MKS Granville-Phillips 358 series Instruction Manual
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MKS Granville-Phillips 358 series Instruction Manual

Micro-ion vacuum gauge controller
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Series 358
Granville-Phillips
Series 358 Micro-Ion
®
®
Vacuum Gauge Controller
Instruction Manual
Instruction manual part number 358013
Revision B - November 2014

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  • Page 1 Series 358 Granville-Phillips Series 358 Micro-Ion ® ® Vacuum Gauge Controller Instruction Manual Instruction manual part number 358013 Revision B - November 2014...
  • Page 3 Instruction Manual ® ® © 2014 MKS Instruments, Inc. All rights reserved. Granville-Phillips , Micro-Ion , and ® Convectron are registered trademarks of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.
  • Page 4 Granville-Phillips Series 358 Micro-Ion ® ® Vacuum Gauge Controllerule Catalog numbers for Series 358 Micro-Ion Controllers Controller for a Micro-Ion gauge, with 3-line display, electron bombardent degas, and remote input/output interface - CE Marked Half-rack mount: 358501 - # # # - # # Left mount for 19-inch rack: 358502 - # # # - # # Center mount for 19-inch rack:...
  • Page 5 Table of Contents Chapter 1 Before You Begin ......Caution and Warning Statements ....Reading and Following Instructions .

