MKS 340001 Instruction Manual
  1. Manuals
  2. Brands
  3. MKS Manuals
  4. Controller
  5. 340001
  6. Instruction manual

MKS 340001 Instruction Manual

Granville-phillips 340 series. vacuum gauge controller
Hide thumbs
Table of Contents

Advertisement

Quick Links

Enlarged version
Series 340
Granville-Phillips
Series 340
®
Vacuum Gauge Controller
Instruction Manual
Instruction manual part number 340005
Revision D - November 2014

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 340001 and is the answer not in the manual?

Questions and answers

Related Manuals for MKS 340001

Summary of Contents for MKS 340001

  • Page 1 Series 340 Granville-Phillips Series 340 ® Vacuum Gauge Controller Instruction Manual Instruction manual part number 340005 Revision D - November 2014...
  • Page 2 Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. A...
  • Page 3 2 Tech Drive, Suite 201 Andover, MA 01810 USA Phone: 1-978-645-5500 www.mksinst.com Instruction Manual © 2014 MKS Instruments, Inc. All rights reserved. Granville-Phillips and Convectron are registered trademarks of MKS Instruments, Inc. ® ® All other trademarks and registered trademarks are the properties of their respective owners.

  • Page 4: United Kingdom 240 Vac

    North America 115 Vac and Japan 100 Vac North America 240 Vac Universal Europe 220 Vac United Kingdom 240 Vac This Instruction Manual is also for use with the following catalog numbers: 340001, 340003, 340004, 340018, 340019, 341579 20340042, 20340045, 20340046, 20340-341-T1, 20340-341-T2, 20340-341-T3...

  • Page 5: Table Of Contents

    Table of Contents Chapter 1 Safety Instructions ..............7 1.1 Safety Introduction .
  • Page 6 4.3 Convectron Gauge Operation ............35 4.3.1 Reading Pressure.

  • Page 7: Chapter 1 Safety Instructions

    Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. MKS Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
  • Page 8 1 Safety Instructions To reduce the risk of fire or electric shock, do not expose this product to rain or moisture. Objects and Liquid Entry − Never push objects of any kind into this product through openings as they may touch dangerous voltage points or short out parts that could result in a fire or electric shock.

  • Page 9: Equipment Grounding

    1 Safety Instructions 1.2 Equipment Grounding Where an equipment malfunction could cause a hazardous situation, always provide for fail−safe operation. As an example, in an automatic backfill operation where a malfunction might cause high internal pressures, provide an appropriate pressure relief device.
  • Page 10 1 Safety Instructions Confirm that these safety devices are properly installed before installing the product. In addition, check that: a. The proper gas cylinders are installed, b. Gas cylinder valve positions are correct on manual systems, and c. The automation is correct on automated gas delivery systems. d.

  • Page 11: Damage Requiring Service

    If the product exhibits a distinct change in performance, service may be required. 1.5 Service Guidelines If the product requires service, contact the MKS, Granville-Phillips Division Customer Service Department at +1-800-227-8766 or +1-303-652-4691 for troubleshooting help over the phone. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips.

  • Page 12: Warranty Information

    1 Safety Instructions 1.6 Warranty Information MKS Instruments/Granville-Phillips provides an eighteen (18) month warranty from the date of shipment for new Granville-Phillips Products. The MKS Instruments, Inc. General Terms and Conditions of Sale provides the complete and exclusive warranty for Granville-Phillips products.

  • Page 13: Chapter 2 Introduction & Specifications

    Chapter 2 Introduction & Specifications 2.1 General Description The Series 340 Vacuum Gauge Controller (VGC) measures pressures from less than 1 x 10 Torr (1.3 x 10 mbar or 1.3 x 10 pascal) to atmosphere by use of a single ionization gauge and two Convectron ®...
  • Page 14 2Introduction & Specifications Figure 2-1 Front of Series 340 Vacuum Gauge Controller Convectron Gauge Module Power Supply / Ion Gauge PCB (See Chapter 6) Connector / Remote I-O PCB Ion Gauge Remote I/O 9-pin Electrometer Module Connector (See Remote PCB (See Chapter 5) Input/Output on page 32) Figure 2-2 Rear of Series 340 Vacuum Gauge Controller...

