Aerotech AGV-HP Series Hardware Manual

Aerotech AGV-HP Series Hardware Manual

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AGV-HP(O) Two-Axis Galvo Scanner

HARDWARE MANUAL
Revision 2.00

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Summary of Contents for Aerotech AGV-HP Series

  • Page 1: Agv-Hp(O) Two-Axis Galvo Scanner

    AGV-HP(O) Two-Axis Galvo Scanner HARDWARE MANUAL Revision 2.00...
  • Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
  • Page 3: Table Of Contents

    3.4. Limits, Marker, and Machine Direction 3.5. Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.2.1. Focal Lens and Protective Glass 4.2.2. Turning Mirrors 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com...
  • Page 4: List Of Figures

    Figure 3-2: -BE1 Galvo X-Axis Machine Direction (front) Figure 3-3: -BE1 Galvo Y-Axis Machine Direction (side) Figure 3-4: -BE2 Galvo X-Axis Machine Direction (front) Figure 3-5: -BE2 Galvo Y-Axis Machine Direction (side) Figure 3-6: Analog Encoder Phasing Reference Diagram www.aerotech.com...
  • Page 5: List Of Tables

    Table 3-1: Motor and Feedback Connector Pinouts Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connector Table 3-3: Aerotech Motor and Feedback Cable Part Numbers Table 3-4: Wire Gauge and Insulation Specifications Table 3-5: Motor and Feedback Specifications...
  • Page 6 List of Tables AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 7: Safety Procedures And Warnings

    To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments.
  • Page 8 Make sure that the product is securely mounted before you operate it. All service and maintenance must be done by approved personnel. Keep the scan head free of foreign matter and moisture to prevent a reduction in its performance and life expectancy. WARNING: Securely mount and position all system cables. www.aerotech.com...
  • Page 9: Laser Safety

    Direct exposures of 0.01 second or less could cause eye and skin Class IIIb damage. Direct or scattered radiation without optical enhancement could cause Class IV eye and skin damage. www.aerotech.com...
  • Page 10: Laser Area

    The laser area must be designated by suitable warning signs or lamps and protected by appropriate shading and interlock switches. Figure 1: Laser Area of an AGV-HP(O) Scan Head www.aerotech.com...
  • Page 11: Laser Shutter

    Do not stare into the laser beam, put your body parts in the laser area, or expose yourself to reflections from powerful beams. WARNING: Aerotech recommends that you only use a Class 1 HeNe laser to do alignments. If a Class 1 HeNe laser is not available, use the lowest power setting on the available laser and remote beam sensing techniques.
  • Page 12 Laser Shutter AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 13: Eu Declaration Of Incorporation

    AGV-HP(O) Hardware Manual EU Declaration of Incorporation EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: AGV-HP(O) Scan Head is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 14 EU Declaration of Incorporation AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 15: Chapter 1: Overview

    The AGV-HPO is also available with right-side and left-side input apertures for “mirror image” machine builds or side-by-side scanner mounting with a single laser beam split to source both scanners. www.aerotech.com...
  • Page 16: Figure 1-2: Standard Agv-Hp

    Chapter 1: Overview AGV-HP(O) Hardware Manual Figure 1-2: Standard AGV-HP Figure 1-3: Standard AGV-HPO www.aerotech.com...
  • Page 17: Table 1-1: Ordering Options

    NOTE: Custom coatings available. Contact factory for details. F-Theta Lenses Available (Optional) -Lxx Table 1-2 for standard F-Theta Lens options Mounting Plate (Optional) Mounting plate Air Cooling (Optional, refer to Section 2.5.) Air cooling Water Cooling (Optional, refer to Section 2.6.) Water cooling www.aerotech.com...
  • Page 18: Table 1-2: F-Theta Lens Options(1,2,3,4)

    (3) Custom lenses are available. Contact the factory for details. (4) Some F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations). Contact factory for alternate lens options that are compatible with short-pulse lasers. www.aerotech.com...
  • Page 19 (3) Custom lenses are available. Contact the factory for details. (4) Some F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations). Contact factory for alternate lens options that are compatible with short-pulse lasers. www.aerotech.com...
  • Page 20: Environmental Specifications

    Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the AGV-HP(O). At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the AGV-HP(O) specifications are repeatable over an extended period of time.
  • Page 21: Basic Specifications