  • Page 6: Table Of Contents

    Table of Contents Chapter 4 Installation ........49 Gauge Installation Tips .
  • Page 7 Table of Contents Chapter 7 Theory of Operation ......101 Micro-Ion Gauge Theory of Operation ....101 Convectron Gauge Theory of Operation .
  • Page 8 Table of Contents Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 9 Reading and Following Instructions or maintaining the module. Failure to comply with the instructions violates standards of design, manufacture, and intended use of the module. MKS Instruments, Inc./ Granville-Phillips disclaim all liability for the customer's failure to comply with the instructions.
  • Page 10 Chapter 1 • Follow instructions – Follow all installation, operating and maintenance instructions. • Heed warnings and cautions – Adhere to all warnings and caution statements on the product and in these instructions. • Parts and accessories – Install only those replacement parts and accessories that are recommended by Granville-Phillips.
  • Page 11 MKS Instruments, Inc./ Granville-Phillips certifies that this product met its Certification published specifications at the time of shipment from the factory. MKS Instruments, Inc./ Granville-Phillips further certifies that its calibration measurements are traceable to the National Institute of Standards and Technology to the extent allowed by the Institute's calibration facility.
  • Page 12 For Customer Service or Technical Support 24 hours per day, 7 days per week, every day of the year including holidays: Phone: +1-800-227-8766 or +1-303-652-4691 Email: gp-csr@mksinst.com MKS, Granville-Phillips Division 6450 Dry Creek Parkway Longmont, CO 80503 USA Phone: 1-303-652-4691 or 1-800-776-6543...
  • Page 13 Chapter 2 System Components The Series 358 Micro-Ion Vacuum Measurement System can operate one Micro-Ion Gauge along with two Convectron Gauges simultaneously, or one Micro-Ion Gauge along with one Convectron Gauge and one Capacitance Manometer Gauge simultaneously. Pressure readout is via three front panel displays, analog output, and available computer interface.
  • Page 14 Chapter 2 Figure 2-2 Controller Front Panel Micro-Ion display Degas “momentary” ON/OFF switch Convectron Gauge A display Degas LED Convectron Gauge B or Capacitance Process control channel labels Manometer display Unit of measure label: Torr, mbar or pascal, Process control channel indicator lights user selectable Micro-Ion Gauge “momentary”...
  • Page 15 System Components Figure 2-3 Controller Front Panel with Door Open Filament select switch: filament 1, filament 2, or both Pressure range selector Sensitivity adjustment Atmosphere adjustment, Convectron or Capacitance Manometer gauge B Vacuum zero adjustment, Convectron or Capacitance Manometer gauge B Process control setpoint 3-position manual override switches.
  • Page 16 Chapter 2 Figure 2-4 Controller Top View with Cover Removed 1. Power supply board 2. Process control setpoint option board 3. Convectron or Capacitance Manometer gauge option board 4. Electrometer board 5. Filament/grid supply board 6. Interface option board (RS-232 or RS-485) Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev.
  • Page 17 System Components Options A 2-setpoint or 6-setpoint relay option can either be factory installed or Process Control Relay added at any time by the user. The set points are adjustable from –10 atmosphere to 1 x 10 Torr with override switches and front panel status indication.
  • Page 18 Chapter 2 RS-232 Specifications Figure 2-6 RS-232 Wiring Connector See Section 3.12 for connector pin assignments. DB–25S connector Table 2-1 RS-232 Specifications Item Specification Format EIA standard RS-232-C, half duplex, asynchronous Data Rates 75,150,300,600,1200,2400,4800,9600 baud Character length 7 or 8 bit ASCII, switch selectable Parity Odd, even, or none, switch selectable Stop bits...
  • Page 19 System Components RS-485 Specifications Figure 2-7 RS-485 Wiring Connector 1) J 1 DE9P Connector for RS-485/422 computer interface 2) Address dial 3) J 2 DE9P Connector for RS-485/422 computer interface See Section 3.12 for connector pin assignments Table 2-2 RS-485 Specifications Item Specification Format...
  • Page 20 Chapter 2 Specifications Table 2-3 Specifications Micro-Ion System Pressure Range for N or air –9 –9 –7 Lower Measurement Limit < 1 x 10 Torr (1.3 x 10 mbar) (1.3 x 10 pascal) at 4 mA emission Upper Measurement Limit Atmosphere Controller Electronic accuracy...
  • Page 21 System Components Table 2-3 Specifications Controller Options Process Control Relay Configuration SPDT, Form C Contact Rating 5A @ 120 VAC, 4A @ 240 VAC resistive or 5A @ 30 Vdc Channels 6 maximum, 2 per operating gauge maximum Hysteresis Setpoint adjustment Digital, 2 significant digits plus exponent Digital Interfaces RS-232 or RS-485/422...
  • Page 22 Chapter 2 Table 2-3 Specifications Convectron Gauge –4 Pressure Range 1 x 10 Torr to 990 Torr, N equivalent –4 Display Resolution 2 significant digits, except for 1 significant digit in 1 x 10 Torr decade Gas Type , air (for direct reading) Display Update Time 0.5 sec.
  • Page 23 System Components Table 2-3 Specifications Capacitance Manometer Specifications Gauge Type Any capacitance manometer transducer that requires ± 15 Vdc power at < 250 mA and outputs 0–10 Vdc proportional to pressure Accuracy 0.01% of full scale (as limited by display resolution) Display Resolution Highest 3 decades –...
  • Page 24 Chapter 2 The dimensions of the Micro-Ion gauge are shown in Figure 2-9. Dimensions are in cm (in.). H dimensions are given in Table 2-4. Figure 2-9 Micro-Ion Gauge with Connector The dimensions of the Convectron gauge are shown Figure 2-10. Dimensions are in cm (in.).
  • Page 25 System Components Table 2-4 Fittings Fitting Description Dimension H Dimension J 0.75 inch port diameter 9.4 cm (3.7 in.) Not applicable 1.0 inch port diameter 9.4 cm (3.7 in.) Not applicable 15 mm port diameter 9.4 cm (3.7 in.) Not applicable 18 mm port diameter 9.4 cm (3.7 in.) Not applicable...
  • Page 26 Chapter 2 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 27 Chapter 3 Initial Setup Now is a convenient time to make any required switch changes before Controller Setup mounting the Controller in its desired location. If the pressure display units of measure are correct (see Figure 3-1), and you do not want to change the degas power timer from the factory setting of 10 minutes, skip to Process Control Setup on page 32.
