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MKS MC20A Manual

MKS MC20A Manual

High flow mass flow controller with analog i/o
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136364-P1
Rev 3, 04/05
Type MC20A
High Flow Mass Flow Controller
with Analog I/O
Preliminary Copy

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  • Page 1 136364-P1 Rev 3, 04/05 Type MC20A High Flow Mass Flow Controller with Analog I/O Preliminary Copy...
  • Page 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America ®...

  • Page 3: Table Of Contents

    Chapter One: General Information ......................13 Introduction ................................. 13 How This Manual is Organized........................... 14 Customer Support................................ 15 Chapter Two: Installation ..........................17 How to Unpack the MC20A MFC ..........................17 Product Location and Requirements..........................18 Setup.................................... 19 Electrical Connections..............................24 Interface Cables................................26 Chapter Three: Overview ..........................29...
  • Page 4 Model Code Description..............................51 Appendix D: Mass Flow Controller Sizing Guidelines ................53 General Information ..............................53 How to Determine the Flow Controller Range ......................53 Appendix E: MKS MC20A Digital MFC Graphical User Interface............55 Overview ..................................55 Software Setup................................55 Equipment Needed ..............................56 Equipment Setup .................................56...
  • Page 5 Figure 1: Front View of the MC20A MFC with 4 VCR Fittings..............20 Figure 2: Front View of the MC20A MFC with 8 VCR Fittings (includes required mounting plate) .....20 Figure 3: Bottom View of the MC20A MFC with 4 VCR Fittings ..............21...
  • Page 6 Table 7: 15-Pin Type “D” MFC Connector Pinout – Standard Assignments (Model Code B) ....... 24 Table 8: 15-Pin Type “D” MFC Connector Pinout – Alternative Assignments (Model Code E)....25 Table 9: MKS Interface Cables ........................26 Table 10: Troubleshooting Chart........................41 Table 11: Description of Digital Error Messages .....................

  • Page 7: Mass Flow Controller Safety Information

    Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these requirements.
  • Page 8 Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers.

  • Page 9: Sicherheitshinweise Für Das Massenflussgerät

    Sicherheitshinweise für das Massenflussgerät Sicherheitshinweise für das Massenflussgerät In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
  • Page 10 Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.

  • Page 11: Informations De Sécurité Pour Appareils De Mesure/Contrôle De Débit Massique

    Informations de sécurité pour appareils de mesure/contrôle de débit massique Informations de sécurité pour appareils de mesure/contrôle de débit massique Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d'accident pour le personnel, en cas d'exécution incorrecte ou de non-respect des consignes.
  • Page 12 Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.

  • Page 13: Medidas De Seguridad Del Dispositivo De Flujo De Masa

    Medidas de seguridad del dispositivo de flujo de masa Medidas de seguridad del dispositivo de flujo de masa Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.
  • Page 14 No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.

