Veeco Dimension 3100 Manuals

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Veeco Dimension 3100 Manual

Veeco Dimension 3100 Manual (376 pages)

NanoScope Software Version 5, 004-320-000 (standard), 004-320-100 (cleanroom)

Brand: Veeco | Category: Microscope | Size: 8.9 MB

Table of Contents

Table of Contents
3
System Overview
21
Chapter 1 System Overview

22
Chapter 2 Safety

37
- Safety
  38
- Safety Requirements
  39
- Figure 2.1A Safety Symbols Key
  39
- Safety Precautions
  40
  - General Operator Safety
    40
  - Microscope
    43
  - Sample Safeguards
    46
- Ergonomics
  46
- Environmental Conditions
  47
- Equipment Safety Applications
  47
  - Dimension 3100 SPM Facility Requirements
    47
- Power-Up Sequence (Installation and Service Only)
  47
- Power-Up Sequence (Normal Usage)
  51
  - Prepare the System for Power-Up (Normal Usage)
    51
  - Power-Up Checklist (Normal Usage)
    52
- Software Power-Up
  52
  - Log into Windows NT
    52
  - Log on
    53
  - Figure 2.8A Log into Windows NT
    53
  - Start the Nanoscope Software
    54
  - Select Realtime
    54
  - Figure 2.8B Logon Window
    54
  - Figure 2.8C Select the Nanoscope Icon
    54
  - Figure 2.8D Select the Realtime Icon
    54
  - Begin Stage Initialization
    55
  - Software Power-Up Checklist
    55
- Hazard Labels
  55
Chapter 3 Facilities Requirements

57
Chapter 4 Installation

74
Chapter 5 Stage System

89
- Mounting of Samples
  90
  - Vacuum Chucks
    90
  - Magnetic Pucks
    90
  - Axis Orientation Motorized X-Y Stages
    91
  - Figure 5.1A Stage X-Y Axis Orientation
    91
- Stage Menu Commands
  92
  - Load New Sample
    92
  - Figure 5.2A Stage Load/Unload Prompt
    92
  - Locate Tip
    93
  - Figure 5.2B Moving to Tip Position Caution
    93
  - Focus Surface
    94
  - Figure 5.2C Locate Tip Prompt
    94
  - Figure 5.2D Focus Surface Prompt
    95
  - Move to (X,Y)
    96
  - Figure 5.2E Move to Prompt
    96
  - Figure 5.2F Abort Motion Prompt
    96
  - Set Reference
    97
  - Figure 5.2G Set Reference Prompt
    98
  - Figure 5.2H Defining the X-Axis
    98
  - Programmed Move
    99
  - Figure 5.2I Resultant Reference Line
    99
  - Figure 5.2J Programmed Move Prompt
    99
  - Figure 5.2K Editing or Creating New Program Prompts
    100
  - Figure 5.2L Teach Program Prompt
    100
  - Figure 5.2M Teach Mode Prompt
    101
  - Initialize
    103
  - Figure 5.2N Initial Focus Prompt
    103
  - Figure 5.2O Programmed Move Prompt
    103
  - Figure 5.2P Stage Initialize/Cancel Prompt
    104
  - Figure 5.2Q SPM Move to Lower Limits Prompt
    104
  - Figure 5.2R Stage Initializing Prompt
    104
  - Figure 5.2S Optics Move to End of Travel Prompt
    104
  - Figure 5.2T Stage Zoom Prompt
    104
  - SPM Parameters
    105
  - Figure 5.2U Stage Zoom out Prompt
    105
Chapter 6 Cantilever Preparation

107
- Silicon Cantilever Substrates
  108
- Silicon Nitride Cantilever Substrates
  113
Chapter 7 Head, Probe, & Sample Preparation

