Wiring And Piping; Ambient Requirements - Shimadzu iMLayer Installation Requirements

2.3 Wiring and Piping

Connection of power supply, cables, etc. of the iMLayer, is shown in Fig 2.
Item
number
1
2
3
4
5
6
7
8
9
10

2.4 Ambient Requirements

To ensure safe use of the product, sufficient consideration must be given to preparing its installation
environment
Temperature
Humidity
Draft chamber
To power supply
1
2
3
4
5
6
Fig 2 iMLayer cable connection
Table2 cable connection information
Description
Power supply cable (To the deposition power supply)
Interface cable
RS-422/485 cable
Deposition boat temperature signal cable
Heater cable No1 (Red)
Heater cable No1 (Blue)
AC cable
RP power supply cable
RP evacuation hose
RP suction hose
: 18 to 28°C
: 40 to 70% (with no condensation)
: Prepare a draft chamber or equivalent exhaust equipment in the room the
instrument is installed. Failure to do so may cause dispersion of the matrix when
opening the equipment to the air after vapor deposition. Also wear safety gear
during the process.
7
10
8
7
ZEBV-5088C
To evacuation duct
9
Length(m)
2.8
2.8
2.8
2.8
2.8
2.8
2.5
2.0
3
3