Ulvac MBS-053 Instruction Manual page 4

Figures and Tables
Fig.1 Dimensional drawing of MBS-053/MBS-053-01
mechanical booster vacuum pump
Fig.2 Driver Box Interior
Fig.3 Basic piping diagram to the vacuum chamber
Fig.4 Compression ratio property
Fig.5 Pumping speed curve
Fig.6 Driver circuit box position
Fig.7 Driver circuit box interior
Fig.8 Circuit protector wiring diagram
Fig.9 An Inlet (EN60320)
Fig.10 Change region of the voltage and frequency
Fig.11 Oil plug, oil level gauge position
Fig.12 Oil level gauge
Fig.13 Structure of pump
Fig.14 External control connector pin assignment
Fig.15 Alarm signal origination side circuitry
Table.1 Specification
Table.2 Power cable selection standards
Table.3 Protection feature
Table.4 External control connector
Table.5 Daily inspections
Table.6 Change parts long-term maintenance
Table.7 Trouble check list
・・・・・・・・・・
・・・・・・・・・・
・・・・・・・・・・
・・・・・・・・・・
・・・・・・・・・・
・・・・・・・・・・ 11
・・・・・・・・・・ 11
・・・・・・・・・・ 12
・・・・・・・・・・ 13
・・・・・・・・・・ 15
・・・・・・・・・・ 16
・・・・・・・・・・ 16
・・・・・・・・・・ 17
・・・・・・・・・・ 21
・・・・・・・・・・ 21
・・・・・・・・・・
・・・・・・・・・・ 12
・・・・・・・・・・ 20
・・・・・・・・・・ 21
・・・・・・・・・・ 22
・・・・・・・・・・ 22
・・・・・・・・・・ 23
6
6
8
9
9
5