MKS 651D Series User Manual
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MKS 651D Series User Manual

MKS 651D Series User Manual

Pressure controller
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118965-P1
Preliminary, 5/02
MKS Type 651D
Pressure Controller

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  • Page 1 118965-P1 Preliminary, 5/02 MKS Type 651D Pressure Controller...
  • Page 2 MKS Instruments, Inc. ® Baratron is a registered trademark of MKS Instruments, Inc., Andover, MA This manual is for firmware version: pre-release...

  • Page 3: Table Of Contents

    Table of Contents Table of Contents Safety Information........................1 Symbols Used in This Instruction Manual ..............1 Symbols Found on the Unit..................2 Safety Procedures and Precautions ................3 Chapter One: General Information..................5 Introduction .......................5 How This Manual is Organized...................6 Customer Support ......................7 Chapter Two: Installation.......................9 How To Unpack the Type 651 Unit................9 Unpacking Checklist ..................9 Product Location and Requirements ................10...
  • Page 4 Table of Contents RS-232 Serial Interface Connector..............20 Interface (I/O) Connector ................21 Transducer Connector ................... 23 Valve Connector.................... 24 Chapter Three: Overview ...................... 25 Control Mode......................25 Gain and Phase....................25 Set Points........................28 Softstart Rates......................28 Process Limit Relays ....................29 Front Panel Components....................
  • Page 5 Table of Contents Labels.........................37 Voltage and Fuse Label..................37 Serial Number Label ..................37 Attention Label ....................37 Chapter Four: Local Operation....................39 General Information ....................39 Startup........................40 Optional Valve Failsafe Battery Back-Up ............40 How To Check the Battery Voltage ..............42 Setup..........................43 How to Select and Calibrate the Valve............43 How To Set the Operating Parameters............43 How To Adjust the Set Point Parameters............51 Operation ........................59...
  • Page 6 Table of Contents How To Set the Backfill Threshold Pressure Value........77 How To Set the Valve Position Signal Output Range........77 How To Set the Valve Battery Back-Up Control ..........77 How To Read the Sensor Type..............79 How To Set the Sensor Signal Input Range ........... 80 How To Set the Sensor Range ...............
  • Page 7 Table of Contents How To Select the Digital Input Functions ..............111 How To Set the Analog Set Point Inputs ............113 Digital Input Priorities..................114 How To Select the Digital Output Functions...............115 How To Activate the Softstart Rate................117 Chapter Seven: Maintenance and Troubleshooting..............119 General Information ....................119 Maintenance .......................119 How to Replace the Fuses ................119...
  • Page 9 List of Figures List of Figures Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable....15 Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable ....15 Figure 3: Line Voltage Selector ....................17 Figure 4: Gain Set Too High....................
  • Page 11 Safety Information Symbols Used in This Instruction Manual List of Tables Table 1: Definition of Symbols Found on the Unit..............2 Table 2: Transducer Current Available................... 11 Table 3: System Interface Cables.................... 12 Table 4: Adapter Cables ......................13 Table 5: Power and Fuse Requirements ................. 16 Table 6: Rear Panel Connector Slot Labels................

  • Page 13: Safety Information

    Safety Information Symbols Used in This Instruction Manual Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 14: Symbols Found On The Unit

    Symbols Found on the Unit Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5017 IEC 417, No.5019 IEC 417, No.5008...

  • Page 15: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY CONTROLLER Do not install substitute parts or perform any unauthorized modification to the controller. Return the controller to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 16 Safety Procedures and Precautions Safety Information USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors, or between either of the supply conductors and ground, than that specified in the manual.

  • Page 17: Chapter One: General Information

    651 controller. The 100° C temperature-controlled, linear Baratron transducers are compatible with the high power unit. Refer to Product Compatibility, page 11, for a complete listing of the MKS products that are compatible with the 651 controller.

  • Page 18: How This Manual Is Organized

    How This Manual is Organized Chapter One: General Information How This Manual is Organized This manual is designed to provide instructions on how to set up, install, and operate a Type 651 unit. Before installing your Type 651 unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual.

  • Page 19: Customer Support

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your controller. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.
  • Page 20 Customer Support Chapter One: General Information This page intentionally left blank.

  • Page 21: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the Type 651 Unit MKS has carefully packed the Type 651 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.

  • Page 22: Product Location And Requirements

    Includes an I/O connector for the rear panel of the unit, a cover for the I/O connector, and a screwlock assembly for the I/O connector cover • MKS Type 253 (fast or standard) or 653 control valve • Valve Failsafe Battery Back-Up (factory installed) •...

  • Page 23: Product Compatibility

    Chapter Two: Installation Product Compatibility Product Compatibility Valves MKS downstream control valves compatible with the 651 unit include: • Types 253 and 653 Transducers MKS transducers compatible with the low power 651 unit include: • Types 121, 122, 124, 127, 128 , 220, 223, 622, 626, 627, and 628.

  • Page 24: Interface Cables

    January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE mark.

  • Page 25: Adapter Cables

    Type “D” connectors on the 651 controller to your unit. The required adapter cables are listed in Table 4. Adapter Cables From Use the MKS Cable... Standard Shielded 651 I/O...

  • Page 26: Generic Shielded Cables

    Chapter Two: Installation Generic Shielded Cables MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 27: Figure 1: Preferred Method To Connect An Overall Metal Braided Shielded Cable

    Chapter Two: Installation Interface Cables Example 1: Preferred Method To Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary)

  • Page 28: Setup

    Setup Chapter Two: Installation Setup Mounting Instructions The 651 unit can be mounted in either a panel cutout or in one of the rack mount options (refer to Optional Equipment, page 10). Position the unit with proper clearance, to allow air cooling, so that the unit can operate within the specified temperature range.