  • Page 15: マスフロー機器の安全に関する情報

    IEC 417, No. 5172-a 注意 (付属書を参照) 注意 (感電の危険あり) 注意 (表面が熱くなっています) ISO 3864, No. B.3.1 ISO 3864, No. B.3.6 IEC 417, No. 5041 安全対策について 本機器を使用する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの 警告を無視すると、機器本来の用途の安全基準を侵害することになり、機器が提供する保護機能が 損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履行に対して は一切責任を負いかねます。 勝手に部品を変えたり、本体を改造しないこと 本機器に代用部品を使用したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。 修理は必ず専門の修理サービスを利用すること オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専門の修理サービスを利 用してください。...
  • Page 16 マスフ ロー機 器 の安 全 に関 する情 報 電流が通じている回路から切断すること 電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態 でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切 断し、放電してください。 浄化する場合は適切な手順で行うこと 本機器の浄化は換気フードの下で行う必要があります。また、浄化作業を行う人は必ず手袋を着用してください。 爆発の危険性のある環境で機器を使用しないこと 爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使用しないでください。ただし、そのような環境 での使用が特別に保証されている場合は除きます。 適切な金具類を使用し、手順に従って金具の締めを行うこと 金具類は本機器の仕様と一致し、機器本来の用途に適合したものである必要があります。金具類の取り付け や締めは、製造業者の指示に従ってください。 液体の漏れがないよう接続箇所を確認すること 本機器を設定する前に、すべての配管の接続を慎重に確認し、液体が漏れないようにしてください。 安全なインレット圧力で使用すること 定格の最大圧力を超える圧力の下で本機器を絶対に使用しないでください (最大許容圧力については仕様書 を参照)。 本機器に異物やゴミが混入しないようにすること 本機器の使用前または使用中に、ほこりやゴミ、繊維、ガラスの破片、金属片などの異物やゴミが混入しないよ うにしてください。本機器が損傷する可能性があります。 温度調整された機器を十分に温めてから使用すること 温度調整された機器が適切な作動温度にならないうちに使用すると、仕様通りの動作をしないことがあります。 本機器が十分に温まるまでは目盛りをゼロに合わせたり、較正しないでください。...

  • Page 17: 질량 유량 장치 안전 정보

    준수하지 않거나 본 매뉴얼의 다른 부분에 있는 특정 경고를 준수하지 않을 경우, 기계 사용 목적의 안전 기준을 위반하는 것이 되며, 장비가 제공하는 보호기능을 손상시킬 수 있습니다. MKS Instruments, Inc.는 고객이 본 요건을 준수하지 않는 경우에 대해서는 어떠한 책임도 지지 않습니다.
  • Page 18 질량 유량 장치 안전 정보 부품을 교체하거나 기계를 개조하지 마십시오 교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가 필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and Service Center)로 보내주십시오. 자격이 있는 사람에게만 서비스를 받으십시오...

  • Page 19: Chapter One: General Information

    In addition, the digital control loop provides very fast control response, even to low setpoints. The MC20A MFCs accept up to 20 gas tables. Each gas table has its own PID tuning parameters to allow the transient response for each gas table to be optimized for the gas, full scale flow range, and application.

  • Page 20: How This Manual Is Organized

    How This Manual is Organized Cleanliness Features The MC20A MFCs use only metal for all external seals. The metal seals eliminate gas permeation and ensure extremely low external leakage. The MC20A MFC mechanical design incorporates minimal wetted surface area and virtual leaks, assuring rapid dry-down. To further enhance its cleanliness, all internal surfaces are precision machined, electropolished, and subjected to a proprietary cleaning process under Class 100 conditions.

  • Page 21: Customer Support

    Calibration and Service Center before shipping. The RMA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be certified free of harmful, corrosive, radioactive, or toxic materials.
  • Page 22 Chapter One: General Information Customer Support This page intentionally left blank.

  • Page 23: Chapter Two: Installation

    If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.

  • Page 24: Product Location And Requirements

    Install the MC20A MFC in a “flowing” system where gas is continually added and evacuated. Do not use the controller in a “dead-ended” system (a system which cannot remove excess mass). The MC20A MFC can not vent excess mass to the atmosphere.

  • Page 25: Setup

    Follow the guidelines below when setting up the MC20A MFC. 1. Set the controller into position where it will be connected to a gas supply. Installation of the MC20A in any orientation other than that for which it was configured, may cause a calibration shift. The MC20A MFC default orientation is horizontal, base down (HBD), SEMI E80-U299 Attitude #1.

  • Page 26: Figure 1: Front View Of The Mc20A Mfc With 4 Vcr Fittings

    Setup Front and Back Views The front of the MC20A MFC has an arrow to indicate the direction of gas flow through the unit. The back of the MC20A MFC contains the serial label and connector pin-outs. Figure 1: Front View of the MC20A MFC with 4 VCR Fittings...

