MKS Stabil-Ion 370 Series Instruction Manual
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MKS Stabil-Ion 370 Series Instruction Manual

MKS Stabil-Ion 370 Series Instruction Manual

Vacuum measurement
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Series 370
®
Stabil-Ion
Vacuum Measurement Controller
Instruction Manual
Instruction manual part number 370119
Revision C - March 2020

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  • Page 1 Series 370 ® Stabil-Ion Vacuum Measurement Controller Instruction Manual Instruction manual part number 370119 Revision C - March 2020...
  • Page 3 © 2020 MKS Instruments, Inc. All rights reserved. ® ® ® Granville-Phillips , Stabil-Ion , and Convectron are registered trademarks, and mksinst is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.
  • Page 4 ® Series 370 Stabil-Ion Vacuum Measurement Controller Catalog numbers for Series 370 Stabil-Ion Vacuum Measurement Controller Left Mount, side-by-side with Power Supply: 370501 - # # # - # # Half-Rack Mount, remote Power Supply: 370502 - # # # - # # Interface Option: None RS-232...

  • Page 5: Table Of Contents

    Table of Contents Safety..................v Chapter 1 System Components .
  • Page 6 Table of Contents 4.3.2 Loading the Stabil-Ion Memory Module..........5 4.3.3 Control Menu Variables .
  • Page 7 Table of Contents Troubleshooting the Electrometer Module ..........7 Overpressure Shutdown .
  • Page 8 Table of Contents Series 370 Stabil-Ion Instruction Manual - 370119...

  • Page 9: Safety

    If you require further assistance, contact MKS at the address on the title page of this manual. This product has been designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict accordance with these safety instructions.
  • Page 10 Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the product. Return the product to a service facility designated by MKS for service and repair to ensure that safety features are maintained. Do not use this product if it has unauthorized modifications.
  • Page 11 MKS Instruments, Inc. does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and pressure relief disks can be located via an online search. Confirm that these safety devices are properly installed before installing the product.
  • Page 12 Safety Do not operate in an explosive atmosphere. Do not operate the product in the presence of flammable gases or fumes. Operation of any electrical instrument in such an environment constitutes a definite safety hazard. Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures.
  • Page 13 Institute of Standards and Technology to the extent allowed by the Institute's calibration facility. Warranty MKS Instruments, Inc. provides a warranty period of 18 months from the date of shipment for the Series 370 Controllers. The MKS General Terms and Conditions of Sale provides the complete and exclusive warranty for MKS products.
  • Page 14 Safety Canadian Users This Class B digital apparatus meets all requirements of the Canadian Interference-Causing Equipment Regulations. Cet appareil numerique de la classe B respecte toutes les exigences du Reglement sur le material broilleur du Canada. UL Listed This product, when labeled, is Listed to UL 3101 Standard for Safety, Laboratory Equipment by Underwriters Laboratories Inc.

  • Page 15: Chapter 1 System Components

    Chapter 1 System Components Figure 1-1 Stabil-Ion Vacuum Measuring System 1. Stabil-Ion Control Unit 5. Stabil-Ion Gauges 2. Interconnect cable 6. Stabil-Ion cables 3. Stabil-Ion Power Supply 7. Dual Convectron cable 4. Power cable 8. Convectron Gauges Figure 1-2 Stabil-Ion Gauge 1.
  • Page 16 1 System Components chamber 1 system 1 chamber 2 system 2 chamber 3 system 3 roughing implant backfill diffusion source etching beam line deposition annealing metalizing residual process 1 e-beam process 2 sputtering process 3 TORR accelerator vent PASCAL MBAR Figure 1-3 Mounting and Installing Hardware 1.
  • Page 17 1 System Components Open the front panel door to access these controls. RS-232 PROCESS CONTROL CONVECTRON ELECTROMETER Off SP On IG-1 AUTO Data Port ▲ I G 1 I G 2 IG1 L F1 IG-2 AUTO Degas Power N2 TORR ▲...
  • Page 18 1 System Components CONVECTRON ELECTROMETER PROCESS CONTROL RS232 (or IEEE488) ANALOG REMOTE POWER OUTPUT A OUTPUT SUPPLY IG1 COL. IG2 COL. ANALOG ANALOG OUTPUT OUTPUT B Figure 1-6 Stabil-Ion Vacuum Gauge Control Unit Rear Panel 1. Grounding lug to be connected to earth ground with 7.
  • Page 19 1 System Components POWER 50-60 HZ 220 WATTS POWER DEGAS FUSE FUSE ALL 3 SWITCHES MUST BE SET TO THE SAME AC LINE VOLTAGE FOR AC LINE VOLTAGE BETWEEN 90V TO 130V SET ALL SWITCHES TO 115V, USE 3A, F 250V POWER FUSE, AND USE 2A, F, 250V DEGAS FUSE CONTROL UNIT FOR AC LINE VOLTAGE BETWEEN 180V TO 240V SET ALL SWITCHES TO 230V, USE 1.6A, F, 250V POWER FUSE, AND USE 1A, F, 250V DEGAS FUSE...
  • Page 20 1 System Components Figure 1-8 Top View of Stabil-Ion Vacuum Gauge Control Unit (cover and door removed) For completeness, all available capabilities are assumed present. Not all capabilities may be present in the product you have specified. Series 370 Stabil-Ion Instruction Manual - 370119...