  • Page 28 Chapter 3 Figure 3-2 Location of Screws for Top Cover Removal Bracket Do not remove the two lower front screws If units of measure are as desired (see Figure 3-1), skip to Changing Display Pressure Units Setup Update Rate on Electrometer Module on page 30. Your unit will have been shipped from the factory preset to display the unit Changing Units of Measure for Electrometer...
  • Page 29 Initial Setup Figure 3-3 Ion Gauge Electrometer Module TopView Unit of Measure Slow Update Overpressure Shutdown Potentiometer Units of measure switch ON and OFF positions Set the switch to the desired position: Off = Torr/mbar units; On = pascal units. You must also change the setting of the unit of measure switch on the Dual Convectron gauge as described in Changing Units of Measure for Convectron Gauge on page 30.
  • Page 30 Chapter 3 This control is factory set so the ion gauge will shut down when the pressure Overpressure Shutdown Adjustment rises above the levels given in Table 3-1. Table 3-1 Pressure Range Settings Pressure Range Designation (Medium Vacuum) (High Vacuum) (Ultrahigh Vacuum) 20 μA Emission Current...
  • Page 31 Initial Setup Figure 3-5 Convectron Gauge Module Top View pascal Slow Update mbar Units of measure switch ON and OFF positions When “ON”, this the Slow Update switch on the Convectron module Display Update Rate Switch on Convectron enables pressure averaging. The display will be updated approximately Module every 3 seconds.
  • Page 32 Chapter 3 mbar or pascal units. Modify the units of measure of the electrometer module to be consistent with the Capcitance Manometer gauge. (See Changing Units of Measure for Electrometer Module on page 28.) Slip the label card out of the top of the front panel and apply the appropriate pressure units label (see Figure 3-4 on page 29).
  • Page 33 Diagram of Control Logic that the following steps be followed. If application assistance is desired, contact an MKS, Granville-Phillips Division application engineer. Use the catalog number on the front of the process control module together with Figure 3-8 and Figure 3-9 to identify the process control capability installed in your unit.
  • Page 34 The required process control connections may be made later. (See Connecting Process Control Relays on page 63.) If application assistance is desired, contact an MKS, Granville-Phillips Division application engineer. Figure 3-8 2-Channel Process Control Option Card...
  • Page 35 Initial Setup Figure 3-9 6-Channel Process Control Option Card Channel 1 and Channel 2 Note 1 6 independent sets are assigned to the NO C NC of relay contacts Micro-Ion Gauge. CH. 1 T W P PROCESS CONTROL Channels 3 and 4 are factory assigned to "...
  • Page 36 Chapter 3 Table 3-3 Relay Polarity Switch Settings Switch Channel Pressure Indication Switch Channel Pressure Indication Settings Activated Relative to Setpoint Settings Activated Relative to Setpoint Below (factory setting) Below (factory setting) Above Above Below (factory setting) Below (factory setting) Above Above Below (factory setting)
  • Page 37 Initial Setup Table 3-4 Setpoint Hysteresis Setpoint Pressure Pressure Change Relay Actuation Pressure –7 –7 6.3 x 10 Falling 6.2 x 10 –7 –7 –7 6.3 x 10 Rising 6.3 x 10 + 10% = 7.0 x 10 If your Controller does not have this capability, skip to RS-485 Computer 3.12 RS-232 Computer Interface Setup...
  • Page 38 Chapter 3 Figure 3-11 RS-232 Connector DB–25S connector Table 3-5 RS-232 Connector Pin Assignments Signal Pin Number Direction Protective Ground – Transmitted Data To computer Received Data To controller Request to Send (RTS) To controller Clear to Send (CTS) To controller Data Set Ready (DSR) To controller Signal Ground (common return)
  • Page 39 Initial Setup Selecting Byte Format for Baud Rate for RS-232 Module RS-232 Module Dip switches 6-8 are used to control the baud rate. The settings are listed in Table 3-6. Figure 3-12 RS-232 Module Top View Table 3-6 RS-232 Baud Rates Baud Rate On (factory setting) On (factory setting)
  • Page 40 Chapter 3 Character Framing for RS-232 Module Switches 3-5 control the number of characters, parity, and number of stop bits. Table 3-7 RS-232 Character Framing Character Bits Parity Stop Bits None 1 (factory (factory setting) (factory setting) (factory setting) (factory setting) (factory setting) setting) or 2 Even...
  • Page 41 Initial Setup Refer to Connecting the RS-232 Computer Interface Handshake Lines on Handshake Line Control Switches for RS-232 page 65 for more detailed information on the handshaking mechanism. Module Table 3-9 RS-232 Handshake Line Control Switches Line Switch Description Internal Switch Function Factory Setting CLEAR to SEND CTS=1 and DSR=1: When...
  • Page 42 Chapter 3 Table 3-10 RS-232 Controller Outputs Line Description Internal Switch Function Factory Setting REQUEST TO SEND: INVERT RTS: When OFF De-asserted by controller on inverts the polarity of the power-up. Asserted by RTS line allowing controller upon receipt of a nonstandard connection message terminator as a directly to host computer...
  • Page 43 Initial Setup Figure 3-13 RS-485 Bias Resistors Figure 3-14 RS-485 Wiring Connector Table 3-11 RS–485 Connector Pins Signal Pin Number –TX –RX Ground Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 44 Chapter 3 Connect TX on the gauge Controller to RX on the host computer and connect RX on the gauge Controller to TX on the host computer. Connect TX to TX and RX to RX on all controllers. If the computer sends and receives data on 2 wires, connect +TX to +RX and connect –TX to –RX.
  • Page 45 Initial Setup Figure 3-16 RS-485 Module - Top View Table 3-12 RS-485 Switch Weight when S1 Switches are set to OFF Weight S1.1 S1.2 S1.3 S1.4 • To prevent data contentions, no two of the controller modules should be set with the same address. •...
  • Page 46 Chapter 3 Selecting Byte Format for Baud Rate for RS-485 RS-485 Module Baud rate for the RS-485 computer interface is determined by S2.6, S2.7, S2.8. Table 3-13 RS-485 Baud Rates S2.6 S2.7 S2.8 Baud Rate 19200 (factory setting) 9600 4800 2400 1200 Character Framing for the RS-485 Computer Interface...
  • Page 47 Initial Setup Assuming you have completed the above instructions, the Controller setup 3.14 Replacing the Controller Cover is now complete. Replace the top cover. Make sure the door hinge pin is seated correctly. Replace the four top cover Phillips head screws and the side-by-side clamp, if used.
  • Page 48 Chapter 3 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...

