MKS 350 Series Instruction Manual
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MKS 350 Series Instruction Manual

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Series 350
UHV Gauge Controller
Instruction Manual
Instruction manual part number 350010
Revision G - March 2020

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  • Page 1 Series 350 UHV Gauge Controller Instruction Manual Instruction manual part number 350010 Revision G - March 2020...
  • Page 3 © 2020 MKS Instruments, Inc. All rights reserved. Granville-Phillips ® , Stabil-Ion ® , and Convectron ® are registered trademarks, and mksinst is a trademark of MKS Instruments Inc. All other trademarks and registered trademarks are the properties of their respective owners.
  • Page 4 Series 350 UHV Gauge Controller Catalog numbers for Series 350 Ultra High Vacuum Gauge Controllers Controller configured for a Series 274 UHV nude Bayard-Alpert gauge, with 1-line display, electron bombardment degas, and remote input/output interface Half-rack mount 350501 - # - # # Left mount for 19-inch rack 350502 - # - # # Center mount for 19-inch rack...

  • Page 5: Table Of Contents

    Contents Chapter 1 Before You Begin ........About These Instructions .
  • Page 6 Electrometer Span Adjustment [13] ....Overpressure Shutdown Adjustment [14] ....A/D calibration [15] .
  • Page 7 Chapter 6 Digital Interface Module ......55 Process Control Installation ......Process Control System Connections .
  • Page 8 Analog Output Full Scale Adjustment [27] ... . . 7.11 Analog Output Offset for Gauges A and B [28 and 29] ..Zero Adjustment [23 and 26] ..... . . Atmosphere Adjustment [22 and 25] .

  • Page 9: Chapter 1 Before You Begin

    Chapter 1 Before You Begin These instructions explain how to install, operate, and maintain the About These Instructions Series 350 UHV gauge controller. This chapter explains caution and warning statements, which must be adhered to at all times; explains your responsibility for reading and following all instructions;...

  • Page 10: Read And Follow These Instructions

    Series 350 UHV controller or vacuum gauges. Failure to comply with the instructions violates standards of design, manufacture, and intended use of the controller. MKS Instruments, Inc. disclaims all liability for the customer's failure to comply with the instructions.

  • Page 11: Explosive Gases

    Before You Begin Do not use Series 350 instruments to measure the pressure of explosive or Explosive Gases combustible gases or gas mixtures. Ionization gauge filaments operate at high temperatures. Glass ionization gauges, if roughly handled, may implode under vacuum Implosion / Explosion causing flying glass which may injure personnel.

  • Page 12: Customer Service

    Representative will advise you if the hazardous materials document is required. When returning products to MKS, be sure to package the products to prevent shipping damage. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility.

  • Page 13: Chapter 2 350 Gauge Controller

    Chapter 2 350 Gauge Controller The Series 350 ionization gauge controller measures pressures from less General Description –11 –11 –9 –3 than 1 x 10 Torr (1.3 x 10 mbar or 1.3 x 10 pascal) to 1 x 10 Torr, air equivalent, depending on transducer and emission current used.

  • Page 14: Ig Cables

    Fuse is Littelfuse 3131.25 (GP P/N 004966). For North American fusing, fuse is Littelfuse 313.600 (GP P/N 009645); for European fusing, fuses are Littelfuse 218.630 (GP P/N 011681). Replacement fuses are available from MKS. Figure 2-1 Line Voltage Selector Card...
  • Page 15 350 Gauge Controller Verify that the line voltage selector indicator displays the line voltage value of the available local AC line voltage. If the indicator does not display the correct line voltage value as listed in Table 2-1, perform the following procedure, referring to Figure 2-2.
  • Page 16 Chapter 2 Figure 2-3 Fuse Changing Procedure 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 17: Mounting Configurations

    350 Gauge Controller To change the selected voltage, refer to Figure 2-4 and follow these steps: Use a small-blade screwdriver or similar tool to open the cover. Set aside the cover/fuse block assembly. Pull the voltage selector card straight outward from the housing. Using the indicator pin, orient the selector card so that the desired voltage is at the bottom.
  • Page 18 Chapter 2 Figure 2-5 Mounting Configurations 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 19: Emc Compliance

    The controller is designed to operate a Bayard-Alpert type or equivalent ionization gauge with either single or dual filaments and nude style construction. It is ideally suited for a nude gauge such as the MKS series –11 –11...