  • Page 15: Specifications

    2Introduction & Specifications 2.3 Specifications 2.3.1 340 VGC Specifications Table 2-1 Series 340 VGC Physical Specifications Parameter Specification Width 24.13 cm (9.5 in.) with 1/2-rack mounting brackets Height 8.89 cm (3.5 in.) Depth 35.56 cm (14 in.) includes 7.62 cm (3 in.) for connectors and cables Weight 4.8 kg (10.5 lb.) Environmental Temperature...

  • Page 16: Convectron

    2Introduction & Specifications Table 2-4 Pressure Display Specifications Parameter Specification Electronic Accuracy Typical ± 3% of reading at ambient temperature of 25 ± 5 Display Units Torr unless otherwise requested. Adjustment and internal selector switch provides readout in mbar or pascal. Display Resolution Scientific notation, 2 significant digits.

  • Page 17: Remote Input/Output

    2Introduction & Specifications Table 2-7 Convectron Module Specifications Parameter Specification Display Resolution 2 significant digits (1 significant digit in the 10 decade) Analog Output Nonlinear 0 to 5.3 Vdc (+5% corresponding to 0 to 1000 Torr) Display Update Time 0.5 sec. typical. Switchable to 3 sec./ reading average Ion Gauge Turn ON Range OFF, 5 mTorr to 50 mTorr Process Relay Setting...
  • Page 18 2Introduction & Specifications NOTES: Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...

  • Page 19: Chapter 3 Installation

    Chapter 3 Installation 3.1 Initial VGC Setup and Installation 3.1.1 Line Voltage Selection Verify that the line voltage selector card displays the line voltage value of the available local AC line voltage. If the card does not display the correct line voltage value as shown in Table 3-1, perform the following procedure and refer to Figure 3-1.

  • Page 20: Mounting Configurations

    3 Installation 3.1.2 Mounting Configurations Figure 3-2 illustrates the various configurations available for mounting the Series 340 Vacuum Gauge Controller. NOTE: The 340 controller should be mounted in a location with free air flow and ambient temperature less than 40 340501-## 340502-## 340503-##...

  • Page 21: Ionization Gauge Types And Installation

    3 Installation 3.2 Ionization Gauge Types and Installation The 340 VGC operates a Bayard-Alpert type or equivalent ionization gauge. It is ideally suited for a nude ionization gauge such as the Granville-Phillips 274022 or 274023 which have an X-ray limit in the low 10 Torr range.

  • Page 22: Ion Gauge Cables

    3 Installation Do not attach cables to glass gauge pins while the gauge is under vacuum. Accidental bending of the pins may cause the glass to break and implode. Cables, once installed, should be secured to the system to provide strain relief for gauge tube pins.
  • Page 23 3 Installation Figure 3-5 Ion Gauge Cable for Granville-Phillips Nude Gauges Figure 3-6 Ion Gauge Cable for Granville-Phillips Nude Gauges Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...

  • Page 24: Convectron Gauge Installation

    3 Installation 3.3 Convectron Gauge Installation 3.3.1 Important Precautions for Gauge Tube Installation Convectron gauges should not be used above 999 Torr true pressure. The Series 340 Vacuum Gauge Controller is calibrated for Air/N Do not attempt to use a Convectron gauge calibrated for N to measure or control the pressure of other gases such as argon or CO unless accurate conversion data for N...

  • Page 25: Gauge Orientation

    3 Installation If the gauge becomes disconnected from the controller or if the sensor wire in the gauge fails, the controller will indicate a voltage equal to above atmosphere. The calibration of the gauge will be seriously affected by any gas which will attack the gold plated sensor, and could result in overpressurizing the system.

  • Page 26: Compression Mount (Quick Connect)

    3 Installation Figure 3-7 Convectron Gauge Mounting Configurations 3.3.3 Compression Mount (Quick Connect) Do not use this type of fitting for positive pressure applications. The gauge tube port is designed to fit a standard 1/2 in. compression (quick connect) mount such as the Cajon Co.

  • Page 27: Other Mounting Options

    3 Installation 3.3.6 Other Mounting Options ® The Convectron gauge is also available in several other mounting systems. These include Cajon ® ® SS-4-VCR -1, SS-4-VCR-3, and SS-6-VCO -1 fittings, 2-3/4 inch rotatable and non-rotatable CuSeal flanges, 1-5/16 inch non-rotatable CuSeal flange, and welded NW16 and NW25 flanges. 3.3.7 Convectron Gauge Cables Connect the provided cable(s) to the Controller and Convectron Gauge(s).

