Aerotech AGV-HP Series Hardware Manual

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AGV-HP(O) 2-Axis Galvo
Scanner Hardware Manual
Revision: 1.05.00

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Summary of Contents for Aerotech AGV-HP Series

  • Page 1: Agv-Hp(O) 2-Axis Galvo Scanner Hardware Manual

    AGV-HP(O) 2-Axis Galvo Scanner Hardware Manual Revision: 1.05.00...
  • Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
  • Page 3: Table Of Contents

    3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.2.1. Focal Lens and Protective Glass 4.2.2. Turning Mirrors 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com...
  • Page 4: List Of Figures

    Figure 3-2: -BE1 Galvo X-Axis Machine Direction (front) Figure 3-3: -BE1 Galvo Y-Axis Machine Direction (side) Figure 3-4: -BE2 Galvo X-Axis Machine Direction (front) Figure 3-5: -BE2 Galvo Y-Axis Machine Direction (side) Figure 3-6: Analog Encoder Phasing Reference Diagram www.aerotech.com...
  • Page 5: List Of Tables

    Table 3-1: Motor and Feedback Connector Pinouts Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connector Table 3-3: Aerotech Motor and Feedback Cable Part Numbers Table 3-4: Wire Gauge and Insulation Specifications Table 3-5: Motor and Feedback Specifications...
  • Page 6: Safety Procedures And Warnings

    If you do not understand the information in this manual, contact Aerotech Global Technical Support. N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release.
  • Page 7: Laser Safety

    Class IIIb Direct exposures of 0.01 second or less may cause eye and skin damage. Direct or scattered radiation without optical enhancement may cause eye and Class IV skin damage. www.aerotech.com...
  • Page 8: Laser Area

    The AGV-HP(O) scan head does not include a laser attenuator, and therefore it cannot block or weaken the laser beam. Due to the unique properties of each laser, it is the user’s responsibility to incorporate an appropriate shutter as per any and all applicable regulations in order to prevent unwanted emission of the laser beam. www.aerotech.com...
  • Page 9 W A R N I N G :  Wear eye protection. The danger to your eyes increases when optical instruments are used in conjunction with the scan head. www.aerotech.com...
  • Page 10: Eu Declaration Of Incorporation

    EU Declaration of Incorporation AGV-HP(O) Hardware Manual EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: AGV-HP(O) Scan Head is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 11: Chapter 1: Overview

    The AGV-HPO is also available with right-side and left-side input apertures for “mirror image” machine builds or side-by-side scanner mounting with a single laser beam split to source both scanners. www.aerotech.com...
  • Page 12: Figure 1-2: Standard Agv-Hp

    Chapter 1: Overview AGV-HP(O) Hardware Manual Figure 1-2: Standard AGV-HP Figure 1-3: Standard AGV-HPO www.aerotech.com...
  • Page 13: Table 1-1: Ordering Options

    NOTE: Custom coatings available. Contact factory for details. F-Theta Lenses Available (Optional) -Lxx Table 1-2 for standard F-Theta Lens options Mounting Plate (Optional) Mounting plate Air Cooling (Optional, refer to Section 2.5.) Air cooling Water Cooling (Optional, refer to Section 2.6.) Water cooling www.aerotech.com...
  • Page 14: Table 1-2: F-Theta Lens Options(1,2,3,4)

    Contact factory for details. (3) Custom lenses available. Contact factory for details. (4) Certain F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations). Contact factory for alternate lens options that are compatible with short-pulse lasers. www.aerotech.com...
  • Page 15 Contact factory for details. (3) Custom lenses available. Contact factory for details. (4) Certain F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations). Contact factory for alternate lens options that are compatible with short-pulse lasers. www.aerotech.com...
  • Page 16: Environmental Specifications

    Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level Altitude Contact Aerotech if your specific application involves use above 2,000 m or below sea level. Use the system in a low vibration environment. Excessive floor or acoustical vibration Vibration can affect system performance.
  • Page 17: Accuracy And Temperature Effects

    1.2. Accuracy and Temperature Effects 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the AGV-HP(O). At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the AGV-HP(O)
  • Page 18: Basic Specifications

    7. Achievable with <1% velocity error over continuous velocity portion of move. 8. Marking speed is dependent on allowable tracking error. 9. Settled to within 1% of move distance. All specifications are per axis unless otherwise noted. www.aerotech.com...
  • Page 19: Table 1-5: Agv-Hp(O) Series Mirror Specifications

    1000 200 1000 1000 1000 300 300 300 300 1000 AGV10 Air and AGV14 1200 150 1200 1200 1200 300 300 300 300 1200 Water AGV20 1800 300 1800 1800 1800 600 600 600 600 1800 Cooling AGV30 3000 600 3000 3000 3000 900 900 900 900 3000 www.aerotech.com...
  • Page 20: Vacuum Operation