  • Page 29: Grounding

    Chapter Two: Installation Setup Grounding For protective earthing, plug the power cord into a properly grounded outlet. How To Set the Line Voltage The line voltage selector, located on the rear panel of the 651 unit (refer to Figure 9), configures the 651 unit to accept either 115 or 230 VAC input voltage The Line Voltage Selector on the 651 unit must be set to the proper Caution...
  • Page 30 Setup Chapter Two: Installation Warning Be sure that your 651 unit is plugged into the correct AC outlet for the selected line voltage. Plugging a unit with 115V line voltage into a 230 V outlet will damage the controller!

  • Page 31: Connectors

    Chapter Two: Installation Connectors Connectors Rear Panel Connectors The 651 controller has five Type “D” connectors on its rear panel (refer to Figure 9, page 32). The connectors are numbered, from right to left as 1 to 4, as listed in Table 6. Rear Panel Connector Slot Labels Slot Number Type “D”...

  • Page 32: Rs-232 Serial Interface Connector

    The 9-pin male Type “D” Serial Interface connector is used to connect the 651 unit to a computer, providing an interface for RS-232 communications. Caution You must use the MKS cable CB651S-10-10 to make the connection from the 651 unit’s 9-pin serial port to a computer’s 9-pin serial port.

  • Page 33: Interface (I/O) Connector

    Chapter Two: Installation Connectors Interface (I/O) Connector The 37-pin female Type “D” Interface (I/O) connector provides access to the set points, process relay limits, softstart control, and the valve control functions. Interface Connector Pinout Pin Number Assignment Pin Number Assignment PLO 1 - NC contact PLO 1 - common contact PLO 1 - NO contact...

  • Page 34: Table 8: Interface Connector Pinout

    Connectors Chapter Two: Installation transducer, connect the negative analog set point (pin 34) to analog ground (pin 35). Table 8: Interface Connector Pinout...

  • Page 35: Transducer Connector

    Chapter Two: Installation Connectors Transducer Connector The 15-pin female Type “D” connector is used to connect the 651 unit to a transducer. The upper, 15-pin ‘D’ connector, is for the High Range pressure sensor. The lower, 15-pin Hi-Density ‘D’, is for the Low Range pressure sensor Both pressure sensor connectors use the same pinout shown below.

  • Page 36: Valve Connector

    Connectors Chapter Two: Installation Valve Connector The 9-pin female Type “D” Valve connector allows you to connect the 651 controller to either a 653 or 253 throttle valve. Valve Connector Pinout Pin Number Assignment Motor winding A low Motor winding A high Limit switch ground Open limit switch signal Closed limit switch signal...

  • Page 37: Chapter Three: Overview

    Chapter Three: Overview Control Mode Chapter Three: Overview Control Mode The 651 controller can control a vacuum system using the PID control mode. In the PID mode, the 651 controller uses a Proportional, Integral, and Derivative (PID) algorithm for control, which requires you to input two (gain and phase) values. Each set point uses its own gain and phase value to optimize the response from set point to set point.

  • Page 38: Figure 4: Gain Set Too High

    Control Mode Chapter Three: Overview Phase The phase provides a control signal that is proportional to the integral of the error signal. This phase is responsible for allowing the controller to track the set point with zero steady state error. If the phase is too low, the pressure will overshoot the set point before settling in (refer to Figure 5).

  • Page 39: Figure 6: Phase Set Too High

    Chapter Three: Overview Control Mode Gain Gain provides a control signal that is directly proportional to the error signal. The error signal is the difference between the actual pressure and the set point. This gain is responsible for controlling how quickly the pressure responds to a change in set point. A large gain generally results in a faster response to set point.

  • Page 40: Set Points

    Set Points Chapter Three: Overview Set Points The 651 controller has five internal set points (A to E) and is capable of accepting one analog set point through the Interface connector on the rear panel. The unit controls the system based on the value of the “active”...

  • Page 41: Process Limit Relays

    Chapter Three: Overview Process Limit Relays Process Limit Relays There are two process limit (PLO) relays in the 651 controller. Each relay has a high and a low trip limit. Refer to Table 8, for the Interface connector pinout, to determine which pins are for relay 1, and which are for relay 2.

  • Page 42: Front Panel Components

    Front Panel Components Chapter Three: Overview Front Panel Components Valve Position Control Keys Display Window Type 651 Pressure Controller Point Set Point Selection Valve Stop Keys Remote Parameters Learn Open Local Zero Close Select Adjust Key Lock Arrow Keys Adjust Sensor Learn Switch...

  • Page 43: Arrow Keys

    Chapter Three: Overview Front Panel Components Arrow Keys The up arrow key [ ] is used to display the next screen in the open menu. The down arrow key [ ] is used to display the previous screen in the open menu. Adjust Knob The adjust knob, which turns clockwise and counterclockwise, is used to select a parameter value.

  • Page 44: Rear Panel Components

    Rear Panel Components Chapter Three: Overview Rear Panel Components Valve Transducer RS-232 Serial Line Voltage Connector Connectors Interface Connector Selector Switch Interface I/O Power On/Off Fuse Holder Connector Switch Figure 9: Rear Panel of the 651 Controller Valve Connector - Slot 4 The 9-pin female Type “D”...

  • Page 45: Line Voltage Selector Switch

    Chapter Three: Overview Line Voltage Selector Switch This switch sets the unit to operate at either 115 VAC or 230 VAC. Refer to How To Set the Line Voltage, for more information. Fuse Holder This housing holds the unit’s two fuses. The fuse values are listed in Table 5, page 16. Refer to How to Replace the Fuses, page 127, for more information.

  • Page 46: Optional Valve Failsafe Battery Back-Up

    When in a disabled state, backup power is not provided. In most cases this means that the value doesn’t move, but this is not guaranteed. This battery is a rechargeable, 12 Volt, 2 amp-hour, sealed lead-acid battery (MKS part no. 003-1109451). If the battery backup is installed, an...