  • Page 21: Chapter 2 Initial Setup Procedures

    Chapter 2 Initial Setup Procedures 2.1 Control Unit Option Module Setup Open the front panel door and determine if any of the following options are installed: ■ Convectron Gauge ■ Process Control ■ RS-485 Computer Interface ■ RS-232 Computer Interface RS-232 PROCESS CONTROL CONVECTRON...

  • Page 22: Top Cover Removal

    2 Initial Setup Procedures 2.1.1 Top Cover Removal With power OFF, remove any cables from Control Unit rear panel. Observe antistatic precautions to avoid damaging static sensitive components inside the chassis. Use a grounded, conductive work surface. Do not handle integrated circuits (IC) devices more than necessary, and only when wearing a high impedance ground strap.

  • Page 23: Convectron Pressure Units Setup

    2 Initial Setup Procedures 2.1.2 Convectron Pressure Units Setup If you wish to change the units of measure displayed for the Convectron gauge, change the settings of the units of measure switches on the module as shown in Figure 2-3 and in Figure 2-4.

  • Page 24: Process Control Setup

    Attach a copy of the Process Control circuit diagram to this manual for future reference and troubleshooting. The required process control connections may be made later. See Section 3.6 on page 3-8. If application assistance is desired, please contact an MKS Application Engineer. Series 370 Stabil-Ion Instruction Manual - 370119...

  • Page 25: Ion Gauge Assignment For Process Control

    2 Initial Setup Procedures Normally Open NOTE 1: Common Normally Closed Setpoint 1 is user- assignable to IG1 or Note 1 2 independent sets NO C NC IG2, or IG1 and IG2. of relay contacts Setpoint 1 T W P PROCESS CONTROL Setpoint 2 is user- Setpoint 2...

  • Page 26: Relay Polarity Setting

    2 Initial Setup Procedures Process Control setpoints 1 (PC1) and 2 (PC2) are controlled by the ionization gauge or gauges. Setpoint 1 operates relay 1. Setpoint 2 operates relay 2. Relays 1 and 2 are also shown as K1 and K2 on the printed circuit board for reference during IG assignment.

  • Page 27: Process Control Tips

    2 Initial Setup Procedures Table 2-3 Relay Polarity Switch Settings Pressure Pressure Indication Indication Switch Channel Relative to Switch Channel Relative to Settings Activated Setpoint Settings Activated Setpoint below* below* above above below* below* above above below* below* above above * factory setting 2.1.3.3 Process Control Tips The process control override switches can be used to hold relays ON or OFF during initial turn...

  • Page 28: Computer Interface Setup

    2 Initial Setup Procedures 2.1.4 RS-232 Computer Interface Setup If your Control Unit does not have this capability, skip to Section 2.1.5 on page 2-12. This available capability permits data output to, and gauge control by, a host computer. Output is either by a command-response mechanism or by a talk-only mode which is invoked via a switch on the RS-232 board.
  • Page 29 2 Initial Setup Procedures 2.1.4.1.2 Character Framing Switches 3-5 control the number of characters, polarity, and number of stop bits: Table 2-6 Character Framing Character Bits Parity Stop Bits None Even OFF* OFF* None* Even Even factory setting Figure 2-11 Partial Top View of RS-232 Module 2.1.4.1.3 Talk-Only Mode The pressure data from all three displays will be output in a single message string, separated by...

  • Page 30: Handshaking

    2 Initial Setup Procedures 2.1.4.2 Handshaking Table 2-8 Inputs to 370 Controller Internal Switch Factory Line Description Function Setting CLEAR to SEND CTS=1 and DSR=1: Both ON & and DATA SET When ON, forces the READY: When functions TRUE and used, both must be thus assumes host is TRUE in order for...
  • Page 31 2 Initial Setup Procedures Table 2-9 Outputs from 370 Controller Internal Switch Factory Line Description Function Setting REQUEST TO SEND: INVERT RTS: De-asserted by the When OFF inverts Controller on power-up. the polarity of the Asserted by the RTS line allowing Controller upon receipt nonstandard of a message terminator...

  • Page 32: Computer Interface Setup

    2 Initial Setup Procedures 2.1.5 RS-485 Computer Interface Setup The RS-485 communications option for the Series 370 Stabil-Ion Gauge Controller permits data output to, and gauge control by, a host computer using RS-485 digital communications. Communications handshake is by a command-response mechanism. A variety of baud rates and byte framing options are available.

