Aerotech AGV3D Series Hardware Manual

Aerotech AGV3D Series Hardware Manual

Three-axis laser scan head
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AGV3D Three-Axis Laser Scan Head

HARDWARE MANUAL
Revision 2.00

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Summary of Contents for Aerotech AGV3D Series

  • Page 1: Agv3D Three-Axis Laser Scan Head

    AGV3D Three-Axis Laser Scan Head HARDWARE MANUAL Revision 2.00...
  • Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
  • Page 3: Table Of Contents

    3.2. Motor and Feedback Wiring 3.3. Motor and Feedback Specifications Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Inspection 4.2.1. Protective Windows 4.2.2. Turning Mirrors 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com...
  • Page 4: List Of Figures

    Figure 2-9: Dynamic Focusing Module Mounting Screws Figure 2-10: Dynamic Focusing Module Reference Figure 3-1: Connectors Figure 3-2: X- and Y-Axis Motor and Feedback Wiring Figure 3-3: Z-Axis Motor and Feedback Wiring Figure 4-1: Exit Aperture Protective Window Mounting Bracket www.aerotech.com...
  • Page 5: List Of Tables

    Motor and Feedback Connecter Pinout (Z Axis) Table 3-4: Mating Connector Part Numbers for the Motor and Feedback Connector Table 3-5: Aerotech Motor and Feedback Cable Part Numbers Table 3-6: AGV3D-20 Motor and Feedback Specifications Table 3-7: AGV3D-30 Motor and Feedback Specifications...
  • Page 6 List of Tables AGV3D Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 7: Safety Procedures And Warnings

    To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments.
  • Page 8 WARNING: Securely mount and position all system cables. IMPORTANT: Carefully lift, move, and transport this product. IMPORTANT: Fingerprints contain aggressive substances that can damage optical surfaces. Wear clean, powder-free gloves when you handle optical components. www.aerotech.com...
  • Page 9: Laser Safety

    Classes of Lasers The AGV3D series scan head can be used with a variety of lasers. Each laser is assigned a particular hazard level, which is indicated by the Laser Class label that is affixed to the device near the location where laser radiation is emitted.
  • Page 10: Laser Area

    The laser area must be designated by suitable warning signs or lamps and protected by appropriate shading and interlock switches. Figure 1: Laser Area of an AGV3D Scan Head www.aerotech.com...
  • Page 11: Laser Shutter

    Do not stare into the laser beam, put your body parts in the laser area, or expose yourself to reflections from powerful beams. WARNING: Aerotech recommends that you only use a Class 1 HeNe laser to do alignments. If a Class 1 HeNe laser is not available, use the lowest power setting on the available laser and remote beam sensing techniques.
  • Page 12 Laser Shutter AGV3D Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 13: Eu Declaration Of Incorporation

    AGV3D Hardware Manual EU Declaration of Incorporation EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: AGV3D Scan Head is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 14 EU Declaration of Incorporation AGV3D Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 15: Chapter 1: Overview

    Chapter 1: Overview Aerotech’s AGV3D three-axis laser scan head manipulates a laser beam in three degrees of freedom:  X, Y, and Z. The AGV3D uses two mirrors, each of which is actuated by a galvano motor, to deflect the beam in the X and Y directions.
  • Page 16: Figure 1-2: Standard Agv3D

    Chapter 1: Overview AGV3D Hardware Manual Figure 1-2: Standard AGV3D www.aerotech.com...
  • Page 17: Table 1-1: Ordering Options

    Testing and integration of individual items as discrete components that ship together. -TAC This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. www.aerotech.com...
  • Page 18: Environmental Specifications

    Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level Altitude Contact Aerotech if your specific application involves use above 2,000 m or below sea level. Use the system in a low vibration environment. Excessive floor or acoustical Vibration vibration can affect system performance.
  • Page 19: Accuracy And Temperature Effects

    1.2. Accuracy and Temperature Effects 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the AGV3D. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the AGV3D...
  • Page 20: Basic Specifications