  • Page 47: Threshold Voltage Check

    Chapter Three: Overview Optional Valve Failsafe Battery Back-Up If for any reason the controller cannot open or close the valve within 30 Note seconds of a power failure, the battery back-up module automatically turns off. This prevents the battery from discharging when no valve is present or if the valve is defective in some way.

  • Page 48: Battery Storage

    Optional Valve Failsafe Battery Back-Up Chapter Three: Overview Battery Storage The lead-acid battery loses its capacity if it is stored with no power connected. In fact, the higher the ambient temperature, the faster the capacity is lost. Table 12 lists the time it takes for the battery to fall to fifty percent of its full capacity at various ambient temperatures.

  • Page 49: Labels

    CE mark signifying compliance with the European CE regulations. Serial #: 0123456789 Model #: 651DXYZCD MKS Instruments, Inc. Made in the USA Figure 11: Serial Number Label The model code is identified as “651DXYZCD.” Refer to Appendix B: Model Code Explanation, page 133, for more information.
  • Page 50 Labels Chapter Three: Overview This page intentionally left blank.

  • Page 51: Chapter Four: Local Operation

    Chapter Four: Local Operation General Information Chapter Four: Local Operation General Information Local operation of the 651 controller is achieved by using the controls on the front panel of the controller. There are three main software menus, accessed through the front panel that allow you to configure the system.

  • Page 52: Startup

    Startup At initial power up, the display screen appears for about five seconds, listing the current software/firmware version (refer to Figure 12). MKS TYPE 651D V 1.0 Figure 12: Initial Display Screen The system then advances to its default Pressure and Position display (refer to Figure 13) and is ready for valve connection and setup (or normal operation once the system has been configured).

  • Page 53: Figure 14: Battery Voltage Low Message

    Chapter Four: Local Operation Startup Battery Voltage Out-of-Range If the battery voltage is out-of-range, the controller revision and the current software/firmware version appear on the front panel display for about five seconds (refer to Figure 12), followed by the appropriate error message, rather than advancing to the default Pressure and Position display screen).

  • Page 54: How To Check The Battery Voltage

    Startup Chapter Four: Local Operation How To Check the Battery Voltage Note Refer to Optional Valve Failsafe Battery Back-Up for more information. To be sure that the 651 unit has recognized the optional battery back-up module, or to view the actual battery voltage and the current valve configuration without entering the software menus (regardless of whether you are using Local or Remote operation): 1.

  • Page 55: Setup

    Chapter Four: Local Operation Setup Setup How to Select and Calibrate the Valve The 651 controller works with the 253 or 653 valve. Choose the appropriate valve and connect it to the 651 unit (refer to the valve manual if necessary). Caution The procedure for calibrating (learning) the valve involves cycling the valve from the open to the close position.
  • Page 56 Setup Chapter Four: Local Operation Settings stored in non-volatile RAM are saved when the power is turned off. When the power is restored, the 651 unit “remembers” the latest configuration, not the initial configuration. To enter the Setup Menu to configure the operating parameters: 1.
  • Page 57 Chapter Four: Local Operation Setup 4. Press the [ ] key to advance to the next screen. The screen displays: DELIMITER: CRLF Select the delimiter from the options of CRLF (carriage return/line feed - initial) or CR (carriage return). 5. Press the [ ] key to advance to the next screen.

  • Page 58: Table 13: Full Scale Sensor Ranges

    Setup Chapter Four: Local Operation Full Scale Sensor Ranges Torr mBar .10000 .20000 .5000 1.0000 1.3332 2.0000 2.6664 5.000 10.000 13.332 20.000 50.00 100.00* 133.32 200.00 500.0 1000.0 1333.2 5000 6666 10000 13332 *Initial setting Table 13: Full Scale Sensor Ranges To view the range of a sensor in pressure units of mBar for a sensor calibrated in Torr, select the equivalent mBar unit of measure.
  • Page 59 Chapter Four: Local Operation Setup Select the pressure units for the 651 controller display from the options of Torr (initial), mTorr, mBar, µBar, kPa, Pa, cmH O, and inH 8. Press the [ ] key to advance to the next screen. The screen displays: CHANNEL SELECT: AUTO...
  • Page 60 Setup Chapter Four: Local Operation 11. Press the [ ] key to advance to the next screen. The screen displays: VALVE SIGNAL OUTPUT: 10 VOLTS Select the full scale voltage range for the valve position signal (analog) output from the options of 5 Volts or 10 Volts (initial).
  • Page 61 Chapter Four: Local Operation Setup SOFT START RATE ANLG SETPT: 100% Set the softstart rate for the analog set point to any value from 0.1% (slowest) to 100% (fastest - initial) of full scale. If it is not necessary to use softstart control in your process, leave the softstart rate at the initial setting of 100%.
  • Page 62 Setup Chapter Four: Local Operation 19. Press the [ ] key to advance to the next screen. The screen displays: BATTERY 13.5V BACK-UP: OPEN Note This screen only appears if the valve failsafe battery back-up option is installed in your 651 controller. The screen displays the actual voltage level of the battery along with the position the valve is currently set to drive to upon a power loss.

