Ulvac MBS-053 Instruction Manual page 13

Caution
Cause
High temperatures caused burns. ⇒ ① The pump reaches a high temperature
Caution
Never place combustible materials around the motor or pump. There is a risk of
fire. Also, do not place objects which block ventilation around the motor.
Abnormal heat generation may result in burns or fire.
High temperature
Prevention method and measures
during operation.
(Temperature increasing)
Pump main unit during non-load operation
Motor during non-load operation
Pump main unit during high-load operation
Motor during high-load operation
(High-load operation: Operation at a pressure
of 5[kPa]- 10[kPa])
② If you use the pump in a high ambient
temperature and have a high gas
throughput, the temperature of the
pump-body may exceed 90℃and you must
fit suitable guards to prevent contact with
hot surfaces.
③ Please be sure to protect and cool surface
of vacuum pump and away from human
body. Use this pump as built-in type.
④ Since the surface temperature is hot,
touching the surface accidentally may
result in burns. Never touch the pump
during operation. When carrying out
inspection, wait for 10 minutes until the
pump has cooled down completely after it
stops.
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10[K]
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10[K]
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50[K]
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25[K]