MKS 332 Series Instruction Manual
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MKS 332 Series Instruction Manual

MKS 332 Series Instruction Manual

Ionization gauge controller
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Series 332
Series 332 Ionization Gauge Controller
Instruction Manual
Instruction manual part number 332004
Revision C - March 2020

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Summary of Contents for MKS 332 Series

  • Page 1 Series 332 Series 332 Ionization Gauge Controller Instruction Manual Instruction manual part number 332004 Revision C - March 2020...
  • Page 3 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual ® © 2020 MKS Instruments, Inc. All rights reserved. Granville-Phillips is a registered trademark, and mksinst is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.

  • Page 4: Table Of Contents

    Table of Contents Introduction & Safety Notices Receiving Inspection ....................... 6 International Shipment ......................6 Limited Warranty ........................6 Explosive Gases ........................7 Implosion / Explosion ......................7 Safety/Warning Notices ......................8 Grounding ..........................8 1.1 General Description ......................9 Available Options ......................
  • Page 5 Compression Mount (Quick Connect) ..............27 1/8 NPT Mount ....................27 NW10, 16, 25 and 40KF Flange Mount ............. 27 Gauge Cable Connections ................... 27 2.5 Operation ........................28 Special Considerations for Use Below 10 Torr ............28 Use with Gases other than N and Air ..............

  • Page 6: Introduction & Safety Notices

    MKS will, at its option, repair, replace, or refund the selling price of the product if it proves to be defective in materials or workmanship during the warranty period, provided the item is returned to MKS together with a written statement of the problem.

  • Page 7: Explosive Gases

    Read this instruction manual before installing, using, or servicing this equipment. If you have any doubts about how to use this equipment safely, contact MKS. DANGER, HIGH VOLTAGE 180 VDC is present in the 332 Controller, the gauge cable, and the ion gauge when the gauge is turned ON.

  • Page 8: Safety/Warning Notices

    MKS equipment. Refer to all Safety Instructions and Section 1.2, Installation, for additional information. If you have questions, or wish additional labels or literature, please contact one of our technical personnel.

  • Page 9: General Description

    Chapter 1 Series 332 Vacuum Gauge Controller 1.1 General Description The 332 Vacuum Gauge Controller (VGC) measures pressure from less than 1 x 10 Torr (1.3 x 10 mbar or 1.3 x 10 Pa) to 1 x 10 Torr, air equivalent, using a standard Bayard- Alpert ionization gauge.

  • Page 10: Ionization Gauge Types And Installation

    MKS offers 2 cable types for use with the 332 VGC. One has a standard connector for the Series 274 tubulated gauge tubes. One has individual pin sockets for use with non-standard pin configurations as well as with MKS "nude"...

  • Page 11: Ion Gauge Cable Connections

    Figure 1-2 shows typical tube base configurations used with the standard connector cables. Figure 1-2 Standard B-A Gauge Configurations Ion Gauge Cable Connections The 9-pin “D” I/O connector is used to operate the Bayard-Alpert ionization gauge and output the analog voltage corresponding to pressure. See Table 1-1. Instruction Manual 332004...

  • Page 12: System Ground Test Procedure

    Function Ion Gauge ON/OFF. A momentary ground (100 milliseconds minimum) will cause the filament circuit to change state. This can be either from an unpowered switch (or relay closure) or from a powered circuit which uses a pull up voltage of less than 50 Vdc. Ground Analog output +12 Vdc (for test purposes only)
  • Page 13 If ac or dc voltages exist and are less than 10 volts, shunt the meter with a 10 ohm, 10 watt resistor. Repeat the voltage measurement. With the shunt in place across the meter, if the voltage remains at 83% or more of the unshunted value, commonality of the grounds is implied.

  • Page 14: Operation

    1.3 Operation Ion Gauge Theory of Operation The functional parts of a typical ionization gauge are the filament (cathode), grid (anode) and ion collector, which are shown schematically in Figure 1-9. These electrodes are maintained by the gauge controller at +30, +180, and 0 volts, relative to ground, respectively. Figure 1-4 Ion Gauge Schematic The filament is heated to such a temperature that electrons are emitted and accelerated toward the grid by the potential difference between the grid and filament.

  • Page 15: Emission Current Adjustment

    electron emission and measures the ion current to the collector. The pressure is then calculated from these data. Ion gauge degas is accomplished by resistance heating (I R). During I R degas a large current is passed through the grid structure raising its temperature and driving off contaminants. Some ion gauge tube designs do not allow I R degas.

  • Page 16: Analog Output

    In such a situation one possibility is to set the emission current at 1/10 of the emission called for by Eq. 1, i.e., .67 mA for the assumed case, and remember to increase the indicated reading by a factor of 10. Under these assumptions a reading of 5 x 10 Torr for helium corresponds to a pressure of helium of 5 x 10 Torr.
  • Page 17 Figure 1-5 Analog Output in Vdc at 1.0 mA Emission Instruction Manual 332004...
  • Page 18 Figure 1-6 Analog Output in Vdc at 10 mA Emission Instruction Manual 332004...

  • Page 19: Overpressure Shutdown

    Overpressure Shutdown The 332 VGC is preset by fixed component values to shut down the ion gauge should pressure rise above 1 x 10 Torr at 1 mA emission or 1 x 10 Torr at 10 mA emission. Degas Degassing of the ion gauge is accomplished by I R heating of the grid utilizing a separate winding of the transformer.