  • Page 63: How To Adjust The Set Point Parameters

    Chapter Four: Local Operation Setup How To Adjust the Set Point Parameters The set point parameters include the internal set points (A to E), gains and phases, two process limit relays (each with high and low trip levels), and the external analog set point. The software menu screens for setting the set point parameters varies slightly, depending on your system’s configuration.
  • Page 64 Setup Chapter Four: Local Operation PID Control with Pressure Set Points To enter the Main Menu to access the set point and gain parameters: Note When using PID control, the gains can be adjusted to provide the best response to the set point. 1.
  • Page 65 Chapter Four: Local Operation Setup The screen displays: GAIN COMP FACTOR: 100.0 The Gain Compensation Factor (GCF) modifies the gain value so that the controller gives the best response to the low range setpoints. When the 651 controller receives a set point in the range of the High range sensor, it uses the Gain value.
  • Page 66 Setup Chapter Four: Local Operation BACKFILL / RELAY2: ENAB DISAB The Backfill Valve Control feature can open a pneumatic valve to assist in raising the system pressure to a new setpoint. Note: When the backfill valve control feature is enabled, process relay 2 is disabled. When backfill valve control feature is disabled, relay 2 is enabled.
  • Page 67 Chapter Four: Local Operation Setup Enter the Setpoint backfill limit value, range from 10 to 100 %. 10. Repeat steps 2 to 4 for set points B to E. * These menu screens only appear when Setpoint A is in Pressure control mode.
  • Page 68 Setup Chapter Four: Local Operation Position Set Point Control To enter the Main Menu to access the set point parameters: Note There are no gain values associated with set points under position control. 1. Be sure that the default Pressure and Position display appears on the screen. 2.
  • Page 69 Chapter Four: Local Operation Setup Process Limit The following series of screens are accessible by pressing the [ ] key after you have configured the set point and gain parameters (if applicable). These screens are the same regardless of your system’s configuration. Be sure that the default Pressure and Position display appears on the screen.
  • Page 70 Setup Chapter Four: Local Operation Note 1. To disable a low limit trip point, set it to negative full scale. 2. To disable a high limit trip point, set it to full scale. Analog Setpoint Value Be sure that the default Pressure and Position display appears on the screen. Press the [ ] key to advance to the analog setpoint screen.

  • Page 71: Operation

    Chapter Four: Local Operation Operation Operation How To Activate a Set Point Activating a set point commands the 651 unit to control to that set point. Only one set point can be active at a time. How To Activate an Internal Set Point The internal set points (A to E) are activated by pressing the appropriate key on the front panel of the 651 controller (refer to Figure 8.).

  • Page 72: How To Control The Valve

    Operation Chapter Four: Local Operation How To Control the Valve The 651 unit can drive the throttle valve to full open or full close, or halt at its current position. Note The commands to open, close, or halt the valve override the active set point control of the valve.

  • Page 73: How To Use The Sensor Zero

    Chapter Four: Local Operation Operation How To Use the Sensor Zero The sensor zero function corrects any sensor zero offsets. To zero the currently displayed sensor (indicated on the display by a ‘H” for the High pressure sensor or an ‘L’ for the Low pressure sensor) 1.
  • Page 74 Operation Chapter Four: Local Operation ZERO BASE PRESSURE: 2. Adjust the pressure reading on the display until it matches the known base pressure reading (as measured by another transducer in the system). 3. Press any key to return to the default Pressure and Position display screen.

  • Page 75: How To Remove The Zero Correction Factors

    Chapter Four: Local Operation Operation How To Remove the Zero Correction Factors This function removes the sensor and special zero correction factors stored in memory, and is used to determine the uncorrected signal from the pressure transducer. Each time a sensor is zeroed, the offset changes and the pressure display is updated.

  • Page 76: How To Calibrate The Full Scale Of The Analog Set Point

    Operation Chapter Four: Local Operation 4. Press the [L ] and [Z ] keys simultaneously for about three seconds. EARN The 651 controller learns the input voltage that corresponds to the analog set point zero value, then the screen returns to the default Pressure and Position display screen. How To Calibrate the Full Scale of the Analog Set Point The analog set point can be configured for 5 V (initial) or 10 V full scale input (refer to step 9).
  • Page 77 Chapter Four: Local Operation Operation 5. Adjust the value of the analog set point to 100%. The 4.5 Volt input to the Interface connector is now the full scale value. To be sure that the analog set point is adjusted correctly, turn the adjust knob until the reading flickers between 99.99 and 100.00%.

  • Page 79: Chapter Five: Remote Rs-232 Operation

    Chapter Five: Remote RS-232 Operation General Information Chapter Five: Remote RS-232 Operation General Information Remote (or rear panel) control of the 651 pressure controller is achieved either through digital RS-232 communications through the Serial Interface connector, or through analog or digital logic control at the rear panel Interface connector (refer to Table 8).

  • Page 80: Rs-232 Protocol

    RS-232 Protocol Chapter Five: Remote RS-232 Operation RS-232 Protocol Messages sent to the 651 controller from a remote computer are either commands that instruct the controller to perform a task or change an operating parameter, or requests that prompt the controller to report information.

  • Page 81: Message Syntax

    Chapter Five: Remote RS-232 Operation RS-232 Protocol Message Syntax The RS-232 message syntax uses the following conventions: Note 1. Commands and requests are not case sensitive. 2. Spaces are included in the syntax for clarity only. Do not include spaces in actual messages. bold Messages that you must enter exactly as shown in the manual.

  • Page 82: Setup Messages

    Setup Messages Chapter Five: Remote RS-232 Operation Setup Messages The Setup messages configure the operating parameters for the 651 unit. Table 14 RS-232 Setup Messages Description Command Request Response J type Select and Calibrate J type R 23 the Valve 1 = Std 253 type: 1 = Std 253* type:...

  • Page 83: Table 14: Rs-232 Setup Messages

    Chapter Five: Remote RS-232 Operation Setup Messages Table 14: RS-232 Setup Messages (Continued) Valve Position Signal B value R 31 B value Output Range value: 0 = 5 V value: 0 = 5 V 1 = 10 V 1 = 10 V* K value Valve Battery K value...
  • Page 84 Setup Messages Chapter Five: Remote RS-232 Operation Sensor Range High EH value R 33 EH value value: 00 = 0.1 Torr value: 00 = 0.1 Torr 01 = 0.2 01 = 0.2 02 = 0.5 02 = 0.5 03 = 1 03 = 1 04 = 2 04 = 2...
  • Page 85 Chapter Five: Remote RS-232 Operation Setup Messages How To Select and Calibrate the Valve The 651 unit can control Type 253 and Type 653 valves. Be sure that the valve is connected to the 651 unit. Caution The procedure for selecting the valve involves cycling the valve from the open to the close position.