119
- System Information
  120
  - Mouse Versus Trackball
    120
  - Motor Interlock
    120
  - Laser Requirements
    121
- Basic AFM Operation
  122
  - Select the Microscope
    122
  - Select Mode of Operation
    122
  - Prepare the Cantilever Holder
    122
  - Figure 7.2A Microscope Select Prompt
    122
  - Load the Cantilever Holder
    123
  - Figure 7.2B Cantilever Holder Stand (Top View)
    123
  - Figure 7.2C Standard AFM Cantilever Holder
    124
  - Remove the Dimension SPM Head
    125
  - Install the Cantilever Holder
    125
  - Figure 7.2D SPM Head Dovetail and Signal Connector
    125
  - Replace the Dimension SPM Head
    126
  - Connect the Dimension Head
    126
  - Align Laser
    126
  - Figure 7.2E Dimension Head Laser Control Knobs
    127
  - Figure 7.2F Etched Silicon Tip Laser Alignment
    128
  - Figure 7.2G Photodetector Adjustment Knobs
    129
  - Figure 7.2H Silicon Nitride Laser Alignment
    130
  - Adjust Photodetector
    131
  - Figure 7.2I Vision System Window
    132
  - Locate Tip
    133
  - Figure 7.2J Photodetector Mirror Adjustment Knobs
    133
  - Load the Sample
    134
  - Figure 7.2K Securing Double-Sided Tape to the Sample Disk
    134
  - Focus Surface
    135
  - Figure 7.2L Securing the Sample
    135
  - Cantilever Tune (Tappingmode Only)
    136
  - Set Initial Scan Parameters
    136
  - Engage
    137
  - Withdraw
    137
- Advanced AFM Operation
  137
  - Stage Parameters
    137
  - Figure 7.3A Default SPM Stage Parameters
    138
Chapter 8 Contact AFM

139
- Basic Contact Mode AFM Operation
  140
  - Select the Microscope
    140
  - Select Mode of Operation
    140
  - Head, Cantilever and Sample Preparation
    140
  - Align Laser
    140
  - Adjust Photodetector
    141
  - Locate Tip
    141
  - Focus Surface
    141
  - Show All Items
    142
  - Figure 8.1A Select Show All Items
    142
  - Figure 8.1B Enable Parameters
    142
  - Set Initial Scan Parameters
    143
  - Figure 8.1C Suggested Scan Controls Settings
    143
  - Figure 8.1D Suggested Other Controls Settings
    143
  - Figure 8.1E Suggested Feedback Controls Settings
    144
  - Figure 8.1F Suggested Channel Controls Settings
    144
  - Engage
    145
- Advanced Atomic Force Operation
  145
  - Cantilever Selection
    145
  - Figure 8.2A Force Curve
    146
- Optimization of Scanning Parameters
  147
  - Data Type
    147
  - Gain Settings
    148
  - Scan Size and Scan Rate
    149
  - Setpoint
    149
  - Lowpass Filter
    149
  - Highpass Filter
    149
- Force Calibration Mode
  150
Chapter 9 Tappingmode AFM

151
- Principles of Tappingmode
  152
- Figure 9.1A Tapping Cantilever in Free Air
  152
- Basic Tappingmode AFM Operation
  153
  - Select Mode of Operation
    153
  - Figure 9.1B Tapping Cantilever on Sample Surface
    153
  - Head, Cantilever and Sample Preparation
    154
  - Align Laser
    154
  - Adjust Photodetector
    154
  - Locate Tip
    154
  - Focus Surface
    155
  - Cantilever Tune
    155
  - Figure 9.2A Auto Tune Control Panel
    156
  - Figure 9.2B Cantilever Tune Control Panels for Main Controls
    157
  - Figure 9.2C Cantilever Tune Frequency Sweep
    158
  - Show All Items
    159
  - Figure 9.2D Select Show All Items
    159
  - Figure 9.2E Enable Parameters
    159
  - Set Initial Scan Parameters
    160
  - Figure 9.2F Suggested Scan Controls Settings
    160
  - Figure 9.2G Suggested Other Controls Settings
    160
  - Engage
    161
  - Figure 9.2H Suggested Feedback Controls Settings
    161
  - Optimize Scan Parameters
    162
- Withdraw the Tip
  162
- Advanced Tappingmode AFM Operation
  163
  - Resonating Techniques
    163
  - Cantilever Oscillation
    163
  - Figure 9.4A Cantilever Response Curve
    163
  - Figure 9.4B Scope Trace with High Scan Rate
    164
  - Decreasing the Cantilever Drive Frequency
    165
  - Figure 9.4C Scope Trace with Correct Scan Rate
    165
  - Figure 9.4D Suggested Range of Drive Frequencies
    165
  - Optimization of Scanning Parameters
    166
  - Data Type
    166
  - Gain Settings
    166
  - Scan Size, Scan Rate, and Setpoint
    166
  - Surface Tune
    167
- Troubleshooting
  168
  - Frequency Response Plot
    168
  - Engaging the Sample
    168
  - Cantilever will Not Tune
    168
Chapter 10 Fluid Imaging

