Ulvac MBS-053 Instruction Manual page 34

Mechanical booster vacuum pump
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Problem
⑤ The wire mesh at the inlet
The
pressure
port is clogged.
does not
decrease.
⑥ The specified amount of oil
has not been added.
⑦ The oil has deteriorated.
⑧ Leakage occurs from the
pipe connected to the pump.
⑨ Our specified oil is not being
used.
① Problem with power supply
Abnormal
sound is
voltage
generated.
② The motor malfunctions.
③ Foreign matter has entered
the pump.
④ The specified amount of oil
has not been added.
⑤ The coupling spider
malfunctions.
⑥ Components inside the
pump have burnt out.
① Continuous operation at
Pump
surfaces are
high evacuation pressure
extremely
hot.
② The specified amount of oil
has not been added. (If the
oil amount is not sufficient,
the cooling effect of the
pump will be reduced.)
③ The temperature of the
evacuated gas is high.
① The pump is been filled in
A lot of oil
splashes
excess of the specified
out from the
amount.
outlet port.
② Continuous operation is
performed at a high
evacuation pressure.
Cause
-24-
Measures
⑤Remove the piping from the
upper section of the inlet
port, and clean the wire
mesh.
⑥ Add the specified amount of
oil.
⑦ Replace the oil.
⑧ Locate the leakage with a
leakage detector and stop
the leakage.
⑨ Overhaul the pump and
replace with oil specified by
us
① Set the power supply voltage
to within ±10% of the rated
voltage.
② Replace the motor.
③ Eliminate the foreign matter
and overhaul the pump.
④ Add the specified amount of
oil.
⑤ Replace the coupling spider.
⑥ Overhaul (replace the
damaged components).
① If continuous operation is
performed at a high
evacuation pressure, the
pump surface temperature
increasing 50K.
Under 50K temperature
increasing is not a serious
problem.
② Add the specified amount of
oil.
③ Mount cooling equipment
such as a gas cooler at the
inlet side.
① Discharge the oil until it
reduces to the specified
amount.
② Install an oil mist trap at the
outlet side.
Reference
6.1
6.1
7
4.5
7
7
4.6
7
7
4.6
4.6
7

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