  • Page 28: System Grounding Procedure

    3 Installation 3.4 System Grounding Procedure Improper grounding can cause product damage or personal injury. • Follow ground network requirements for the facility. • Maintain all exposed conductors at Earth ground. • Connect the power cord to a properly grounded outlet. •...
  • Page 29 3 Installation When high voltages are used within the vacuum system and the gauge envelope is not reliably grounded through its vacuum connection, either a separate ground wire must be added, or the envelope must be shielded to positively prevent human contact. The gauge envelope may be grounded by using a metal hose clamp on the gauge connected by a #12 awg copper wire to the grounded vacuum chamber.

  • Page 30: System Ground Test Procedure

    3 Installation 3.4.1 System Ground Test Procedure Use the following procedure to test each of your vacuum systems which incorporates an ionization gauge. NOTE: This procedure uses a conventional multi meter (DMM) and a 10 Ω, 10 W resistor. Examine the grounding of both the 340 power supply and the vacuum chamber. Make sure there is a heavy duty ground connection to all exposed conductors on the chamber and to all exposed conductors on the vacuum chamber.

  • Page 31: Chapter 4 Operation

    Chapter 4 Operation 4.1 Series 340 VGC Controls A description of the controls and indicators on a basic 340 Vacuum Gauge Controller (VGC) is given in this section. Theory of operation for ion gauges and Convectron gauges is explained in this chapter, as well as Convectron gauge operation and using them with gases other than N2 or Air.

  • Page 32: Sensor Failure

    4 Operation 4.1.1 Sensor Failure If the gauge tube becomes disconnected from the controller or if the sensor wire in the gauge tube fails, the controller will indicate 9.9E+9. If the tube is unplugged for a powered controller, there may be an instantaneous (0 to 0.2 seconds) drop in the pressure indication and the process control relay could activate for this brief time, depending on the order in which the tube pins break contact.

  • Page 33: Theory Of Operation

    4 Operation A single-pole, double-throw relay is provided to indicate filament status (the normally open contact is open when the filament is OFF). Refer to Table 4-1. Table 4-1 Series 340 Remote Input/Output Connector for the Ion Gauge Pin Number Function Pin Number Function...

  • Page 34: Convectron Gauge Theory Of Operation

    The amount of ion current for a given emission current and pressure depends on the ion gauge design. This gives rise to the definition of ion gauge sensitivity, frequently denoted by S: Bayard-Alpert type gauges typically have sensitivities of 10/Torr when used with nitrogen or air. Refer to Section 5.3.5 on page 48 for more information on gas sensitivities for other gases.

  • Page 35: Convectron Gauge Operation

    4 Operation 4.3 Convectron Gauge Operation 4.3.1 Reading Pressure The Convectron Gauge (CG) Module provides pressure measurement from 1.0 x 10 Torr (1.3 x mbar or 1.3 x 10 Pa) to 1000 Torr, and one meaningful digit pressure indication down to 1 x Torr, air equivalent.
  • Page 36 4 Operation Table 4-2 Indicated vs. True Pressure Curves Figure Range and Units Gases 1 to 100 mTorr 0.1 to 1000 Torr Ar, C0 , CH , Freon 12, He 0.1 to 1000 Torr , Freon 22, Kr, Ne, 02 to 10-1 mbar 0.1 to 1000 mbar Ar, C0...
  • Page 37 4 Operation Example 3: True to Indicated Pressure Conversion Assume you want to set a process control setpoint at a true pressure of 20 Torr of CO . On Figure 4-6, locate 20 Torr on the true pressure scale, travel horizontally to the right to the CO curve and then down to an indicated pressure of 6.5 Torr (N equivalent).
  • Page 38 4 Operation Figure 4-5 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 100 mTorr Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...
  • Page 39 4 Operation Figure 4-6 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 Torr Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...
  • Page 40 4 Operation Figure 4-7 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 Torr Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...
  • Page 41 4 Operation Figure 4-8 Convectron Gauge Indicated vs. True Pressure Curve; 10 to 0.1 mbar Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...
  • Page 42 4 Operation Figure 4-9 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 mTorr Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...
  • Page 43 4 Operation Figure 4-10 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 mbar Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...

