MKS 332 Series Ion Gauge Controller Manuals

Manuals and User Guides for MKS 332 Series Ion Gauge Controller. We have 1 MKS 332 Series Ion Gauge Controller manual available for free PDF download: Instruction Manual

MKS 332 Series Instruction Manual

MKS 332 Series Instruction Manual (40 pages)

Ionization Gauge Controller

Brand: MKS | Category: Controller | Size: 1 MB

Table of Contents

Table of Contents
4
Introduction & Safety Notices

6
- Receiving Inspection
  6
- International Shipment
  6
- Limited Warranty
  6
- Explosive Gases
  7
- Implosion / Explosion
  7
- Safety/Warning Notices
  8
- Grounding
  8
- General Description
  9
  - Available Options
    9
    
    Convectron Gauge Option
    9
- Installation
  9
- Operation
  14
  - Ion Gauge Theory of Operation
    14
  - Emission Current Adjustment
    15
    
    Example 1
    15
    
    Example 2
    15
    
    Example 3
    15
    
    Analog Output
    16
    
    Overpressure Shutdown
    19
    
    Degas
    19
- Calibration
  19
  - Electrometer Zero
    19
  - Electrometer Log Amplifier
    19
  - Summary
    20
- Specifications
  20
- General Description
  23
- Safety Instructions
  23
  - Explosive Gases
    23
  - Limitation of Use of Compression Mounts
    23
  - Convectron Gauge Mounting Position
    23
  - Overpressure Conditions
    23
  - High Indicated Pressure
    24
  - Chemicals
    24
  - Sensor Failure
    24
  - Tube Contamination
    24
- Convectron Gauge Theory of Operation
  24
- Convectron Gauge Installation
  25
Operation

28
- Torr
  28
- Use with Gases Other than N 2 and Air
  28
- Indicated Vs. True Pressure Curves
  28
- Analog Output (Logarithmic)
  33
  - Analog Output (Non Linear)
    33
Calibration

34
- Zero Adjustment
  34
- Atmosphere Adjustment
  35
- Full Scale Adjustment (Internal)
  35
- Zero Adjustment (Internal)
  35
General Description

36
Troubleshooting

37

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