Veeco 004-320-100 Manuals

Manuals and User Guides for Veeco 004-320-100. We have 1 Veeco 004-320-100 manual available for free PDF download: Manual

Veeco 004-320-100 Manual (455 pages)

Brand: Veeco | Category: Industrial Equipment | Size: 8.42 MB

Table of Contents
2
Overview
14
System Overview
14
How to Reach Digital Instruments Veeco
15
Dimension 3100 SPM Features
16
System Overview
16
Control Station Overview
18
Figure 1.4A
18
Input and Display Devices
18
Computer
19
Figure 1.4B
19
Figure 1.4C
20
Nanoscope Iiia Controller
20
Dimension 3100 Controller
21
Figure 1.4D
21
Dimension 3100 Microscope Electronics Box1-10
23
Dimension 3100 SPM Overview
23
Figure 1.5A
23
Optics and Motors Overview
24
Dimension SPM Head
25
Figure 1.5B
25
Stage System
25
Figure 1.5C
27
Figure 1.5D
28
Cantilever Holder
29
Figure 1.5E
29
Figure 1.5F
30
Video Zoom Microscope
31
Facilities Specifications
32
Sample Size & Handling
32
Applications
33
Maintenance and Troubleshooting
33
Overview
34
Safety
34
Safety Requirements
35
General Operator Safety
36
Safety Precautions
36
Microscope
40
Sample Safeguards
42
Dimension 3100 SPM Facility Requirements2-11
44
Equipment Safety Applications
44
Ergonomics
44
Figure 2.6A
44
Non-Physical Conditions
44
Only)
45
Power-Up Sequence
45
Pre Power-Up Checklist
45
Power-Up the Dimension 3100 SPM (Service and Installation Only)
50
Power-Up Checklist (Service and Installation Only)
51
Power-Up Checklist (Normal Usage)
52
Power-Up Sequence (Normal Usage)
52
Prepare the System for Power-Up (Normal Usage)
52
Figure 2.9A
53
Select Windows NT Workstation 4.00
53
Software Power-Up
53
Figure 2.9B Log into Windows NT
54
Press CTRL - ALT - DELETE
54
Figure 2.9C Logon Window
55
Log on
55
Start the Nanoscope Software
55
Begin Stage Initialization
56
Select Real-Time
56
Figure 2.9F Status Panel
57
Software Power-Up Checklist
57
Figure 2.10B Laser Warning Label
58
Hazard Labels
58
Laser Warning Labels
58
Figure 2.10C Noninterlocked Protective Housing Label
59
Facilities Requirements
60
Overview
60
Axiom VT-103-3K with ELCON
61
Optional Configurations
61
Axiom IS3K-2
63
Figure 3.2C Axiom IS3K-2
63
Facilities Requirements
64
Figure 3.3A Dimension 3100 SPM Facility
64
Acoustic/Vibration Isolation Systems
65
Axiom IS3K-2 Dimensions, Utilities, and Clearance
65
Figure 3.4A Axiom IS3K-2
65
Figure 3.4B Axiom IS3K-2
66
Figure 3.4C Axiom IS3K-2
66
Axiom VT-103-3K Dimensions, Utilities and Clearance
68
Figure 3.4F Axiom VT-103-3K
68
Figure 3.4G Axiom VT-103-3K
69
Figure 3.4H Axiom VT-103-3K
69
Axiom VT-102 Dimensions and Utilities
70
Figure 287.3I: Axiom VT-102 Vibration Isolation Table
70
Computer/Controller Facility Requirements3-12
71
ELCON Console
72
Facilities Requirements Summary
73
Environmental Acoustic/Vibration Specifications
74
General Facilities Guidelines
75
Installation
76
Overview
76
Dimension 3100 Manual
77
Equipment Requirements
77
Shipping and Receiving
77
Uncrate the Dimension 3100 SPM System4-4
79
Uncrating the System
79
Install the Dimension 3100 SPM Unit
80
Installing the Dimension 3100 System
80
Install the Control Station
82
Connect the Dimension 3100 Control Station Extensions
84
Connecting the Dimension 3100 System
84
Figure 4.5A Computer (Rear View)
85
Figure 4.5D Dimension 3100 Controller
89
Figure 4.5E Dimension 3100 Controller
89
Connect the Dimension 3100 Microscope Extensions
90
Figure 4.5F D3100 Microscope Electronics Box
90
Figure 4.5G Vacuum Power Switch
91
Figure 4.5H Cable Clamp
91
System Power-Up
93
Overview
94
Stage System
94
Magnetic Pucks
95
Mounting of Samples
95
Vacuum Chucks
95
Axis Orientation-Motorized X-Y Stages
96
Load New Sample
97
Stage Menu Commands
97
Locate Tip
98
Figure 5.3C Locate Tip Prompt
99
Align Laser
100
Figure 5.3D Align Laser Prompt
100
Figure 5.3E Mirror Cap Prompt
100
Figure 5.3F Focus Surface Prompt
101
Focus Surface
101
Move to (X,Y)
102
Figure 5.3G Move to Prompt
103
Figure 5.3H Abort Motion Prompt
103
Figure 5.3I Set Reference Prompt
105
Set Reference
105
Figure 5.3J Defining the X-Axis
106
Programmed Move
108
Figure 5.3M Editing or Creating New Program
109
Figure 5.3N Teach Program Prompt
109
Figure 5.3O Teach Mode Prompt
110
Figure 5.3P Initial Focus Prompt
113
Initialize
113
SPM Parameters
115
Cantilever Preparation
116
Overview
116
Cantilever Preparation
117
Silicon Cantilever Substrates
117
Wafer Tool Kit
117
Tip Shape of Etched Silicon Probes
119
Silicon Nitride Cantilever Substrates
123
Tip Shape of Silicon Nitride Probes
126
Chapter 7 Head, Probe, & Sample Preparation

