Calibration, Maintenance, Troubleshooting and Warranty
Calibrating Z
2. Go to the display screen and draw a cursor box surrounding the entire image (see
15.8d).
3. Click
4. If the two peaks do not appear in the display, increase the Histogram filter cut off in the
Configure dialog box to 2-10nm.
5. Open the Configure dialog box by clicking the C
(see
6. In the Data result dialog box located under the image on the display screen, check the Peak
to Peak value and record it for future reference.
302
Figure 15.8d Draw a Cursor Box
in the display monitor's top menu bar.
EXECUTE
Note:
Height data within the drawn cursor box displays on the monitor, showing two,
prominent peaks. These peaks correspond to two elevations on the surface: the
bottom of the pit and the top surface. There should be a line cursor on each
peak.
Figure
15.8e).
Figure 15.8e Z Calibration Configure Dialog Box
MultiMode SPM Instruction Manual
button in the Depth dialog box
ONFIGURE
Figure
Rev. B
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