  • Page 86: How To Read The Pressure Control Mode

    Setup Messages Chapter Five: Remote RS-232 Operation How To Read the Pressure Control Mode To query the current control mode setting, issue the request: R 51 The controller responds with the message [V value], where: value: 1 = PID...

  • Page 87: How To Set The Pressure Units

    Chapter Five: Remote RS-232 Operation Setup Messages How to Set the Pressure Units The command [F value] identifies the units for the 651 controller display, where: value: 00 = Torr (initial) 01 = mTorr 02 = mBar 03 = µBar 04 = kPa 05 = Pa 06 = cm H...

  • Page 88: How To Enable Backfill Valve Control

    Setup Messages Chapter Five: Remote RS-232 Operation How To Enable Backfill Valve Control The Backfill Valve Control feature can open a pneumatic valve to assist in raising the system pressure to a new setpoint. The messages described here enable and disable the feature, and check which of those states is in force.

  • Page 89: How To Set The Backfill Threshold Pressure Value

    Chapter Five: Remote RS-232 Operation Setup Messages How To Set the Backfill Threshold Pressure Value This value is the required difference between the new set point and the current pressure in the system before the backfill control feature operates. Set point changes less than the backfill threshold value do not trigger the backfill function.
  • Page 90 Setup Messages Chapter Five: Remote RS-232 Operation = Open valve at power failure = Close valve at power failure To check the direction of the valve battery back-up control, issue the request: R 40 The controller responds with the message [K value], where: value: 0 = Option disabled = Valve opens at power failure...

  • Page 91: How To Read The Sensor Type

    Chapter Five: Remote RS-232 Operation Setup Messages How To Read the Sensor Type To query the current sensor type, issue the request: R 36 The controller responds with the message [U value], where: value: 0 = Absolute An example response is:...

  • Page 92: How To Set The Sensor Signal Input Range

    Setup Messages Chapter Five: Remote RS-232 Operation How To Set the Sensor Signal Input Range Note Be sure that the sensor is connected to the 651 controller before changing the sensor signal input range. The command [G value] sets the full scale voltage range for the pressure sensor input, where: value: 0 = 1 Volt...

  • Page 93: How To Set The Sensor Range

    Chapter Five: Remote RS-232 Operation Setup Messages How To Set the Sensor Range Note Be sure that the sensor is connected to the 651 controller before changing the sensor range. The command [Ex value] identifies the range of the sensor, in units, where x corresponds to either ‘H’...
  • Page 94 Setup Messages Chapter Five: Remote RS-232 Operation To check the sensor range of your unit, issue the request: R 55 for the Low range sensor R 33 for the High range sensor The controller responds with the message [Ex value], where x corresponds to either ‘H’ or ‘L’...
  • Page 95 Chapter Five: Remote RS-232 Operation Setup Messages Set Point Messages The Set Point messages define the set point parameters which include the set point values, the gains and phases, and two process limit relays (each with high and low trip point levels). All of the set point messages (except for the gain and phase parameters) function the same, regardless of your system’s configuration.

  • Page 96: Table 16: Rs-232 Set Point Messages

    Setup Messages Chapter Five: Remote RS-232 Operation RS-232 Set Point Messages Description Command Request Response T x value Set Point Control T x value R xx x: 0 = Analog Set Pt x: 1 = Set Point A xx: 25 = Analog Set Pt 1 = Set Point A 2 = Set Point B 26 = Set Point A...
  • Page 97 Chapter Five: Remote RS-232 Operation Setup Messages Description Command Request Response M x value Gain M x value R xx x: 1 = Gain SP A x: 1 = Gain SP A xx:46 = Gain SP A 2 = Gain SP B 2 = Gain SP B 47 = Gain SP B 3 = Gain SP C...

  • Page 98: How To Set The Type Of Set Point Control

    Setup Messages Chapter Five: Remote RS-232 Operation How To Set the Type of Set Point Control Each set point can be configured so that it is represents a pressure value or position value. The command [T x value] configures the unit for set point control, where: = Set point A control = Set point B control = Set point C control...

  • Page 99: How To Set The Analog Set Point Range

    Chapter Five: Remote RS-232 Operation Setup Messages How To Set the Analog Set Point Range The command [A value] sets the full scale voltage range for the analog set point, where: value: 0 = 5 Volts (initial) = 10 Volts To query the voltage range of the analog set point, issue the request: R 24 The controller responds with the message [A range], where:...

  • Page 100: How To Set The Set Point Values

    Setup Messages Chapter Five: Remote RS-232 Operation How To Set the Set Point Values The command [S x value] sets the values for the set points, where: = Set point A value = Set point B value = Set point C value = Set point D value = Set point E value = Analog set point value...
  • Page 101 Chapter Five: Remote RS-232 Operation Setup Messages The controller responds with the message [S x value], where: = Analog set point value = Set point A value = Set point B value = Set point C value = Set point D value = Set point E value value: set points A to E:...

  • Page 102: How To Set The Gain Values

    Setup Messages Chapter Five: Remote RS-232 Operation How To Set the Gain Values The command [M x value] sets the gain values for the internal set points, where: = Set point A gain = Set point B gain = Set point C gain = Set point D gain = Set point E gain value:...

  • Page 103: How To Set The Gain Compensation Factor

    Chapter Five: Remote RS-232 Operation Setup Messages How To Set the Gain Compensation Factor The gain compensation factor (GCF) modifies the gain value so that the controller gives the best response to the low range set points. When the 651 controller receives a set point in the range of the high sensor (Channel 1), it uses the gain value entered with the [Mxvalue] command.