  • Page 27: Figure 3: Bottom View Of The Mc20A Mfc With 4 Vcr Fittings

    Setup Chapter Two: Installation Figure 3: Bottom View of the MC20A MFC with 4 VCR Fittings Figure 4: Bottom View of the MC20A MFC with 8 VCR Fittings (includes required mounting plate)

  • Page 28: Figure 5: Inlet End View Of The Mc20A Mfc

    Chapter Two: Installation Setup Inlet End View 4 VCR Fittings 8 VCR Fittings Figure 5: Inlet End View of the MC20A MFC Top View Figure 6: Top View of the MC20A MFC with 15-Pin Analog Interface...

  • Page 29: Figure 7: Serial Number Label

    Labels Each MC20A unit has two serial number labels, a small one on top side and the standard, larger label on the back side. Each label shows the serial number, the model code, the full scale flow range, and the calibration gas.

  • Page 30: Electrical Connections

    MKS pinout assignments and a 15-pin “D” with alternative pin assignments. 15-Pin Type “D” Connector – Standard MKS Pinout Assignments The table below lists the pinout of the 15-pin Type “D” connector for the MC20A MFC. Table 6: 15-Pin Type “D” MFC Connector Pinout –...

  • Page 31: Table 8: 15-Pin Type "D" Mfc Connector Pinout - Alternative Assignments (Model Code E)

    Chapter Two: Installation 15-Pin Type “D” Connector – Alternative Pinout Assignments The table below lists the pinouts of the alternative 15-pin Type “D” connector for the MC20A MFC. Table 7: 15-Pin Type “D” MFC Connector Pinout – Alternative Assignments (Model Code E)

  • Page 32: Interface Cables

    * Required for use with MKS Model 246 and 247 power supply units. Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1.
  • Page 33 Interface Cables Chapter Two: Installation 5. In selecting the appropriate type and wire size for cables, consider: A. Voltage ratings. B. Cumulative I R heating of all the conductors (keep them safely cool). C. IR drop of the conductors, so that adequate power or signal voltage gets to the controller. D.
  • Page 34 Chapter Two: Installation Interface Cables This page intentionally left blank.

  • Page 35: Chapter Three: Overview

    Flow Control Range The MC20A MFC can control flow over a range of 2 to 100% of full scale flow. This means that a 50 SLM MC20A MFC can control flow from 1 SLM to 50 SLM, whereas a 200 SLM instrument can control flow from 4 SLM to 200 SLM.

  • Page 36: How The Mc20A Mfc Works

    Proportional (P), Integral (I) and the Derivative (D) terms can be adjusted digitally through the communication port on top of the MC20A MFC. MKS can supply an adapter cable between this port and the standard 9-pin RS-232 connection on a personal computer. In addition, MKS offers a graphical user interface (GUI) which allows easy communication with the controller.

  • Page 37: Tuning The Mc20A Mfc

    Tuning the MC20A MFC Tuning optimizes the MC20A MFC’s control of flow rate. The Proportional (P), Integral (I), and Derivative (D) terms adjust the response of the MC20A MFC to changes in either mass flow rate setpoint or system pressure.

  • Page 38: Figure 8: Effects Of The Proportional Term (Low Proportional Term)

    The PID tuning parameters are associated with specific gas tables. This allows each gas to have it’s own optimized PID values. The MKS supplied RS-232 adapter cable and graphic user interface (GUI) allows access to the controller gas tables and associated PID tuning parameters. To access a particular set of PID parameters, the associated gas table must be “active”.

  • Page 39: Figure 10: Effects Of The Integral Term (Low Integral Term)

    Figure 11: Effects of the Integral Term (High Integral Term) Adjusting the Integral Control The Integral (I) term is adjusted through the “Comm Port” using an MKS supplied RS-232 adapter cable and graphical user interface (GUI) . See the instruction manual accompanying the GUI.
  • Page 40 Tuning the MC20A MFC Adjusting the Derivative Control The Derivative (D) term is adjusted through the “Comm Port” using an MKS supplied RS-232 adapter cable and graphical user interface (GUI) . See the instruction manual accompanying the GUI. Optimizing PID Control Settings Optimizing the MC20A MFC response in your system involves adjusting the Proportional, Integral, and Derivative (PID) terms.

