2e Topographic (left) and Magnetic Force Gradient Image (right) Note: The MFM data displays in Channel 2; however, the parameter settings are different depending on whether Phase Detection or Amplitude Detection is being used Dimension 3100 Manual Rev. D...
Page 283 2. Switch the Channel 2 image Data type to Frequency. Try a Data scale (frequency shift) of approximately 10 Hz. 3. Select Other Controls, then adjust the frequency modulation gains: Rev. D Dimension 3100 Manual...
Page 284: Advanced Mfm Operation
The ultimate lateral resolution of MFM is near 20nm. Resolution is affected by properties of the tip, including mechanical sharpness and magnetic structure. When in good condition, magnetically- coated tips routinely give 50nm resolution, and many achieve 30nm or better. Dimension 3100 Manual Rev. D...
Page 285: Fine Tuning Interleave Controls
Drive Amplitude is not increased to the extent that the tip strikes the surface on the low point of its swing. The signatures of tip-sample contact are white and black spots in the image, or, in extreme cases, noisy, high-contrast streaks across the whole Rev. D Dimension 3100 Manual...
Page 286 Drive Amplitude between main and Interleave scanning. This can interfere with very fast rates (> a few Hz). The ﬁlter can be disabled easily; contact Veeco technical support for more information. Dimension 3100 Manual...
Page 287: Figure 15.3B Tip Height And Oscillation Amplitudes (Tappingmode & Liftmode)
20-25nm/V. The exact value depends on the position of the laser spot on the cantilever, the cantilever geometry, and the particular instrument. A 1V Setpoint typically corresponds to h ~14-18nm. Rev. D Dimension 3100 Manual...
Page 288: Installation Of The Electronics Modules
A hardware change is also required; the main electronics backplane board at the rear of the microscope must be swapped out (this may be done by either the customer or a factory representative). For more information, contact Veeco. The phase box is equipped with a slider switch for switching internal electronics between Dimension-series and MultiMode SPM signals.
Page 289: Quadrex Extender
1. Extender-compatible microscope electronics are required to permit operation of the phase detection extender option. Standard electronics on these microscopes require hardware upgrades. Consult Veeco for details. 2. Turn off the power to the NanoScope controller whenever connecting or disconnecting the Extender.
Page 290: Troubleshooting
Be careful not to move the beam off the cantilever or feedback may be lost. Note: Optical interference is essentially eliminated by using phase detection or frequency modulation. Dimension 3100 Manual Rev. D...
Page 291: Electric Techniques
Section 16.3.1 • Verify Electric Field at Surface: Section 16.3.2 • Fine Tune Lift Scan Height: Section 16.3.3 • Fine Tune Interleave Drive Amplitude: Section 16.3.4 • Optimize Tune in Vicinity of Surface: Section 16.3.5 Rev. D Dimension 3100 Manual...
Page 292 Surface Potential Detection—Theory: Section 16.4 • Surface Potential Detection—Preparation: Section 16.5 • Applying Voltage to the Sample Directly: Section 16.5.1 • Surface Potential Imaging—Procedure: Section 16.6 • Troubleshooting the Surface Potential Feedback Loop: Section 16.6.1 Dimension 3100 Manual Rev. D...
Page 293: Electric Techniques Overview
Electric Techniques Overview 16.1 Electric Techniques Overview There are two types of electric techniques used with the Dimension 3100: Electric Force Microscopy (EFM) and Surface Potential Detection. Electric techniques are similar to magnetic force microscopy (MFM) and share many of the same procedural techniques.
Page 294: Surface Potential Imaging Overview
Quantitative voltage measurements can be made of the relative voltages within a single image. This method requires the Extender Electronics Module and version 3.1 or later of the NanoScope software. Dimension 3100 Manual Rev. D...
Page 295: Electric Force Microscopy
For other samples having rough surface topography or small voltage variations, this technique may be undesirable because topographic features appear in the LiftMode image. Rev. D Dimension 3100 Manual...
Page 296: Electric Force Microscopy Preparation
