Veeco VT-102 Manuals

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Veeco VT-102 Manual

Veeco VT-102 Manual (376 pages)

NanoScope Software Version 5, 004-320-000 (standard), 004-320-100 (cleanroom)

Brand: Veeco | Category: Microscope | Size: 8 MB

Table of Contents

Table of Contents
3
System Overview
21
Chapter 1 System Overview

22
Chapter 2 Safety

37
- Safety
  38
- Safety Requirements
  39
- Figure 2.1A Safety Symbols Key
  39
- Safety Precautions
  40
  - General Operator Safety
    40
  - Microscope
    43
  - Sample Safeguards
    46
- Ergonomics
  46
- Environmental Conditions
  47
- Equipment Safety Applications
  47
  - Dimension 3100 SPM Facility Requirements
    47
- Power-Up Sequence (Installation and Service Only)
  47
- Power-Up Sequence (Normal Usage)
  51
  - Prepare the System for Power-Up (Normal Usage)
    51
  - Power-Up Checklist (Normal Usage)
    52
- Software Power-Up
  52
  - Log into Windows NT
    52
  - Log on
    53
  - Figure 2.8A Log into Windows NT
    53
  - Start the Nanoscope Software
    54
  - Select Realtime
    54
  - Figure 2.8B Logon Window
    54
  - Figure 2.8C Select the Nanoscope Icon
    54
  - Figure 2.8D Select the Realtime Icon
    54
  - Begin Stage Initialization
    55
  - Software Power-Up Checklist
    55
- Hazard Labels
  55
Chapter 3 Facilities Requirements

57
Chapter 4 Installation

74
Chapter 5 Stage System

89
- Mounting of Samples
  90
  - Vacuum Chucks
    90
  - Magnetic Pucks
    90
  - Axis Orientation Motorized X-Y Stages
    91
  - Figure 5.1A Stage X-Y Axis Orientation
    91
- Stage Menu Commands
  92
  - Load New Sample
    92
  - Figure 5.2A Stage Load/Unload Prompt
    92
  - Locate Tip
    93
  - Figure 5.2B Moving to Tip Position Caution
    93
  - Focus Surface
    94
  - Figure 5.2C Locate Tip Prompt
    94
  - Figure 5.2D Focus Surface Prompt
    95
  - Move to (X,Y)
    96
  - Figure 5.2E Move to Prompt
    96
  - Figure 5.2F Abort Motion Prompt
    96
  - Set Reference
    97
  - Figure 5.2G Set Reference Prompt
    98
  - Figure 5.2H Defining the X-Axis
    98
  - Programmed Move
    99
  - Figure 5.2I Resultant Reference Line
    99
  - Figure 5.2J Programmed Move Prompt
    99
  - Figure 5.2K Editing or Creating New Program Prompts
    100
  - Figure 5.2L Teach Program Prompt
    100
  - Figure 5.2M Teach Mode Prompt
    101
  - Initialize
    103
  - Figure 5.2N Initial Focus Prompt
    103
  - Figure 5.2O Programmed Move Prompt
    103
  - Figure 5.2P Stage Initialize/Cancel Prompt
    104
  - Figure 5.2Q SPM Move to Lower Limits Prompt
    104
  - Figure 5.2R Stage Initializing Prompt
    104
  - Figure 5.2S Optics Move to End of Travel Prompt
    104
  - Figure 5.2T Stage Zoom Prompt
    104
  - SPM Parameters
    105
  - Figure 5.2U Stage Zoom out Prompt
    105
Chapter 6 Cantilever Preparation

107
- Silicon Cantilever Substrates
  108
- Silicon Nitride Cantilever Substrates
  113
Chapter 7 Head, Probe, & Sample Preparation

