Basic Specifications; Table 1-4: Agv-Hp(O) Series Specifications - Aerotech AGV-HP Series Hardware Manual

1.3. Basic Specifications

1.3. Basic Specifications
Table 1-4: AGV-HP(O) Series Specifications
Optical Performance
Beam Aperture
Maximum Scan Angle
Beam Displacement
Feedback Resolution
(2)
Dither
(Minimum Incremental Motion)
Accuracy
(3)
Repeatability
Gain Error
Non-Linearity
Dynamic Performance
Tracking Error
Peak Acceleration
Continuous Acceleration
Positioning Speed
(4,7,8)
Marking Speed
Jump & Settle Time, 1 mm Move
Stability
Long-Term Drift
Thermal Drift
Mechanical Specifications
Mass (AGV-HP)
Mass (AGV-HPO)
Material
Mean Time Before Failure
1. All angles are optical unless otherwise noted.
2. Without -AC air cooling option.
3. After initial 3 hour warm-up, ambient temperature variation < ±0.5°.
4. Typical performance with f = 160 mm F-Theta objective.
5. Based on maximum rated current of the motor.
6. Based on rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value
without water cooling.
7. Achievable with <1% velocity error over continuous velocity portion of move.
8. Marking speed is dependent on allowable tracking error.
9. Settled to within 1% of move distance.
All specifications are per axis unless otherwise noted.
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AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
(1)
(4,5)
288,000 m/s
(4,6)
75,200 m/s
(4)
(4,9)
Offset
(3)
Gain
Offset
Gain
10 mm 14 mm
12.6 mm 16.5 mm
0.012 µrad (25 bit)
< 0.4 µrad
50 µrad pk-pk
0.4 µrad
0.05 mrad
2
224,000 m/s
2
56,000 m/s
75 m/s 75 m/s
270 µsec 270 µsec
10 µrad/12 hrs
15 µrad/24 hrs
10 ppm/24 hrs
10 µrad/°C
1 ppm/°C
4.1 kg 4.4 kg
2.5 kg 2.6 kg
Aluminum (Black Anodize and Blue Paint)
20,000 Hours
AGV-HP(O) Hardware Manual
20 mm 30 mm
±20°
23.2 mm 35.7 mm
RMS
RMS
0.005%
0 µsec
2 2
80,000 m/s 56,000 m/s
2 2
20,800 m/s 19,200 m/s
50 m/s 50 m/s
5 m/s
450 µsec 700 µsec
5.1 kg 5.8 kg
2.9 kg 3.1 kg
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