  • Page 20: Summary

    approaches zero. For an accurate reading at very low pressures, set the current source for 1 x 10 A. Adjust the zero potentiometer, R19, for 2.00 V output. For a 10/Torr gauge, this will yield accurate results at 1 x 10 Torr with 1 mA emission.
  • Page 21 Degas R: 8 Vac, 10 A maximum. Maximum Cable Length 50 ft. with reduced degas power (16 AWG cable). Convectron Gauge Gauge Type MKS Series 275 ONLY Pressure Range 1 x 10 Torr to 1000 Torr, N equivalent Gas Type...
  • Page 22 Notes Instruction Manual 332004...

  • Page 23: General Description

    Chapter 2 ® Convectron Gauge Module 2.1 General Description The Convectron Gauge Module provides pressure measurement from 1.0 x 10 Torr (1.3 x 10 mbar or 1.3 x 10 Pa) to 1000 Torr, and one meaningful digit pressure indication down to 1 x 10 Torr, air equivalent.

  • Page 24: High Indicated Pressure

    argon is considerably above atmospheric pressure. Thus, if the indicated pressure is not accurately converted to true pressure, it is possible to over-pressure the vacuum system. Over-pressure may cause glassware such as ionization gauges to shatter dangerously, and if high enough may cause metal parts to rupture, thus damaging the system and possibly injuring personnel.

  • Page 25: Convectron Gauge Installation

    Figure 2-1 Simplified Schematic Convectron Gauge Module As the vacuum system pressure is decreased, there are fewer molecules in the system to conduct the heat away from the sensor wire causing the temperature and resistance of R1 to increase. The increased resistance of R1 causes the bridge to unbalance and a voltage is developed across the null terminals.

  • Page 26: Convectron Gauge Orientation

    install the gauge. 4. Do not mount the gauge in a manner such that deposition of process vapors upon the internal surfaces of the gauge may occur through line-of-sight access to the interior of the gauge. 5. Do not install the gauge where high amplitudes of vibration are present. Excessive vibration will cause forced convection at high pressure giving erroneous readings.

  • Page 27: Compression Mount (Quick Connect)

    The 332 Convectron gauge is designed to operate using standard Convectron cables from MKS Series 316 product line. These are available in standard lengths of 10, 15 and 50 ft. and as a variable length with a maximum of 500 feet. This cable provides the connections to power the gauge tube.

  • Page 28: Operation

    2.5 Operation Special Considerations for Use Below 10 Torr During a fast pumpdown from atmosphere, thermal effects will prevent the Convectron Gauge from tracking pressure rapidly below 10 Torr. After about 15 minutes readings in the 10 range will be valid and response will be rapid. Calibration at vacuum may be performed at this time, or sooner if readings in the 10 range are not needed.
  • Page 29 others. Therefore, it is not safe to attempt to use calibration curves supplied by other manufacturers for their gauges with a Convectron Gauge; nor is it safe to use curves for the Convectron Gauge with gauges supplied by other manufacturers. If you must measure the pressure of gases other than N or air, use Figures 2-3 through 2-5 to determine the maximum safe indicated pressure for the other gas as explained below.
  • Page 30 Figure 2-3 True Pressure vs. Indicated Pressure for Commonly used Gases: 10 to 10 Torr Instruction Manual 332004...
  • Page 31 Figure 2-4 True Pressure vs. Indicated Pressure for Commonly used Gases: 10 to 1000 Torr Instruction Manual 332004...
  • Page 32 Figure 2-5 True Pressure vs. Indicated Pressure for Commonly used Gases: 10 to 1000 Torr Instruction Manual 332004...

  • Page 33: Analog Output (Logarithmic)

    Analog Output (Logarithmic) An analog output jack is provided on the rear panel. This is a DC voltage proportional to the logarithm of the pressure, scaled to 1 volt per decade: 0 volts = 1 x 10 or less, Torr or mbar, 1 volt = 1 x 10 , etc.

  • Page 34: Calibration

    Figure 2-7 Convectron Gauge Pressure Nonlinear Output 2.6 Calibration Each Convectron Gauge is individually calibrated for N and air prior to shipment from the factory. The Convectron Gauge itself has a temperature compensated design. Each 332 Controller is also individually calibrated to provide accurate readout of N and air pressure with any calibrated Convectron Gauge.

  • Page 35: Atmosphere Adjustment

    Atmosphere Adjustment 1. Allow the system pressure to rise to atmospheric pressure of N or air. 2. Adjust the ATM potentiometer until the log output voltage agrees with the absolute pressure as read on an accurate barometer. Use absolute pressure, not corrected to sea level.

  • Page 36: General Description

    If the prescribed remedies do not correct the troubles, or if additional assistance or special parts are required, contact the MKS Technical Service Department, Phone: +1-833-986- 1686, or email: insidesales@mksinst.com.

  • Page 37: Troubleshooting

    3.2 Troubleshooting General Symptoms/Possible Causes Symptom Possible Causes No power indication No input power. Check to be sure the Convectron Gauge interconnect cable is properly attached to the gauge and the controller, and that the cable is not damaged. Bridge analog output Gauge tube failure.

  • Page 38: Convectron Gauge Bakeout Procedure

    Convectron Gauge Bakeout Procedure The Convectron Gauge can be baked to 150 C. Measure the temperature at the mounting flange of the Convectron Gauge. After the system has cooled down, reassemble the electronics and connect the cable(s). Cleaning a Convectron Gauge When the small sensor wire is contaminated with oil or other films, its emissivity or its diameter may be appreciably altered and a change of calibration will result.

  • Page 39: Technical Support And Service

    If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA. In some cases, a hazardous materials disclosure form may be required. The MKS Customer Service Representative will advise you if the hazardous materials document is required.
  • Page 40 Series 332 Series 332 Ionization Gauge Controller This Instruction Manual is for use with all 332 Ionization Gauge Controllers. Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at www.mksinst.com...

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