  • Page 41: Chapter Four: Operation

    Once the controller is sufficiently warmed-up, you can proceed to zero it. See instructions in Section 5. Power Requirements The MC20A MFC requires an input voltage of ±15 ±5% VDC with 300 mA. With the 24 VDC power option installed, the MC20A MFC requires 24 VDC to power return with 400 mA.
  • Page 42 Chapter Four: Operation How to Zero the Flow Controller For Systems With Upstream and Downstream Positive Shut-Off Valves 1. Close both the upstream and downstream shut-off valves. 2. Set the controller to 100% setpoint. 3. Allow pressure across the controller to equilibrate as flow output approaches zero and stabilizes. 4.

  • Page 43: How To Override The Valve

    The Optional Input The standard 15-pin MC20A MFCs can control flow based on a 0 to 5 Volt signal from an external sensing device using the optional input feature (for a 0 to 10 Volt input range, contact the MKS Applications Department).
  • Page 44 2. PID Tuning One outstanding feature of the MC20A line of MFCs is that the optional input control has a set of PID parameters which are independent of the PID parameters used for standard flow control. This provides greatly enhanced flexibility in configuring systems which utilize the optional input feature.

  • Page 45: Chapter Five: Maintenance

    It is recommended that the instrument be recalibrated annually if no other time interval has been specifically established. Refer to the inside of the back cover of this instruction manual for a complete list of MKS Calibration and Service Centers.
  • Page 46 Chapter Five: Maintenance Calibration This page intentionally left blank.

  • Page 47: Chapter Six: Troubleshooting

    Controller does not power Improper power supply or Check for proper power to the unit. power cable. Malfunctioning electronics. Return unit for service to MKS Calibration and Service Center. Controller indicates negative Incorrect instrument Reinstall instrument in process system flow.

  • Page 48: Description Of Digital Error Messages

    Description of Digital Error Messages Description of Digital Error Messages MC20A digital flow controller has some diagnostic capabilities and can output error and warning messages digitally to the GUI. Some of these identify internal controller faults but others identify possible installation issues affecting controller operation.
  • Page 49 Indicates an error with the digital interface software. EEprom Error Internal data has been corrupted. Perform a “reset” through the GUI. If the error message persists, return the unit to the MKS Service Center. Controller Failure Message occurs when flow setpoint is not met.
  • Page 50 Chapter Six: Troubleshooting Description of Digital Error Messages This page intentionally left blank.

  • Page 51: Appendix A: Product Specifications

    Performance Specifications Appendix A: Product Specifications Appendix A: Product Specifications Performance Specifications Accuracy Mass Flow Controller 1% of reading from 25% to 100% F.S. 0.25% of F.S. < 25% F.S. CE Compliance Electromagnetic Compatibility EMC Directive 89/336/EEC Control Adjustments Derivative Adjustable via digital Graphical User Interface Integral Proportional...

  • Page 52: Physical Specifications

    Appendix A: Product Specifications Physical Specifications Performance Specifications (continued) Temperature Coefficient ≤ ±0.05% F.S./°C Zero ≤ ±0.08% Reading/°C Span Settling Time, from zero setpoint 10 – 100% SP <= 2 sec. typical Warm-Up Time 30 minutes Physical Specifications ≥1000 psig Burst Pressure Dimensions 1.49”...

  • Page 53: Appendix B: Gas Correction Factors

    GCF. The digital capabilities of the MC20A allows separate calibration tables to be created for various gases internal to the device, either at the factory or in the field using the available digital communications kit, P/N 133730-G1/G2.