  • Page 20: Cable Installation

    It is intended that all wiring either to or from the controller, whether Cable Installation supplied by MKS or not, be installed in accordance with the safety requirements of NEC/NFPA 70. Cables provided by MKS for connection to sensors or transducers is, at a minimum, designed for use as Appliance...
  • Page 21 350 Gauge Controller Figure 2-7 Cable connections to glass ion gauge Figure 2-8 Cable Connections to a 274041, 274042, or 274043 Gauge Figure 2-9 Cable Connections to a 274053, 274057, or 274058 Gauge 350 UHV Gauge Controller Instruction Manual - 350010...
  • Page 22 Chapter 2 ® Figure 2-10 Installation to Nude Ion Gauge with ConFlat Fitting and Without Integral Pin Guard NOTE: Cable and nude ionization gauge combinations other than those illustrated above, and which leave ionization gauge pins exposed with no locking connector or protective shroud, are not considered as complying with UL3101-1, EN61010-1, or CAN/CSA-C22.2 No.

  • Page 23: Wiring

    350 Gauge Controller Figure 2-11 illustrates short-cable connections, up to 50 feet (15 meters), to Wiring the nude ionization gauge. Figure 2-12 illustrates short-cable connections, 50 to 100 feet (15 to 30 meters), to the nude ionization gauge. Figure 2-11 Nude Ionization Gauge Cable, Maximum 50 feet (15 meters) Figure 2-12 Nude Ionization Gauge Cable Set, Maximum 100 feet (30 meters) 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 24: System Ground Test Procedure

    Chapter 2 System Ground Test Procedure WARNING Improper grounding could cause product failure, property damage, or serious personal injury. To reduce the risk of product failure, property damage, or serious personal injury, follow ground network requirements for the facility. • Maintain all exposed conductors at earth ground.
  • Page 25 350 Gauge Controller Voltage Shunted ------------------------------------------ - 0.83 or more Voltage Unshunted Repeat the measurements several times to be sure that the voltage ratio is not changing with time. A ratio of 15.083 or more should prevent the plasma from creating a dangerous voltage between these grounds. If more than 10 V exists between grounds, check with your electrician.

  • Page 26: Controls And Indicators

    Chapter 2 A description of the control and indicators found on a basic controller is Controls and Indicators given in this section. For detailed instructions pertaining to particular functions, consult the chapter for that function. Figure 2-14 Control Unit Front Panel Figure 2-15 Control Unit Rear Panel The unit of measure displayed is selectable via a switch on the Electrometer Units of Measure [1]...

  • Page 27: Power On/Off [4]

    350 Gauge Controller To turn ON the controller, depress the top half of the power switch located Power On/Off [4] on the rear panel. “Power On” indication is by the green LED located adjacent to the word “POWER.” To turn OFF the controller, depress the lower half of the power switch. The ion gauge may be turned on or off by the front panel momentary rocker Ion Gauge On/Off [2] switch or by remote control using the rear panel I/O connector.

  • Page 28: Ionization Gauge Theory Of Operation

    Chapter 2 Table 2-2 Remote Input/Output Pin Functions Pin Number Function Gauge Filament 1 On/Off Remote* Ground Not used Filament status optoisolator collector Filament status optoisolator emitter Degas On/Off Remote* Ground Not used Gauge Filament 2 On/Off Remote* * Active low inputs. The functional parts of a typical ionization gauge are the filament (cathode), Ionization Gauge Theory of Operation...