  • Page 33: Selecting The Byte Format For Rs-485 Communications

    2 Initial Setup Procedures 2.1.5.3 Selecting the Byte Format for RS-485 Communications 2.1.5.3.4 Baud Rate Baud rate for the RS-485 communications is determined by the settings of switches S2.6, S2.7 and S2.8. See Figure 2-15. Table 2-11, below, defines the baud rate base on the switch settings. The factory default baud rate setting is 9600.

  • Page 34: Replacing Control Unit Cover

    Use 3A, F, 250V Power Fuse, and use 2A, F, 250V Degas Fuse (see Note 1). Replacement fuses are available from the vendors below, or from MKS at the address listed at the front of this manual. NOTE 1: (115V Nom) Power Fuse is:...
  • Page 35 2 Initial Setup Procedures Replace the fuses whenever the switch settings are changed with correct fuse values as indicated on the power supply panel. New fuse holders may be required. Do not connect power cables until the Installation Instructions in Chapter 3 are completed. The 370 VGC is supplied with a convenient IEC 320 AC main connection receptacle which allows selection of a detachable line cord to match your available main power.
  • Page 36 2 Initial Setup Procedures 2-16 Series 370 Stabil-Ion Instruction Manual - 370119...

  • Page 37: Chapter 3 Installation

    MKS or not, be installed in accordance with the safety requirements of NEC/NFPA 70. Cables provided by MKS for connection to sensors or transducers is, at a minimum, designed for use as Appliance Wiring Material (UL category AVLV2), and is constructed of appropriate material and dimensions for the voltages and currents provided by the Stabil-Ion Gauge Controller unit.

  • Page 38: Environmental Conditions

    3 Installation 3.1.3 Environmental Conditions Indoor Use. Altitude up to 2000 meters. Temperature 0 °C to 40 °C. Maximum relative humidity 80% for temperatures up to 31 °C decreasing linearly to 50% relative humidity at 40 °C. Transient overvoltages according to INSTALLATION CATEGORY (over-voltage category) II. POLLUTION DEGREE 2 in accordance with IEC664.

  • Page 39: Convectron Gauge Installation

    3 Installation ■ Avoid contaminating the Stabil-Ion Gauge. Connector collar must be locked with integral Do not touch the port. Do not talk directly at pin guard on ionization gauge tube BEFORE an open vacuum port. Follow good vacuum gauge is turned on. practice.

  • Page 40: Compression Mount/Quick Connect

    3 Installation ■ Do not mount the gauge in a manner such that deposition of process vapors upon the internal surfaces can occur through line-of-sight access to its interior. If condensates may be present, orient the port downward to help liquids drain out.

  • Page 41: Installing The Control Unit And Power Supply

    3 Installation 3.4 Installing the Control Unit and Power Supply Provide adequate ventilation for the Control Unit to dissipate 15 watts and for the Power Supply to dissipate 50 watts. ALLOW AT LEAST 1 IN. CLEARANCE AROUND THE SIDE AND TOP VENTILATION SLOTS ON THE POWER SUPPLY.

  • Page 42: Installation Hardware Part Numbers

    3 Installation Figure 3-4 Control Unit and Power Supply Mounting 3.4.2 Installation Hardware Part Numbers Table 3-1 Installation Hardware Part Numbers Part Number Adapter Hardware Description 370008 To mount one or two Power Supplies side-by-side in a 19 in. rack 370010 To mount Control Unit only on left or right side of a 19 in.

  • Page 43: Connecting Analog Outputs

    3 Installation 3.5 Connecting Analog Outputs 3.5.1 Stabil-Ion Gauge Analog Output Signal A signal voltage proportional to the logarithm of the Stabil-Ion Gauge pressure indication is provided on the back of the electrometer module via a standard 1/8 in. miniature phone jack. A mating connector is supplied in the hardware kit.

  • Page 44: Connecting Process Control Relays

    3 Installation 3.6 Connecting Process Control Relays Instructions for setting up this module are in Section 2.1.3 on page 2-4. The process control connector is embossed with letters identifying each pin. Table 3-2 shows the letters designating the 3 pins assigned to each of the 6 channels. Table 3-2 Process Control Output Connector Pin Assignments Process Control Channel...

  • Page 45: Connecting Stabil-Ion Remote Control

    3 Installation 3.7 Connecting Stabil-Ion Remote Control This factory installed option permits the following functions to be controlled from a remote location: ■ ■ Ionization gauge IG1/IG2 CG gas selection – gas a or b ON/OFF ■ ■ Degas Pressure range selection – high or low ON/OFF ■...
  • Page 46 3 Installation 3-10 Series 370 Stabil-Ion Instruction Manual - 370119...
  • Page 47 3 Installation Table 3-3 Connections to DA-26P Connector Function Remote Operation Inputs IG1 ON/OFF IG2 ON/OFF Degas ON/OFF IG Lockout. Turns OFF IG and prevents turn on from any source. Keyboard Disable. Prevents , and buttons on front panel from functioning. Degas Remote Parameter Setup Inputs Remote Enable.