169
- Basic Principles
  171
  - Acknowledgments
    171
- Fluid Operation Hardware
  171
  - Fluid Tip Holder
    171
  - Tip Suggestions
    172
  - Figure 10.2A Fluid Tip Holder
    172
  - Rubber Protective Skirt
    173
- Sample Mounting
  173
  - General Notes on Sample Binding
    173
  - Figure 10.2B Rubber Protective Skirt
    173
  - Larger Samples
    174
  - Smaller Samples
    174
  - Figure 10.3A Imaging a Sample Covered by a Drop of Fluid
    174
- Precautions
  175
  - Spillage Precautions
    175
- Operating Principles
  177
  - Clean Fluid Cell and Protective Skirt
    177
  - Select Mode of Operation
    177
  - Load the Probe
    177
  - Install the Fluid Tip Holder
    178
  - Install the Protective Skirt
    179
  - Align Laser
    179
  - Figure 10.5A Tip Holder Installed with Protective Skirt
    179
  - False Reflections
    180
  - Load Sample
    180
  - Figure 10.5B False Reflections from Fluid Tip Holder
    180
  - Lower Probe into Fluid
    182
  - Readjust Laser Alignment
    182
  - Adjust Photodetector
    182
  - Locate Tip
    183
  - Focus Surface
    183
  - Cantilever Tune (Tappingmode Only)
    185
  - Figure 10.5D Cantilever Tune Control Panels for Main Controls
    187
  - Figure 10.5E Cantilever Tune Frequency Sweep
    188
  - Show All Items
    189
  - Figure 10.5F Select Show All Items
    189
  - Figure 10.5G Enable Parameters
    189
  - Set Initial Scan Parameters
    190
  - Figure 10.5H Suggested Scan Controls Settings During Tappingmode
    190
  - Engage
    191
  - Adjust Scan Parameters
    191
  - Clean Cell and Protective Skirt
    192
- Troubleshooting
  193
  - Cantilever Tune Plot Looks Poor
    193
  - Laser Sum Signal Absent or Weak
    193
  - Poor Image Quality
    193
  - Unable to Locate Particulate Samples
    194
Chapter 11 Scanning Tunneling Microscopy (STM)

195
- Introduction
  196
  - Overview of STM
    196
- Basic STM Operation
  197
  - Imaging Samples
    197
  - Figure 11.1A Dimension Tip Holder and Head Connection
    197
- STM-Specific Information and Operations
  200
  - STM Hardware
    201
  - Fine Points of STM Operation
    202
  - STM Operating Modes
    202
  - Figure 11.3A Typical STM Channel 1 Control Panel Parameters
    202
  - STM-Specific Menu Parameters
    203
  - Figure 11.3B Scan Derating Graph
    206
- Spectroscopy with the STM
  207
  - Operation of STS
    207
- Troubleshooting Operation of STM
  208
  - Head and Microscope-Related Problems
    208
  - Head Engages Immediately
    209
- Etching Tungsten Tips
  212
  - Procedure
    212
Chapter 12 Lateral Force Mode