  • Page 49: Chapter 4 Installation

    Chapter 4 Installation CAUTION Failure to check system programming before switching to automatic operation can cause measurement error. To avoid measurement error due to inaccurate output signals, carefully check the system programming before switching to automatic operation. WARNING Failure to install appropriate pressure relief devices for high−pressure applications can cause product damage or personal injury.

  • Page 50: Cable Installation

    Chapter 4 It is intended that all wiring either to or from the controller, whether Cable Installation supplied by Granville-Phillips or not, be installed in accordance with the safety requirements of NEC/NFPA 70. Cables provided by Granville-Phillips for connection to sensors or transducers is, at a minimum, designed for use as appliance wiring material (UL category AVLV2), and is constructed of appropriate material and dimensions for the voltages and currents provided by the controller.

  • Page 51: Mounting Configurations

    The standard mounting configuration is 1/2-rack mount (358501). Other configurations are available using the mounting hardware kits listed in Table 4-1, and shown in Figure 4-1. Contact an MKS, Granville-Phillips Division Customer Service Representative for specail mounting configurations. See page 4 of this instruction manual for more information and catalog numbers.
  • Page 52 Chapter 4 Figure 4-1 Controller Mounting Configurations Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...

  • Page 53: Line Voltage

    Installation The controller will operate over a line voltage range of 100 to 240 VAC, 50 Line Voltage to 60 Hz. All that is required is that a line cord be selected to match your available power receptacle to the power input connector located on the rear of the Controller.

  • Page 54: Mounting Options

    Chapter 4 • Physical dimensions of Micro-Ion and Convectron Gauges are shown in Figure 2-9 on page 24 and Figure 2-10 on page 24. • Mounting clearance dimensions for Convectron Gauges are shown in Figure 4-2. 4.10 Mounting Options Compression Mount/Quick Connect Do not use for positive pressure applications.

  • Page 55: Grounding The System

    Installation Figure 4-2 Convectron Gauge Installation 4.11 Grounding the System When high voltages are used within the vacuum system and the gauge envelope is not reliably grounded through its vacuum connection, either a separate ground wire must be added, or the envelope must be shielded to positively prevent human contact.
  • Page 56 Chapter 4 High voltage can couple through a gas to the internal electrodes of a gauge. Do not touch the exposed pins on any gauge installed on a vacuum system where high voltage is present. WARNING Touching the pins on the gauge in a high−voltage environment can cause an electrical discharge through a gas or plasma, resulting in property damage or personal injury due to electrical shock.
  • Page 57 Installation • Physically examine the grounding of both the controller and the vacuum System Ground Test Procedure chamber to assure that all exposed conductors of the system are properly grounded. • Note that a horizontal “O” ring or “L” ring gasket, without metal clamps, can leave the chamber above it electrically isolated.
  • Page 58 Chapter 4 NOTE: The placement of a second ground wire, (dashed line in Figure 4-3), between the vacuum chamber and the controller chassis is not a safe grounding procedure. Large currents could flow through it. Figure 4-3 System Grounding Do NOT Make a Direct Chassis to Vacuum System Connection 358 Vacuum Gauge Controller...

  • Page 59: Connecting Analog Outputs

    Installation 4.12 Connecting Analog Outputs This voltage is proportional to the logarithm of the pressure, scaled to 1 V Electrometer Module Analog Output Signal –11 per decade with 0 V at 1 x 10 Torr. When the Micro-Ion gauge is turned OFF, the output will switch to slightly over +10 V.