119
- System Information
  120
  - Mouse Versus Trackball
    120
  - Motor Interlock
    120
  - Laser Requirements
    121
- Basic AFM Operation
  122
  - Select the Microscope
    122
  - Select Mode of Operation
    122
  - Prepare the Cantilever Holder
    122
  - Figure 7.2A Microscope Select Prompt
    122
  - Load the Cantilever Holder
    123
  - Figure 7.2B Cantilever Holder Stand (Top View)
    123
  - Figure 7.2C Standard AFM Cantilever Holder
    124
  - Remove the Dimension SPM Head
    125
  - Install the Cantilever Holder
    125
  - Figure 7.2D SPM Head Dovetail and Signal Connector
    125
  - Replace the Dimension SPM Head
    126
  - Connect the Dimension Head
    126
  - Align Laser
    126
  - Figure 7.2E Dimension Head Laser Control Knobs
    127
  - Figure 7.2F Etched Silicon Tip Laser Alignment
    128
  - Figure 7.2G Photodetector Adjustment Knobs
    129
  - Figure 7.2H Silicon Nitride Laser Alignment
    130
  - Adjust Photodetector
    131
  - Figure 7.2I Vision System Window
    132
  - Locate Tip
    133
  - Figure 7.2J Photodetector Mirror Adjustment Knobs
    133
  - Load the Sample
    134
  - Figure 7.2K Securing Double-Sided Tape to the Sample Disk
    134
  - Focus Surface
    135
  - Figure 7.2L Securing the Sample
    135
  - Cantilever Tune (Tappingmode Only)
    136
  - Set Initial Scan Parameters
    136
  - Engage
    137
  - Withdraw
    137
- Advanced AFM Operation
  137
  - Stage Parameters
    137
  - Figure 7.3A Default SPM Stage Parameters
    138
Chapter 8 Contact AFM

139
- Basic Contact Mode AFM Operation
  140
  - Select the Microscope
    140
  - Select Mode of Operation
    140
  - Head, Cantilever and Sample Preparation
    140
  - Align Laser
    140
  - Adjust Photodetector
    141
  - Locate Tip
    141
  - Focus Surface
    141
  - Show All Items
    142
  - Figure 8.1A Select Show All Items
    142
  - Figure 8.1B Enable Parameters
    142
  - Set Initial Scan Parameters
    143
  - Figure 8.1C Suggested Scan Controls Settings
    143
  - Figure 8.1D Suggested Other Controls Settings
    143
  - Figure 8.1E Suggested Feedback Controls Settings
    144
  - Figure 8.1F Suggested Channel Controls Settings
    144
  - Engage
    145
- Advanced Atomic Force Operation
  145
  - Cantilever Selection
    145
  - Figure 8.2A Force Curve
    146
- Optimization of Scanning Parameters
  147
  - Data Type
    147
  - Gain Settings
    148
  - Scan Size and Scan Rate
    149
  - Setpoint
    149
  - Lowpass Filter
    149
  - Highpass Filter
    149
- Force Calibration Mode
  150
Chapter 9 Tappingmode AFM

151
- Principles of Tappingmode
  152
- Figure 9.1A Tapping Cantilever in Free Air
  152
- Basic Tappingmode AFM Operation
  153
  - Select Mode of Operation
    153
  - Figure 9.1B Tapping Cantilever on Sample Surface
    153
  - Head, Cantilever and Sample Preparation
    154
  - Align Laser
    154
  - Adjust Photodetector
    154
  - Locate Tip
    154
  - Focus Surface
    155
  - Cantilever Tune
    155
  - Figure 9.2A Auto Tune Control Panel
    156
  - Figure 9.2B Cantilever Tune Control Panels for Main Controls
    157
  - Figure 9.2C Cantilever Tune Frequency Sweep
    158
  - Show All Items
    159
  - Figure 9.2D Select Show All Items
    159
  - Figure 9.2E Enable Parameters
    159
  - Set Initial Scan Parameters
    160
  - Figure 9.2F Suggested Scan Controls Settings
    160
  - Figure 9.2G Suggested Other Controls Settings
    160
  - Engage
    161
  - Figure 9.2H Suggested Feedback Controls Settings
    161
  - Optimize Scan Parameters
    162
- Withdraw the Tip
  162
- Advanced Tappingmode AFM Operation
  163
  - Resonating Techniques
    163
  - Cantilever Oscillation
    163
  - Figure 9.4A Cantilever Response Curve
    163
  - Figure 9.4B Scope Trace with High Scan Rate
    164
  - Decreasing the Cantilever Drive Frequency
    165
  - Figure 9.4C Scope Trace with Correct Scan Rate
    165
  - Figure 9.4D Suggested Range of Drive Frequencies
    165
  - Optimization of Scanning Parameters
    166
  - Data Type
    166
  - Gain Settings
    166
  - Scan Size, Scan Rate, and Setpoint
    166
  - Surface Tune
    167
- Troubleshooting
  168
  - Frequency Response Plot
    168
  - Engaging the Sample
    168
  - Cantilever will Not Tune
    168
Chapter 10 Fluid Imaging