215
- Introduction
  215
- Basic LFM Operation
  216
- Advanced LFM Operation
  217
  - Scan Direction
    217
  - Figure 12.3A Scan Angle Selection
    217
  - Tip Selection
    218
  - Understanding the LFM Signal
    218
  - Understanding the Color Scale
    219
  - Figure 12.3C Friction Data
    219
  - Using TMR Voltage to Measure Friction
    220
  - Enhancing the LFM Data by Subtracting Two Images
    220
  - Figure 12.3D TMR Data
    220
  - Height Artifacts in the Signal
    221
  - Figure 12.3E Height Artifacts in LFM Data
    221
Chapter 13 Force Imaging

223
Chapter 14 Interleave Scanning

268
- Preface: Interleave Scanning & Liftmode
  268
- Figure 14.2A X-Y Scan Pattern
  269
- Interleave Mode Description
  269
- Figure 14.3A Liftmode Profiles
  270
- Liftmode Description
  270
- Operation of Interleave Scanning / Liftmode
  270
- Use of Liftmode with Tappingmode
  271
Chapter 15 Magnetic Force Microscopy

275
- Magnetic Force Microscopy
  276
  - Force Gradient Detection
    276
  - Figure 15.1A MFM Liftmode Principles
    276
  - Amplitude Detection Techniques
    277
- Basic MFM Operation
  278
- Advanced MFM Operation
  284
- Installation of the Electronics Modules
  288
  - Phase Extender Module
    288
  - Figure 15.4A Phase Box
    288
  - Quadrex Extender
    289
  - Nanoscope IV
    289
- Software Setup Configuration (Phase, Quadrex or NSIV)
  289
- Figure 15.5A Microscope Select Dialog Box
  289
- Troubleshooting
  290
  - MFM Image Verification
    290
  - Saturation in Amplitude Detection
    290
  - Optical Interference
    290
Chapter 16 Electric Techniques

291

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Veeco Dimension 3100 Manual

Veeco Dimension 3100 Manual (455 pages)