  • Page 60: Connecting A Capacitance Manometer

    Chapter 4 If you have a Capacitance Manometer capability installed, signal voltages 4.13 Connecting a Capacitance Manometer are provided on the back of the Convectron Gauge module via a standard 1/8 in. miniature phone jack - the Analog Output B port shown in Figure 4-4.
  • Page 61 Installation The analog output for the capacitance manometer is a dc voltage Capacitance Manometer Analog Output Signal proportional to the pressure with a range of 0 to 10 volts, proportional to the transducer output. Refer to the documentation provided with your transducer for a description of this output.
  • Page 62 Chapter 4 Table 4-2 Capacitance Manometer Analog Output Voltage/Pressure Volts Pressure Pressure Pressure Pressure Torr Torr Torr Torr 1000 Torr 100 Torr 10 Torr 1Torr Head Head head Head 1000 .001 Pressure = Volts multiplied by Scaling # P = V x 100 (1000 Torr Head) P = V x 10 (100 Torr Head) P = V x 1 (10 Torr Head) P = V x .1 (1 Torr Head)

  • Page 63: Connecting Process Control Relays

    Installation For instructions for setting up this module, see Process Control Setup on 4.14 Connecting Process Control Relays page 32. The process control connector is embossed with letters identifying corner pins. Table 4-3 shows the letters designating the 3 pins assigned to each of the 6 setpoint channels.
  • Page 64 Chapter 4 WARNING Failure to install appropriate pressure relief devices for high−pressure applications can cause product damage or personal injury. For automatic backfilling and other applications in which malfunction or normal process conditions can cause high pressures to occur, install appropriate pressure relief devices. Using Figure 4-8 and Table 4-3, and circuit schematics you have prepared, make up a cable to connect the various system components which are to be controlled.

  • Page 65: Connecting The Rs-232 Computer Interface Handshake Lines

    Installation For instructions for setting up this interface, see RS-232 Computer Interface 4.15 Connecting the RS-232 Computer Interface Setup on page 37. Handshake Lines The DTR line is set true on power up to indicate it is on line. When the controller receives a start bit on the received data line it will input and buffer a character.

  • Page 66: Connecting Rs-485 Computer Interface

    Chapter 4 CTS, DSR RS-232 Handshake Line Summary Set the computer to indicate that controller may output the next byte in its message. As shipped from the factory these lines are forced “TRUE” by the switch settings of the controller RS-232 printed circuit board. Thus the controller will automatically assume the host is ready to receive.

  • Page 67: Chapter 5 Preparing For Operation

    Chapter 5 Preparing for Operation Before preparing to operate the controller, make sure that: Preparing for Pressure Measurement • the controller has been properly set up and installed per the instructions in Chapter 3 and Chapter 4, • the gas in your vacuum system is air or N .

  • Page 68: Alternate On/Off Gauge Control

    Chapter 5 The Micro-Ion Gauge can be turned ON and OFF in the following ways: Alternate ON/OFF Gauge Control • Use the front panel Micro-Ion Gauge “momentary” GAUGE ON/OFF switch. See Figure 5-2. • Automatically via the Auto ON function of the Convectron gauge module.

  • Page 69: Micro-Ion Analog Output Signal

    Preparing for Operation Figure 5-3 Input/Output Wiring Connector See Figure 2-5, Item #10 Table 5-1 Remote Input/Output Pin Functions Pin Number Function Pin Number Function Gauge On/Off Remote* Degas On/Off Remote* Ground Ground Not Used Not Used Gauge Status Common Gauge Status N.O.
  • Page 70 Chapter 5 Normal Measurement Operation Pressure indication: V–11 = 10 Torr or mbar V–9 Pi = 10 pascal When Degassing Pressure indication: –13.92 Pi = 10 V Torr or mbar –11.92 Pi = 10 V pascal When the gauge is OFF V = 11 volts This signal voltage is determined by the pressure indicated on the Micro-Ion Gauge display.

  • Page 71: Preparing For Convectron Gauge Operation

    Preparing for Operation Convectron Gauge pressures are indicated on lines A and B of the Preparing for Convectron Gauge Operation Controller display. WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization.
  • Page 72 Chapter 5 loss from the Convectron sensor as will argon at atmospheric pressure. Thus if the pressure indication of the Convectron gauge is not properly corrected for argon, an operator attempting to fill a vacuum system with 1/2 atmosphere of argon would observe an indication of only 12 Torr when the actual pressure had risen to the desired 380 Torr.
  • Page 73 Preparing for Operation pressure vary widely from gas to gas because the thermal losses at higher pressures are greatly different for different gases. If you must measure the pressure of gases other than N or air, use Figure 5-6 through Figure 5-11 to determine the maximum safe indicated pressure for the other gas as explained below.
  • Page 74 Chapter 5 –4 –1 Figure 5-6 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 10 Torr Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 75 Preparing for Operation –1 Figure 5-7 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 Torr Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 76 Chapter 5 –1 Figure 5-8 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 Torr Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 77 Preparing for Operation –4 –1 Figure 5-9 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 10 mbar Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 78 Chapter 5 –1 Figure 5-10 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 mbar Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 79 Preparing for Operation –1 Figure 5-11 True pressTrue Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 mbar Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...

