Shimadzu iMLayer Installation Requirements page 7

Item
Item name
number
1 Main iMLayer unit
2
Deposition Power supply(EVC)
3 Rotary pump
4 Draft chamber（typical）*
5 Table(for reference)
In the example installation given in Fig. 1, iMLayer is installed on the existing draft chamber, and
the deposition power supply and the rotary pump are placed on the table which has been prepared
separately. The specifications required for the table is as follows.
Width
Depth
Height
Load limit
Distance between iMLayer and deposition power supply must be within approx. 2.8 m.
Distance between iMLayer and rotary pump must be within approx. 2 m.
The specifications required for the draft chamber is as follows. See also Fig 1 Example Installation.
Inside depth of the draft chamber
Inside width of the draft chamber
Height of opening (front glass)
Load limit (Inside floor)
Minimum local exhaust air velocity
A certain amount of space is required around the iMLayer for installation and maintenance. The
space required is as follows. See also Fig 1 Example Installation.
Space behind the iMlayer
Space to right of the iMlayer
Space to left of the iMlayer
Space in front of the iMLayer
Space behind the deposition power supply
Space to right and left of the deposition power supply
Place rotary pump on a firm floor surface or on a low working surface at a distance where it can be
connected to the iMLayer by attached piping. (Extending piping to a distance greater than this will
prevent assurance of unit performance.) The rotary pump will be placed on the side of or under the
draft chamber on which iMLayer is installed. When placing the rotary pump on the side of the draft
chamber, for wiring and piping, ensure a distance of 150 mm or more between the side of the rotary
pump and the side of the draft chamber.
Teble.1 Dimensions and Weight
Dimensions(mm)
Width
416
296
163
-
300
: 500mm or more
: 300mm or more
: 750mm or more
: 40kg or more (Each step)
: 660mm or more
: 1000mm ore more
: 650mm ore more
: 100kg ore more
: 1m/s ore more
6
Depth Height
450 610
390 230
431 230
- -
500 750
* The opening needs to be 650mm or more.
Projection is not included in the dimensions.
: 150mm or more
: 430mm or more
: 150mm or more
: 305mm or more
: 100mm or more
: 100mm or more
ZEBV-5088C
Weight(kg)
80
28
30
-
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