  • Page 29: 350 Uhv Gauge Controller Specifications

    AC Line 200 to 240 V, 0.60 A Time Lag (T), Littelfuse 313.600 +/- 20 V supplies: MKS P/N 013132, 1.5 A slow-blow Littelfuse 22901.5 MKS P/N 013193, 0.1 A, 500 V, slow-blow Grid Supply Bussman FNQ-1/10 Gould-Shawmut ATQ 1/10 Filament Supply MKS P/N 013192, 6.0 A slow-blow...
  • Page 30 Indoor use Environmental Conditions Up to 2000 meters Altitude Temperature to 40 C (32° to 104° F) Maximum relative humidity 80% for temperatures up to 31 Decreasing linearly to 50% relative humidity at 40 C (104° F) Transient over voltages Installation category (over voltage category) II In accordance with IEC 664 Pollution degree II...
  • Page 31 350 Gauge Controller Typical ± 3% of reading at ambient temperature of 25 ± 5 Electronic Accuracy Torr unless otherwise requested Display Unit Adjustment and internal selector switch provides readout in mbar or pascal Scientific notation, 2 significant digits Display Resolution 0.5 sec.
  • Page 32 Chapter 2 Notes: 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 33: Chapter 3 Electrometer Module

    Chapter 3 Electrometer Module The ionization gauge (IG) Electrometer Module provides ion gauge pressure Introduction –11 –11 –9 readout from less than 1 x 10 Torr (1.33 x 10 mbar or 1.33 x 10 –2 –2 pascal) to 1 x 10 Torr (1.33 x 10 mbar, 1.33 pascal), air equivalent, depending on the gauge and emission current used.

  • Page 34: Display Update Rate Switch [8]

    Chapter 3 Figure 3-1 Electrometer Module Top View Locate [8] slow update switch. Setting this switch “ON” will enable Display Update Rate Switch pressure averaging. The display will update about every 3 seconds rather than the normal 0.5 sec. typical period. Locate [6] degas timer override switch.

  • Page 35: Emission Range Switch [10]

    Electrometer Module Figure 3-2 Electrometer Module Front Panel This switch selects between three emission ranges; 0.1 milliampere, 1.0 Emission Range Switch [10] milliampere, or 10.0 milliamperes. Adjustment within each range is achieved with the emission adjustment pot. In general, higher emissions are used at lower pressures. If you are measuring very low pressures or have a low-sensitivity IG tube, the 10.0 mA range is better.

  • Page 36: Sensitivity Adjustment [12]

    The controller is shipped from the factory set for a tube sensitivity of 25/Torr, as is typical for nude Bayard-Alpert type tubes such as the MKS 274022 and 274023. The approximate range of the adjustment is 3 to 50/Torr.

  • Page 37: Analog Output

    Electrometer Module To adjust the controller to be direct reading for gases other than air or N calculate the sensitivity K for gas type x as follows: ) KN Where KN is the gauge sensitivity for N and R is found in Table 3-1. Table 3-1 Relative Gas Sensitivities 0.18...
  • Page 38 Chapter 3 Figure 3-3 Analog Outputs (in V) Figure 3-4 Ion Gauge Electrometer Module 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 39: Electrometer Calibration

    Electrometer Module See pages 35 and 36 for instructions on calibrating ion gauge sensitivity and 3.11 Electrometer Calibration emission current. This is a factory calibration point and should not normally be changed by Electrometer Span Adjustment [13] the user. This control is factory set so the ion gauge will shut down when the pressure Overpressure Shutdown Adjustment [14] rises above the levels listed in Table 3-2.
  • Page 40 Chapter 3 Notes: 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 41: Chapter 4 Process Control Module

    Process Control System Connections that the following steps be followed. If application assistance is desired, contact an MKS application engineer. Unless the control logic is simple and obvious, develop a logic diagram of the process control function. Prepare a specification table which lists the proposed pressure setting, system measurement point, and polarity for each process control channel.

  • Page 42: To Modify A Setpoint

    Chapter 4 Press either setpoint display/set button, [17] or [18] and release. The setpoint will appear for 2 seconds in the same display. Set the selector switch [19] to the number of the channel you wish to To Modify a Setpoint modify.