  • Page 80: Micro-Ion Gauge Auto On/Off

    Chapter 5 Micro-Ion Gauge Auto ON/OFF WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization. If the controller will measure any gas other than N or air, before connecting the controller to system control devices, adjust pressure outputs for the process gas that will be used.

  • Page 81: Gauge Zero And Atmospheric Pressure Adjustment

    Preparing for Operation Figure 5-12 IG Auto Switch for Convectron Gauge IG AUTO Switch Convectron Gauge (A & B) ATM (atmosphere) and VAC (vacuum) adjustment potentiometers Gauge Zero and Atmospheric Pressure WARNING Adjustment Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization.

  • Page 82: Convectron Gauge Analog Output Signal

    Chapter 5 controller indicates the local atmospheric pressure in the pressure units you have selected. NOTE: 1 atmosphere at sea level is 7.6 x 10 Torr; 1.0 x 10 mbar; 1.0 x 10 pascal. Repeat this procedure for Convectron Gauge B. If the Convectron gauge capability is installed, a voltage output signal 5.10 Convectron Gauge Analog...
  • Page 83 Preparing for Operation Figure 5-14 Convectron Gauge Analog Output versus Pressure factory adjustment lower adjust limit upper adjust limit Gauge analog output (V) CONVECTRON The voltage signal is smooth and continuous throughout all the decades of pressure measurement. This format is useful for computerized data acquisition because a simple equation (finding the common antilogarithm) may be programmed to calculate pressure from the voltage output.

  • Page 84: Preparing For Capacitance Manometer Operation

    Chapter 5 (–7+3) equation instead of –4, i.e., P = 10 . Furthermore for the same offset, if –2 the pressure were, say, 1 x 10 Torr, then the output voltage would be –5 V. (–5+3) The pressure would be calculated as P = 10 The capacitance manometer pressure is read in the third display line of the 5.11 Preparing for Capacitance...

  • Page 85: Preparing For Process Control Operation

    Preparing for Operation When first installed, the transducer zero-adjust should be set using a Initial Transducer Calibration voltmeter to read Zero when at a system pressure below the minimum pressure range of the transducer. Refer to the documentation accompanying your capacitance manometer transducer for instructions on this procedure. You should also at this time adjust the VAC on the 358 controller, with the gauge not attached to the controller, per the instructions below.
  • Page 86 Chapter 5 –6 For example, if the setpoint is programmed to 6.6 x 10 Torr the relay will –6 activate at 6.5 x 10 Torr (on falling pressure) and will deactivate when the –6 –6 –6 –6 pressure rises to 6.6 x 10 + 0.7 x 10 + 0.1 x 10 or 7.4 x 10...

  • Page 87: Preparing To Use Rs-232 Computer Interface

    Preparing for Operation To Modify a Setpoint Set the selector switch to the number of the channel you wish to modify (see Figure 5-16). Press and hold one of the setpoint Set pushbuttons for the direction you wish the setpoint to change. The setpoint will scroll until the switch is released.
  • Page 88 Chapter 5 Command Syntax for RS-232 Computer Interface Definition: Turn degas ON or OFF. Modifiers: ON or OFF Response: OK if command accepted, or INVALID if rejected. Example: From computer: DG ON CRLF From controller: OKCRLF • Command is INVALID if the Ion gauge is OFF. •...
  • Page 89 Preparing for Operation Definition: Turn the Ion gauge ON or OFF. Modifiers: ON or OFF Response: OK if command accepted, INVALID if rejected. Example: From computer: IG1 ON CRLF From controller: OKCRLF • The IG1 ON command will be rejected as INVALID if the Ion gauge is already ON, and IG1 OFF will be rejected if the Ion gauge is already OFF.

  • Page 90: Rs-232 Error Messages

    Chapter 5 From computer: PCS B CRLF From controller: GCRLF (Note that ASCII “G” corresponds to the bit pattern 01000111 and represents the status of the PC channels in bits 0 through 5). From computer: PCS CRLF From controller: 1,1,1,0,0,0 CRLF If an error is found in the incoming message, the following messages will be 5.14 RS-232 Error Messages...
  • Page 91 Preparing for Operation Command Syntax for RS-485 Computer Interface Definition: Turn degas ON or OFF. Modifiers: ON or OFF. Response: OK if command accepted, or INVALID if rejected. Example: From computer: #AADG ON CR From controller: OKCR • Command is INVALID if the Ion gauge is OFF. •...
  • Page 92 Chapter 5 Definition: Turn the Ion gauge ON or OFF. Modifiers: ON or OFF Response: OK is command accepted, INVALID if rejected. Example: From computer: #AAIG1 ON CR From controller: OKCR • The IG ON command will be rejected as INVALID if the Ion gauge is already ON, and IG OFF will be rejected if the Ion gauge is already OFF.