The backplane board used with Dimension Series SPMs is shown below in Figure 16.2c. There is a header supplied with jumpers at the center of the board. For non-EFM applications and Surface Potential operation, leave or return jumpers to their original positions. Dimension 3100 Manual Rev. D...
Page 297: Figure 16.2C Microscope Backplane
4. Reconfigure jumpers on the backplane header using the appropriate jumper configuration. 5. After correctly configuring the backplane jumpers, replace the cover on the electronics box. 6. Plug the power cable back into the microscope. 7. Turn on the NanoScope controller. Rev. D Dimension 3100 Manual...
Page 298 1. Select Di > Microscope Select > Edit > Advanced, and set Analog 2 to Atten switch. 2. Click to exit both dialog boxes. Note: Remember to set Allow in attenuation to Allow when ﬁnished. For all other conﬁgurations it should be left on Allow. Dimension 3100 Manual Rev. D...
Page 299: Figure 16.2D Toggle Switches On Extender Electronics Module
Table 16.2a Extender Electronics Module Toggle Switch Settings Mode Tip or Sample Voltage GND/ Surface FM/Phase Surface Analog 2 Potential Potential EFM with Analog 2 biasing tip or sample EFM in all other conﬁgu- rations Standard Operation Rev. D Dimension 3100 Manual...
Page 300: Figure 16.2E Normal Jumper Configuration
Figure 16.2e Normal Jumper Conﬁguration Sample Chuck Ground/Bias Sample Chuck Analog 2 Gain Select Sample Unused STM Signal (from Dimension head) Auxiliary D (to NanoScope III controller) Ground Ground Indicates Jumpers Dimension 3100 Manual Rev. D...
Page 301 Figure 16.2f Jumper Conﬁguration for Application of Analog 2 Voltage to Tip Sample Chuck Ground/Bias Sample Chuck Analog 2 Analog 2 Sample Gain Select Unused STM Signal (from Dimension head) Auxiliary D (to NanoScope III controller) Ground Ground Indicates Jumpers Rev. D Dimension 3100 Manual...
Page 302: Figure 16.2G Jumper Configuration (Application Of Analog 2 Voltage To Sample)
Figure 16.2g Jumper Conﬁguration (Application of Analog 2 Voltage to Sample) Sample Chuck Ground/Bias Sample Chuck Analog 2 Sample Gain Select Analog 2 Unused STM Signal (from Dimension head) Auxiliary D (to NanoScope III controller) Ground Ground Indicates jumpers Dimension 3100 Manual Rev. D...
Page 303: Figure 16.2H Jumper Configuration For Applying External Voltage To Tip
You may also use current-limited power supplies. Connect voltage leads to pins on the header using soldered, push-on connectors. Do not solder leads directly to the header pins, as the heat may cause damage and/or make jumpering the pins difﬁcult. Rev. D Dimension 3100 Manual...
Page 304 Voltage leads should be connected to pins on the header using soldered, push-on connectors. Do not solder leads directly to the header pins, as the heat may cause damage and/or make jumpering the pins difﬁcult. Dimension 3100 Manual Rev. D...
Page 305 Figure 16.2j Normal Jumper Conﬁguration with Extender Electronics Module ChuckGround/Bias Chuck Analog 2 or Gnd/OSC + DC signal Unused Sample Unused STM Signal Auxiliary 2 Output Ground Ground Indicates Jumpers Rev. D Dimension 3100 Manual...
Page 306: Figure 16.2K Jumper Configuration For Application Of Voltage To Tip
Figure 16.2k Jumper Conﬁguration for Application of Voltage to Tip Chuck Ground/Bias Sample Chuck Analog 2 or Analog 2 Gnd/OSC + DC signal Sample Unused Unused STM Signal Auxiliary 2 Output Ground Ground Indicates Jumpers Dimension 3100 Manual Rev. D...
Page 307: Figure 16.2L Jumper Configuration For Application Of Voltage To Sample
Figure 16.2l Jumper Conﬁguration for Application of Voltage to Sample Chuck Ground/Bias Sample Chuck Analog 2 or Gnd/OSC + DC signal Sample Unused Analog 2 Unused STM Signal Auxiliary 2 Output Ground Ground Indicates Jumpers Rev. D Dimension 3100 Manual...
Page 308: Figure 16.2M Jumper Configuration For Applying External Voltage To Tip
You can also use current-limited power supplies. Connect voltage leads to pins on the header using soldered, push-on connectors. Do not solder leads directly to the header pins as the heat may cause damage or make jumpering the pins difﬁcult. Dimension 3100 Manual Rev. D...