128
- Overview
  128
- System Information
  129
- Mouse Versus Trackball
  129
- Motor Interlock
  129
- Laser Requirements
  129
- Basic AFM Operation
  131
- Select the Microscope Head
  131
- Select Mode of Operation
  131
- Prepare the Cantilever Holder
  131
- Load the Cantilever Holder
  132
- Remove the Dimension SPM Head
  134
- Install the Cantilever Holder
  135
- Replace the Dimension SPM Head
  136
- Connect the Dimension Head
  136
- Align Laser
  136
- Adjust Photodetector
  141
- Locate Tip
  143
- Load the Sample
  144
- Focus Surface
  146
- Cantilever Tune (Tappingmode Only)
  146
- Set Initial Scan Parameters
  146
- Engage
  147
- Establish Tip Clearance
  147
- Advanced AFM Operation
  148
- Stage Parameters
  148
- Contact AFM
  150
- Overview
  150
- Basic Contact Mode AFM Operation
  151
- Select the Microscope Head
  151
- Select Mode of Operation
  151
- Align Laser
  151
- Adjust Photodetector
  152
- Locate Tip
  152
- Focus Surface
  152
- Set Initial Scan Parameters
  152
- Engage
  155
- Advanced Atomic Force Operation
  156
- Cantilever Selection
  156
- Optimization of Scanning Parameters
  159
- Data Type
  159
- Gain Settings
  160
- Scan Size and Scan Rate
  161
- Setpoint
  161
- Lowpass Filter
  162
- Highpass Filter
  162
- Force Calibration Mode
  163
- Contact AFM in Fluids
  164
- Overview
  164
- Basic Principles of Contact AFM in Fluids9-2
  165
- Fluid Operation Hardware
  165
- Fluid Tip Holder
  165
- Tip Suggestions
  166
- Rubber Protective Skirt
  167
- Sample Mounting
  167
- General Notes on Sample Binding
  167
- Larger Samples
  168
- Smaller Samples
  168
- Fluid Operation Procedure
  171
- Load the Cantilever Substrate
  171
- Install the Cantilever Holder
  172
- Install the Protective Skirt
  173
- Align Laser
  173
- False" Reflections
  173
- Lower Tip Holder into Fluid
  174
- Readjust Laser Alignment
  175
- Adjust Detector Offsets and Setpoint
  175
- Locate Tip
  176
- Focus Surface
  176
- Check Scan Parameters
  178
- Engage
  178
- Adjust Scan Parameters
  178
- Clean Fluid Cell and Protective Skirt
  179
- Tapping Mode AFM
  180
- Overview
  180
- Principles of Tapping Mode
  181
- Basic Tapping Mode AFM Operation
  183
- Select the Microscope Head
  183
- Select Mode of Operation
  183
- Head, Cantilever and Sample Preparation10-4
  183
- Align Laser
  183
- Adjust Photodetector
  184
- Locate Tip
  184
- Focus Surface
  184
- Cantilever Tune
  185
- Set Initial Scan Parameters
  189
- Engage
  191
- Withdraw the Tip
  192
- Resonating Techniques
  193
- Cantilever Oscillation
  193
- Decreasing the Cantilever Drive Frequency10
  195
- Optimization of Scanning Parameters
  196
- Data Type
  196
- Gain Settings
  197
- Scan Size, Scan Rate, and Setpoint
  197
- Troubleshooting
  199
- Frequency Response Plot
  199
- Engaging the Sample
  199
- Tappingmode AFM in Fluids
  201
- Principles of Tapping Mode in Fluids
  201
- Acknowledgments
  201
- Precautions
  202
- Spillage Precautions
  202
- Basic Tapping Mode AFM in Fluids Operation
  204
- Select the Microscope Head
  204
- Select Mode of Operation
  204
- Align Laser
  204
- Adjust Photodetector
  205
- Locate Tip
  205
- Focus Surface
  205
- Cantilever Tune
  206
- Set Initial Scan Parameters
  210
- Engage
  212
- Clean the Fluid Cantilever Holder
  212
- Attach Protective Skirt
  213
- Plug Fluid Cell in Dimension Head
  213
- Prepare the Sample for Imaging
  214
- Remount the Dimension Head
  214
- Verify that the Microscope Is Dry
  216
- Switch to Tapping Mode
  216
- Set Initial Scan Parameters
  225
- Advanced LFM Operation
  229
- Optimal Setup for Frictional Measurements12-8
  229
- Identification of Friction
  230
- Identification of Forces Other than Friction12
  233
- Example of Frictional Data
  235
- Force Imaging
  237
- Force Plots-An Analogy
  237
- Force Calibration
  240
- Example Force Plot
  241
- Force Calibration Control Panels
  245
- Main Controls (Ramp Controls)
  246
- Main Controls (Display)
  247
- Channel 1, 2, 3 Panels
  247