  • Page 104: How To Set The Phase Values

    Setup Messages Chapter Five: Remote RS-232 Operation How To Set the Phase Values The command [X x value] sets the Phase values for the internal set points, where: = Set point A Phase = Set point B Phase = Set point C Phase = Set point D Phase = Set point E Phase value:...

  • Page 105: How To Set The Phase Compensation Factor

    Chapter Five: Remote RS-232 Operation Setup Messages How To Set the Phase Compensation Factor The phase compensation factor (PCF) modifies the phase value so that the controller gives the best response to the low range set points. When the 651 controller receives a set point in the range of the high sensor, it uses the phase value entered with the [Xxvalue] command.

  • Page 106: How To Set The Softstart Rates

    Setup Messages Chapter Five: Remote RS-232 Operation How To Set the Softstart Rates The softstart rate controls the rate at which flow moves toward the desired set point. Different softstart rates can be assigned to each set point as well as to the valve open and valve close commands.
  • Page 107 Chapter Five: Remote RS-232 Operation Setup Messages To change the softstart rate for set point A to 50% enter: I 1 50...

  • Page 108: How To Set The Process Limit Relays

    Setup Messages Chapter Five: Remote RS-232 Operation How To Set the Process Limit Relays The command [P x value] sets the process limit relay thresholds, where: = Low threshold - Process Limit 1 = High threshold - Process Limit 1 = Low threshold - Process Limit 2 = High threshold - Process Limit 2 value:...

  • Page 109: Control Messages

    Chapter Five: Remote RS-232 Operation Control Messages Control Messages The control messages directly control the actions of the valve and the system. RS-232 Control Messages Description Command Request Response x y z w Activate Set Point X: Active Set x: 1 = Set Point A Point 2 = Set Point B 3 = Set Point C...
  • Page 110 Control Messages Chapter Five: Remote RS-232 Operation RS-232 Control Messages Valve Stop None None • stops valve in current position Sensor Zero None None • corrects sensor zero offsets Special Zero Z 2 value None None • zeros base pressure value: % FS pressure Remove Sensor and None...

  • Page 111: How To Activate A Set Point

    Chapter Five: Remote RS-232 Operation Control Messages How To Activate a Set Point The command [D x] activates one of the set points, where: x: 1 = Set point A = Set point B = Set point C = Set point D = Set point E = Analog set point To activate set point A, enter:...

  • Page 112: How To Control The Valve

    Control Messages Chapter Five: Remote RS-232 Operation How To Control the Valve The 651 unit can drive the throttle valve to full open or full close, or to stop at its current position. There are no requests associated with these functions. Note The RS-232 commands to open, close, or stop the valve override the active set point control of the valve.

  • Page 113: How To Use The Sensor Zero

    Chapter Five: Remote RS-232 Operation Control Messages How To Use the Sensor Zero The command [Z 1] corrects for any sensor zero offsets. There is no request associated with this function. This command will zero the currently selected pressure sensor range. To use the sensor zero: 1.

  • Page 114: How To Zero The Analog Set Point

    Control Messages Chapter Five: Remote RS-232 Operation The command [Z 3] removes the sensor zero [Z 1] and the special zero [Z2 value] correction factors stored in memory, and is used to determine the uncorrected signal from the pressure transducer. Each time a sensor is zeroed, the offset changes and the pressure display is updated.

  • Page 115: How To Calibrate The Full Scale Of The Analog Set Point

    Chapter Five: Remote RS-232 Operation Control Messages How To Calibrate the Full Scale of the Analog Set Point The analog set point can be configured for 5 Volt (initial) or 10 Volt full scale input (refer to How To Set the Analog Set Point Range). You can, however, operate the 651 controller at a different full scale input, for example, 4.5 V, by recalibrating the full scale of the analog set point.

  • Page 116: Informational Messages

    Informational Messages Chapter Five: Remote RS-232 Operation Informational Messages Informational messages report data on the 651 controller. There are no commands associated with these functions. RS-232 Informational Messages Description Request Response P value Pressure Reading • reports pressure reading as value: % FS % of FS Valve Position Value...
  • Page 117 Chapter Five: Remote RS-232 Operation Informational Messages RS-232 Informational Messages (Continued) Description Request Response BT x Valve Battery Back-Up Status R 39 • reports the voltage status of x: 0 = Battery voltage is out of the optional valve failsafe range battery back-up 1 = Battery voltage is within...

  • Page 118: How To Report The Pressure Reading

    Informational Messages Chapter Five: Remote RS-232 Operation How To Report the Pressure Reading To report the currently selected pressure reading as a percentage (%) of full scale (FS) of your pressure sensor, issue the request: The controller responds with the message [P value], where: value: % of sensor full scale Note Pressure readings are reported as a percentage of full scale, where full...

  • Page 119: How To Report The Valve Position Value

    Chapter Five: Remote RS-232 Operation Informational Messages How To Report the Valve Position Value To report the valve position value as a percentage (%) of full Open, issue the request: The controller responds with the message [V value], where: value: % of full Open Example: if the valve is at 50, the response is: V+0050.0 The valve position is 50% of full open.

  • Page 120: How To Report The System Status

    Informational Messages Chapter Five: Remote RS-232 Operation How To Report the System Status The system status request reports the type of operation, the state of the learn function, and the state of the valve control. To report the system status, issue the request: R 37 The controller responds with the message: x y z...

  • Page 121: How To Report The Voltage Status Of The Valve Battery Back-Up

    Chapter Five: Remote RS-232 Operation Informational Messages How To Report the Voltage Status of the Valve Battery Back-Up To report the voltage status of the optional valve failsafe battery back-up, issue the command: R 39 The controller responds with the message: BT x where x: 0 = Battery voltage is out of range...