  • Page 54: Gas Correction Factors Table

    Appendix B: Gas Correction Factors Gas Correction Factors Table Gas Correction Factors Table The following table lists the theoretical Gas Correction Factors for various gases with respect to Nitrogen. Please note that a non-linearity may exist between a Nitrogen calibration and the actual flow of process gases. Note Standard Pressure is defined as 760 mmHg (14.7 psia).
  • Page 55 Nitrogen Trifluoride NF 3 0.1797 3.168 0.48 Nitrous Oxide N 2 O 0.2088 1.964 0.71 Octafluorocyclobutane C 4 F 8 0.1866 8.93 0.164 (Freon - C318) Oxygen 0.2193 1.427 0.993 Consult MKS Instruments for this application. (Continued on next page)
  • Page 56 Appendix B: Gas Correction Factors Gas Correction Factors Table Table 11: Gas Correction Factors (continued) Specific Heat Density ccl/g o C g/l @ 0 o C Symbol Conversion Factor Pentane C 5 H 12 0.398 3.219 0.21 Perfluoropropane C 3 F 8 0.194 8.388 0.17...

  • Page 57: Appendix C: Model Code Explanation

    Mass Flow Full Scale Range (XXX) The MC20A MFC’s full scale range is indicated by a two digit/one letter code. The first two digits of this code are the flow full scale range in exponential form. The third letter is the flow units. L stands for Standard Liters per Minute.
  • Page 58 15-pin D Valve Plug Material (A) The MC20A MFC’s valve plug material option is designated by a letter code. The plug material is chosen for chemical compatibility with the intended process gas. Viton (code V) is most common. Valve Plug Material...

  • Page 59: Appendix D: Mass Flow Controller Sizing Guidelines

    The flow controller range depends on the desired flow rate and the gas correction factor for the gas to be used. MKS states the flow controller ranges based on flow rate of nitrogen; the flow rate for other gases may vary.
  • Page 60 Appendix D: Mass Flow Controller Sizing Guidelines How to Determine the Flow Controller Range This page intentionally left blank.

  • Page 61: Appendix E: Mks Mc20A Digital Mfc Graphical User Interface

    Appendix E: MKS MC20A Digital MFC Graphical User Interface Overview The MC20A line of digital MFCs have calibration and tuning features, which can be altered to expand the operating range of the controllers. Specifically: Calibration tables can be copied to new gas tables to allow controller re-ranging or use of alternative gases.

  • Page 62: Equipment Needed

    — One converter module, MKS P/N 134568-P1, inserted between the two cables Power supply (±15 V standard; +24 VDC optional). For ±15 VDC MFCs, MKS offers a selection of power supplies and accessories. Power cable appropriate to the specific analog pin-out configuration. For the standard 15-pin configuration and MKS Model 246/247 power supplies, MKS cable P/N 1480-1 should be used.

  • Page 63: Starting The Gui

    Starting the GUI Appendix E: MKS MC20A Digital MFC Graphical User Interface Starting the GUI 1. Double click the “ALTAAnalogMFC.exe” shortcut on your computer desktop. The program starts and following window appears: Figure 13: Communications Window 2. Choose the serial port that you connected to (COM1, COM2 … etc.) on your personal computer.

  • Page 64: Exiting The Gui

    ⎯ Create new gas tables and change PID control parameters. ⎯ Create and change GUI access passwords. The Remote Zero button zeros the MC20A MFC. Refer to How to Zero the Flow Remote Zero Controller, page 35, for proper zeroing procedures.

  • Page 65: User Mode And Calibration Mode

    User Mode and Calibration Mode Appendix E: MKS MC20A Digital MFC Graphical User Interface Menu Items The File Menu includes two options: Exit Print Graph The Setup Menu has the following options: Calibrate Flow is used to calibrate the gas table.

  • Page 66: Calibration Mode Access

    1. Click in the User Mode field to reveal a list of choices, which include User and Calibration. 2. Click on Calibration. A small window with fields for the user name and password appears. 3. Input the user name and password in the appropriate fields. The GUI is shipped from MKS with: User Name:...

