Linearity Correction Procedure; Adjust Mag0 And Arg - Veeco 004-210-000 Instruction Manual

Calibration, Maintenance, Troubleshooting and Warranty

Linearity Correction Procedure

3. Click
4. Capture another image and re-measure the angle.
5. Repeat correction of Orthogonality until the scanned image shows less than 0.5º of error.
15.4 Linearity Correction Procedure
For applications which demand good linearity, the following procedure can be used to optimize the
linearity correction parameters for individual scanners. As discussed previously, linearity correction
is especially important for long-range scanners.
15.4.1

Adjust Mag0 and Arg

1. Select Microscope > Calibrate > Scanner to display the Scanner Calibration dialog box.
2. Set the mag0 and arg values while noting the scan beginning and ending.
284
to exit the Scanner Calibration panel
OK
Note: After a major change to the orthogonality parameter, you may need to
physically realign the calibration standard to the image frame.
Note: When Line direction is set to Trace, the beginning of the fast scan is on the
left, as indicated by the arrow base. Because the display monitor screen itself is
not linear, use the Realtime Zoom box to check mag0 and arg.
Note: When viewing up or down scans, check the image against itself, not the
residual image from the previous scan. Be careful to compare only the part of
the scan drawn since the last parameter change.
MultiMode SPM Instruction Manual Rev. B