  • Page 122: How To Report The Firmware Version

    If the checksum error persists after you perform a full system calibration, followed by a recalibration of the span of the A/D converter, the error indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.

  • Page 123: Chapter Six: Remote Digital Logic Control

    Chapter Six: Remote Digital Logic Control General Information Chapter Six: Remote Digital Logic Control General Information Digital and analog control of the 651 unit is accomplished via the Interface connector located on the rear panel. Refer to Table 8, for the Interface connector pinout. Note Any RS-232 command takes priority over digital logic commands.

  • Page 124: Table 18: Digital Input Functions

    How To Select the Digital Input Functions Chapter Six: Remote Digital Logic Control Refer to Table 8, for the complete Interface connector pinout. Digital Input Functions I/O Pin No. State Digital Input Function Analog set point to position High Analog set point to pressure Softstart is active for selected command function High...

  • Page 125: How To Set The Analog Set Point Inputs

    Chapter Six: Remote Digital Logic Control How To Select the Digital Input Functions Digital Input Functions (Continued) I/O Pin No. State Digital Input Function Selects set point B High No function Selects set point A High No function No function High No function Performs the remote zero function...

  • Page 126: Digital Input Priorities

    How To Select the Digital Input Functions Chapter Six: Remote Digital Logic Control Digital Input Priorities Digital inputs are scanned and selected in a prioritized manner, enabling a higher priority request to override a lower one. The order of priority is shown in Table 18. Priority of Digital Inputs Order of Priority I/O Pin No.

  • Page 127: How To Select The Digital Output Functions

    Chapter Six: Remote Digital Logic Control How To Select the Digital Output Functions How To Select the Digital Output Functions The I/O board contains 6 type 74HC digital outputs, each having the capacity to drive one standard TTL load. The specific function of each output is listed in Table 19, page 116. The approximate time constant of the outputs are 2.5 microseconds.

  • Page 128: Table 20: Digital Output Functions

    How To Select the Digital Output Functions Chapter Six: Remote Digital Logic Control Refer to Table 8, for the complete Interface connector pinout. Digital Output Functions I/O Pin No. State Digital Output Function Valve is not open High Valve is open Valve is not closed High Valve is closed...

  • Page 129: How To Activate The Softstart Rate

    Chapter Six: Remote Digital Logic Control How To Activate the Softstart Rate How To Activate the Softstart Rate When using the front panel controls or RS-232 to Open the valve, Close the valve, or use a setpoint, the softstart rate is automatically activated. Having a softstart rate setting of 100% is the same as not applying any softstart rate.
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  • Page 131: Chapter Seven: Maintenance And Troubleshooting

    Instruments immediately. If it is necessary to return the unit to MKS, obtain an ERA number (Equipment Return Authorization Number) from a MKS Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 132: Figure 18: Fuse Holder

    Maintenance Chapter Seven: Maintenance and Troubleshooting Warning To avoid an electrical shock, be sure to disconnect the power cord before proceeding. 3. Disconnect all cables from the connectors located on the rear panel of the unit. 4. Insert a small device such as a screwdriver in the fuse holder clip on the right side of the fuse holder.

  • Page 133: How To Replace The Memory (Ram) Module

    This memory module (MKS part no. 037-9227) is specified to provide at least seven years of memory storage under all operating conditions. Maintenance is normally not required during this period. The memory module may need to be replaced if the 651 unit continually loses set up information at each power cycle (power off then on again).

  • Page 134: Figure 19: Location Of The Battery-Backed Ram Module

    Maintenance Chapter Seven: Maintenance and Troubleshooting 7. Remove the Phillips head screw to the left of the Serial Interface connector. 8. Remove the CPU board from the 651 controller. It may be necessary to remove the clamping spring that holds the card cage to the power supply.
  • Page 135 Chapter Seven: Maintenance and Troubleshooting Maintenance How To Replace the CPU Board 1. Position the CPU board over slot 1 in the 651 unit, ensuring that the board’s edge is behind the next connector’s edge. 2. Push on the bottom tab to snap the board into the slot. 3.

  • Page 136: How To Replace The Optional Valve Failsafe Battery

    Maintenance Chapter Seven: Maintenance and Troubleshooting How To Replace the Optional Valve Failsafe Battery Warning The 651 unit has lethal voltages inside. Only qualified personnel must perform servicing of the unit. To avoid an electrical shock, disconnect the power line before opening the unit.
  • Page 137 Chapter Seven: Maintenance and Troubleshooting Maintenance 14. Pull the front panel module completely forward and remove the battery circuit board assembly. 15. Disconnect the two insulated clips from the battery terminals. Caution Do not allow anything to short across the battery terminals, such as a screwdriver.

  • Page 138: Troubleshooting

    Troubleshooting Chapter Seven: Maintenance and Troubleshooting Troubleshooting How To Identify an Out-of-Range Pressure Condition An out-of-range condition occurs at ±105% of FS (±10.5 Volts at sensor input) and is displayed as a positive or negative polarity. An example of a positive out-of-range pressure condition is shown below. PRES +++++++ 0.0%...

  • Page 139: How To Respond To A Checksum Error

    Refer to How To Calibrate the Full Scale of the Analog Set Point, page 103. If the checksum error persists after you perform a full calibration, the error indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.