Brand: Veeco | Category: Industrial Equipment | Size: 8.42 MB

Table of Contents

Table of Contents
2
Overview
14
System Overview
14
How to Reach Digital Instruments Veeco
15
Dimension 3100 SPM Features
16
System Overview
16
Control Station Overview
18
Figure 1.4A
18
Input and Display Devices
18
Computer
19
Figure 1.4B
19
Figure 1.4C
20
Nanoscope Iiia Controller
20
Dimension 3100 Controller
21
Figure 1.4D
21
Dimension 3100 Microscope Electronics Box1-10
23
Dimension 3100 SPM Overview
23
Figure 1.5A
23
Optics and Motors Overview
24
Dimension SPM Head
25
Figure 1.5B
25
Stage System
25
Figure 1.5C
27
Figure 1.5D
28
Cantilever Holder
29
Figure 1.5E
29
Figure 1.5F
30
Video Zoom Microscope
31
Facilities Specifications
32
Sample Size & Handling
32
Applications
33
Maintenance and Troubleshooting
33
Overview
34
Safety
34
Safety Requirements
35
General Operator Safety
36
Safety Precautions
36
Microscope
40
Sample Safeguards
42
Dimension 3100 SPM Facility Requirements2-11
44
Equipment Safety Applications
44
Ergonomics
44
Figure 2.6A
44
Non-Physical Conditions
44
Only)
45
Power-Up Sequence
45
Pre Power-Up Checklist
45
Power-Up the Dimension 3100 SPM (Service and Installation Only)
50
Power-Up Checklist (Service and Installation Only)
51
Power-Up Checklist (Normal Usage)
52
Power-Up Sequence (Normal Usage)
52
Prepare the System for Power-Up (Normal Usage)
52
Figure 2.9A
53
Select Windows NT Workstation 4.00
53
Software Power-Up
53
Figure 2.9B Log into Windows NT
54
Press CTRL - ALT - DELETE
54
Figure 2.9C Logon Window
55
Log on
55
Start the Nanoscope Software
55
Begin Stage Initialization
56
Select Real-Time
56
Figure 2.9F Status Panel
57
Software Power-Up Checklist
57
Figure 2.10B Laser Warning Label
58
Hazard Labels
58
Laser Warning Labels
58
Figure 2.10C Noninterlocked Protective Housing Label
59
Facilities Requirements
60
Overview
60
Axiom VT-103-3K with ELCON
61
Optional Configurations
61
Axiom IS3K-2
63
Figure 3.2C Axiom IS3K-2
63
Facilities Requirements
64
Figure 3.3A Dimension 3100 SPM Facility
64
Acoustic/Vibration Isolation Systems
65
Axiom IS3K-2 Dimensions, Utilities, and Clearance
65
Figure 3.4A Axiom IS3K-2
65
Figure 3.4B Axiom IS3K-2
66
Figure 3.4C Axiom IS3K-2
66
Axiom VT-103-3K Dimensions, Utilities and Clearance
68
Figure 3.4F Axiom VT-103-3K
68
Figure 3.4G Axiom VT-103-3K
69
Figure 3.4H Axiom VT-103-3K
69
Axiom VT-102 Dimensions and Utilities
70
Figure 287.3I: Axiom VT-102 Vibration Isolation Table
70
Computer/Controller Facility Requirements3-12
71
ELCON Console
72
Facilities Requirements Summary
73
Environmental Acoustic/Vibration Specifications
74
General Facilities Guidelines
75
Installation
76
Overview
76
Dimension 3100 Manual
77
Equipment Requirements
77
Shipping and Receiving
77
Uncrate the Dimension 3100 SPM System4-4
79
Uncrating the System
79
Install the Dimension 3100 SPM Unit
80
Installing the Dimension 3100 System
80
Install the Control Station
82
Connect the Dimension 3100 Control Station Extensions
84
Connecting the Dimension 3100 System
84
Figure 4.5A Computer (Rear View)
85
Figure 4.5D Dimension 3100 Controller
89
Figure 4.5E Dimension 3100 Controller
89
Connect the Dimension 3100 Microscope Extensions
90
Figure 4.5F D3100 Microscope Electronics Box
90
Figure 4.5G Vacuum Power Switch
91
Figure 4.5H Cable Clamp
91
System Power-Up
93
Overview
94
Stage System
94
Magnetic Pucks
95
Mounting of Samples
95
Vacuum Chucks
95
Axis Orientation-Motorized X-Y Stages
96
Load New Sample
97
Stage Menu Commands
97
Locate Tip
98
Figure 5.3C Locate Tip Prompt
99
Align Laser
100
Figure 5.3D Align Laser Prompt
100
Figure 5.3E Mirror Cap Prompt
100
Figure 5.3F Focus Surface Prompt
101
Focus Surface
101
Move to (X,Y)
102
Figure 5.3G Move to Prompt
103
Figure 5.3H Abort Motion Prompt
103
Figure 5.3I Set Reference Prompt
105
Set Reference
105
Figure 5.3J Defining the X-Axis
106
Programmed Move
108
Figure 5.3M Editing or Creating New Program
109
Figure 5.3N Teach Program Prompt
109
Figure 5.3O Teach Mode Prompt
110
Figure 5.3P Initial Focus Prompt
113
Initialize
113
SPM Parameters
115
Cantilever Preparation
116
Overview
116
Cantilever Preparation
117
Silicon Cantilever Substrates
117
Wafer Tool Kit
117
Tip Shape of Etched Silicon Probes
119
Silicon Nitride Cantilever Substrates
123
Tip Shape of Silicon Nitride Probes
126
Chapter 7 Head, Probe, & Sample Preparation

