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- Page 1 117082-P1 Rev D, 1/98 Instruction Manual MKS Type 653B Exhaust Throttle Valve Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
- Page 2 For the period commencing with the date of shipment of this equipment and ending two years later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
- Page 3 117082-P1 Rev D, 1/98 MKS Type 653B Exhaust Throttle Valve...
- Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 5: Table Of Contents
Table of Contents Table of Contents Valve Safety Information ....................... 1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Chapter One: General Information..................5 Introduction ....................... 5 How This Manual is Organized.................. 6 Customer Support ...................... - Page 6 Table of Contents Safety Precautions ..................21 Cleaning the Valve.....................22 Appendix A: Product Specifications..................23 General Specifications....................23 Appendix B: ASA Series Flange Specifications ..............25 Appendix C: ISO-NW Series Flange Specifications ...............27 Appendix D: CF Series Flange Specifications ................29 Appendix E: JIS Series Flange Specifications ................31 Index ............................33...
- Page 7 List of Figures and Tables List of Figures and Tables Figures Figure 1: Outline Dimensions of the Motor Driver Assembly ..........9 Figure 2: Outline Dimensions of an ASA Series Flange............10 Figure 3: Outline Dimensions of a CF Series Flange ............. 11 Figure 4: Outline Dimensions of an ISO-NW Series Flange ..........
- Page 8 List of Figures and Tables...
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Page 9: Valve Safety Information
Valve Safety Information Symbols Used in This Instruction Manual Valve Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 10: Symbols Found On The Unit
Symbols Found on the Unit Valve Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017 IEC 417, No.5008... -
Page 11: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 12 Safety Procedures and Precautions Valve Safety Information DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All valve fittings must be consistent with valve specifications, and compatible with the intended use of the valve.
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Page 13: Chapter One: General Information
Chapter One: General Information Introduction The Type 653B Exhaust Throttle Valve is designed for a wide range of pressure control conductance and has the high torque rating necessary for sealing-type and large-size valves. The 653’s motor and gear/driver assembly combined with the Type 651, Type 1651 or Type 652B Self-Tuning Controller, provides fast and precise pressure control over the entire operating range of the valve. -
Page 14: How This Manual Is Organized
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. -
Page 15: Chapter Two: Installation
Chapter Two: Installation How To Unpack the Type 653 Unit MKS has carefully packed the Type 653 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. -
Page 16: Environmental Requirements
23. Specific requirements of the available flange types are provided in Appendices B through E, on pages 25 through 31. Setup MKS products are designed and tested to provide the highest degree of safety attainable. To use your MKS valve safely, you must always conform to the following instructions: Warning The moving parts in the valve create a risk of personal injury until the valve is securely incorporated into a system. -
Page 17: Choosing A Pressure Controller
Chapter Two: Installation Flange Types Choosing A Pressure Controller The 653 valve works with the following pressure controllers: • Type 651 (any revision) • Type 1651 (any revision) • Type 652 (Revision B or later) Note Revision A of the 652 controller does not support the 653 valve. 3.95 Dia. -
Page 18: Asa Series Flanges
Flange Types Chapter Two: Installation ASA Series Flanges Total O-Ring Groove O-Ring Model Size Height Width Depth - 2 - 2 - 1 1 . 8 8 6 3 . 3 6 5 5 . 9 5 6 . 1 6 . -
Page 19: Cf Series Flanges
Chapter Two: Installation Flange Types CF Series Flanges Total CF Size Model No. Height 1.270 2.75 4.18 30° 10.24 -1-2CF-1 2.312 2-3/4" 1.00 (106) (32) (70) (6.8) -1-2CF-2 (59) (25) (260) .779 -20-2CF-1 -20-2CF-2 (20) 3.25 4.68 2.850 10.74 1.886 22°30' 3-3/8"... -
Page 20: Iso-Nw Series Flanges
Flange Types Chapter Two: Installation ISO-NW Series Flanges Model No. Total Height 653 -60-63-1 2.360 5.95 6.16 0.35 4.330 45º NW-63 12.22 653 -60-63-2 (60) (151) (157) (110) (25) (310) 653 -3-80-1 2.886 5.95 6.16 4.920 22.5º NW-80 12.22 653 -3-80-2 (73) (151) (157) -
Page 21: Jis Series Flanges
Chapter Two: Installation Flange Types JIS Series Flanges Model No. J O-Ring Groove O-Ring Total I.D. Width Depth Size Height 653 -2-50J-1 1.886 4.47 5.906 0.39 3.937 45º 2.766 0.197 0.118 2.756 x 0.157 1.00 11.97 653 -2-50J-2 (48) (114) (150) (10) (100) -
Page 22: Kf Series Flanges
Flange Types Chapter Two: Installation KF Series Flanges Total Model No. Height 10.25 2 . 7 5 2 . 1 6 1 . 2 5 2 . 2 5 K F - 4 0 4 0 - 1 0.870 0.779 6 5 3 (260) ( 7 0 ) -
Page 23: Interface Cables
January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE Mark. -
Page 24: Generic Shielded Cable Description
Interface Cables Chapter Two: Installation Generic Shielded Cable Description Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. -
Page 25: Interface Connector
Chapter Two: Installation Interface Connector Interface Connector The pinout of the 9 -pin Type “D” Interface connector is shown in Table 8. Interface Connector Pinout Pin Number Signal Motor Winding A Motor Winding A' Limit Switch Common Open Limit Switch Closed Limit Switch Motor Winding B Motor Winding B'... - Page 26 Interface Connector Chapter Two: Installation This page intentionally left blank.