Page 309 Connect voltage leads to pins on the header using soldered, push-on connectors. Do not solder leads directly to the header pins, as the heat may cause damage and make jumpering the pins difﬁcult. Rev. D Dimension 3100 Manual...
Page 310: Electric Force Microscopy Procedures
5. Set up the AFM as usual for TappingMode operation. 6. Select View > Sweep > Cantilever Tune. 7. Follow the procedure below for the type of electric force imaging desired, Phase Detection, Frequency Modulation or Amplitude Detection (see sections 16.2.4 through 16.2.6). Dimension 3100 Manual Rev. D...
Page 311: Phase Detection
Resonance shifts also give rise to phase shifts ∆φ used to generate an image of the electric force gradients; see Figure 16.2p. Figure 16.2p Shift In Phase at Fixed Drive Frequency ∆F ∆φ Drive Frequency Rev. D Dimension 3100 Manual...
Page 312 Feedback Controls panel. For more details, refer to EFM Troubleshooting/Pointers: Section 16.3. 11. Optimize the Lift scan height. For high-resolution, make the Lift scan height as small as possible without crashing the tip into the surface. Dimension 3100 Manual Rev. D...
Page 313: Frequency Modulation
Figure 16.2q. Figure 16.2q Shift In Amplitude at Fixed Drive Frequency ∆F ∆ amplitude Drive Frequency 1. Set the Drive frequency to the left side of the cantilever resonance curve, as shown in Figure 16.2r. Rev. D Dimension 3100 Manual...
Page 314: Figure 16.2R Amplitude Detection Cantilever Tune
Note: Optical interference is essentially eliminated by using phase detection or Frequency Modulation, available only with the Extender Electronics Module. Dimension 3100 Manual Rev. D...
Page 315: Efm Troubleshooting/Pointers
Adjust drive frequency to center of peak or just to the left. If phase data is to be collected during the main line, zero the phase at the drive frequency. Rev. D Dimension 3100 Manual...
Page 316: Optimize Tune In Interleave
On the second pass, the piezo that normally vibrates the cantilever is turned off. Instead, to measure the surface ωt potential, an oscillating voltage is applied directly to the cantilever tip. This creates an Dimension 3100 Manual Rev. D...
Page 317: Figure 16.4A Simplified Block Diagram Of Basic Extender Module In Surface
At this point the tip voltage will be the same as the unknown surface potential. The voltage applied to the cantilever tip V tip is recorded by the NanoScope III to construct a voltage map of the surface. Rev. D Dimension 3100 Manual...
Page 318: Surface Potential Detection Preparation
(e.g., on integrated circuits connect electrical leads directly to pads). For normal operation, the sample chuck is held at ground. For Application Module-ready systems, the bias is normally applied to the chuck. Be certain to carefully any electrical connections from the sample chuck. Dimension 3100 Manual Rev. D...
Page 319: Figure 16.5B Jumper Configuration For Application Of Voltage To Tip
Figure 16.5b Jumper Conﬁguration for Application of Voltage to Tip Chuck Ground/Bias Sample Chuck Analog 2 or Analog 2 Gnd/OSC + DC signal Sample Unused Unused STM Signal Auxiliary 2 Output Ground Ground Indicates Jumpers Rev. D Dimension 3100 Manual...
Page 320: Figure 16.5C Jumper Configuration For Application Of Voltage To Sample
Do not solder leads directly to the header pins. Heat may cause damage and/or make jumpering the pins difﬁcult. The sample should be electrically connected directly to the chuck or a standard sample puck using conductive epoxy or silver paint as shown below: Conductive Epoxy or Paint Sample Sample Chuck Dimension 3100 Manual Rev. D...
Page 321: Surface Potential Imaging Procedure
3. Mount a metal-coated NanoProbe cantilever into the standard cantilever holder. MFM-style cantilevers (225µm long, with resonant frequencies around 70kHz) usually work well. It is also possible to deposit custom coatings on model FESP silicon TappingMode cantilevers. Rev. D Dimension 3100 Manual...
Page 322 Drive amplitude that has been selected. Also, when Potential is selected as the Data type for the Channel 2 image, a feedback circuit is enabled in the Extender box which adjusts the dc voltage on the tip to maintain the cantilever oscillation Dimension 3100 Manual Rev. D...