  • Page 93: Error Messages

    Preparing for Operation Examples: Assume that channels 1through 3 are active, and 4 through 6 are inactive: From computer: #AAPCS 1 CR From controller: From computer: #AAPCS B CR From controller: The ASCII “G” corresponds to the bit pattern 01000111 and represents the status of the PC channels).
  • Page 94 Chapter 5 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...

  • Page 95: Operation

    Chapter 6 Operation The instructions in this chapter assume the instructions for Setup, Installation, and Preparing for Operation have been completed. See Chapter 2, Chapter 3, and Chapter 4. For theories of operation for the Micro-Ion Gauge, Convectron Gauge, electrometer, capacitance manometer, and process control modules, see Chapter 7.
  • Page 96 Chapter 6 Figure 6-2 Controller Front Panel DEGAS 7.5 – 6 O F F 6.4 – 2 GAUGE 3.2 + 2 O F F 358 Micro-Ion Controller TORR If you have Convectron Gauge capability installed and have prepared your system for automatic operation of the Micro-Ion Gauge per Micro-Ion Gauge Auto ON/OFF on page 80, the Micro-Ion Gauge will turn ON and OFF automatically.

  • Page 97: Micro-Ion Gauge On/Off

    Operation Stable pressure measurement requires that all the environmental parameters in, on, and around the vacuum gauge and vacuum system remain unchanged during measurement. Therefore, never attempt meaningful measurements immediately after turning on the Micro-Ion Gauge or immediately after degassing the gauge. Permit sufficient time for the environmental parameters to stabilize.

  • Page 98: Special Considerations For Use Below

    Chapter 6 During a fast pumpdown from atmosphere, thermal effects will prevent the Special Considerations –3 –3 for Use Below 10 Torr Convectron gauge from tracking pressure accurately below 1 x 10 Torr. –4 After about 15 minutes, indications in the 1 x 10 range will be valid and response will be rapid.
  • Page 99 Operation In general, higher emissions are used at lower pressures. If you are measuring very low pressures the 4 mA range is best. Lower emissions will increase tube life. The overpressure shutdown point will change inversely proportional to the emission range. See Table 3-1 on page 30. The sensitivity adjustment (see Figure 6-3) on the electrometer module is Sensitivity Adjustment used to match gauges of different sensitivities.

  • Page 100: Filament Selection For Electrometer Module

    Chapter 6 The Filament Select switch (see Figure 6-4) is used to operate each filament Filament Selection for Electrometer Module individually or both in series. Normally only one filament should be selected. During degas, selecting the BOTH position will clean up the tube more satisfactorily allowing for a lower ultimate pressure reading.

  • Page 101: Theory Of Operation

    Chapter 7 Theory of Operation The functional parts of a typical Micro-Ion Gauge are the filament Micro-Ion Gauge Theory of Operation (cathode), grid (anode) and ion collector, which are shown schematically in Figure 7-1. These electrodes are maintained by the gauge Controller at +30, +180, and 0 V, relative to ground, respectively.

  • Page 102: Convectron Gauge Theory Of Operation

    Chapter 7 The Convectron Gauge transducer is represented in Figure 7-2 as R1, R2, Convectron Gauge Theory of Operation R3, and R4. These four resistances form the legs of a bridge circuit, with R1 designating the sensor wire of the transducer. R2 is a resistive network in the tube that compensates for changes in the ambient temperature.

  • Page 103: Microcontrollers And Bus Structure

    Theory of Operation The electrometer module in the controller has a dedicated microcontroller Microcontrollers and Bus Structure with internal ROM, RAM, timing, and interrupt management functions. This architecture provides high performance at low cost with greater reliability and noise immunity than more complicated microprocessor systems using external buses and memory hardware.
  • Page 104 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...

  • Page 105: Service

    Some minor difficulties are readily corrected in the field. Each module in Service Guidelines the controller has fault indicator LEDs which help localize failures. If the product requires service, contact the MKS, Granville-Phillips Division Customer Service Department at +1-800-227-8766 or +1-303-652-4691 for troubleshooting help over the phone.

  • Page 106: Damage Requiring Service

    Chapter 8 Disconnect this product from the power source and refer servicing to Damage Requiring Service qualified service personnel if any the following conditions exist: • A gauge cable or plug is damaged. • Liquid has been spilled onto, or objects have fallen into, the product. •...