  • Page 43: Relay Disable

    Process Control Module Figure 4-2 Process Control Module, Top View The K1 pair of switches can be used to enable or disable PC1. Set both Relay Disable switches to OFF to enable PC1 to be activated by the IG pressure. Setting both switches ON will set the PC1 relay to be always off.

  • Page 44: Pin Assignments

    Chapter 4 Table 4-1 lists pins on the process control module rear panel connector. Pin Assignments Table 4-1 Rear Panel Pin Assignments Pin Letter Function Channel 1 relay common Channel 1 relay N.C. Channel 1 relay N.O. Channel 2 relay common Channel 2 relay N.C.

  • Page 45: Manual Override [16]

    Process Control Module mistakenly interpret setpoint data as pressure data, but will simply retain the last displayed pressure data until the SET key is released. These two three-position switches on the front of the process control Manual Override [16] module allow override of the programmed setpoints at any time. When moved to the right, the relay is activated.
  • Page 46 Notes: 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 47: Chapter 5 Rs-232 Module

    Chapter 5 RS-232 Module The RS-232 interface module for the controller allows data output to, and Introduction ion gauge control by, a host computer. Output is either by a command-response mechanism or by a talk-only mode which is invoked via a switch on the RS-232 board. A variety of baud rates and byte framing options are available, as well as switches to force the handshake lines to an “always true”...

  • Page 48: Talk-Only Mode

    Chapter 5 Switch S1 [20], if OFF at power-up, puts the interface in talk-only mode. Talk-Only Mode The pressure data from all three displays will be output in a single message string, separated by commas, approximately every 5 seconds. See page 51 for more detailed information on the handshaking mechanism. Handshake Line Control Switches Switches [22],[23], and [24], when in the up position, force the handshake...

  • Page 49: Operation

    RS-232 Module Consult the user's manual for the host computer to be sure the protocol used Operation is in accord with that established via the switch configuration you have chosen for the RS-232 module. Communication with the controller is via ASCII strings. A message to the controller consists of a command and a command modifier, followed by a terminator.

  • Page 50: Dgs

    Chapter 5 Definition: Display degas status Modifiers: None Response: 1if degas is ON, 0 if degas is OFF Example: From computer: DGS↵ 1 ↵ (Indicating degas is on) From controller: Definition: Display pressure reading DS IG Response: ASCII string representing the pressure Example: DS IG ↵...

  • Page 51: Error Messages

    RS-232 Module If an error is found in the incoming message, the following messages will be Error Messages returned in place of the normal response: OVERRUN ERROR↵ Returned if the incoming message overflows 350’s buffer. This may indicate a flaw in the host software. PARITY ERROR↵...

  • Page 52: Cts, Dsr

    Chapter 5 During output of the reply, the incoming handshake lines CTS, and DSR are tested prior to beginning transmission of each character. The controller will wait until both are true before beginning transmission of a character, and will not test them again until ready to begin transmitting the next. After transmitting the terminator, the controller will negate RTS and wait for the next incoming message.

  • Page 53: Rs-232 Specifications

    RS-232 Module Check command format. Be sure the strings you output to the controller are in accord with the syntax defined in Command Syntax, page 49. Table 5-4 RS-232 Troubleshooting Guide Symptom Possible Cause Micro controller reset LED [25] lit or flashing Micro controller failure No response or garbled output Baud rate incorrect.
  • Page 54 Notes: 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 55: Chapter 6 Digital Interface Module

    Process Control System Connections that the following steps be followed. If application assistance is desired, contact an MKS application engineer. Unless the control logic is simple and obvious, develop a logic diagram of the process control function. Prepare a specification table which lists the proposed pressure setting, system measurement point, and polarity for each PC channel.

