Item
1. Carry-in route
2.
Temperature
Installation
Humidity
room
Installation space
Space for iMLayer
Load limit
Table
deposition
supply
Facilities
・Evacuation
・Draft chamber
Power
Power supply
supply
fluctuation
(guaranteed
performance)
Voltage fluctuation
・
・Frequency fluctuation
Power capacity
・For iMLayer
・ Ground (ground
resistor)
Terminal
・For iMLayer
Condition
・ The instrument must be movable in the
building.
・ There is no step in the passage.
18 to 28°C
40 to 70% (with no condensation)
・ W
D
1000 mm ×905 mm ×610 mm
・ Ability to withstand weight loads
adequately. (80kg)
for
・ The table must be wide enough so that
power
the equipment can be placed according
to the example installation.
・Draft chamber or equivalent exhaust
equipment is required
・ Requires
meeting
specifications.
Inside depth of the draft chamber
: 660mm or more
Inside width of the draft chamber
: 1000mm ore more
Height of opening (front glass)
: 650mm ore more
Load limit (Inside floor)
: 100kg ore more
Minimum local exhaust air velocity
: 1m/s ore more
・Within ±10% of voltage rating
・50/60Hz, ±1 Hz
・AC100V 15A 50/60Hz (single phase)
* Avoid sharing power source with other
equipment.
・Less than 100 ohms
・AC100V: 2.5m
11
Required itme
( * refers to Shimadzu
part number )
・ Table for deposition
H
power supply
・Draft chamber
the
following
(Depending on the situation)
・ Transformer
AC100V
line for oversea use.
STEP-DOWN
TRANSFORMER
1.5KVA
P/N 225-25315-41*
・ Plug
transformer.
100 V AC extension cable
・
(For oversea use, prepare
what is appropriate based
on the local power supply
condition
ZEBV-5088C
Check
□
□
□
□
□
□
on
the
power-supply
□
for
Step-down
□
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