- Feedback Controls
  248
- Scan Mode
  250
- Menu Bar Commands
  252
- Force Calibration (Contact Mode AFM)13-19
  254
- Obtaining a Good Force Curve
  254
- Helpful Suggestions
  257
- Advanced Techniques
  260
- Force Calibration (Tapping Mode)
  265
- Force Plots
  265
- Obtaining a Force Plot (Tapping Mode)13-33
  268
- High Contact Force
  270
- Plotting Phase Versus Frequency in Tapping Mode
  271
- Force Modulation
  272
- Introduction
  272
- Selecting a Force Modulation Tip
  273
- Operating Principle
  274
- Force Modulation Procedure
  275
- Notes about Artifacts
  284
- Force Modulation with 'Negative Liftmode'13
  287
- Set Interleave Controls
  288
- Obtain a Tapping Mode Image
  288
- Obtain a Negative Liftmode Force Modulation Image
  289
- Force Volume
  291
- Overview
  292
- Interleave Scanning
  293
- Basic Interleave Scanning Operation
  293
- Select the Microscope Head
  293
- Select Mode of Operation
  293
- Head, Cantilever and Sample Preparation14-3
  294
- Align Laser
  294
- Adjust Photodetector
  294
- Locate Tip
  294
- Focus Surface
  295
- Set Initial Scan Parameters
  295
- Engage
  297
- Lift Mode
  298
- Interleave Scanning/Lift Mode Operation14-8
  298
- Basic Lift Mode Operation
  299
- Advanced Lift Mode Operation
  301
- Lift Scan Height
  301
- Tip Shape
  301
- Scan Line Direction
  301
- Lift Mode with Tapping Mode
  302
- Main Drive Amplitude and Frequency Selection
  302
- Setpoint Selection
  302
- Interleave Drive Amplitude and Frequency Selection
  302
- Magnetic Force Microscopy
  304
- Overview
  304
- Magnetic Force Microscopy
  305
- Force Gradient Detection
  305
- Amplitude Detection Techniques
  306
- Basic MFM Operation
  307
- MFM Using Liftmode
  307
- Advanced MFM Operation
  316
- Lift Scan Height and Magnetic Imaging Resolution
  316
- Linear Lift
  317
- Fine Tuning Interleave Controls
  317
- Drive Amplitude
  318
- Installation of Extender Electronics Module15
  321
- Troubleshooting
  325
- MFM Image Verification
  325
- Saturation in Amplitude Detection
  325
- Optical Interference
  325
- Overview
  326
- Electric Techniques Overview
  327
- Electric Force Microscopy Overview
  328
- Surface Potential Imaging Overview
  329
- Electric Force Microscopy
  330
- Electric Force Microscopy Theory
  330
- Electric Force Microscopy Preparation
  332
- Surface Potential Detection
  353
- Surface Potential Detection Theory
  353
- Surface Potential Imaging Procedure
  360
- Open Loop Operation
  364
- Troubleshooting
  366
- Calibration
  369
- SPM Calibration Overview
  369
- Theory Behind Calibration
  370
- Sensitivity and Scanner Calibration
  373
- Scanner Properties
  373
- Calibration References
  376
- Small Scan Size Calibration
  377
- Full X-Y Calibration Routine
  377
- Linearity Correction
  377
- Off-Line / Utility / Autocalibration
  392
- Fine-Tuning for X-Y Calibration
  395
- Prepare System for Fine-Tuning
  395
- Measure Vertically at 440V Scan Size
  397
- Measure Vertically at 150 V Scan Size
  400
- Change Scan Angle and Repeat Calibration Routines
  401
- Calibrating Z
  402
- Engage
  402
- Capture and Correct an Image
  403
- Measure Vertical Features
  405
- Correct Z Sensitivity
  407
- Recheck Z-Axis Measuring Accuracy
  408
- Calculate Retracted and Extended Offset Deratings
  408
Chapter 18 Maintenance and Troubleshooting

410
- Overview
  410
- Maintenance
  411
- Returning Components for Repair
  411
- Cleaning the Cantilever Holder
  411
- Clean the Sample Holder and X-Y Stage Surfaces
  411
- Changing the Illuminator Light Bulb
  412
- Troubleshooting
  414
- Software Main Menu Items
  414
- Contact Mode AFM
  417
- Problems with Contact Mode AFM
  419
- Tapping Mode AFM
  424
- Problems with Tapping Mode AFM
  428
- Initialize
  431

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Veeco 004-320-100 Manuals

Veeco 004-320-100 Manual (455 pages)

Table of Contents

Chapter 7 Head, Probe, & Sample Preparation

Chapter 18 Maintenance and Troubleshooting

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