MKS Convectron 316 Series Instruction Manual
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MKS Convectron 316 Series Instruction Manual

MKS Convectron 316 Series Instruction Manual

Vacuum gauge controller
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Series 316
®
Convectron
Controller
Instruction Manual
Instruction manual part number 316059
Revision D - March 2020
Vacuum Gauge

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Summary of Contents for MKS Convectron 316 Series

  • Page 1 Series 316 ® Convectron Vacuum Gauge Controller Instruction Manual Instruction manual part number 316059 Revision D - March 2020...
  • Page 3 Instruction Manual © 2020 MKS Instruments, Inc. All rights reserved. Granville-Phillips and Convectron are registered trademarks, and mksinst is a trademark ® ® of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.
  • Page 4 ® Catalog numbers for Granville-Phillips ® Convectron Vacuum Gauge Controller 20316046 and 316035...

  • Page 5: Table Of Contents

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions Table of Contents Safety Section 1 - The 316 Vacuum Gauge Controller 1.1 Introduction ........... . 1-1 1.2 Available Configurations .
  • Page 6 Series 316 Vacuum Gauge Controller Installation and Operation Instructions Table of Contents (continued) 2.3.1 Reading Pressure ..........2-7 2.3.2 Special Considerations For Use Below 10 -3 Torr .
  • Page 7 Series 316 Vacuum Gauge Controller Installation and Operation Instructions Table of Contents (continued) Figure 2-8: Convectron Module Rear Panel ......2-17 Figure 2-9: Convectron Gauge Pressure Analog Output .
  • Page 8 Series 316 Vacuum Gauge Controller Installation and Operation Instructions P/N 316059...

  • Page 9: Section 1 - The 316 Vacuum Gauge Controller

    1.2.1 Convectron Gauge (CG) Module Permits pressure measurements from 1 x 10 to 999 Torr of N from up to three MKS Series 275 Convectron Gauges simultaneously provides analog output of each indicated pressure. 1.3 Installation 1.3.1 Line Voltage Selection Line voltages of 90-110 or 105-125 or 220-240 volts are user selectable via jumpers on the power supply PC board within the controller.

  • Page 10: Figure 1-1: Line Voltage Select Jumpers, Power Supply Pc Board

    The 316 Vacuum Gauge Controller FUSE HOLDER 115VAC 230VAC 100VAC CONN 115/230 115/230 115/230 100/ 100/ 100/ 100/ 100/ 100/ 316 POWER SUPPLY 009425-100 115/230 100/ 100/ LINE VOLTAGE Figure 1-1: Line Voltage Select Jumpers, Power Supply PC Board P/N 316059...

  • Page 11: Mounting Configurations

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 1.3.2 Mounting Configurations NOTE: The 316 controller should be mounted in a location with free air flow and ambient temperature less then 40 NOTE: Figure 1-2 illustrates the various configurations available for mounting the 316 control unit and power supply.

  • Page 12: Figure 1-2: Mounting Configurations

    The 316 Vacuum Gauge Controller REAR VIEW SIDE OF CONTROL UNIT CONTROL UNIT CONTROL UNIT 8-32X.25 SCREW (2X) MOUNTING EAR FRONT OF CONTROL UNIT 2 CONTROL UNIT MOUNTING ADAPTER CONTROL UNIT 1/2 RACK 11.0 307021 316001 316002 CONTROL UNIT CONTROL UNIT CENTER RACK BENCH MOUNT MOUNTING...

  • Page 13: Cable Connections

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 1.3.3 Cable Connections To avoid confusion in cable connections, a set of labels is provided with the cable. The labels are easily attached to the gauge connector with the adhesive backing. The rear panels of the Convectron and thermocouple modules are labeled with their respective display designations, A, B and C.