  • Page 44: Convectron Gauge Module Setup

    4 Operation 4.4 Convectron Gauge Module Setup The Convectron Gauge Module provides capabilities such as auto turn ON/OFF if the ion gauge and process rely, and calibration of the Convectron Gauge pressure display. See Chapter 6 for detailed information. Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev.

  • Page 45: Chapter 5 Electrometer Module

    Chapter 5 Electrometer Module 5.1 Introduction to the Electrometer Module The Ion Gauge (IG) Electrometer Module provides ion gauge pressure readout from less than 1 x 10 Torr (1.3 x 10 mbar or 1.3 x 10 pascal) to 1 x 10 Torr, air equivalent, depending on the gauge and emission current used.

  • Page 46: Display Update Rate Switch

    5 Electrometer Module Figure 5-1 Ion Gauge Electrometer Module - Top View (Controller Cover Removed) 5.2.1 Display Update Rate Switch Locate the Slow Update Switch See Figure 5-1. Set the switch to the ON position to enable pressure averaging. The display will update about every 3 seconds rather than the normal 0.5 second typical period.

  • Page 47: Emission Range Switch

    5 Electrometer Module Do not leave the calibration switch set to the left or right after you are done viewing sensitivity or emission; otherwise, the displayed reading may be mistaken for an actual pressure reading. 5.3.2 Emission Range Switch The Emission Range Switch (Figure 5-2) selects between three emission ranges; 0.1 milliampere, 1.0 milliampere, or 10.0 milliamperes.

  • Page 48: Relative Gas Sensitivities

    5 Electrometer Module 5.3.5 Relative Gas Sensitivities Sensitivity depends on the gas being measured as well as the type of ion gauge being used. Table 5-1 lists the relative gauge sensitivities for common gases. NOTE: The values in Table 5−1 are from NASA Technical Note TND 5285, "Ionization Gauge Sensitivities as Reported in the Literature", by Robert L.
  • Page 49 5 Electrometer Module Analog output is available through the miniature phono connector. Figure 5-3 Electrometer Module Rear Panel For 10 mA emission, PRESSURE = 10 (volts-12) For 1 mA emission, PRESSURE = 10 (volts-11) For 0.1 mA emission, PRESSURE = 10 (volts-10) Figure 5-4 Analog Output (in Vdc)

  • Page 50: Electrometer Calibration

    5 Electrometer Module 5.4 Electrometer Calibration Refer to Section 5.3.4 for instructions on setting the ion gauge sensitivity and Section 5.3.3 for instructions on setting the emission current. 5.4.1 Electrometer Minimum Adjustment The Electrometer Minimum Adjustment potentiometer calibrates the electrometer for very low inputs.

  • Page 51: Chapter 6 Convectron Gauge Module

    Chapter 6 Convectron Gauge Module 6.1 Introduction to the Convectron Gauge Module The Convectron Gauge (CG) module provides pressure measurement from 1.0 x 10 Torr (1.0 x mbar or 1.0 x 10 pascal) to 990 Torr. An analog output proportional to the logarithm of pressure (1V per decade) is provided on the rear of the Convectron Module.

  • Page 52: Ionization Gauge Filament Auto Turn On

    6 Convectron Gauge Module Calibration Potentiometers 15-pin Convectron for Convectron Gauge "A" Gauge Cable Connector See Figure 3-8 & 4-2 Ion Gauge Filament Auto Turn ON Potentiometer (CGA) Calibration Potentiometers 9-pin Accessory Connector for Convectron Gauge "B" for Convectron Gauge A & B Analog Output contacts &...

  • Page 53: Process Relay Turn On

    6 Convectron Gauge Module More precise control may be achieved by fixing the system pressure at the desired auto turn-ON pressure, and adjusting the potentiometer slowly until the gauge turns ON. To disable the auto turn ON function, adjust the CG auto turn-ON potentiometer counterclockwise to the OFF position.

  • Page 54: Zero Calibration

    6 Convectron Gauge Module 6.6.1 Zero Calibration –4 Evacuate the system for Convectron Gauge "A" to a pressure known to be less than 1 x 10 Torr. –4 With power ON and at vacuum less than 1 x 10 Torr, adjust the VAC potentiometer for gauge "A"...

  • Page 55: Convectron Gauge Analog Output Signal

    6 Convectron Gauge Module 6.7 Convectron Gauge Analog Output Signal A nonlinear dc voltage output signal for both Convectron Gauges is provided on the rear panel of the Convectron Gauge module through the 9-pin accessory connector. See Figure 6-2 and Figure 6-3.
  • Page 56 6 Convectron Gauge Module Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...