Page 323 (The lock-in amplifier produces a voltage that is proportional to the cantilever amplitude.) Qualitative surface potential images can be collected using this lock-in signal. Also, if the sample has a surface potential that exceeds ±10V (greater than the range of the Rev. D Dimension 3100 Manual...
Page 324: Troubleshooting The Surface Potential Feedback Loop
Interleave mode to Disabled, then back to Enabled. Also try reducing any external voltage that is being applied to the sample to stabilize the feedback loop, then turn the voltage back up. Dimension 3100 Manual Rev. D...
Page 325: Calibration
Adjust Mag0 and Arg: Section 17.4.1 • Adjust Fast mag1: Section 17.4.2 • Adjust Slow mag1: Section 17.4.3 • X-Y Calibration using Capture Calibration and Autocalibration: Section 17.5 • Capture Calibration: Section 17.5.1 • Autocalibration: Section 17.6 Rev. D Dimension 3100 Manual...
Page 326 Capture and Correct an Image: Section 17.8.2 • Measure Vertical Features: Section 17.8.3 • Correct Z Sensitivity: Section 17.8.4 • Recheck Z-axis Measuring Accuracy: Section 17.8.5 • Calculate Retracted and Extended Offset Deratings: Section 17.8.6 Dimension 3100 Manual Rev. D...
Page 327: Spm Calibration Overview
Veeco employs a software-guided calibration procedure for all microscopes. The procedural details of how calibration is executed using NanoScope software are beyond the scope of this document and include proprietary methods exclusive to Veeco. A brief overview of the theory is available in Section 17.1.1.
Page 328: Theory Behind Calibration
Critical Height Measurements All Years Monthly Note: Small Scan Size Calibration: If using scan sizes of 5µm or smaller, Veeco recommends calibrating the scanner for small scan sizes. Contact Veeco for further instructions. 17.1.1 Theory Behind Calibration Scanners typically consist of a hollow tube made of piezoelectric material such as PZT (lead zirconium titanate).
Page 329: Figure 17.1A Scanner Crystal Voltage And Photodiode Voltage
By precisely determining points along the scanner’s sensitivity curve, then applying a rigorous mathematical model, full-range measuring capabilities can be achieved with better than 1 percent accuracy. Consider the sensitivity curve represented in Figure 17.1b. Rev. D Dimension 3100 Manual...
Page 330: Figure 17.1B Scanner Sensitivity Curve
As scan size is decreased, the piezo exhibits more linearity. These effects are further complicated by X-Y-Z coupling effects (the tendency for one axis to affect movement in other axes). Dimension 3100 Manual Rev. D...
Page 331: Figure 17.1D Scanner Voltage And Movement
Movement Time Through rigorous quality control of its scanner piezos, Veeco has achieved excellent modeling of scanner characteristics. Two calibration points are typically used for ﬁne-tuning: at 150 and 440 volts. A third point is assumed at 0 nm/volts. These three points yield a second-order sensitivity curve to ensure accurate measurements throughout a broad range of scanner movements.
Page 332: Calibration References
CD shipped with every system. Individually purchased scanners are shipped with a head/scanner disk containing backup files or a hard copy of the scanner parameters. 2. In the event that files are not found, fax or call Veeco for scanner calibration records. Dimension 3100 Manual...
Page 333: Align Calibration Reference
Number of samples Slow scan axis Enabled Z limit 440 V Other Controls Units Volts Channel 1 Data type Height Z range ~ 20 V a. Adjust the Z range parameter to obtain the best contrast. Rev. D Dimension 3100 Manual...
Page 334: Set Up Contact Afm
2. On the display monitor, select the Angle command and use the mouse to draw a cursor between the edges (or centers) of widely spaced pits (see Figure 17.3a). Figure 17.3a Non-Orthogonal and Corrected, Orthogonal Image Dimension 3100 Manual Rev. D...
Page 335: Adjust Sample Orthogonality
5. Repeat correction of Orthogonality until the scanned image shows less than 0.5º of error. Note: After a major change to the orthogonality parameter, you may need to physically realign the calibration standard to the image frame. Rev. D Dimension 3100 Manual...
Page 336: Linearity Correction