  • Page 14: Summary Of Controls And Indicators

    The 316 Vacuum Gauge Controller DO NOT MAKE DIRECT CHASSIS TO VACUUM SYSTEM CONNECTION! ION GAUGE CONTROLLER POWER DISTRIBUTION VACUUM SYSTEM BREAKER BOX FACILITY GROUNDING GROUNDING ELECTRODE WIRE SYSTEM NOTE : OTHER POWER LEADS ARE NOT SHOWN POWER COMMON OR SAFETY GROUNDING WIRE.

  • Page 15: Theory Of Operation

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 1.5 Theory of Operation 1.5.1 Microcontrollers and Bus Structure Each module in the 316 has a dedicated microcontroller with internal ROM, RAM, timing, and interrupt management functions. This architecture provides high-performance at low cost with greater reliability and noise immunity than more complicated microprocessor systems using external buses and memory.
  • Page 16 The 316 Vacuum Gauge Controller Some minor difficulties are user correctable, and the built-in diagnostic aids described here may be helpful. Each module has status LEDs which will aid in localizing failures. These are described in the troubleshooting section of the chapters for each module.

  • Page 17: Figure 1-6: Power Supply Board Top View

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions Table 1-1: 316 VGC Troubleshooting Symptom Possible Cause Unit won't power-up, no response to Power fuse 17 blown.* power switch. Power fuse 17 blows repeatedly.* 1. Wrong line voltage selection, see Figure 1-1. 2.

  • Page 18: Service Guidelines

    Customer Service Representative will advise you if the hazardous materials docu- ment is required. When returning products to MKS, be sure to package the products to prevent ship- ping damage. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility.

  • Page 19: Table 1-3: 316 Vgc Electrical Specifications

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions Table 1-3: 316 VGC Electrical Specifications Parameter Value Voltage 90-110 VAC or 105-125 VAC Frequency 50 or 60 Hz Power 100 watts max. Fuse Ratings 0.5 A (90-125 VAC), 3AG normal blow 0.25 A (220-240 VAC), 3AG normal blow P/N 316059 1-11...
  • Page 20 The 316 Vacuum Gauge Controller 1-12 P/N 316059...

  • Page 21: Section 2 - The Convectron Gauge Module

    Safety pays. Read this instruction manual before installing, using, or servicing this equipment. If you have any doubts about how to use this equipment safely, contact MKS. 2.1.2 Explosive Gases Do not use the gauge tube when there is danger of explosion from ignition of combustible gas mixtures.

  • Page 22: High Indicated Pressure

    The Convectron Gauge Module such as argon or CO , unless accurate conversion data for N to the other gas is properly used. If accurate conversion data is not used or improperly used, a potential overpressure explosion hazard can be created under certain conditions.

  • Page 23: Tube Contamination

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 2.1.9 Tube Contamination The calibration of the gauge will be seriously affected by any gas which will attack the gold plated sensor, and could result in over pressurizing the system. Two primary gases in this category are mercury vapor and fluorine.

  • Page 24: Gauge Tube Orientation

    The Convectron Gauge Module WARNING When high voltages are used within the vacuum system and the Convectron Gauge envelope is not reliably grounded through its vacuum connection, either a separate ground wire must be added, or the envelope must be shielded to positively prevent human contact. The gauge envelope may be grounded by using a metal hose clamp on the gauge connected by a #12 AWG copper wire to the grounded vacuum chamber.

  • Page 25: Figure 2-1: Convectron Gauge Mounting

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 2.2.3.1 Below 1 Torr The gauge tube will operate and accurately measure pressure below 1 Torr when mounted in any orientation. 2.2.3.2 Above 1 Torr The gauge tube will accurately measure pressures above 1 Torr only when mounted with its axis horizontal, preferably with the port pointing vertically downward, as shown in Figure 2-1.

  • Page 26: Compression Mount (Quick Connect)

    The Convectron Gauge Module 2.2.4 Compression Mount (Quick Connect) CAUTION Do not use for positive pressure applications. The gauge tube port is designed to fit a standard 1/2 in. compression (quick ® ® connect) mount such as the Cajon Co. Ultra-Torr fittings.