  • Page 107: Troubleshooting

    Service If any of the conditions described above have occurred, troubleshooting is Troubleshooting required to determine the repairs that are necessary. Table 8-1 Symptoms and Possible Causes Symptom Possible Cause Unit will not power-up, no response to Power fuse blown power switch Wrong line voltage selection, see Line Voltage on page 53 Power fuse blows repeatedly...
  • Page 108 Chapter 8 Table 8-1 Symptoms and Possible Causes Symptom Possible Cause Micro-Ion Gauge pressure reads Collector unplugged extremely low Bad collector cable Faulty electrometer Collector is coated with material Micro-Ion Gauge pressure readout very Micro-Ion Gauge badly contaminated erratic Improper Micro-Ion Gauge or Controller grounding Bad collector cable Excessive electrical noise source causing offset Interference from other charged particle source in chamber...

  • Page 109: Overpressure Shutdown

    Service As pressure increases, the ion current to the collector increases until the Overpressure Shutdown high density of gas molecules begins to interfere with the ionization process. When some electrons cannot acquire sufficient energy to ionize the gas molecules, the collector current no longer increases with increasing pressure.

  • Page 110: Troubleshooting The Convectron Gauge Module

    Chapter 8 Troubleshooting the Convectron Gauge Module Table 8-3 Convectron Gauge Module Troubleshooting - See Figure 5-13 on page 82 Symptom Possible Cause Pressure reading grossly in error Controller out of calibration Unknown gas type Gauge not mounted horizontally (see Figure 4-2 on page 55) Sensor damaged (e.g., by reactive gas) or Gauge very dirty Extremes of temperature or mechanical vibration CGA over current indicator lit...
  • Page 111 Service Cleaning Contaminated Convectron Gauges WARNING Exposure to fumes from solvents in an improperly ventilated area can cause personal injury. To avoid personal injury from inhaling fumes from solvents such as trichloroethylene, perchloroethylene, toluene, and acetone, use these solvents only in a well−ventilated area that exhausts to the outdoors.

  • Page 112: Capacitance Manometer Troubleshooting

    Chapter 8 Refer to Figure 4-5 on page 60 to locate the LEDs on the capacitance Capacitance Manometer Troubleshooting manometer printed circuit board. Table 8-4 Capacitance Manometer Troubleshooting Guide - See Figure 4-5 on page 60 Symptom Possible Cause Unstable reading Mechanical vibration of capacitance manometer, faulty system ground or cable ground Display always reads 0 Capacitance manometer cable unplugged, no ±...

  • Page 113: Troubleshooting

    Service Because the RS-232 “standard” is found in an array of configurations, the RS-232 Troubleshooting first thing to do if trouble arises is check the following configuration options: Check switch settings. Be sure the baud rate, character format and framing, and interface protocol are matched to your host computer or terminal's requirements.

  • Page 114: Troubleshooting

    Chapter 8 The first thing to do if trouble arises is check the following configuration RS-485 Troubleshooting options: Check the switching settings. Be sure the baud rate, character format and framing, and interface protocol are matched to your host computer or terminal's requirements.

  • Page 115: Field Installation Of A Module

    Service Turn OFF power to the Controller. 8.10 Field Installation of a Module With power OFF, remove any cables from the Controller rear panel. Follow antistatic precautions to avoid damaging static sensitive components inside the chassis. Use a grounded, conductive work surface.
  • Page 116 Chapter 8 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 117 Index Convectron gauge analog output 1 82 Analog outputs installation 53 connecting 59 mounting options 54 Convectron gauge 82 preparing for operation 71 Micro-Ion gauge 69 pressure units setup 30 specifications 22 theory of operation 102 Before you begin troubleshooting 110 caution and warning statements 9 with connector 24 certification 11...
  • Page 118 Index Micro-Ion gauge analog output 69 pressure measurement 67 Installation process control 84, 85 analog outputs 59 RS-232 protocol 87 cable 50 RS-485 protocol 90 controller 50 Pressure controller line voltage 53 overpressure shutdown 109 Convectron gauge 53 true versus indicated 74–79 environmental conditions 50 units setup 28 FCC and EU installation requirements 49...
  • Page 119 Index Convectron gauge module 110 process control module 112 Service RS-232 protocol 113 damage requiring 106 RS-485 protocol 114 field installation 115 True versus indicated pressure 74–79 guidelines 11, 105 overpressure shutdown 109 troubleshooting Convectron gauge 110 troubleshooting process control module 112 Warranty 11 troubleshooting RS-232 protocol 113 troubleshooting RS-485 protocol 114...
  • Page 120 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B...
  • Page 122 For Customer Service or Technical Support 24 hours per day, 7 days per week, every day of the year including holidays: Phone: +1-800-227-8766 or +1-303-652-4691 MKS, Granville-Phillips Division 6450 Dry Creek Parkway Longmont, CO 80503 USA Phone: 1-303-652-4691 or 1-800-776-6543...

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