    1.4. Vacuum Operation AGV-HP(O) Hardware Manual 1.4. Vacuum Operation Contact the factory for information regarding operation in a vacuum environment. www.aerotech.com...
  • Page 21: Chapter 2: Mechanical Specifications And Installation

    W A R N I N G :  Fingerprints contain aggressive substances that can damage optical surfaces. Always wear suitable gloves when you handle the optics. Lift only by the base of the scan head. Carefully remove the AGV-HP(O) from its protective shipping container. Gently set the AGV-HP(O) on a smooth, flat, and clean surface. www.aerotech.com...
  • Page 22 12 hours. Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping.
  • Page 23: Dimensions

    N O T E :  All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. The most recent system drawings and schematics can be found on your Storage Device or at www.aerotech.com. Figure 2-1: AGV10HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 24: Figure 2-2: Agv10Hp-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-2: AGV10HP-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 25: Figure 2-3: Agv10Hpo-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-3: AGV10HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 26: Figure 2-4: Agv10Hpo-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-4: AGV10HPO-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 27: Figure 2-5: Agv14Hp-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-5: AGV14HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 28: Figure 2-6: Agv14Hp-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-6: AGV14HP-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 29: Figure 2-7: Agv14Hpo-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-7: AGV14HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 30: Figure 2-8: Agv14Hpo-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-8: AGV14HPO-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 31: Figure 2-9: Agv20Hp-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-9: AGV20HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 32: Figure 2-10: Agv20Hp-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-10: AGV20HP-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 33: Figure 2-11: Agv20Hpo-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-11: AGV20HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 34: Figure 2-12: Agv20Hpo-Be2 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-12: AGV20HPO-BE2 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 35: Figure 2-13: Agv30Hp-Be1 Galvanometer Scanner Dimensions

    AGV-HP(O) Hardware Manual 2.2. Dimensions Figure 2-13: AGV30HP-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 36: Figure 2-14: Agv30Hpo-Be1 Galvanometer Scanner Dimensions

    2.2. Dimensions AGV-HP(O) Hardware Manual Figure 2-14: AGV30HPO-BE1 Galvanometer Scanner Dimensions www.aerotech.com...
  • Page 37: Securing The Scan Head To The Mounting Surface

    Additional mounting holes are also provided on the back surface of the scan head. For applications where the scan head is to be mounted onto a bridge structure or onto the carriage of a gantry stage, the AGV-HP series scanners can be equipped with an optional mounting plate.
  • Page 38 6. Insert the appropriate hardware into the holes of the mounting flange. The screw length must be long enough to provide at least 1.0x diameter thread engagement. 7. Using an appropriate wrench, tighten the hardware. Alternate tightening of the screws so that the AGV-HP(O) scan head comes together evenly on the mounting flange. www.aerotech.com...
  • Page 39: Attaching The Focal Lens To The Scan Head

    W A R N I N G :  Before performing any inspections of the focal lens, verify that the laser is switched off and secured against accidentally being switched on. W A R N I N G :  Fingerprints contain aggressive substances that can damage optical surfaces. Always wear suitable gloves when you handle the optics. www.aerotech.com...
  • Page 40: Figure 2-16: Assembly Of Focal Lens To Scan Head (Agv-Hp(O))

    7. Remove the dust cover from the front of the focal lens. To remove the focal lens, reverse the procedure outlined above. Figure 2-16: Assembly of Focal Lens to Scan Head (AGV-HP(O)) www.aerotech.com...
  • Page 41: Air Requirements

    W A R N I N G :  To prevent damage to the AGV-HP(O), do not attach a water hose to an air fitting or an air hose to a water fitting. W A R N I N G : Wear eye protection when you are close to compressed air components. Figure 2-17: Air-Cooling (-AC) Locations www.aerotech.com...
  • Page 42: Water Requirements

    Aerotech recommends using an appropriately sized chiller capable of delivering 0.35 GPM (gallons per minute) at 60 psid. The coolant must be delivered and retrieved from the scan head via appropriate hoses with outer diameters of 6 mm.
  • Page 43: Chapter 3: Electrical Specifications And Installation

    Aerotech motion control systems are adjusted at the factory for optimum performance. When the AGV-HP (O) is part of a complete Aerotech motion control system, setup usually involves connecting the AGV-HP(O) to the appropriate drive chassis with the cables provided. Labels on the system components usually indicate the appropriate connections.
  • Page 44: Motor And Feedback Connectors