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Page 27: Chapter Three: Operation
Chapter Three: Operation Theory of Operation Chapter Three: Operation Theory of Operation The 653 Exhaust Throttle Valve is one of three components in a closed loop, downstream pressure control system. When coupled with a smart self tuning controller, such as the 651 ... -
Page 28: General Operation Information
General Operation Information Chapter Three: Operation General Operation Information The Type 653 valve is controlled by the Type 651, 1651, or 652B pressure controller, and instructions for operation are included in those manuals. There is no warm-up time required for the valve. -
Page 29: Chapter Four: Maintenance
The Type 653 valve, in particular, must be purged of all contaminants. Safety Precautions MKS products are designed and tested to provide the highest degree of safety attainable. To use your MKS valve safely, you must always conform to the following instructions: Warning The moving parts in the valve create a risk of personal injury until the valve is securely incorporated into a system. -
Page 30: Cleaning The Valve
Do not dip the motor or switches in cleaning fluid. Inspect all parts for damage - nicks, dents, wear, distortion and corrosion. If any parts appear to be damaged, contact MKS for repair or replacement. Polish wetted surfaces to remove stains, paying particular attention to O-ring sealing surfaces. -
Page 31: Appendix A: Product Specifications
General Specifications CE Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Machinery Directive 89/392/EEC Machinery Compatible Controllers MKS Type 651, 1651, 652 (Revision B or later) Speed (open to close) 1.7 seconds Resolution 1/12,000 Valve body operating temperature Standard: 0° to 100° C Optional: 0°... - Page 32 General Specifications Appendix A: Product Specifications This page intentionally left blank.
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Page 33: Appendix B: Asa Series Flange Specifications
Appendix B: ASA Series Flange Specifications General Specifications Appendix B: ASA Series Flange Specifications... - Page 34 General Specifications Appendix B: ASA Series Flange Specifications This page intentionally left blank.
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Page 35: Appendix C: Iso-Nw Series Flange Specifications
Appendix C: ISO-NW Series Flange Specifications General Specifications Appendix C: ISO-NW Series Flange Specifications... - Page 36 General Specifications Appendix C: ISO-NW Series Flange Specifications This page intentionally left blank.
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Page 37: Appendix D: Cf Series Flange Specifications
Appendix D: CF Series Flange Specifications General Specifications Appendix D: CF Series Flange Specifications... - Page 38 General Specifications Appendix D: CF Series Flange Specifications This page intentionally left blank.
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Page 39: Appendix E: Jis Series Flange Specifications
Appendix E: JIS Series Flange Specifications General Specifications Appendix E: JIS Series Flange Specifications... - Page 40 General Specifications Appendix E: JIS Series Flange Specifications This page intentionally left blank.
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Page 41: Index
Index Index ASA Series flanges, 10, 25 Maintenance, 22 Manual, organization, 6 Cables, 15 CE compliance, 15, 23 Operating temperature, 8 CF Series flanges, 11, 29 Operation, general, 20 Connector, 17 Construction, material, 5 Pressure controller, 5, 9, 19, 23 Controller, 5, 19, 23 Customer support, 6 Requirements, environmental, 8...
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