The beginning third of the scan is the standard for judging almost all of the linearity values. Ignore the set of features near the edges of the scan since these may be distorted slightly. 8. Move the zoom box to the end third of the scan. Dimension 3100 Manual Rev. D...
Page 337: Figure 17.4A Fast Scan Linearization: Mag0
4. After an adjustment in Fast arg is made, Fast mag0 may need readjusting. Repeat Fast mag0 adjustment procedure until the rulings are evenly spaced across the Fast-axis. Figure 17.4b X Scan Linearization Center Compressed Center Expanded Rev. D Dimension 3100 Manual...
Page 338: Figure 17.4C Y Scan Linearization
5. If the features of the end third are too large for the box, decrease the parameter. If the features are too small, increase the parameter. Note: Compare only parts of the current scan, not the previous scan. Figure 17.4c Y Scan Linearization Center Compressed Center Expanded Dimension 3100 Manual Rev. D...
Page 339: Adjust Fast Mag1
The yellow retrace line will shift in the same direction as the arrow. 9. When done, click to close the Scanner Calibration window. 10. Set Slow scan axis back to Enabled. 11. Select View > Image Mode. Rev. D Dimension 3100 Manual...
Page 340: Adjust Slow Mag1
6. Wait one complete frame with the new value before readjusting the Slow mag1 value. 7. Check the final result by capturing an image and checking it with the Offline > Modify > Zoom window. The scanner is now ready for calibration of the X and Y parameters. Dimension 3100 Manual Rev. D...
Page 341: X-Y Calibration Using Capture Calibration And Autocalibration
5. As each routine is executed, adjust the scan slightly to optimize the calibration image using the Capture Control dialog box displayed on the control monitor throughout the calibration routines (see Figure 17.5b). Rev. D Dimension 3100 Manual...
Page 342: Figure 17.5B Capture Control Prompt
After the ﬁrst four images with the diagonal stripe pattern are captured, you can leave the system unattended while the program continues to completion. Some of the following images appear stretched in one dimension; however, this is normal. Dimension 3100 Manual Rev. D...
Page 343: Autocalibration
2. Select the Offline > Utility > Autocalibration command. The control monitor will display the X-Y Piezo Calibration dialog box (see Figure 17.6a). Figure 17.6a X-Y Piezo Calibration Prompt 3. Verify that the file name prefix assigned to the captured files from the Capture Calibration routine is correct. Rev. D Dimension 3100 Manual...
Page 344: Figure 17.6B Vertical Calibration Line
10µm apart (e.g., between bottom edges, left sides, etc.). Note: Measure features without regard to how they appear in calibration images. Features may be represented with stretched, distorted, or angled appearances Dimension 3100 Manual Rev. D...
Page 345 1-2 percent accuracy over most of the scanner’s measuring range. To obtain still better accuracy, the SPM can be ﬁne-tuned to obtain maximum measuring accuracy. This is accomplished through the use of calibration parameters discussed in Section 17.7. Rev. D Dimension 3100 Manual...
Page 346: Fine-Tuning For X-Y Calibration
The screen will display the measured distance between pits next to the line. Dimension 3100 Manual Rev. D...
Page 347: Figure 17.7A Calibration Horizontal Reference
Known distance between features ---------------------------------------------------------------------------------------------------- - SPM-calculated distance between features 7. Select the Realtime > Microscope > Calibrate > Scanner option. The Scanner Calibration dialog box displays (see Figure 17.7b). Figure 17.7b Scanner Calibration Panel Rev. D Dimension 3100 Manual...
Page 348: Measure Vertically At 440V Scan Size
8. Multiply the quotient obtained earlier by the Y slow sens value shown on the Scanner Calibration panel. 9. Enter the new value to adjust the scanner’s slow axis to more closely match calculated distances with actual feature distances. 10. To save the new parameter value, click Dimension 3100 Manual Rev. D...
Page 349: Measure Horizontally At 150 V Scan Size
X fast derate or Y slow derate value you recorded in the above step; m is the measured distance; and, v is the Scan size in volts:   ⋅ – --- - s d 440 v – –   ------------------------------------------------------------- - 440 v – Rev. D Dimension 3100 Manual...