  • Page 56: To Display A Setpoint

    Chapter 6 Be sure the “CAL” switch of the electrometer is in its center position; To Display a Setpoint otherwise, the calibration data in display lines 1 and 2 will conflict with the display of the setpoints. Set selector switch to the number of the channel you wish to display. Toggle the setpoint set switch to either the up or down position and release.

  • Page 57: Process Control Connector

    Digital Interface Module After the setpoint switch is released, the display will return to pressure data after two seconds. At this time the new setpoint will be deposited in non-volatile memory. Note that if the ion gauge is off, any PC relay which is programmed to the top display will deactivate.

  • Page 58: Manual Override

    Chapter 6 These three-position switches on the front of the PC/RS-485/RS-232 module Manual Override allow override of the programmed setpoints at any time. When moved to the right, the relay is activated. When moved to the left, the relay is deactivated.
  • Page 59 Digital Interface Module Figure 6-2 Process Control, RS-232, and RS-485 Interface Connectors 350 UHV Gauge Controller Instruction Manual - 350010...

  • Page 60: Setpoint Display And Adjustment

    Chapter 6 Setpoints are stored in non-volatile memory, and are specified by a 2-digit Setpoint Display and Adjustment mantissa and 2-digit exponent. They may be set anywhere in the range –2 1 x 10 to 9 x 10 . This allows for the entire pressure range of all supported transducer types and systems of units.

  • Page 61: Switch Settings

    Digital Interface Module Table 6-4 details the functions and settings of the four blocks of DIP 6.10 Switch Settings switches located along the top edge of the module. To access these switches, remove the top covet per the instructions in the controller instruction manual.
  • Page 62 Chapter 6 Table 6-4 Module Switch Functions and Settings (continued) Switch Function Factory Setting PC 1 display assignment — See Table 6-2 PC 1 display assignment — See Table 6-2 PC 2 display assignment — See Table 6-2 PC 2 display assignment — See Table 6-2 PC 3 display assignment —...
  • Page 63 Digital Interface Module Table 6-6 Character Framing Switch settings Switch 8.3 Switch 8.4 Switch 8.5 Character Bits Parity Stop Bits None Even None Even Even * Factory setting. Table 6-7 RS-485 Address Switch Settings Decimal Value Hex Value Binary Value Switch Settings Switch 8.2 Switch 7.8...

  • Page 64: Rs-232 Connectors

    Chapter 6 Serial interface connector, J2, is configured for DCE operation when in 6.11 RS-232 Connectors RS-232 mode. Table 6-8 RS-232 Connector Pinout J3 pin number Mnemonic Name Data carrier detect* Output (ON) Received data Output Transmitted data Input Data terminal ready* Input (not used) Signal ground Data set ready*...

  • Page 65: Rs-485 Connector

    Digital Interface Module If the computer has a 25 pin connector, use the configuration listed in Figure 6-10. Table 6-10 25-pin RS-232 Connections Signal Name PC/AT Connector Cable Pinout Controller (DCE) DB9 Male DB9 Female DB9 Female DB9 Male Pin 3 Pin 3 Pin 2 Pin 2...

  • Page 66: Rs-232/Rs-485 Command Syntax

    The message may contain leading spaces, and the command and modifier may optionally be separated by spaces or commas. No spaces may appear within the command or the modifier, only between them. The address expected by the controller is programmed via the switch settings of S7.5, S7.6, S7.7, S7.8, and S8.2.

  • Page 67: Igb

    Digital Interface Module Response: 1DG ON if degas is ON, 0 DG OFF if degas is Example: From computer: #AADGS↵ * 1DG ON ↵ (Indicating degas is ON) From controller: Definition: Display ion gauge status Modifiers: None Response: 00 if filament is ON 01 if filament 1 is ON 10 if filament 2 is ON Example:...
  • Page 68 Chapter 6 Definition: Display process control channel status Modifiers: 1 or 2 or 3 or 4 or B or S or ASCII string representing PC number and pressure Response: Depends on modifier. The response will always be 11 characters long. The described response is followed by ASCII spaces then carriage return.