  • Page 57: Chapter 7 Service And Maintenance

    If a qualified service person makes repairs at the component level, repairs properly made with equivalent electronic parts and rosin core solder do not void the warranty. If the product requires service, contact the MKS, Granville-Phillips Division Customer Service Department at +1-800-227-8766 or +1-303-652-4691 for troubleshooting help over the phone.

  • Page 58: Damage Requiring Service

    7 Service and Maintenance NOTE: This product was designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict accordance with these safety instructions. The service and repair information in this manual is for the use of Qualified Service Personnel.

  • Page 59: Troubleshooting

    7 Service and Maintenance 7.3 Troubleshooting 7.3.1 Power Input Troubleshooting High voltages are present within the power supply, capable of causing injury or death. Use extreme care while troubleshooting while power is applied. Table 7-1 Power Input Troubleshooting Symptom Possible Causes Corrective Action 1.
  • Page 60 7 Service and Maintenance Table 7-2 Power Supply Test Point Voltages Test Point Voltage (Vdc) +4.75 to +5.25 +18 to +23 +11.4 to +12.6 -11.4 to -12.6 +180 +170 to +190 +220 +190 to +250 NOTE: If measured voltages do not agree with these readings, it will be necessary to correct this problem before proceeding further.

  • Page 61: Ionization Gauge Filament Turn On And Emission

    7 Service and Maintenance 7.3.3 Ionization Gauge Filament Turn ON and Emission Table 7-3 Filament Turn On and Emission Troubleshooting Symptom Possible Causes Corrective Action 1. The ionization gauge filament does 1. The gauge cable is not connected 1. Connect the gauge cable. not illuminate when the gauge switch is to the gauge or to the controller.

  • Page 62: Electrometer Troubleshooting

    7 Service and Maintenance 7.3.5 Electrometer Troubleshooting The electrometer design is based on a log-type amplifier, and conversion is accomplished via a dual-slope A/D converter. Table 7-5 Electrometer Module Troubleshooting Symptom Possible Cause Corrective Action The pressure reading displayed on the 1.

  • Page 63: Convectron Gauge Troubleshooting

    7 Service and Maintenance 7.3.6 Convectron Gauge Troubleshooting Table 7-6 Convectron Module PCB Troubleshooting Symptom Possible Causes The displayed pressure reading for a 1. The controller is out of 1. Check the calibration - see Gauge Convectron gauge is very inaccurate calibration Zero and Atmospheric Pressure Calibration on page 53.
  • Page 64 7 Service and Maintenance Figure 7-3 Convectron Module PCB - Top View (Controller Cover Removed) 7.3.6.1 Convectron Gauge Test Procedure The small diameter sensor wire inside the Convectron gauge can be damaged by small voltages. Do not perform electrical continuity tests with instruments applying in excess of 1 volt when the gauge is at vacuum, or 5 V when at atmospheric pressure.
  • Page 65 7 Service and Maintenance 7.3.6.2 Gauge Tube Contamination The calibration of the gauge will be seriously affected by any gas which will attack the gold plated sensor, and could result in over pressurizing the system. Two primary gases in this category are mercury vapor and fluorine.
  • Page 66 7 Service and Maintenance Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...

  • Page 67: Chapter 8 Index

    Index Analog Output Signal Implosion / Explosion Convectron Gauge Module Ionization Gauge Electrometer Module ON/OFF Pressure Range Specifications Specifications Cables Theory of Operation Convectron Gauge Types and Installation Ion Gauge Canadian Users Controller Module Controls and Indicators Convectron Gauge Initial Setup Specifications 9, 24, 26, 35 Overpressure Conditions...
  • Page 68 Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. D...
  • Page 69 Series 340 Vacuum Gauge Controller Instruction Manual - 340005 - Rev. A...
  • Page 70 For Customer Service or Technical Support 24 hours per day, 7 days per week, every day of the year including holidays: Phone: +1-800-227-8766 or +1-303-652-4691 MKS, Granville-Phillips Division 6450 Dry Creek Parkway Longmont, CO 80503 USA Phone: 1-303-652-4691 or 1-800-776-6543...

This manual is also suitable for:

3400033400043400183415792034004220340045 ... Show all

Table of Contents