Page 350: Measure Vertically At 150V Scan Size
Repeat steps above for the following parameters: Y fast sens, X slow sens, Y fast der, and X slow der to ensure the scanner is calibrated properly along the X- and Y-axis for scanning at 90º. Dimension 3100 Manual Rev. D...
Page 351: Calibrating Z
X- and Y-axes do during scanning. Furthermore, offsets affect the piezo over a period of minutes. The silicon calibration references distributed by Veeco have 200nm vertical features accurate to within ± 3 percent. The calibration reference is referred to throughout the examples provided in this section.
Page 352: Capture And Correct An Image
4. Go to the display screen and draw a stopband over the pit as shown in Figure 17.8b. Figure 17.8b Draw a Stopband 5. Click Execute to complete the flattening procedure. 6. Quit the dialog box. Dimension 3100 Manual Rev. D...
Page 353: Measure Vertical Features
Height data within the drawn cursor box displays on the monitor, showing two, prominent peaks. These peaks correspond to two elevations on the surface: the bottom of the pit and the top surface. There should be a line cursor on each peak. Rev. D Dimension 3100 Manual...
Page 354: Figure 17.8E Z Calibration Configure Dialog Box
6. In the Data result dialog box located under the image on the display screen, check the Peak to Peak value and record it for future reference. 7. Click Quit to exit the Depth dialog box. Figure 17.8f Z Calibration Depth Dialog Box Dimension 3100 Manual Rev. D...
Page 355: Correct Z Sensitivity
Z sensitivity value. Note: The numerator value above (200nm) is for Veeco 10µm silicon reference. For other calibration references, set the numerator equal to the depth of features measured by Depth analysis. Ideally, calibration references should have features with heights comparable to those being imaged and measured on samples.
Page 356 Step 5 Step Note: The measured depth should read 200nm on a Veeco 10µm silicon calibration reference. 5. Select Realtime > Microscope > Calibrate > Z to display the Z Calibration panel 6. Click on the Extended offset der parameter.
Page 357: Maintenance, Troubleshooting And Warranty
Air Pressure: Section 18.1.6 • Air Table Feet: Section 18.1.7 • Optics Zoom System: Section 18.1.8 • Troubleshooting: Section 18.2 • Alarms and Error Messages: Section 18.2.1 • Common Problems: Section 18.2.2 • Warranty: Section 18.3 Rev. D Dimension 3100 Manual...
Page 358: Maintenance
Maintenance, Troubleshooting and Warranty Maintenance 18.1 Maintenance Generally, the Dimension 3100 system requires very little maintenance. A simple schedule of cleaning and calibration check is usually sufﬁcient. Every three months: 1. Wipe down the major components of the instrument. 2. Clean the SPM stage.
Page 359 5. Lubricate the screw and the leading edge of the threaded insert with a small amount of silicon vacuum grease. 6. Thread the screw back into the scanner head. 7. Repeat the cleaning procedure with the other three adjustment screws. Rev. D Dimension 3100 Manual...
Page 360: Calibration
Because the Dimension 3100 is sensitive to vibration, it is often a convenient tool for checking the performance of the vibration isolation system. The following test can be performed under ambient conditions or while an external noise source is applied to the ﬂoor.
Page 361: Changing The Illuminator Light Bulb
Dimension control box. Dimension 3100 systems ship with a spare light bulb mounted within the Dimension control box back panel. Order a new illuminator bulb from Veeco when the spare bulb burns out. Please note availability and shipping time may vary. Figure 18.1a Change the Illuminator Bulb...
Page 362 7. Plug in the light bulb cable. 8. Slide the bulb mount panel back and replace the holding screws. 9. Order another spare bulb from Veeco. CAUTION: When you receive the new spare bulb, remove the power from the...
Page 363: Fuse Characteristics And Replacement
120V 281-000-029 0.2A 5 x 20mm 250V 240V 281-000-028 0.125A 5 x 20mm 250V Fuse Replacement Procedure 1. Remove all power from the system. 2. Remove the lid of the appropriate control box (4 screws). Rev. D Dimension 3100 Manual...