  • Page 48: Using The Remote Inputs

    3 Installation 3.7.2 Using the Remote Inputs IG ON/OFF Inputs (pins 22, 9): Either IG can be turned on by the remote inputs (if the pressure in the IG is adequately low, and the IG LOCKOUT input, Pin 7, is HI) by pulling the IG input line LOW after it has been HI for at least 35 msec.

  • Page 49: Using The Remote Outputs

    3 Installation 3.7.3 Using the Remote Outputs The relay contact outputs are accessible on the 15 pin remote output connector. These contacts provide status indication for IG1 and IG2 ON or OFF, degas ON or OFF, and fault detection. Figure 3-11 shows the pin designations.
  • Page 50 3 Installation Table 3-4 RS-232 Connector Pin Assignments Signal Pin Number Direction Protective Ground – Transmitted Data To Computer Received Data To 370 Request to Send (RTS) To Computer Clear to Send (DTS) To 370 Data Set Ready (DSR) To 370 Signal Ground (common return) –...
  • Page 51 3 Installation Negated by 370 on power-up. Asserted by 370 upon receipt of a message terminator. Negated after transmitting the terminator of 370's response to that message. RS-232 connections to a 9 pin IBM AT compatible computer can be made by using a straight- through cable.

  • Page 52: Connecting The Rs-485 Computer Interface

    3 Installation 3.9 Connecting the RS-485 Computer Interface Instructions for setting up this interface are in Section 2.1.5 on page 2-12. The RS-485 communications option permits data output to, and gauge control by, a host computer using RS-485 digital communications. Communications handshake is by a command-response mechanism.
  • Page 53 3 Installation Figure 3-14 RS-485 Bias Resistor Figure 3-15 RS-485 Connectors Table 3-7 RS-485 Specifications Function Specification Communications Format RS-485, half-duplex, asynchronous Data Rate 9600 (Default), 4800, 2400, 1200, 600, 300, 150 baud Character Length 8-bit or 7-bit ASCII (Factory default is 8-bit) Parity No parity, even or odd (Factory default is None) Stop Bits...

  • Page 54: Connecting The Gauge Cables

    3 Installation 3.10 Connecting the Gauge Cables Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection. A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential.

  • Page 55: Stabil-Ion Gauge Cable Installation

    3 Installation 3.10.2 Stabil-Ion Gauge Cable Installation Connect the Stabil-Ion cable(s) to the Power Supply first before connecting them to either the gauges or the Control Unit. Figure 3-17 Power Supply and Control Unit Rear Views Showing the Cable Connections to the Stabil-Ion Gauges Then connect the coaxial cable(s) to the corresponding connector on the Control Unit: IG1 to IG1, IG2 to IG2.
  • Page 56 3 Installation If space does not permit leaving the blue Guard attached to the cable connection during installation, separate the Guard from the cable connector, and install as follows: ■ Grasp the Guard with your fingers. ■ Place your thumb on the blue connector between two of the tabs on the connector end of the Guard.

  • Page 57: Connecting The Power Cables

    3 Installation 3.11 Connecting the Power Cables After completing the set up, connect the interconnect cable to the Control Unit and to the Power Supply. A 0.6 m (2 ft) [or a 3 m (10 ft) for remote mounting] interconnect cable is supplied with your Controller and has identical 25 pin connectors at both ends.
  • Page 58 3 Installation 3-22 Series 370 Stabil-Ion Instruction Manual - 370119...

  • Page 59: Chapter 4 Preparing The Stabil-Ion System For Operation

    Chapter 4 Preparing the Stabil-Ion System for Operation 4.1 Preparing for Pressure Measurement with the Stabil-Ion Gauge The steps in this Section (4.1) assume: ■ Your Stabil-Ion System has been properly set up and installed per the instructions in Chapters 2 and 3. ■...

  • Page 60: Memory Module Loading And Operating Parameter Setup

    4 Preparing the Stabil-Ion System for Operation Convectron Gauge equivalent N pressures will be displayed whenever power is applied and the gauges and cables are installed. Make sure the IG1 AUTO and IG2 AUTO switches are in the IG AUTO ON or OFF position and have not been left in the SET positions. See Section 4.7 on page 4-18 for information on Convectron Gauge pressure measurement.
  • Page 61 4 Preparing the Stabil-Ion System for Operation then, with a subsequent Cancel keystroke, transfer back to the IG Status for the tube that is turned ON. Also, when in a submenu with a flashing value, the Cancel key will return the display to the previously stored value.
  • Page 62 4 Preparing the Stabil-Ion System for Operation Status for IG1 Status for IG2 CANCEL CANCEL SELECT SELECT pressure range Control Menu high, low CANCEL IG1, IG2 filament select fil. 1, fil. 2, both IG1, IG2 scale factor .1 – 10 IG1, IG2 gas type a, b, …...