    (6) Based on the rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling. (7) Achievable with <1% velocity error over continuous velocity portion of move. (8) Marking speed is dependent on allowable tracking error. (9) Settled to within 1% of move distance. www.aerotech.com...
  • Page 22: Table 1-5: Agv-Hp(O) Series Mirror Specifications

    Cooling 20 mm Power (W) 30 mm 1000 1000 1000 1000 1000 10 mm Air and 14 mm 1200 1200 1200 1200 1200 Water 20 mm 1800 1800 1800 1800 1800 Cooling 30 mm 3000 3000 3000 3000 3000 www.aerotech.com...
  • Page 23: Vacuum Operation

    AGV-HP(O) Hardware Manual 1.4. Vacuum Operation 1.4. Vacuum Operation Contact the factory for information about operation in a vacuum environment. www.aerotech.com...
  • Page 24 1.4. Vacuum Operation AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 25: Chapter 2: Mechanical Specifications And Installation

    Avoid eye or skin exposure to direct or scattered radiation. WARNING: Aerotech recommends that you only use a Class 1 HeNe laser to do alignments. If a Class 1 HeNe laser is not available, use the lowest power setting on the available laser and remote beam sensing techniques.
  • Page 26: Unpacking And Handling The Scan Head

    12 hours. Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping.
  • Page 27: Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions 2.2. Dimensions Figure 2-1: AGV10HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 28: Figure 2-2: Agv10Hp-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-2: AGV10HP-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 29: Figure 2-3: Agv10Hpo-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-3: AGV10HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 30: Figure 2-4: Agv10Hpo-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-4: AGV10HPO-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 31: Figure 2-5: Agv14Hp-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-5: AGV14HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 32: Figure 2-6: Agv14Hp-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-6: AGV14HP-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 33: Figure 2-7: Agv14Hpo-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-7: AGV14HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 34: Figure 2-8: Agv14Hpo-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-8: AGV14HPO-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 35: Figure 2-9: Agv20Hp-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-9: AGV20HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 36: Figure 2-10: Agv20Hp-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-10: AGV20HP-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 37: Figure 2-11: Agv20Hpo-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-11: AGV20HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 38: Figure 2-12: Agv20Hpo-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-12: AGV20HPO-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 39: Figure 2-13: Agv30Hp-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-13: AGV30HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 40: Figure 2-14: Agv30Hpo-Be1 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-14: AGV30HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 41: Securing The Scan Head To The Mounting Surface

    The alignment tolerance should be based on the variability acceptable in the optical system. Aerotech recommends that you align the bottom surface of the AGV parallel to the work plane within 25 µm as a starting point.
  • Page 42 6. Insert the appropriate hardware into the holes of the mounting flange. The screw length must be long enough to provide at least 1.0x diameter thread engagement. 7. Using an appropriate wrench, tighten the hardware. Alternate tightening of the screws so that the AGV-HP(O) scan head comes together evenly on the mounting flange. www.aerotech.com...
  • Page 43: Attaching The Focal Lens To The Scan Head

    Figure 2-15: Example of F-Theta Lens (Complete Assembly) DANGER: Make sure that the laser is set in the "off" position and secured against accidental operation before you inspect or do maintenance to the focal lens. www.aerotech.com...
  • Page 44: Figure 2-16: Assembly Of Focal Lens To Scan Head (Agv-Hp(O))

    7. Remove the dust cover from the front of the focal lens. To remove the focal lens, reverse the procedure outlined above. Figure 2-16: Assembly of Focal Lens to Scan Head (AGV-HP(O)) www.aerotech.com...
  • Page 45: Air Requirements

    If compressed air is used, it must be filtered to 0.25 microns, dry to 0º F dew point, and oil free. The filtration requirement is necessary to prevent particles from damaging the optical surfaces of the turning mirrors. Figure 2-17: Air-Cooling (-AC) Locations www.aerotech.com...
  • Page 46: Water Requirements

    Aerotech recommends using an appropriately sized chiller capable of delivering 0.35 GPM (gallons per minute) at 60 psid. The coolant must be delivered and retrieved from the scan head via appropriate hoses with outer diameters of 6 mm.
  • Page 47: Chapter 3: Electrical Specifications And Installation

    Aerotech motion control systems are adjusted at the factory for optimum performance. When the AGV-HP(O) is part of a complete Aerotech motion control system, setup should only require that you connect the galvo to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections.
  • Page 48: Motor And Feedback Connectors