Page 364: Air Tables
6. Using a screwdriver, press the slot in the fuse holder and rotate the fuse a 1/4 turn clockwise until the fuse is secure. 7. Order another spare fuse from Veeco. Be sure to turn off all system power before placing the spare fuse back in the holder location.
Page 365: Optics Zoom System
Do not tighten the nut more than 1/8-1/4 turn. This is typically enough additional tension to fix the problem. 7. Verify that the zoom optics work correctly and that the clutch still slips at the end of the motors travel. Rev. D Dimension 3100 Manual...
Page 366: Troubleshooting
Troubleshooting 18.2 Troubleshooting The Dimension 3100 system is very reliable and generally will not need adjustment once properly calibrated, nor is it likely to develop a problem due to use. In most cases any problems that occur can be linked to some external event.
Page 367 The message will also appear when switching between AFM and STM probes. The intent of this message is a safety check to warn you that you have moved the objective unusually long distance. Select OK if you’ve changed to a different style of probe. Rev. D Dimension 3100 Manual...
Page 368: Common Problems
Cables – The wires inside the cable connector on the Dimension scanner can be broken from the 21-pin plug. Disconnecting or connecting the scanner by pulling on the cable can cause this. Dimension 3100 Manual Rev. D...
Page 369: Warranty
Veeco’s obligation under these warranties is limited to repairing or replacing at Veeco’s option defective non-expendable parts. Veeco’s obligation shall not extend to defects that do not impair service. No claim will be allowed for any defect unless Veeco has received notice of the defect within thirty days following its discovery by purchaser.
Page 370 To be eligible for the above warranties, purchaser must perform preventative maintenance in accordance with the schedule set forth in the manual provided. Veeco assumes no liability under the above warranties for equipment or system failures resulting from improper operation, improper preventative maintenance, abuse or modiﬁcations of the equipment or system from the original...
Page 371 (installation and service only) — Symbols software power-up 35 Chucks . 248 vacuum 115 Circuitry Dimension 3100 microscope 8 Dimension 3100 controller 7 Color contrast 180 Aliasing 241 Color offset 180 Amplitude 146 Color table 180 Atomic Force Microscope (AFM)
Page 372 240 thermal hazard 6 — operating procedure 235 vacuum pump 7 — principles of 235 Dimension 3100 Microscope Electronics Box 7 Frequency Modulation larger SPM mother board 8 with MFM 263 main SPM circuit board 8 Frequency Sweep 135 —...
Page 373 Index safety 19 Lift scan height 261 thermal hazard 19 Lift scan height 250 Illumination Lift start height 261 Dimension 3100 controller 7 Lift start height 250 Input and Display Devices Lifting Hazard computer 4 symbol 19 keyboard 3 —...
Page 374 (normal usage) 31 scanner 11 — precautions 20 Plot type 180 sample safeguards 26 Power — software power-up 32 Dimension 3100 controller 7 — symbols 19 power-up (installation and service only) 27 Safety Hazards — attention 19 power-up (normal usage) 31 —...
Page 375 System Overview 2 password 33 computer 3 — power-up 32 configurations 2 power-up checklist 35 Dimension 3100 controller 2 realtime 34 motorized positioning stage 2 stage initialization 35 optical microscope 2 user name 33 video image capture capability 3 Specifications cantilever holder 14 —...
Page 376 173 poor image quality 173 unable to locate particulate samples 174 Units 213 User Name 33 Vacuum Dimension 3100 controller 7 microscope vacuum power switch 8 Van der Waals Forces 253 Veeco Contact Information 350 Vibration isolation table 57...

This manual is also suitable for:

Vt-103-3k Vt-102

Veeco Dimension 3100 Manual

Chapter 1 System Overview

Chapter 2 Safety

Chapter 3 Facilities Requirements

Chapter 4 Installation

Chapter 5 Stage System

Chapter 6 Cantilever Preparation

Chapter 7 Head, Probe, & Sample Preparation

Chapter 8 Contact AFM

Chapter 9 Tappingmode AFM

Chapter 10 Fluid Imaging

Quick Links

Troubleshooting

Related Manuals for Veeco Dimension 3100

Summary of Contents for Veeco Dimension 3100