  • Page 63: Loading The Stabil-Ion Memory Module

    4 Preparing the Stabil-Ion System for Operation Setup Menu (see previous page) CANCEL CANCEL SELECT SELECT Information Menu IG1 a, b CANCEL IG serial No.'s IG2 a, b temporary swap area SELECT SELECT SELECT swap swap TMP hit select updating &...
  • Page 64 4 Preparing the Stabil-Ion System for Operation Table 4-2 Gauge Location and Gas Type Table Gas Type Tube Serial No. System Designation IG1 (gas) a (gas) b IG2 (gas) a (gas) b Turn ON the controller power and watch the LCD display until it displays mm Load mm Load to IG1 a or mm Load to CGA a.

  • Page 65: Control Menu Variables

    4 Preparing the Stabil-Ion System for Operation 4.3.3 Control Menu Variables 4.3.3.1 Pressure Range The H range is preferred for applications involving pressure measurement above 1x10 Torr. The emission current and cathode power are reduced and the upper pressure limit and overpressure IG shut down setpoint are extended.

  • Page 66: Filament Selection

    4 Preparing the Stabil-Ion System for Operation Press the SELECT key to store the new setting in memory. IG1 HIGH PRESS. RNG Press CANCEL to return to the control menu. Control (Or press CANCEL again to return to the status display for the gauge tube Menu that is turned ON.) 4.3.3.2 Filament Selection...

  • Page 67: Gauge Scale Factor

    4 Preparing the Stabil-Ion System for Operation 4.3.3.3 Gauge Scale Factor SCALE FACTOR: The scale factor is normally set to 1.000. This will cause the display to read correctly when the gas in the system matches the gas of the calibration memory. Scale factor adjustment is provided so that the display can be made to read approximately correct for other gases when using the N memory.

  • Page 68: Selecting Gas Type For The Stabil-Ion Gauge

    4 Preparing the Stabil-Ion System for Operation Press the SELECT key to see the pressure range display. IG1 LOW IG1 HIGH PRESS. RNG PRESS. RNG ▲ ▼ Press the arrow keys until you see the scale factor IG1 SCAL display. 1.000 Press the SELECT key so that the scale factor value is flashing.

  • Page 69: Selecting Gas Type For The Convectron Gauge

    4 Preparing the Stabil-Ion System for Operation Press the SELECT key to store the new setting. Press CANCEL to return to the control menu. Control (Or press CANCEL again to return to the status display for the gauge tube Menu that is turned ON.) To change the gas type label, open the Gas a...

  • Page 70: Setup Menu Variables

    4 Preparing the Stabil-Ion System for Operation Press the SELECT key to store the new setting. CGA GAS b Press CANCEL to return to the control menu. Control (Or press CANCEL again to return to the status display for the gauge tube Menu that is turned ON.) To change the gas type label, open the door and lift the label card from its slot in the front...

  • Page 71: Overpressure Threshold

    4 Preparing the Stabil-Ion System for Operation Press the SELECT key so that the time (in minutes) is flashing. DEGAS TIME 10 ▲ ▼ Press the arrow keys to select the desired degas time DEGAS (1 – 30 minutes). TIME 15 Press the SELECT key to store the new setting in memory.

  • Page 72: Line Frequency

    4 Preparing the Stabil-Ion System for Operation 4.3.4.4 Line Frequency Best noise rejection is achieved when the internal filters are set for the proper a.c. line frequency being used. The default factory setting for this function is 60 Hz. ▼ Press the arrow key until you see the setup menu.

  • Page 73: Stabil-Ion Gauge Turn On

    4 Preparing the Stabil-Ion System for Operation Press the SELECT key to store the new setting in memory. DISPLAY UPD SLOW Press CANCEL to return to the setup menu. Setup (Or press CANCEL again to return to the status display for the gauge tube Menu that is turned ON.) 4.4 Stabil-Ion Gauge Turn ON...
  • Page 74 4 Preparing the Stabil-Ion System for Operation All conductors in, on, or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times. Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product.

  • Page 75: Pressure Indication During Degas

    4 Preparing the Stabil-Ion System for Operation 4.5.1 Pressure Indication During Degas An approximate indication of pressure within the Stabil-Ion Gauge is provided on the digital display during degas. Observing this pressure indication rise, peak out and then fall is an excellent means of determining the optimum time of degas.

  • Page 76: Preparing For Convectron Gauge Operation

    MKS Instruments, Inc. does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and pressure relief disks can be located via an online search, and are listed on ThomasNet.com under “Relief Valves”...

  • Page 77: Understanding Convectron Gauge Pressure Measurement In Gases Other Than Nitrogen (Or Air)

    4 Preparing the Stabil-Ion System for Operation 4.7.1 Understanding Convectron Gauge Pressure Measurement in Gases other than Nitrogen (or Air) Convectron Gauges are thermal conductivity gauges of the Pirani type. These gauges transduce gas pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature. For different gases, the heat loss is different at any given true pressure and thus the pressure indication can be very different.