128
- Overview
  128
- System Information
  129
- Mouse Versus Trackball
  129
- Motor Interlock
  129
- Laser Requirements
  129
- Basic AFM Operation
  131
- Select the Microscope Head
  131
- Select Mode of Operation
  131
- Prepare the Cantilever Holder
  131
- Load the Cantilever Holder
  132
- Remove the Dimension SPM Head
  134
- Install the Cantilever Holder
  135
- Replace the Dimension SPM Head
  136
- Connect the Dimension Head
  136
- Align Laser
  136
- Adjust Photodetector
  141
- Locate Tip
  143
- Load the Sample
  144
- Focus Surface
  146
- Cantilever Tune (Tappingmode Only)
  146
- Set Initial Scan Parameters
  146
- Engage
  147
- Establish Tip Clearance
  147
- Advanced AFM Operation
  148
- Stage Parameters
  148
- Contact AFM
  150
- Overview
  150
- Basic Contact Mode AFM Operation
  151
- Select the Microscope Head
  151
- Select Mode of Operation
  151
- Align Laser
  151
- Adjust Photodetector
  152
- Locate Tip
  152
- Focus Surface
  152
- Set Initial Scan Parameters
  152
- Engage
  155
- Advanced Atomic Force Operation
  156
- Cantilever Selection
  156
- Optimization of Scanning Parameters
  159
- Data Type
  159
- Gain Settings
  160
- Scan Size and Scan Rate
  161
- Setpoint
  161
- Lowpass Filter
  162
- Highpass Filter
  162
- Force Calibration Mode
  163
- Contact AFM in Fluids
  164
- Overview
  164
- Basic Principles of Contact AFM in Fluids9-2
  165
- Fluid Operation Hardware
  165
- Fluid Tip Holder
  165
- Tip Suggestions
  166
- Rubber Protective Skirt
  167
- Sample Mounting
  167
- General Notes on Sample Binding
  167
- Larger Samples
  168
- Smaller Samples
  168
- Fluid Operation Procedure
  171
- Load the Cantilever Substrate
  171
- Install the Cantilever Holder
  172
- Install the Protective Skirt
  173
- Align Laser
  173
- False" Reflections
  173
- Lower Tip Holder into Fluid
  174
- Readjust Laser Alignment
  175
- Adjust Detector Offsets and Setpoint
  175
- Locate Tip
  176
- Focus Surface
  176
- Check Scan Parameters
  178
- Engage
  178
- Adjust Scan Parameters
  178
- Clean Fluid Cell and Protective Skirt
  179
- Tapping Mode AFM
  180
- Overview
  180
- Principles of Tapping Mode
  181
- Basic Tapping Mode AFM Operation
  183
- Select the Microscope Head
  183
- Select Mode of Operation
  183
- Head, Cantilever and Sample Preparation10-4
  183
- Align Laser
  183
- Adjust Photodetector
  184
- Locate Tip
  184
- Focus Surface
  184
- Cantilever Tune
  185
- Set Initial Scan Parameters
  189
- Engage
  191
- Withdraw the Tip
  192
- Resonating Techniques
  193
- Cantilever Oscillation
  193
- Decreasing the Cantilever Drive Frequency10
  195
- Optimization of Scanning Parameters
  196
- Data Type
  196
- Gain Settings
  197
- Scan Size, Scan Rate, and Setpoint
  197
- Troubleshooting
  199
- Frequency Response Plot
  199
- Engaging the Sample
  199
- Tappingmode AFM in Fluids
  201
- Principles of Tapping Mode in Fluids
  201
- Acknowledgments
  201
- Precautions
  202
- Spillage Precautions
  202
- Basic Tapping Mode AFM in Fluids Operation
  204
- Select the Microscope Head
  204
- Select Mode of Operation
  204
- Align Laser
  204
- Adjust Photodetector
  205
- Locate Tip
  205
- Focus Surface
  205
- Cantilever Tune
  206
- Set Initial Scan Parameters
  210
- Engage
  212
- Clean the Fluid Cantilever Holder
  212
- Attach Protective Skirt
  213
- Plug Fluid Cell in Dimension Head
  213
- Prepare the Sample for Imaging
  214
- Remount the Dimension Head
  214
- Verify that the Microscope Is Dry
  216
- Switch to Tapping Mode
  216
- Set Initial Scan Parameters
  225
- Advanced LFM Operation
  229
- Optimal Setup for Frictional Measurements12-8
  229
- Identification of Friction
  230