  • Page 27: Convectron Operation

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 2.3 Convectron Operation 2.3.1 Reading Pressure WARNING If used without proper calibration or without reference to proper calibration tables, Convectron gauges can supply misleading pressure indications. This may result in dangerous overpressure conditions within the system.

  • Page 28: Indicated Vs. True Pressure Curves

    The Convectron Gauge Module 2.3.3 Use With Gases Other Than N and Air Before using the Convectron gauge to measure the pressure of other gases make certain the ATM adjustment is correctly set for air. See Section 2.5. It is important to understand that the indicated pressure on a Convectron gauge depends on the type of gas in the tube, and on the orientation of the tube axis as well as on the gas pressure in the tube.

  • Page 29: Example 1 - Maximum Safe Indicated Pressure

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions A useful interpretation of these curves is, for example, that at a true pressure of 2 x 10 Torr of CH the heat loss from the sensor is the same as at a pressure of 3 x 10 Torr of N (see Figure 2-2).

  • Page 30: Example 3 - True To Indicated Pressure Conversion

    The Convectron Gauge Module 2.3.7 Example 3 - True to Indicated Pressure Conversion Assume you wish to set a process control setpoint at a true pressure of 20 Torr of CO . On Figure 2-3, locate 20 Torr on the true pressure scale, travel horizontally to the right to the CO curve and then down to an indicated pressure of 6.5 Torr (N...

  • Page 31: Figure 2-2: Indicated Pressure Of A Convectron Gauge (1 To 100 Mtorr)

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions Figure 2-2: Indicated Pressure of a Convectron Gauge (1 to 100 mTorr) P/N 316059 2-11...

  • Page 32: Figure 2-3: Indicated Pressure Of A Convectron Gauge (0.1 To 1000 Torr)

    The Convectron Gauge Module Figure 2-3: Indicated Pressure of a Convectron Gauge (0.1 to 1000 Torr) 2-12 P/N 316059...

  • Page 33: Figure 2-4: Indicated Pressure Of A Convectron Gauge (0.1 To 1000 Torr)

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions Figure 2-4: Indicated Pressure of a Convectron Gauge (0.1 to 1000 Torr) P/N 316059 2-13...

  • Page 34: Figure 2-5: Indicated Pressure Of A Convectron Gauge (10-3 To 10-1 Mbar)

    The Convectron Gauge Module Figure 2-5: Indicated Pressure of a Convectron Gauge (10 to 10 mbar) 2-14 P/N 316059...

  • Page 35: Figure 2-6: Indicated Pressure Of A Convectron Gauge (0.1 To 1000Mbar)

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions Figure 2-6: Indicated Pressure of a Convectron Gauge (0.1 to 1000mbar) P/N 316059 2-15...

  • Page 36: Figure 2-7: Indicated Pressure Of A Convectron Gauge (0.1 To 1000 Mbar)

    The Convectron Gauge Module Figure 2-7: Indicated Pressure of a Convectron Gauge (0.1 to 1000 mbar) 2-16 P/N 316059...

  • Page 37: Example 4 - True To Indicated Pressure Conversion

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 2.3.8 Example 4 - True to Indicated Pressure Conversion Assume you wish to obtain a helium pressure of 100 Torr in the system. On Figure 2-3, locate 100 Torr on the left hand scale, travel horizontally to the right to attempt to intersect the He curve.

  • Page 38: Convectron Calibration And Maintenance

    The Convectron Gauge Module 10 3- 10 3 ANALOG OUTPUTS (IN VOLTS) Figure 2-9: Convectron Gauge Pressure Analog Output 2.5 Convectron Calibration and Maintenance Each gauge tube is individually calibrated for N and air prior to leaving the factory. The Convectron gauge tube itself has a temperature compensated design.