  • Page 140: How To Calibrate The Span Of The A/D Converter

    Troubleshooting Chapter Seven: Maintenance and Troubleshooting How To Calibrate the Span of the A/D Converter The controller’s A/D (analog-to-digital) converter converts the analog input to a digital value that the controller uses. The span of the A/D converter is calibrated at the factory. However, you may need to recalibrate the span if your unit issues a checksum error when you power up the controller, or if the transducer’s readings are incorrect.
  • Page 141 In that case, repeat the A/D converter calibration. If the error persists, it indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.
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  • Page 143: Appendix A: Product Specifications

    Appendix A: Product Specifications Appendix A: Product Specifications Ambient Operating Temperature Range 15° to 40° C (59° to 104° F) 15° to 35° C (59° to 95° F) with the optional valve failsafe battery backup Analog Output Signal Position 0 to 5 Volts or 0 to 10 Volts, selectable Pressure 110% FS pressure, same range as sensor CE Mark Compliance...
  • Page 144 Appendix A: Product Specifications External Set Point Signal 5 Volts or 10 Volts*, selectable Fuses Low power unit: 90 to 132 VAC 0.63A (T), 250V, 5 x 20 mm 180 to 264 VAC 0.315A (T), 250V, 5 x 20 mm High power unit: 90 to 132 VAC 1.25A (T), 250V, 5 x 20 mm 180 to 264 VAC...

  • Page 145: Appendix B: Model Code Explanation

    Appendix B: Model Code Explanation Appendix B: Model Code Explanation Model Code The desired options for the 651 controller are identified in the model code when you order the unit. The model code is identified as follows: 651D X Y Z C D where: 651D Type Number...
  • Page 146 Appendix B: Model Code Explanation Interface (Y) The type of interface is indicated by a single digit code. Ordering Code RS-232 Valve Driver (Z) The valve driver is designated by a single letter code. Ordering Code Stepper motor Power Supply (C) Two power supplies are available, designated by a single number code.

  • Page 147: Appendix C: Initial Settings

    Appendix C: Initial Settings Appendix C: Initial Settings Your 651 controller is shipped with the initial configuration settings listed alphabetically in Table 20. Since the 651 unit stores most of the settings in non-volatile RAM, the values are not default settings.
  • Page 148 Appendix C: Initial Settings Initial Settings (Continued) Parameter Initial Setting Other Sensor Signal Input Range 10 V Sensor Type Absolute None Set Point Control Pressure Position Soft Start Rate 100% User selectable; 0.1 to 100% Valve Failsafe Battery None Close, Open, Disable Back-Up Option Valve Signal Output Range Pressure: 10 V...
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  • Page 151: Appendix E: Rs-232 Message Summary

    Appendix E: RS-232 Message Summary Appendix E: RS-232 Message Summary The RS-232 messages required for operation of the 651 controller are listed alphabetically—by command—in Table 20. For complete information on any RS-232 message, refer to Chapter Five: Remote RS-232 Operation, page 67. RS-232 Message Summary Command Description...
  • Page 152 Appendix E: RS-232 Message Summary W: Active Sensor/Channel Select/Zero Adjust 0 = L/A/D 1 = H/A/D 3 = H/H/D 4 = L/A/E 5 = H/A/E 7 = H/H/E 8 = L/L/D : = L/L/E RS-232 Message Summary (Continued) Command Description Request Response Ex value...
  • Page 153 Appendix E: RS-232 Message Summary 05 = Pa 05 = Pa 06 = cm H 06 = cm H 07 = in H 07 = in H H model / Firmware Version Reports the installed R 38 version • NO COMMAND version of firmware number G value...
  • Page 154 Appendix E: RS-232 Message Summary 2 = Close valve at 2 = Valve closes at power failure power failure Select High channel R7(w) Select Low channel Select Auto M x value M x value Gain R xx x: 1 = Gain SP A x: 1 = Gain SP A xx:46 = Gain SP A 2 = Gain SP B...
  • Page 155 Appendix E: RS-232 Message Summary 3 = Set Point C 2 = Set Point B 2 = Set Point B 4 = Set Point D 3 = Set Point C 3 = Set Point C 5 = Set Point E 4 = Set Point D 4 = Set Point D 6 = Analog Set Pt...
  • Page 156 Appendix E: RS-232 Message Summary 3 = Set Point C 27 = Set Point B 2 = Set Point B 4 = Set Point D 28 = Set Point C 3 = Set Point C 5 = Set Point E 29 = Set Point D 4 = Set Point D 6 = Analog Set Pt...
  • Page 157 Appendix E: RS-232 Message Summary RS-232 Message Summary (Continued) Command Description Request Response S 0 value Calibrate Analog Set Point Full Scale value: % of the analog set point FS voltage range Sensor Zero None None • corrects sensor zero offsets Z 2 value Special Zero...
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  • Page 159: Index

    Index Index A/D converter span calibration Cables local, 128 adapter, 13 Absolute pressure, calculating, 106 Calibration Analog set point analog set point, 64, 103 activating span of A/D converter, 128–30 local, 59 valve, 43, 73 RS-232, 99 Checksum status, 110, 127 calibration of Command priority and timing, 69 local, 64...
  • Page 160 Index End-of-line delimiter, 45 Labels, 37 Environmental requirements, 10 Line voltage selector, 17 Firmware version, 110 Maintenance, 119 Front panel components, 30–31 fuse replacement, 119–20 Fuse RAM module replacement, 121–23 replacement, 119–20 valve battery back-up replacement, 124–25 requirements, 16 Manual organization, 6 Model code, 133 Gains description of, 25–29...
  • Page 161 Index local, 57 RS-232, 101 RS-232, 96 zero corrections, removing Product compatibility, 11 local, 63 Proportional gain, 26 RS-232, 102 Serial number label, 37 Set point Rear panel components, 32–33 activating Returning the product, 7, 9 local, 59 RS-232 operation RS-232, 99 command priority and timing, 69 control...
  • Page 162 Index local, 63 RS-232, 102 Valve sensor control local, 61 local, 60, 100 RS-232, 101 RS-232, 100 special zero selection and calibration local, 61 local, 43 RS-232, 101 RS-232, 73 signal output local, 48 RS-232, 77 Valve battery back-up battery life, 35 battery storage, 36 control local, 50...

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