    2.5 μm / °C NOTE: All angles are optical unless otherwise noted. All specifications are per axis unless noted. (1) Contact Aerotech to inquire about additional wavelengths. (2) As measured at the focusing apparatus. (3) The processing speed is dependent on the allowable tracking error. It is achievable with < 2% velocity error over continuous velocity portion of the move.
  • Page 21: Table 1-4: Agv3D Series Specifications (Continued)

    20,000 hours NOTE: All angles are optical unless otherwise noted. All specifications are per axis unless noted. (1) Contact Aerotech to inquire about additional wavelengths. (2) As measured at the focusing apparatus. (3) The processing speed is dependent on the allowable tracking error. It is achievable with < 2% velocity error over continuous velocity portion of the move.
  • Page 22: Table 1-5: Agv3D-20 Spot Diameter Range (Μm) Within Field Of View Per Wavelength

    The working distance is measured from the bottom surface of the scan head. Refer to Table 1-7 to determine which field configuration option is required to achieve a specific nominal field of view for the desired wavelength. Contact Aerotech for additional data. www.aerotech.com...
  • Page 23: Table 1-6: Agv3D-30 Spot Diameter Range (Μm) Within Field Of View Per Wavelength

    The working distance is measured from the bottom surface of the scan head. Refer to Table 1-7 to determine which field configuration option is required to achieve a specific nominal field of view for the desired wavelength. Contact Aerotech for additional data. www.aerotech.com...
  • Page 24: Figure 1-3: Working Distance Detail

    1000 mm x 1000 mm (1320 mm WD) (1) For fields of view exceeding this value, or for applications using an F-theta lens in conjunction with AGV3D, contact Aerotech. (2) The working distance is measured from the bottom surface of the scan head.
  • Page 25: Figure 1-4: Agv3D-20 X/Y Axis Linear Acceleration Vs Working Distance

    AGV3D Hardware Manual 1.3. Basic Specifications Figure 1-4: AGV3D-20 X/Y Axis Linear Acceleration vs Working Distance Figure 1-5: AGV3D-30 X/Y Axis Linear Acceleration vs Working Distance www.aerotech.com...
  • Page 26: Figure 1-6: Agv3D Z-Axis Linear Acceleration Vs Working Distance

    Z-Axis linear acceleration values are shown for 1030 -1090 nm wavelength configuration. These values are generally representative of system performance for all wavelength options. If precise values for an alternate wavelength are required, contact the factory. Figure 1-6: AGV3D Z-Axis Linear Acceleration vs Working Distance www.aerotech.com...
  • Page 27: Software Configuration

    AGV3D Hardware Manual 1.4. Software Configuration 1.4. Software Configuration Refer to the AGV3D User Guide to configure the motion software. Any PC included with the system from the factory will already be configured. www.aerotech.com...
  • Page 28 1.4. Software Configuration AGV3D Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 29: Chapter 2: Mechanical Specifications And Installation

    Avoid eye or skin exposure to direct or scattered radiation. WARNING: Aerotech recommends that you only use a Class 1 HeNe laser to do alignments. If a Class 1 HeNe laser is not available, use the lowest power setting on the available laser and remote beam sensing techniques.
  • Page 30: Unpacking And Handling The Scan Head

    12 hours. Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping.
  • Page 31: Dimensions

    AGV3D Hardware Manual 2.2. Dimensions 2.2. Dimensions Figure 2-1: AGV3D-20 Scan Head Dimensions www.aerotech.com...
  • Page 32: Figure 2-2: Agv3D-30 Scan Head Dimensions

    2.2. Dimensions AGV3D Hardware Manual Figure 2-2: AGV3D-30 Scan Head Dimensions www.aerotech.com...
  • Page 33: Remove The Shipping Clamp

    4. Carefully remove the shipping clamp, the two [QTY. 2] M3 shcs, and the two [QTY. 2] M3 washers as a group to make sure that you do not drop a screw or washer in the open AGV3D enclosure. www.aerotech.com...
  • Page 34: Figure 2-4: Shipping Clamp Detail