  • Page 69: Error Messages

    Digital Interface Module • Other possible response is ? RAN FAIL. If this occurs, there may be a defective non-volatile RAM but the setpoint will operate properly until power is cycled. • Non-volatile memory requires approximately 1/2 second to cycle when this command is sent.

  • Page 70: Rs-232 And Rs-485 Start Characters

    Chapter 6 Figure 6-3 RS-232 and RS-485 Data Timing Data Data Data TO = 500 ms when PCX (pressure) command is sent. For all other commands, TO = 630 μS minimum. T1 = 300 μS minimum. The controller RS-232 mode implements the following signals: Table 6-14 RS-485 Connector Pinout Signal Pin number...

  • Page 71: Troubleshooting

    Digital Interface Module The start character “#“from the host computer signals to the controller to reset its buffer for incoming data. If a string of data is received by the controller, including more than one “#”, only the data after the last “#” will be interpreted.
  • Page 72 Chapter 6 Stop bits 1 or 2 None Handshake 0 through 31 selectable (RS-485 only) Address Up to 32 devices (RS-485 only) Number of connections 4000 ft. maximum (RS-485 only) Total cable length D-9S on module rear panel Connector Process Control Specifications 1to 4 Number of channels –12...

  • Page 73: Convectron Gauge Module

    Chapter 7 Convectron Gauge Module This chapter provides you with the information required to install the Introduction Convectron gauge. –3 The gauge provides pressure measurement from 1.0 x 10 to 1000 Torr –3 –1 (1.33 x 10 to 1333 mbar, 1.33 x 10 to 1.33 x 10 pascal), and pressure –4...
  • Page 74 Chapter 7 Figure 7-1 Typical Controller Front Panel with 3-Line Display and Process Control Status Indicators Figure 7-2 Convectron Option Front Panel The Convectron module option can automatically turn ON filament 1 of the ion gauge. If automatic ion gauge ON is not desired, adjust the IG ON potentiometer to the OFF position (full CCW).

  • Page 75: Safety Instructions

    Convectron Gauge Module Safety Instructions Do not use the gauge tube to measure the pressure of combustible gas Explosive Gases mixtures. The sensing element normally operates at only 125 C but it is possible that momentary transients or controller malfunction can raise the sensor above the ignition temperature of combustible mixtures which might then explode causing damage to equipment and injuring personnel.
  • Page 76 Chapter 7 For some gases, be aware the indicated pressure will be higher than the true High Indicated Pressure pressure. For example, at a true pressure of 9 Torr for helium the indicated pressure on a Convectron gauge calibrated for N is 760 Torr.

  • Page 77: Installation Considerations

    Convectron Gauge Module • For greatest accuracy and repeatability, locate the gauge in a stable, Installation Considerations room-temperature environment. Ambient temperature should never exceed 40 °C (104 °F) operating, non-condensing, or 85 °C (185 °F) non-operating. Bakeout temperature for the Convectron gauge is 150 °C (302 °F).

  • Page 78: Mounting

    Before you install the gauge, install appropriate pressure relief devices in the Mounting vacuum system. MKS does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and rupture disks are listed in the Thomas Register under “Valves, Relief” and “Discs, Rupture.”...

  • Page 79: Compression Mount

    Convectron Gauge Module The gauge fits a standard 1/2 inch compression (quick-disconnect) mount. Compression Mount WARNING Using a compression fitting may cause ejection of the gauge tube from the fitting, resulting in property damage or personal injury. To avoid property damage or personal injury resulting from ejection of the gauge tube, do not install a compression fitting if positive pressures occur in the vacuum system.

  • Page 80: Reading Pressure

    Chapter 7 The Convectron gauge measures the heat loss from a heated, gold-plated Reading Pressure tungsten sensing wire that is maintained at a constant temperature. WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization.