  • Page 78: Examples

    4 Preparing the Stabil-Ion System for Operation Pressure vs. Indicated N Pressure Curve Table 4-5 Fig. No. Pressure Range and Units Gases to 10 Torr 4-10 to 1000 Torr Ar, CO , CH , Freon 12, He 4-11 to 1000 Torr , Freon 22, Kr, Ne, O 4-12 to 10...
  • Page 79 4 Preparing the Stabil-Ion System for Operation Example 2 – Indicated to true pressure conversion. Assume you wish to determine the true pressure of helium in a system when the Convectron is indicating 10 Torr. On Figure 4-10 on page 4-23, read up from 10 Torr (N equivalent) indicated pressure to the Helium curve and then horizontally to the left to a true pressure of 4.5 Torr.
  • Page 80 4 Preparing the Stabil-Ion System for Operation , air freon 22 freon 12 Do not use this data with transducers other than the MKS Series 275 ® Convectron Gauge. Pressure units equivalence: µ m Hg = 1 mTorr = 1 x 10 Torr µ...

  • Page 81: Pressure Units Equivalence: 1 Μ M Hg = 1 Mtorr = 1 X

    4 Preparing the Stabil-Ion System for Operation 1000 freon 12 , air Use only when gauge axis is horizontal Do not use this data with transducers other than the MKS Series 275 ® Convectron Gauge. Pressure units equivalence: µ m Hg = 1 mTorr = 1 x 10 Torr µ...
  • Page 82 4 Preparing the Stabil-Ion System for Operation 1000 , air freon 22 Use only when gauge axis is horizontal Do not use this data with transducers other than the MKS Series 275 ® Convectron Gauge. Pressure units equivalence: µ m Hg = 1 mTorr = 1 x 10 Torr µ...

  • Page 83: Ar Co

    4 Preparing the Stabil-Ion System for Operation , air freon 22 freon 12 Do not use this data with transducers other than the MKS Series 275 ® Convectron Gauge. Pressure units equivalence: 1 mbar = 100 pascal Indicated Pressure (mbar) (nitrogen equivalent) Figure 4-12 Convectron Gauge Indicated vs.

  • Page 84: Do Not Use This Data With Transducers Other Than The Mks Series

    4 Preparing the Stabil-Ion System for Operation 1000 freon 12 , air Use only when gauge axis is horizontal Do not use this data with transducers other than the MKS Series 275 ® Convectron Gauge. Pressure units equivalence: 1 mbar = 100 pascal...
  • Page 85 4 Preparing the Stabil-Ion System for Operation 1000 , air freon 22 Use only when gauge axis is horizontal Do not use this data with transducers other than the MKS Series 275 ® Convectron Gauge. Pressure units equivalence: 1 mbar = 100 pascal...

  • Page 86: Ionization Gauge Auto Turn On/Off

    4 Preparing the Stabil-Ion System for Operation 4.8 Ionization Gauge Auto Turn ON/OFF Warning – If used improperly, Convectron Gauges can supply misleading pressure indications that can result in dangerous overpressure conditions within the system. For use with gases other than air or N , consult the gas type correction charts in Section 4.7.1 on page 4-19, or use a Memory Module programmed with data for the specific gas being used.

  • Page 87: Adjustment Of Convectron Gauge Zero And Atmospheric Pressure Indications

    4 Preparing the Stabil-Ion System for Operation 4.9 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system.

  • Page 88: Convectron Gauge Analog Output Signal

    4 Preparing the Stabil-Ion System for Operation 4.10 Convectron Gauge Analog Output Signal If the Convectron Gauge capability is installed, a voltage output signal proportional to the common logarithm of the pressure indication is provided on the rear panel of the Convectron Gauge module via a standard 1/8 in.

  • Page 89: Preparing For Process Control Operation

    4 Preparing the Stabil-Ion System for Operation and: the offset is at the factory adjusted 0V at 10 Torr (10 Pa). If the offset has been adjusted to other than 0V at 10 Torr (10 Pa), then the exponent value must be forced to -4 (-2 for Pa) when the pressure is at 1.0 x 10 Torr (10 Pa) by adding or subtracting a...

  • Page 90: Preparing For Use Of The Rs-232 Computer Interface

    4 Preparing the Stabil-Ion System for Operation After holding the SET button in for about 5 seconds, the setpoint will scroll until the button is released. It will scroll slowly until a decade boundary is crossed and then will speed up to facilitate rapid changes across many decades.

  • Page 91: And Rs-485 Command Syntax

    4 Preparing the Stabil-Ion System for Operation Figure 4-20 RS-485 Data Timing Consult the user's manual for the host computer to be sure the character framing settings used are in accord with that established via the switch configuration you have chosen for the RS-485 module. Communication is via ASCII strings.
  • Page 92 4 Preparing the Stabil-Ion System for Operation A response to the IG1 ON command of OK indicates only that a signal requesting that IG1 be turned ON has been sent to the electrometer. IG1 may fail to come ON, e.g., if the system pressure is too high or if the gauge is disconnected.
  • Page 93 4 Preparing the Stabil-Ion System for Operation CATH1 Definition: Select Filament 1, Filament 2, or both filaments for IG1 operation. Modifiers: 1, 2, or B Response: OKCRLF Example: From computer: CATH1 2 CRLF From 370: OKCRLF NOTES This function can be implemented from the electrometer front panel or from the remote setup connector as well as from the computer interface.
  • Page 94 4 Preparing the Stabil-Ion System for Operation Definition: Front Panel Status. Displays the status of the current tube setup condition. Modifiers: None Response: pressure range filament operation single both filament # pressure range filament operation single both filament # Example: If the Controller is set as follows: for IG1 –...