  • Page 67: Figure 16: Adding A Calibration Mode Password For A New User

    Calibration Mode Access Appendix E: MKS MC20A Digital MFC Graphical User Interface Adding a Calibration Mode Password for a New User 1. On the Main Control Panel, choose Setup Password New. The following interface appears: Figure 16: Adding a Calibration Mode Password for a New User 2.

  • Page 68: Setting, Adding, And Deleting Gas Tables

    Appendix E: MKS MC20A Digital MFC Graphical User Interface Setting, Adding, and Deleting Gas Tables Setting, Adding, and Deleting Gas Tables Note In order to work with gas tables, the GUI must be in Calibration mode. This is set on the Main Control Panel, in the lower right hand corner.
  • Page 69 Adding a Gas Table Adding gases is based on copying existing tables. There are several guidelines: Gas table instances 0 through 5 may be created only by MKS Instruments. Any new tables must be assigned instance numbers 6 through 19.

  • Page 70: Figure 18: Accuracy Graphical Representation

    Appendix E: MKS MC20A Digital MFC Graphical User Interface Setting, Adding, and Deleting Gas Tables Original 100 SLM Calibration 110 SLM Table 50 SLM Table 0.2% FS Accuracy SLM SLM 1% Rdg. Accuracy Figure 18: Accuracy Graphical Representation Figure 19: Gas List 3.

  • Page 71: Figure 20: Copy Gas Table

    1. Highlight the gas table to be deleted. Gas table instances 0 through 5 are reserved for use by MKS Instruments only. These may not be deleted. 2. Click the Delete Gas button. The table will be deleted from the gas table list.

  • Page 72: Adjusting Pid Tuning Parameters

    Use this window to get, modify, and set the PID parameters. Retrieve values in the active table of the MC20A MFC by clicking the Get All button. Update the parameters as desired. Note that MKS generally recommends keeping the Controller D set at zero.

  • Page 73: Viewing Identity Table

    2. After reviewing the desired information, click the Close button. Reading Diagnostic Messages The MC20A flow controllers provide diagnostic messages that aid users in troubleshooting their systems. 1. Access the Messages window on the Main Control Panel by clicking Parameter Error Message.

  • Page 74: Creating And Modifying Calibration Tables

    Appendix E: MKS MC20A Digital MFC Graphical User Interface Creating and Modifying Calibration Tables Creating and Modifying Calibration Tables It is possible to perform gas calibration or adjust existing calibration tables using the Calibration Table Operations window, which is accessed through Set-up Calibration Flow on the Main Control Panel.
  • Page 75 Creating and Modifying Calibration Tables Appendix E: MKS MC20A Digital MFC Graphical User Interface Creating New Calibration Table In the Calibration Table Operations window: 1. Input Instance # for the table of interest. This may only be in the range of 6 through 19.
  • Page 76 Appendix E: MKS MC20A Digital MFC Graphical User Interface Creating and Modifying Calibration Tables This page intentionally left blank.

  • Page 77: Index

    Index Index accuracy of mass flow controller ......45 digital error messages..........42 ambient operating temperature range....46 digital features .............13 burst pressure ............46 digital operation...........30 cable dimensions.............20, 46 shielded............26 electrical connections ..........24 cable length ........... 45, 46 electromagnetic compatibility ......45 calibration ............
  • Page 78 Index gas flow .............. 23 overriding the valve ..........37 gas inlet pressure ..........18 Parameter menu ..........59 gas tables ............30 password setting, adding, deleting ....... 62 adding ............61 Graphical User Interface (GUI)....31, 55 changing ............60 hazardous gases ..........
  • Page 79 ............57 top ..............22 specifications warm up time............18 electrical ............45 warm-up time ..........35, 46 environmental..........46 weight ..............46 performance..........45 wetted materials...........46 physical............46 zero starting software..........57 how to ............35 starting the MC20A MFC ........35 zero adjustment............39...

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