  • Page 81: Indicated Versus True Pressure

    Convectron Gauge Module Convectron gauge tubes are thermal conductivity gauges. These gauges transduce gas pressure by measuring the heat loss from a heated sensor wire maintained at a constant temperature. For gases other than N and air, the heat loss is different at any given true pressure and the indicated pressure will be different.
  • Page 82 Chapter 7 Example 1 – Maximum Safe Indicated Pressure Assume a certain system will withstand an internal pressure of 1000 Torr or 19.3 psia. For safety, limit the maximum internal pressure to 760 Torr during backfilling. Assume you want to measure the pressure of argon (Ar). On Figure 7-5, locate 760 Torr on the left hand scale, travel to the right to the intersection with the argon curve, and then down to an indicated pressure of 24 Torr (N...
  • Page 83 Convectron Gauge Module –4 Figure 7-4 Gas Pressures, 1 x 10 to 1 Torr Convectron gauge axis must be horizontal Pressure unit equivalents: –3 1 μm Hg = 1 mTorr = 1 x 10 Torr 1000 μm Hg = 1 Torr 1 Torr = 1.33mbar 1 Torr = 133 pascal 1 mbar = 100 pascal...
  • Page 84 Chapter 7 –2 Figure 7-5 Gas Pressures, 1 x 10 to 1000 Torr Convectron gauge axis must be horizontal Pressure unit equivalents: 1 μm Hg = 1 mTorr = 1 x 10 –3 Torr 1000 μm Hg = 1 Torr 1 Torr = 1.33mbar 1 Torr = 133 pascal 1 mbar = 100 pascal...
  • Page 85 Convectron Gauge Module –2 Figure 7-6 Gas Pressures, 1 x 10 to 1000 Torr Convectron gauge axis must be horizontal Pressure unit equivalents: 1 μm Hg = 1 mTorr = 1 x 10 –3 Torr 1000 μm Hg = 1 Torr 1 Torr = 1.33mbar 1 Torr = 133 pascal 1 mbar = 100 pascal...

  • Page 86: Unit Of Measure [16 And 17]

    Chapter 7 The gauge is preset at the factory to display the pressure unit (Torr, mbar, or Unit of Measure [16 and 17] pascal) that you requested. To change the pressure unit, follow these steps: Shut off power to the control unit. Remove the top cover and locate the Convectron module.

  • Page 87: Analog Output [20 And 21]

    Convectron Gauge Module Analog outputs [20 and 21] are located on the rear panel. The outputs Analog Output [20 and 21] accommodate standard 1/8-inch miniature phone jacks. The analog outputs produce DC voltages proportional to the logarithm of pressure, scaled to 1 V per decade: 3 –...

  • Page 88: Calibration

    Chapter 7 Figure 7-9 Convectron Gauge Pressure Analog Output Each Convectron gauge is individually calibrated for N (air) and 7.10 Calibration temperature compensated prior to leaving the factory. Each controller is individually calibrated to provide accurate readout of N or air pressure, therefore, initial calibration should not be necessary.
  • Page 89 Convectron Gauge Module Use the analog output offset potentiometers to adjust offset voltages for each 7.11 Analog Output Offset for –4 Gauges A and B [28 and 29] analog output. You may set the analog output to represent 1 x 10 Torr –4 –2...
  • Page 90 Chapter 7 –4 Evacuate the chamber to a pressure that is less than 1 x 10 Torr Zero Adjustment [23 and 26] –4 –2 (1.33 x 10 mbar, 1.33 x 10 pascal). With the gauge operating, adjust the VAC potentiometer until a single “0”...
  • Page 91 Index Available Options 13 Process Control Module 41 Process Control Operation 44 Process Control Specifications 45 Process Control System Connections 41 Baud Rate Switch Settings 47 Process Control Theory of Operation 45 Before You Begin 9 Process control, RS–232, and RS–485 interface connectors 59 Process control, RS–232, and RS–485 module 56 Caution and warning statements 9...
  • Page 92 Index 350 UHV Gauge Controller Instruction Manual - 350010...
  • Page 94 Series 350 UHV Gauge Controller Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual Instruction manual part number 350010 Revision G - March 2020...

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