MKS 350 Series Manuals

Manuals and User Guides for MKS 350 Series. We have 2 MKS 350 Series manuals available for free PDF download: Instruction Manual

MKS 350 Series Instruction Manual (94 pages)

UHV Gauge Controller

Brand: MKS | Category: Controller | Size: 2 MB

Table of Contents
5
Chapter 1 Before You Begin

9
- About These Instructions
  9
- Caution and Warning Statements
  9
- Read and Follow These Instructions
  10
- System Grounding
  10
- Explosive Gases
  11
- Implosion / Explosion
  11
- Operation
  11
- Customer Service
  12
Chapter 2 350 Gauge Controller

13
- General Description
  13
  - Available Options
    13
  - IG Cables
    14
  - Mounting Options
    14
- Installation
  14
  - Line Voltage Selection
    14
  - Mounting Configurations
    17
  - EMC Compliance
    19
  - Ionization Gauge Types and Installation
    19
  - Cable Installation
    20
- Wiring
  23
  - System Ground Test Procedure
    24
- Controls and Indicators
  26
  - Units of Measure [1]
    26
  - Power On/Off [4]
    27
  - Ion Gauge On/Off [2]
    27
  - Degas On/Off [3]
    27
  - Remote Input/Output [5]
    27
- Ionization Gauge Theory of Operation
  28
  - 350 UHV Gauge Controller Specifications
    29
Chapter 3 Electrometer Module

33
- Introduction
  33
- Units of Measure
  33
- Display Update Rate Switch [8]
  34
- Degas Timer Override [6]
  34
- Calibration Switch [9]
  34
- Emission Range Switch [10]
  35
- Emission Adjustment [11]
  35
- Sensitivity Adjustment [12]
  36
- Relative Gas Sensitivities
  36
- Analog Output
  37
- Electrometer Calibration
  39
Chapter 4 Process Control Module

41
- Introduction
  41
- Process Control System Connections
  41
- To Display a Setpoint
  41
- To Modify a Setpoint
  42
- Relay Polarity Setting
  42
- Relay Disable
  43
- Pin Assignments
  44
- Process Control Operation
  44
  - Setpoint Display and Adjustment
    44
  - Manual Override [16]
    45
- Process Control Theory of Operation
  45
  - Process Control Specifications
    45
Chapter 5 RS-232 Module

47
- Introduction
  47
- RS-232 Interface
  47
  - Selecting the Byte Format
    47
  - Baud Rate
    47
  - Character Framing
    47
  - Talk-Only Mode
    48
  - Handshake Line Control Switches
    48
  - Invert RTS Switch
    48
- Operation
  49
  - Command Syntax
    49
  - Dgs
    50
  - Ds Ig
    50
  - Ig1
    50
  - Ig2
    50
  - Error Messages
    51
- RS-232 Theory of Operation
  51
  - Handshaking
    51
  - Cts, Dsr
    52
  - DCD
    52
  - Dtr
    52
  - Rts
    52
- Reversing the Polarity of RTS
  52
- RS-232 Troubleshooting
  52
  - RS-232 Specifications
    53
Chapter 6 Digital Interface Module

55
- Process Control Installation
  55
- Process Control System Connections
  55
- To Display a Setpoint
  56
- To Modify a Setpoint
  56
- Process Control Connector
  57
- Process Control Display Assignment
  57
- Manual Override
  58
- RS-232/RS-485 Installation
  58
- Setpoint Display and Adjustment
  60
- Switch Settings
  61
- RS-232 Connectors
  64
- RS-485 Connector
  65
- Operation
  65
  - RS-232/RS-485 Command Syntax
    66
  - Dgs
    66
  - Igb
    67
  - Error Messages
    69
  - RS-232/RS-485 Signals
    69
  - RS-232 and RS-485 Start Characters
    70
- Troubleshooting
  71
  - Host Computer Interface Specifications
    71
Chapter 7 Convectron Gauge Module

73
- Introduction
  73
- Safety Instructions
  75
- Installation Considerations
  77
- Orientation
  77
- Mounting
  78
  - Compression Mount
    79
  - 1/8 NPT Mount
    79
  - NW Flange
    79
- Reading Pressure
  80
- Unit of Measure [16 and 17]
  86
- Display Update Rate Switch [18]
  86
- Analog Output [20 and 21]
  87
- Calibration
  88

MKS 350 Series Instruction Manual (58 pages)

UHV Ionization Gauge Controller

Brand: MKS | Category: Controller | Size: 0 MB

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MKS 350 Series Manuals

MKS 350 Series Instruction Manual (94 pages)

Table of Contents

Chapter 1 Before You Begin

Chapter 2 350 Gauge Controller

Chapter 3 Electrometer Module

Chapter 4 Process Control Module

Chapter 5 RS-232 Module

Chapter 6 Digital Interface Module

Chapter 7 Convectron Gauge Module

MKS 350 Series Instruction Manual (58 pages)

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