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Shimadzu iMLayer Installation Requirements page 12

Matrix vapor deposition system

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Item
1. Carry-in route
2.
Temperature
Installation
Humidity
room
Installation space
Space for iMLayer
Load limit
Table
deposition
supply
Facilities
・Evacuation
・Draft chamber
Power
Power supply
supply
fluctuation
(guaranteed
performance)
Voltage fluctuation
・Frequency fluctuation
Power capacity
・For iMLayer
・ Ground (ground
resistor)
Terminal
・For iMLayer
Condition
・ The instrument must be movable in the
building.
・ There is no step in the passage.
18 to 28°C
40 to 70% (with no condensation)
・ W
D
1000 mm ×905 mm ×610 mm
・ Ability to withstand weight loads
adequately. (80kg)
for
・ The table must be wide enough so that
power
the equipment can be placed according
to the example installation.
・Draft chamber or equivalent exhaust
equipment is required
・ Requires
meeting
specifications.
Inside depth of the draft chamber
: 660mm or more
Inside width of the draft chamber
: 1000mm ore more
Height of opening (front glass)
: 650mm ore more
Load limit (Inside floor)
: 100kg ore more
Minimum local exhaust air velocity
: 1m/s ore more
・Within ±10% of voltage rating
・50/60Hz, ±1 Hz
・AC100V 15A 50/60Hz (single phase)
* Avoid sharing power source with other
equipment.
・Less than 100 ohms
・AC100V: 2.5m
11
Required itme
( * refers to Shimadzu
part number )
・ Table for deposition
H
power supply
・Draft chamber
the
following
(Depending on the situation)
・ Transformer
AC100V
line for oversea use.
STEP-DOWN
TRANSFORMER
1.5KVA
P/N 225-25315-41*
・ Plug
transformer.
100 V AC extension cable
(For oversea use, prepare
what is appropriate based
on the local power supply
condition
ZEBV-5088C
Check
on
the
power-supply
for
Step-down

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