6
Operating in CI Mode
The CI Flow Control Module
When a CI system is installed along with a JetClean system, the MFC is shared
by both systems. By design, its use is restricted to one of these systems at a
time. In this case, the Gas B supply is dedicated to hydrogen used for source
cleaning. For detailed information on the JetClean system refer to the JetClean
Operating manual installed on your PC along with this manual.
Table 12 CI system MFC state
Result
Gas A flow
Gas A
Open
Gas B
Closed
MFC
On
setpoint
Shutoff valve
Open
The Open and Closed states are shown in the monitors as Opened and Closed.
138
Purge
Gas B flow
with Gas A
Closed
Open
Open
Closed
On
setpoint
On
100%
Open
Open
7000/7010 Series TQ GC/MS Operating Manual
Purge
Pump out
with Gas B
flow module
Closed
Closed
Open
Closed
On
100%
On
100%
Open
Open
Standby, vented,
or EI mode
Closed
Closed
Off
0%
Closed