    NOTE: The top cover should be flush with the enclosure. Carefully move any cables that interfere with the position of the top cover. 6. Attach the top cover with the four [QTY. 4] M3 socket head cap screws that were removed in Step 1. www.aerotech.com...
  • Page 35: Securing The Scan Head To The Mounting Surface

    For example, if the rear mounting points are used to mount the AGV3D to the mounting surface, use the bottom mounting points as a reference. Either the exit cover glass bracket or the bottom mounting surface must be accessible to verify mounting parallelism. www.aerotech.com...
  • Page 36: Figure 2-5: Mounting Point Locations

    Screw Size Right Side M6x1, 9 mm LG Rear Side M6x1, 9 mm LG Bottom M6x1, 9 mm LG Table 2-2: Mounting Specifications Specification Parallelism to Workpiece 50 µm over 100 mm Mounting Surface Flatness 25 µm over 305 mm www.aerotech.com...
  • Page 37: Laser Beam Alignment

    In general, use as little power as necessary to see the laser spot on the fluorescing disks. The values in Table 2-3 are the recommended laser settings for alignment. Small deviations in power are acceptable, if necessary. www.aerotech.com...
  • Page 38: Table 2-3: Recommended Beam Power Settings

    7. Repeat steps 5 and 6 until the beam is aligned with the rear target pinhole and centered on the front target. 8. Turn off the laser. 9. Remove the laser beam alignment fixture, M6 SHCS, and 6 mm dowels from the front face of the AGV3D. www.aerotech.com...
  • Page 39 9. Repeat Steps 2 through 8 until the beam is aligned with the rear target pinhole and the front tar- get pinhole. 10. Remove the laser beam alignment fixture, M6 SHCS, and 6 mm dowels from the front face of the AGV3D. www.aerotech.com...
  • Page 40: Air Requirements

    If compressed air is used, it must be filtered to 0.25 microns, dry to 0º F dew point, and oil free. The filtration requirement is necessary to prevent particles from damaging the optical surfaces of the turning mirrors. Figure 2-7: Air-Cooling Locations www.aerotech.com...
  • Page 41: Water Requirements

    6 mm to deliver and retrieve the coolant from the scan head. Use of a corrosion inhibitor additive meant for multi-metal cooling channels can help increase the life of components in the water-cooling circuit. Figure 2-8: Water Cooling Locations www.aerotech.com...
  • Page 42: Changing The Dynamic Focusing Field-Of-View Setting

    -F1 Option: Slide the DFM to the right -F2 Option: Slide the DFM to the left IMPORTANT: The M4 screws do not need to reach the ends of their slots for the DFM to be in the correct position. www.aerotech.com...
  • Page 43: Figure 2-10: Dynamic Focusing Module Reference

    5. Slowly tighten the M4 socket head cap screws that were loosened in Step 2. Alternate between the screws. Tighten the screws to a torque of 30 in·lb. 6. Use the AGV3D setup programs to update the parameter settings to make sure that the AGV3D functions correctly. Refer to the AGV3D User Guide. www.aerotech.com...
  • Page 44: Using An F-Theta Lens

    2.9. Using an F-Theta Lens AGV3D Hardware Manual 2.9. Using an F-Theta Lens IMPORTANT: Wear clean, powder-free gloves when you handle optical components. The user is responsible for supplying both the F-Theta lens and a lens adapter. Contact the factory for assistance. www.aerotech.com...
  • Page 45: Chapter 3: Electrical Specifications And Installation

    Electrical installation requirements will depend on the ordered product options. Installation instructions in this section are for AGV3D stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information on products that are otherwise configured.
  • Page 46: Motor And Feedback Connectors

    Restrict access to the AGV3D when it is connected to a power source. If the AGV3D is built with standard Aerotech motors and encoders, it will arrive from the factory completely wired and assembled. The X- and Y-axis galvo motors produce dual analog encoder feedback signals. The Z-axis motor produces single analog encoder feedback signals.
  • Page 47: Table 3-1: Motor And Feedback Connecter Pinouts (X And Y Axis)