    Failure to do so could expose the operator to electrical shock or mechanical dangers. C A U T I O N : The stage controller must provide over-current and over-speed protection. Failure to do so could cause electric shock or damage to the equipment.. www.aerotech.com...
  • Page 45: Table 3-1: Motor And Feedback Connector Pinouts

    5V Common Ground 5V Common Ground Frame Ground Motor - Motor - Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF www.aerotech.com...
  • Page 46: Motor And Feedback Wiring

    3.2. Motor and Feedback Wiring AGV-HP(O) scan heads come from the factory fully wired and assembled. N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration.
  • Page 47: Figure 3-1: Motor And Feedback Wiring

    AGV-HP(O) Hardware Manual 3.2. Motor and Feedback Wiring Figure 3-1: Motor and Feedback Wiring www.aerotech.com...
  • Page 48: Motor And Feedback Specifications

    Encoder Resolution 4096 lines/revolution Motor Specifications AGV10HP(O), AGV14HP(O), AGV30HP(O) AGV20HP(O) BEMF Constant 1.4 V/krpm 4.3 V/krpm Max Current Resistance 1.5 ohms 3.1 ohms Inductance 170 µH 675 µH Maximum Bus 80 V 80 V Voltage Number of Poles www.aerotech.com...
  • Page 49: Limits, Marker, And Machine Direction

    3.4. Limits, Marker, and Machine Direction 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5.
  • Page 50: Figure 3-4: -Be2 Galvo X-Axis Machine Direction (Front)

    3.4. Limits, Marker, and Machine Direction AGV-HP(O) Hardware Manual Figure 3-4: -BE2 Galvo X-Axis Machine Direction (front) Figure 3-5: -BE2 Galvo Y-Axis Machine Direction (side) www.aerotech.com...
  • Page 51: Motor And Feedback Phasing

    AGV-HP(O) Hardware Manual 3.5. Motor and Feedback Phasing 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-6: Analog Encoder Phasing Reference Diagram www.aerotech.com...
  • Page 52 3.5. Motor and Feedback Phasing AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 53: Chapter 4: Maintenance

    Inspect and perform an operational check on all safeguards and protective devices. In general, repair and/or replacement of damaged or malfunctioning components by Aerotech field service personnel is not possible. Repair typically requires that the unit be returned to the factory. Please contact Aerotech Global Technical Support for more information.
  • Page 54: Cleaning And Lubrication

    W A R N I N G :  Before performing any inspections of the focal lens, verify that the laser is switched off and secured against accidentally being switched on. W A R N I N G :  Take extra care when cleaning a focal lens that does not have a protective glass window. www.aerotech.com...
  • Page 55 5. Remove any liquid residue with a dry lint-free lens cleaning cloth or by blow it off in one direction with compressed nitrogen or clean, dry, oil-less air. 6. Repeat this procedure, using a new lint-free lens cleaning cloth for each repetition, until the surface is completely clean. www.aerotech.com...
  • Page 56: Turning Mirrors

    When cleaning the turning mirrors becomes an absolute necessity (to remove fingerprints from the reflective surfaces, for example), carefully follow the same procedure outlined in Section 4.2.1. www.aerotech.com...
  • Page 57: Troubleshooting

    Section 4.2. for cleaning instructions the laser beam passes debris through the scan head Optical surfaces damaged Contact Aerotech service and/or a lens supplier Motor and Feedback con- Section 3.1., Section 3.2., and Controller AGV-HP(O) scanner...
  • Page 58 4.3. Troubleshooting AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 59: Appendix A: Warranty And Field Service

    Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s...
  • Page 60 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
  • Page 61: Appendix B: Revision History

    Appendix B: Revision History Appendix B: Revision History Revision Description 1.05.00 Updated Chapter 3 with new motor specifications. 1.04.00 1.03.00 Revision changes have been archived. If you need a copy of this revision, contact Aerotech 1.02.00 Global Technical Support. 1.01.00 1.00.00 www.aerotech.com...
  • Page 62 Appendix B: Revision History AGV-HP(O) Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 63: Index

    Humidity Class I Class II Inspection Class IIa Inspection Schedule Class IIIa isopropyl alcohol Class IIIb Class IV label Classes of Lasers Laser Area cleaning Laser Safety mounting surface Laser Shutter solvents lubrication Cleaning Lubrication Cleaning Solvents Recommended Maintenance www.aerotech.com...
  • Page 64 Securing the Scan Head to the Mounting Surface serial number Service and Inspection Schedule shimming solvents stabilizing stage stage stabilizing Support Technical Support Temperature Effects Turning Mirrors Unpacking and Handling the Scan Head Vacuum Operation Vibration www.aerotech.com...

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Agv-hpo seriesAgv-14 hpAgv20 hpo

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