Table 1-4: Agv3D Series Specifications (Continued) - Aerotech AGV3D Series Hardware Manual

AGV3D Hardware Manual
Table 1-4: AGV3D Series Specifications (continued)
Mechanical Specifications
Axes
Accuracy
Repeatability
Dither (Minimum Incre-
(5)
mental Motion)
(6)
Cooling
Weight
Material
Mean Time Before Failure (MTBF)
All angles are optical unless otherwise specified. All specifications are per axis unless otherwise specified.
(1) Contact Aerotech to inquire about additional wavelengths.
(2) As measured at the focusing apparatus.
(3) Processing speed is dependent on allowable tracking error. Achievable with < 2% velocity error over continous velocity portion of
the move.
(4) After initial 3-hour warm-up with ambient temperature variation < ±0.5°C.
(5) Without -AC option
(6) For -AC option, if nitrogen is used, it must be 99.99% pure and filtered to 0.25 μm. If compressed air is used, it must be filtered to
0.25 μm, dry to 0º F dew point and oil free.
(7) Working distance is measured from the bottom surface of the scan head.
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Galvo Scanners
Z-Focus
Galvo Scanners
Z-Focus
Galvo Scanners
Z-Focus
1.3. Basic Specifications
AGV3D-20
3 total: Spot positioning (X,Y); Focusing (Z)
50 µrad pk-pk
0.5 µm
0.4 µrad rms
0.15 µm
< 0.4 µrad rms
(2)
0.003 μm
0.05 μm at 160 mm working distance
0.25 μm at 500 mm working distance
0.8 μm at 1000 mm working distance
Air cooling (-AC option);
Water cooling (-WC option)
10.5 kg
Anodized aluminum
20,000 hours
AGV3D-30
11.2 kg
17