169
- Basic Principles
  171
  - Acknowledgments
    171
- Fluid Operation Hardware
  171
  - Fluid Tip Holder
    171
  - Tip Suggestions
    172
  - Figure 10.2A Fluid Tip Holder
    172
  - Rubber Protective Skirt
    173
- Sample Mounting
  173
  - General Notes on Sample Binding
    173
  - Figure 10.2B Rubber Protective Skirt
    173
  - Larger Samples
    174
  - Smaller Samples
    174
  - Figure 10.3A Imaging a Sample Covered by a Drop of Fluid
    174
- Precautions
  175
  - Spillage Precautions
    175
- Operating Principles
  177
  - Clean Fluid Cell and Protective Skirt
    177
  - Select Mode of Operation
    177
  - Load the Probe
    177
  - Install the Fluid Tip Holder
    178
  - Install the Protective Skirt
    179
  - Align Laser
    179
  - Figure 10.5A Tip Holder Installed with Protective Skirt
    179
  - False Reflections
    180
  - Load Sample
    180
  - Figure 10.5B False Reflections from Fluid Tip Holder
    180
  - Lower Probe into Fluid
    182
  - Readjust Laser Alignment
    182
  - Adjust Photodetector
    182
  - Locate Tip
    183
  - Focus Surface
    183
  - Cantilever Tune (Tappingmode Only)
    185
  - Figure 10.5D Cantilever Tune Control Panels for Main Controls
    187
  - Figure 10.5E Cantilever Tune Frequency Sweep
    188
  - Show All Items
    189
  - Figure 10.5F Select Show All Items
    189
  - Figure 10.5G Enable Parameters
    189
  - Set Initial Scan Parameters
    190
  - Figure 10.5H Suggested Scan Controls Settings During Tappingmode
    190
  - Engage
    191
  - Adjust Scan Parameters
    191
  - Clean Cell and Protective Skirt
    192
- Troubleshooting
  193
  - Cantilever Tune Plot Looks Poor
    193
  - Laser Sum Signal Absent or Weak
    193
  - Poor Image Quality
    193
  - Unable to Locate Particulate Samples
    194
Chapter 11 Scanning Tunneling Microscopy (STM)

195
- Introduction
  196
  - Overview of STM
    196
- Basic STM Operation
  197
  - Imaging Samples
    197
  - Figure 11.1A Dimension Tip Holder and Head Connection
    197
- STM-Specific Information and Operations
  200
  - STM Hardware
    201
  - Fine Points of STM Operation
    202
  - STM Operating Modes
    202
  - Figure 11.3A Typical STM Channel 1 Control Panel Parameters
    202
  - STM-Specific Menu Parameters
    203
  - Figure 11.3B Scan Derating Graph
    206
- Spectroscopy with the STM
  207
  - Operation of STS
    207
- Troubleshooting Operation of STM
  208
  - Head and Microscope-Related Problems
    208
  - Head Engages Immediately
    209
- Etching Tungsten Tips
  212
  - Procedure
    212
Chapter 12 Lateral Force Mode