    Restrict access to the galvo when it is connected to a power source. If the AGV-HP(O) is built with standard Aerotech motors and encoders, it will arrive from the factory completely wired and assembled. The AGV scan heads contain galvano motors with dual analog encoder feedback. Both the primary and secondary position feedback signals of each galvano motor must be tuned for optimal performance.
  • Page 49: Table 3-1: Motor And Feedback Connector Pinouts

    5V Common Ground 5V Common Ground Frame Ground Motor - Motor - Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2...
  • Page 50: Motor And Feedback Wiring

    Restrict access to the galvo when it is connected to a power source. AGV-HP(O) scan heads are wired and assembled at the factory. Contact your Aerotech representative if you have any questions on system configuration. For cable drawings, refer to the documentation that shipped with your system.
  • Page 51: Figure 3-1: Motor And Feedback Wiring

    AGV-HP(O) Hardware Manual 3.2. Motor and Feedback Wiring Figure 3-1: Motor and Feedback Wiring www.aerotech.com...
  • Page 52: Motor And Feedback Specifications

    Encoder Resolution 4096 lines/revolution Motor Specifications AGV10HP(O), AGV14HP(O), AGV30HP(O) AGV20HP(O) BEMF Constant 1.4 V/krpm 4.3 V/krpm Max Current Resistance 1.5 Ω 3.1 Ω Inductance 170 µH 675 µH Maximum Bus 80 V 80 V Voltage Number of Poles www.aerotech.com...
  • Page 53: Limits, Marker, And Machine Direction

    3.4. Limits, Marker, and Machine Direction 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5.
  • Page 54: Figure 3-4: -Be2 Galvo X-Axis Machine Direction (Front)

    3.4. Limits, Marker, and Machine Direction AGV-HP(O) Hardware Manual Figure 3-4: -BE2 Galvo X-Axis Machine Direction (front) Figure 3-5: -BE2 Galvo Y-Axis Machine Direction (side) www.aerotech.com...
  • Page 55: Feedback Phasing

    AGV-HP(O) Hardware Manual 3.5. Feedback Phasing 3.5. Feedback Phasing Figure 3-6: Analog Encoder Phasing Reference Diagram www.aerotech.com...
  • Page 56 3.5. Feedback Phasing AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 57: Chapter 4: Maintenance

    Inspect and perform an operational check on all safeguards and protective devices. It is usually not possible for Aerotech field service personnel to do repairs and/or replace components. Contact Aerotech Global Technical Support for more information and to determine if the AGV-HP(O) should be sent back to the factory for maintenance.
  • Page 58: Focal Lens And Protective Glass

    5. Remove any liquid residue with a dry lint-free lens cleaning cloth or by blow it off in one direction with compressed nitrogen or clean, dry, oil-less air. 6. Repeat this procedure, using a new lint-free lens cleaning cloth for each repetition, until the surface is completely clean. www.aerotech.com...
  • Page 59: Turning Mirrors

    When cleaning the turning mirrors becomes an absolute necessity (to remove fingerprints from the reflective surfaces, for example), carefully follow the same procedure outlined in Section 4.2.1. www.aerotech.com...
  • Page 60: Troubleshooting

    Optical surfaces Reduction in power as contaminated with dirt Refer to Section 4.2. the laser beam passes and debris through the scan Contact Aerotech service and/or a lens head Optical surfaces damaged supplier. Motor and Feedback Refer to Section 3.1., Section 3.2., and the...
  • Page 61: Appendix A: Warranty And Field Service

    All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense.
  • Page 62 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
  • Page 63: Appendix B: Revision History

    Appendix B: Revision History Revision Description 2.00 General update 1.05 Updated Electrical Specifications and Installation with new motor specifications. 1.04 1.03 Revision changes have been archived. If you need a copy of this revision, contact 1.02 Aerotech Global Technical Support. 1.01 1.00 www.aerotech.com...
  • Page 64 Appendix B: Revision History AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 65: Index

    Class IIIa Class IIIb Maintenance Class IV maximum permitted radiation value cleaning Motor Specifications mounting surface mounting surface solvents cleaning Cleaning Cleaning Solvents Recommended nitrogen cleaning the turning mirrors compressed air coolant Optical surfaces contaminated Ordering Options Dimensions Directive 2006/42/EC www.aerotech.com...
  • Page 66 Securing the Scan Head to the Mounting Surface serial number Service and Inspection Schedule solvents stabilizing stage stage stabilizing Table of Contents Temperature Effects Turning Mirrors Unpacking and Handling the Scan Head Vacuum Operation Vibration Warranty and Field Service Water Requirements www.aerotech.com...

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