  • Page 39: Zero Adjustment

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 2.5.1 Zero Adjustment 1. Evacuate the system to a pressure less than 1 x 10 Torr. 2. With the gauge tube operating, adjust the VAC pot until 0.0 0 shows in the display. NOTE: If the adjustment is turned too far below zero, a minus sign will appear before the exponent (0.0 -0).

  • Page 40: Analog Output Full Scale Adjustment

    The Convectron Gauge Module 2.5.3 Analog Output Full Scale Adjustment This potentiometer may be adjusted to calibrate the span of the analog output voltage to the factory setting of 1 volt per decade. This adjustment is common to both outputs. 2.5.4 Analog Output Offset These potentiometers provide adjustable offset voltages to each analog output.

  • Page 41: Cleaning The Gauge Tube

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 2.6 Cleaning the Gauge Tube The Convectron gauge may be baked to 150 C. See Section 2.5 for a list of materials exposed to vacuum. When the fine sensor wire is so contaminated with oil or other films that its emissivity or diameter is appreciably altered, a change of calibration will result.

  • Page 42: Theory Of Operation

    The Convectron Gauge Module 2.7 Theory of Operation The Convectron transducer is represented in Figure 2-12 as R1, R2, R3, and R4. These four resistances form the legs of a bridge circuit, with R1 designating the sensor wire of the transducer. R2 is a resistive network in the tube which compensates for changes in the ambient temperature.

  • Page 43: Convectron Troubleshooting

    Series 316 Vacuum Gauge Controller Installation and Operation Instructions 2.8 Convectron Troubleshooting 2.8.1 Transducer Test Procedure Do not perform electrical continuity tests with instruments applying in excess of 1 volt when the tube is at vacuum, or 5 volts when at atmospheric pressure.
  • Page 44 The Convectron Gauge Module Table 2-3: Convectron Troubleshooting Guide Symptom Possible Cause Indicator 38 lit or flashing.** A/D integration failure. Display reads 9.99 +9. Broken sensor wire. Display reads -. Tube or cable at controller unplugged. Pressure reading very inaccurate. Controller out of calibration, unknown gas type, tube mounted in the wrong orientation, sensor damaged (e.g., by reactive gas), tube very dirty,...
  • Page 45 Series 316 Vacuum Gauge Controller Installation and Operation Instructions CGB OVERCURRENT BRIDGE CIRCUIT GAUGE UNPLUGGED uP FAILURE A/D FAILURE mBAR mBAR PASCAL PASCAL SLOW UPDATE SLOW UPDATE ANALOG OUT ANALOG OUT FULL SCALE FULL SCALE ANALOG OUT CGA ANALOG OUT OFFSET OFFSET CGB &...
  • Page 46 The Convectron Gauge Module CONNECTOR CG B CONNECTOR (ALSO CG A SINGLE CHANNEL MODELS) CG C CONNECTOR GAUGE B CG B (OR CG A) Figure 2-14: Convectron Cable Wiring (Single Filament) 2-26 P/N 316059...
  • Page 47 Series 316 Vacuum Gauge Controller Installation and Operation Instructions CONNECTOR CG B CONNECTOR (ALSO CG A SINGLE CHANNEL MODELS) CG C CONNECTOR GAUGE B CG B (OR CG A) CONVECTRON GAUGE C CG C Figure 2-15: Convectron Cable Wiring (Dual Filament) P/N 316059 2-27...

  • Page 48: Convectron Specifications

    The Convectron Gauge Module 3.0 Convectron Specifications Table 2-4: Convectron Specifications Parameter Specification Gauge Type GP Series 275 Pressure Range 1 x 10 Torr to 990 Torr, N equivalent. Gas Type , Air Analog Output Logarithmic, 1V/decade, Factory set to 0-7 V. Adjustable offset +1 V to -7 V.
  • Page 50 Series 316 ® Convectron Vacuum Gauge Controller Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual Instruction manual part number 316059...

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