    5V Common Ground 5V Common Ground Frame Ground Motor - Motor - Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connectors Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2...
  • Page 48: Table 3-3: Motor And Feedback Connecter Pinout (Z Axis)

    Common ground Common ground Signal Shield Connection Motor - Motor - Table 3-4: Mating Connector Part Numbers for the Motor and Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com...
  • Page 49: Motor And Feedback Wiring

    Restrict access to the AGV3D when it is connected to a power source. AGV3D scan heads are wired and assembled at the factory. Contact your Aerotech representative if you have any questions on system configuration. For cable drawings, refer to the documentation that shipped with your system.
  • Page 50: Figure 3-2: X- And Y-Axis Motor And Feedback Wiring

    3.2. Motor and Feedback Wiring AGV3D Hardware Manual Figure 3-2: X- and Y-Axis Motor and Feedback Wiring www.aerotech.com...
  • Page 51: Figure 3-3: Z-Axis Motor And Feedback Wiring

    AGV3D Hardware Manual 3.2. Motor and Feedback Wiring Figure 3-3: Z-Axis Motor and Feedback Wiring www.aerotech.com...
  • Page 52: Motor And Feedback Specifications

    Home Switch At Center Motor Specifications X and Y Motors Z Motor BEMF Constant 4.3 V/krpm 6.64 V/(m/s) Max Current Resistance 3.1 Ω 1.84 Ω Inductance 675 µH 1.12 mH Maximum Bus 80 V 80 V Voltage Number of Poles www.aerotech.com...
  • Page 53: Chapter 4: Maintenance

    Inspect and perform an operational check on all safeguards and protective devices. It is usually not possible for Aerotech field service personnel to do repairs and/or replace components. Contact Aerotech Global Technical Support for more information and to determine if the AGV3D should be sent back to the factory for maintenance.
  • Page 54: Cleaning And Inspection

    5. Remove any liquid residue with a dry lint-free lens cleaning cloth or by blow it off in one direction with compressed nitrogen or clean, dry, oil-less air. 6. Repeat this procedure, using a new lint-free lens cleaning cloth for each repetition, until the sur- face is completely clean. Contact Aerotech if you need a replacement Protective Window. www.aerotech.com...
  • Page 55: Turning Mirrors

    NOTE: Make sure that the protective window and o-ring are in their correct positions. 5. Use the four [QTY. 4] M6 socket head cap screws that were removed in Step 1 to secure the mounting bracket to the scan head. Figure 4-1: Exit Aperture Protective Window Mounting Bracket www.aerotech.com...
  • Page 56: Troubleshooting

    Refer to Section 4.2. the laser beam passes debris through the scan head Optical surfaces damaged Contact Aerotech service and/or a lens supplier. Motor and Feedback Refer to Section 3.1., Section 3.2., and the AGV3D scanner does connections controller documentation.
  • Page 57: Appendix A: Warranty And Field Service

    Aerotech’s products are specifically designed and/or manufactured for buyer’s use or purpose. Aerotech’s liability on any claim for loss or damage arising out of the sale, resale, or use of any of its products shall in no event exceed the selling price of the unit.
  • Page 58 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
  • Page 59: Appendix B: Revision History

    AGV3D Hardware Manual Appendix B: Revision History Appendix B: Revision History Revision Description 2.00 General update Section 1.3. Basic Specifications 1.01 Updated 1.00 New Manual www.aerotech.com...
  • Page 60 Appendix B: Revision History AGV3D Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 61: Index

    Cleaning Ordering Options compressed air part number Dimensions Protection Rating Directive 2006/42/EC protective ground connection 7,46 Protective Windows Electrical Installation EN 60204-1 2010 Securing the Scan Head to the Mounting Surface EN ISO 12100 2010 serial number EU 2015/863 www.aerotech.com...
  • Page 62 Index AGV3D Hardware Manual Service and Inspection Schedule solvents stabilizing stage stage stabilizing Table of Contents Temperature Effects Tuning Turning Mirrors Unpacking and Handling the Scan Head Vibration Warranty and Field Service Water Requirements www.aerotech.com...

This manual is also suitable for:

Agv3d-20Agv3d-30

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