  • Page 95: Gauge Serial Number Display And Channel Data Swapping

    4 Preparing the Stabil-Ion System for Operation Modifier = single digit (1 through 6); response = single ASCII digit, 0 if the corresponding relay is inactive, 1 if active. See Example 1. Modifier = B; response = a byte of data with bits 0 through 5 set/clear according to whether the corresponding relay is active/inactive.
  • Page 96 4 Preparing the Stabil-Ion System for Operation example, we want to swap what is in IG1 gas a table (i.e. Serial No. A data) with what is in IG2 gas a table (i.e. Serial No. B data.) The symbol # will be used to represent a clear memory table. To do this you need to make the following swaps of data: Starting State 1...

  • Page 97: Convectron Gauge Serial Number Display And Memory Data Swapping

    4 Preparing the Stabil-Ion System for Operation Press CANCEL to return to the serial number display. Serial Press CANCEL again to return to the INFO Menu. IG No.’s (Press CANCEL yet again to return to the status display for the gauge tube that is turned ON.) Info Menu...
  • Page 98 Press the SELECT key to swap the data files. Hit SLCT To Swap! Press the SELECT key again to complete the swap action. Updating Changes! ▲ ▼ Use the arrow keys to check the results. CG TMP CG ##### Press CANCEL to return to the serial number display. Serial Press CANCEL again to return to the INFO Menu.

  • Page 99: Chapter 5 Operation Of A Stabil-Ion System

    Chapter 5 Operation of a Stabil-Ion System The instructions in this chapter assume the instructions for Setup, Installation, and Preparing For Operation have been completed. See Chapters 2, 3, and 4. Press the Power switch on the Control Unit to ON (see Figure 5-1). Convectron Gauge pressures will be displayed on lines A and B of the I G 1...
  • Page 100 5 Operation of a Stabil-Ion System Torr range, the indication is accurate to about ± 0.1 millitorr provided the In the 10 instrument has been carefully zeroed at vacuum. See Section 4.9 on page 4-29 for vacuum and atmosphere calibration procedures. For accurate use in the 10 range, zeroing should be repeated frequently.

  • Page 101: Stabil-Ion Gauge Theory Of Operation

    Chapter 6 Theory of Operation and Specifications This chapter provides a brief explanation of the theory of operation and the general specifications for Stabil-Ion gauges and Convectron gauges. 6.1 Stabil-Ion Gauge Theory of Operation 6.1.1 Operating Principles of Bayard-Alpert Ionization Gauges Ion collector Precision-wound, stress-relieved grid...

  • Page 102: Ray Limit Of Bayard-Alpert Gauges

    6 Theory of Operation and Specifications proportional to the density of molecules (pressure) in the gauge for pressures below approximately 1 x 10 Torr. The strength of the ion current is then indicated on an electrometer that is calibrated in units of pressure.

  • Page 103: Degassing Bayard-Alpert Gauges

    6 Theory of Operation and Specifications The amount of emission current that a B-A gauge requires for proper operation depends on many factors such as: the size or style of the gauge, the process in which the gauge is used, the pressure range of operation, and the desired accuracy of the indicated pressure.

  • Page 104: Convectron Gauge Theory Of Operation

    6 Theory of Operation and Specifications 6.2 Convectron Gauge Theory of Operation The Convectron Gauge transducer is represented in Figure 6-2 as R1, R2, R3, and R4. These four resistances form the legs of a bridge circuit, with R1 designating the sensor wire of the transducer. R2 is a resistive network in the tube that compensates for changes in the ambient temperature.

  • Page 105: Chapter 7 Service And Maintenance

    Service and Maintenance 7.1 Service Guidelines Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS.

  • Page 106: Damage Requiring Service

    7 Service and Maintenance 7.2 Damage Requiring Service Disconnect this product from the wall outlet and any other power sources, and refer servicing to Qualified Service Personnel if any the following conditions exist: ■ The gauge cable, power-supply cord, or plug is damaged. ■...
  • Page 107 7 Service and Maintenance Symptom Possible Cause Fault relay tripped. Unplugged Convectron Gauge or sensor broken in Convectron Gauge. Collector input from IG unplugged. Convectron Gauge zero badly out of calibration. Bad table data in Convectron Option. Microprocessor reset occurring on a module (probable circuit failure). Checksum failure on process control board.

  • Page 108: Fault Relay

    7 Service and Maintenance Symptom Possible Cause IG pressure readout very erratic. IG badly contaminated. Improper IG or Controller grounding. Bad collector cable. Excessive noise source. Interference from other charged particle source in chamber. Faulty electrometer. Green +18 LED out on control Improper connection of Power Supply cable.