- Identification of Forces Other than Friction12
  233
- Example of Frictional Data
  235
- Force Imaging
  237
- Force Plots-An Analogy
  237
- Force Calibration
  240
- Example Force Plot
  241
- Force Calibration Control Panels
  245
- Main Controls (Ramp Controls)
  246
- Main Controls (Display)
  247
- Channel 1, 2, 3 Panels
  247
- Feedback Controls
  248
- Scan Mode
  250
- Menu Bar Commands
  252
- Force Calibration (Contact Mode AFM)13-19
  254
- Obtaining a Good Force Curve
  254
- Helpful Suggestions
  257
- Advanced Techniques
  260
- Force Calibration (Tapping Mode)
  265
- Force Plots
  265
- Obtaining a Force Plot (Tapping Mode)13-33
  268
- High Contact Force
  270
- Plotting Phase Versus Frequency in Tapping Mode
  271
- Force Modulation
  272
- Introduction
  272
- Selecting a Force Modulation Tip
  273
- Operating Principle
  274
- Force Modulation Procedure
  275
- Notes about Artifacts
  284
- Force Modulation with 'Negative Liftmode'13
  287
- Set Interleave Controls
  288
- Obtain a Tapping Mode Image
  288
- Obtain a Negative Liftmode Force Modulation Image
  289
- Force Volume
  291
- Overview
  292
- Interleave Scanning
  293
- Basic Interleave Scanning Operation
  293
- Select the Microscope Head
  293
- Select Mode of Operation
  293
- Head, Cantilever and Sample Preparation14-3
  294
- Align Laser
  294
- Adjust Photodetector
  294
- Locate Tip
  294
- Focus Surface
  295
- Set Initial Scan Parameters
  295
- Engage
  297
- Lift Mode
  298
- Interleave Scanning/Lift Mode Operation14-8
  298
- Basic Lift Mode Operation
  299
- Advanced Lift Mode Operation
  301
- Lift Scan Height
  301
- Tip Shape
  301
- Scan Line Direction
  301
- Lift Mode with Tapping Mode
  302
- Main Drive Amplitude and Frequency Selection
  302
- Setpoint Selection
  302
- Interleave Drive Amplitude and Frequency Selection
  302
- Magnetic Force Microscopy
  304
- Overview
  304
- Magnetic Force Microscopy
  305
- Force Gradient Detection
  305
- Amplitude Detection Techniques
  306
- Basic MFM Operation
  307
- MFM Using Liftmode
  307
- Advanced MFM Operation
  316
- Lift Scan Height and Magnetic Imaging Resolution
  316
- Linear Lift
  317
- Fine Tuning Interleave Controls
  317
- Drive Amplitude
  318
- Installation of Extender Electronics Module15
  321
- Troubleshooting
  325
- MFM Image Verification
  325
- Saturation in Amplitude Detection
  325
- Optical Interference
  325
- Overview
  326
- Electric Techniques Overview
  327
- Electric Force Microscopy Overview
  328
- Surface Potential Imaging Overview
  329
- Electric Force Microscopy
  330
- Electric Force Microscopy Theory
  330
- Electric Force Microscopy Preparation
  332
- Surface Potential Detection
  353
- Surface Potential Detection Theory
  353
- Surface Potential Imaging Procedure
  360
- Open Loop Operation
  364
- Troubleshooting
  366
- Calibration
  369
- SPM Calibration Overview
  369
- Theory Behind Calibration
  370
- Sensitivity and Scanner Calibration
  373
- Scanner Properties
  373
- Calibration References
  376
- Small Scan Size Calibration
  377
- Full X-Y Calibration Routine
  377
- Linearity Correction
  377
- Off-Line / Utility / Autocalibration
  392
- Fine-Tuning for X-Y Calibration
  395
- Prepare System for Fine-Tuning
  395
- Measure Vertically at 440V Scan Size
  397
- Measure Vertically at 150 V Scan Size
  400
- Change Scan Angle and Repeat Calibration Routines
  401
- Calibrating Z
  402
- Engage
  402
- Capture and Correct an Image
  403
- Measure Vertical Features
  405
- Correct Z Sensitivity
  407
- Recheck Z-Axis Measuring Accuracy
  408
- Calculate Retracted and Extended Offset Deratings
  408

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