215
- Introduction
  215
- Basic LFM Operation
  216
- Advanced LFM Operation
  217
  - Scan Direction
    217
  - Figure 12.3A Scan Angle Selection
    217
  - Tip Selection
    218
  - Understanding the LFM Signal
    218
  - Understanding the Color Scale
    219
  - Figure 12.3C Friction Data
    219
  - Using TMR Voltage to Measure Friction
    220
  - Enhancing the LFM Data by Subtracting Two Images
    220
  - Figure 12.3D TMR Data
    220
  - Height Artifacts in the Signal
    221
  - Figure 12.3E Height Artifacts in LFM Data
    221
Chapter 13 Force Imaging

223
Chapter 14 Interleave Scanning

268
- Preface: Interleave Scanning & Liftmode
  268
- Figure 14.2A X-Y Scan Pattern
  269
- Interleave Mode Description
  269
- Figure 14.3A Liftmode Profiles
  270
- Liftmode Description
  270
- Operation of Interleave Scanning / Liftmode
  270
- Use of Liftmode with Tappingmode
  271
Chapter 15 Magnetic Force Microscopy

275
- Magnetic Force Microscopy
  276
  - Force Gradient Detection
    276
  - Figure 15.1A MFM Liftmode Principles
    276
  - Amplitude Detection Techniques
    277
- Basic MFM Operation
  278
- Advanced MFM Operation
  284
- Installation of the Electronics Modules
  288
  - Phase Extender Module
    288
  - Figure 15.4A Phase Box
    288
  - Quadrex Extender
    289
  - Nanoscope IV
    289
- Software Setup Configuration (Phase, Quadrex or NSIV)
  289
- Figure 15.5A Microscope Select Dialog Box
  289
- Troubleshooting
  290
  - MFM Image Verification
    290
  - Saturation in Amplitude Detection
    290
  - Optical Interference
    290
Chapter 16 Electric Techniques

291
Chapter 17 Calibration

325
- SPM Calibration Overview
  327
- Calibration Setup
  332
  - Check Scanner Parameter Values
    332
  - Figure 17.1E Silicon Calibration Reference
    332
  - Align Calibration Reference
    333
  - Set Realtime Parameters
    333
  - Figure 17.2A 0 Degrees Scan Angle
    333
  - Set up Contact AFM
    334
- Check Sample Orthogonality
  334
- Linearity Correction
  336
  - Adjust Mag0 and Arg
    336
  - Figure 17.4A Fast Scan Linearization: Mag0
    337
  - Figure 17.4B X Scan Linearization
    337
  - Figure 17.4C y Scan Linearization
    338
  - Adjust Fast Mag1
    339
  - Adjust Slow Mag1
    340
- X-Y Calibration Using Capture Calibration and Autocalibration
  341
- Autocalibration
  343
- Figure 17.6A X-Y Piezo Calibration Prompt
  343
- Figure 17.6B Vertical Calibration Line
  344
- Figure 17.6C Calibration Line Distance Prompt
  344
- Fine-Tuning for X-Y Calibration
  346
- Calibrating Z
  351
  - Engage
    351
  - Figure 17.8A Z Calibration Image
    351
  - Capture and Correct an Image
    352
  - Figure 17.8B Draw a Stopband
    352
  - Measure Vertical Features
    353
  - Figure 17.8C Depth Analysis Screen
    353
  - Figure 17.8D Draw a Cursor Box
    353
  - Figure 17.8E Z Calibration Configure Dialog Box
    354
  - Figure 17.8F Z Calibration Depth Dialog Box
    354
  - Correct Z Sensitivity
    355
  - Recheck Z-Axis Measuring Accuracy
    355
  - Calculate Retracted and Extended Offset Deratings
    355
Chapter 18 Maintenance, Troubleshooting and Warranty

357
- Maintenance
  358
  - Cleaning
    358
  - Calibration
    360
  - Changing the Illuminator Light Bulb
    361
  - Figure 18.1A Change the Illuminator Bulb
    361
  - Fuse Characteristics and Replacement
    363
  - Air Tables
    364
  - Air Pressure
    364
  - Air Table Feet
    364
  - Optics Zoom System
    365
- Troubleshooting
  366
  - Alarms and Error Messages
    366
  - Common Problems
    368
- Warranty
  369

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