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DN160ISO-K
Edwards DN160ISO-K Vacuum Pump Manuals
Manuals and User Guides for Edwards DN160ISO-K Vacuum Pump. We have
1
Edwards DN160ISO-K Vacuum Pump manual available for free PDF download: Instruction Manual
Edwards DN160ISO-K Instruction Manual (40 pages)
Compound Turbomolecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Technical Data
9
General
9
Pumping Media
9
Pumps Without Gas Purge
10
Pumps with Gas Purge
10
Vent Gas Specification and Vent Control Data
11
Purge Gas Specification
11
Water Cooling
11
Materials Exposed to Gases Pumped
12
Mounting Attitude of the EXT556H Pump
15
Installation
17
Unpack and Inspect
17
Typical Installation
17
Connection to the Vacuum System
17
Typical Pumping System
18
The Inlet Screen (Supplied Fitted)
19
Inlet Connection
19
Do Not Remove Screws 'B
20
Backing Connection
21
Vent Options, Vent Valve Connection and Control
21
Maximum Rate of Pressure Rise When Venting
22
Purge Gas Connection
23
Connect the Purge Gas
23
Recommended Purge Gas Flow
23
Electrical Installation
23
Dimensions and Features of EXT556H Pumps
24
Cooling
25
Introduction
25
Forced Air Cooling
25
Water Cooling
25
Magnetic Fields
26
Operation
27
Start up
27
Stand-By
27
Shut-Down
27
Safety Interlocks and Control System
28
Bakeout (Conflat Only)
28
Maintenance
29
Introduction
29
Bearing Maintenance
29
Rotor Life
29
Clean the Pump
29
Fault Finding
30
Storage and Disposal
33
Storage
33
Disposal
33
Service, Spares and Accessories
35
Introduction
35
Service
35
Spares
35
ISX Inlet-Screen
35
Inlet-Flange Seals
35
Accessories
36
Installation
36
EXC Controller
36
Pump-To-Controller Cable
36
EXDC Drive Modules
36
Installation of EXT556H Optional Accessories and Spares
37
BX Bakeout Band (Conflat Only)
38
FL20K Foreline Trap
38
TAV Vent-Valve and Vent-Port Adaptor
38
ACX Air-Cooler
38
WCX Water-Cooler
39
Vibration Isolators
39
PRX Purge-Restrictor
39
VRX Vent-Restrictor
39
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