  • Page 109: Electrometer Minimum Calibration Adjustment

    7 Service and Maintenance Table 7-2 Fault Cause/Action Cause Action Microprocessor reset occurring on some module Cycle power. (probable circuit failure). Call Qualified Service Technician. Unplugged Convectron Gauge. Plug in gauge. Sensor broken in Convectron Gauge. Replace gauge. Convectron Gauge zero badly out of calibration. Adjust zero calibration.

  • Page 110: Troubleshooting The Convectron Gauge Module

    7 Service and Maintenance 7.5 Troubleshooting the Convectron Gauge Module Table 7-4 Convectron Gauge Module Troubles. Symptom Possible Cause Pressure reading grossly in error. Controller out of calibration. Unknown gas type. Gauge not mounted horizontally (see Section 3.3 on page 3-3). Sensor damaged (e.g., by reactive gas).

  • Page 111: Cleaning Contaminated Convectron Gauges

    7 Service and Maintenance 7.7 Cleaning Contaminated Convectron Gauges The fumes from solvents such as trichloroethylene, perchlorethylene, toluene, and acetone can be dangerous to health if inhaled. If used, use only in well- ventilated area exhausted to the outdoors. Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment.

  • Page 112: Overpressure Shutdown

    7 Service and Maintenance 7.9 Overpressure Shutdown As pressure increases, the ion current to the collector increases until the high density of gas molecules begins to interfere with the ionization process. When some electrons cannot acquire sufficient energy to ionize the gas molecules, the collector current no longer increases with increasing pressure. This pressure is called the “turn around”...

  • Page 113: Turn-Off History

    7 Service and Maintenance Press CANCEL to return to the setup menu. Setup (Or press CANCEL again to return to the status display for the gauge tube Menu that is turned ON.) 7.10 Turn-OFF History In the event of an unplanned filament turnoff, the Turnoff History display provides an indication of what caused the Stabil-Ion Gauge to shut OFF.

  • Page 114: Troubleshooting The Process Control Module

    7 Service and Maintenance 7.11 Troubleshooting the Process Control Module If the μP FAILURE LED is lit or flashing (see Figure 7-5), there is a probable circuit failure. Return this product to a service facility designated by G-P for repair. The setpoints are read from non-volatile memory into RAM when the unit powers up.

  • Page 115: Troubleshooting

    7 Service and Maintenance 7.13 RS-485 Troubleshooting In the event of problems with the RS-485 communications verify the following items for proper configuration. Check configuration switch settings. Ensure the baud rate, character framing, and interface protocol are matched to the host computer or terminal’s requirements.

  • Page 116: Troubleshooting Flow Charts

    7 Service and Maintenance Carefully remove the bus ribbon cable from all modules located to the right (as you face the front panel) of the position where the module is to be installed. Remove connectors slowly using pull tabs. Lift out the filler module at the position where the module is to be installed. Install the module in its proper position making sure all ends lock together.
  • Page 117 7 Service and Maintenance 370 IG TURN ON BEGIN SELECT CORRECT SELECT CORRECT IG1 OR IG2 REPLACE CABLE RANGE CATHODE SWITCH ON CATHODE PRESSURE CONTR. CHECK DOES SWITCH RANGE SWITCH CHECK PRESSURE CHECK CATHODE INTERCONNECT CONTROLLER IG SWITCH RANGE SWITCH SWITCH CABLE INTERCONNECT...
  • Page 118 7 Service and Maintenance CONVECTRON DISPLAY BEGIN SELECT CORRECT REPLACE CABLE READ PRESSURE REPLACE GAUGE UNITS DISPLAY GAUGE SWITCH PRESSURE DAMAGED OR CHECK CHECK CHECK DISPLAY CABLE DISPLAY AS CONTAMINATED? CONVECTRON CONVECTRON CORRECTLY? DAMAGED? UNITS SWITCH EXPECTED? GAUGE CABLE GAUGE CABLE RANGE IN CHECK...

  • Page 119: Index

    Index 4-10 Vacuum connections STABIL-ION Gauge Zero and Atmospheric Indications Gases other than nitrogen or air AC line voltage 4-29 4-19 2-14 Between 180V to 240V CONVECTRON Gauge Module Grounding the system 2-14 Between 90V to 130V 3-19 Troubleshooting Guard Analog output Convectron Gauge Test Procedure CONVECTRON Gauge...
  • Page 120 Index 4-14 Pressure Display Update Speed Theory of Operation Pressure measurement CONVECTRON Gauge STABIL-ION Gauge STABIL-ION Gauge Safety Pressure range Tips 1-vi damage requiring service Pressure Units Installation instructions CONVECTRON Gauge - Setup Process Control Scale factor CONVECTRON setup Top cover Selecting Gas Type for the Display formats 4-11...
  • Page 122 Series 370 ® Stabil-Ion Vacuum Measurement Controller Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual Instruction manual part number 370119...

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Stabil-ion 370501Stabil-ion 370502

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