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Table Of Contents - Shimadzu iMLayer Installation Requirements

Matrix vapor deposition system

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1. INTRODUCTION ····················································· 3
2. INSTALLATION CONDITIONS ··································· 4
2.1 Carry-in route .............................................................................. 4
2.2 Example installation ................................................................... 5
2.3 Wiring and Piping ....................................................................... 7
2.4 Ambient Requirements .............................................................. 7
2.5 Required Power Supply ............................................................. 8
3. Customer pre-check list .................................................... 10
Contents
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ZEBV-5088C

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