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MKS MF1 Instruction Manual

Digital mass flow controller
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Y-195MF1
Digital Mass Flow Controller
Type MF1
– Instruction Manual –
a
MKS Instruments
Edition 2011-07
Deutschland GmbH

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  • Page 1 Y-195MF1 Digital Mass Flow Controller Type MF1 – Instruction Manual – MKS Instruments Edition 2011-07 Deutschland GmbH...
  • Page 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments. Printed in the Federal Republic of Germany Swagelok ®...

  • Page 3: Table Of Contents

    Pressure Drop Test..........................19 ..............................19 IMENSIONS ....................22 LECTRICAL ONNECTIONS AND ABLES Cables..............................22 Power Supply / Readout Units of other Manufacturers ................22 Non MKS Cables ............................. 22 ........................23 INISHING THE NSTALLATION ..................24 TART P THE ONTROLLER ETER ...............................
  • Page 4 Functions..............................64 Valve Override..............................64 Scaling the Signal ..............................64 Installation ...............................64 Pinout ..................................64 Power supply................................. 65 Cables and Controllers by MKS ........................... 65 Operation ..............................65 Configuration ................................ 65 Feedback and Diagnostic ........................65 LED Functions ..............................65 RS485 USB I ........................66...
  • Page 5 Set WinkStatus (W) .............................. 75 Select Gas Table Index (G)........................75 Get Gas Table Index (g)............................75 Get Device Status (D) ............................76 Get MF1 Error Status (M)............................. 76 Get Communication Status (U or u) ........................77 ............................ 78 ODBUS NTERFACE Installation ..............................
  • Page 6 OPTIONS APPENDIX C: GAS CORRECTION FACTORS...................112 APPENDIX D: CE DECLARATION OF CONFORMITY..............115 MKS WORLDWIDE CALIBRATION & SERVICE CENTERS ............116 There is a declaration of contamination on the last page of this instruction manual. List of Figures Figure 1 Model Code Label ......................16 Figure 2 Side View - Dimensions (for 4 VCR, Sub D Connector and “single-part-body”) ....
  • Page 7 Table 3 Cable specification (EN50170) ................... 56 Table 4 Maximum segment length as a function of the baud rate ........... 56 Table 5 Analog Interface ........................65 Table 6 MKS Controller and cables for analog MF1 units ............... 65 Table 7 Troubleshooting......................... 103...

  • Page 9: Mass Flow Controller Safety Information

    Mass Flow Controller Safety Information Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 10: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 11 Mass Flow Controller Safety Information INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise. KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use.

  • Page 13: Chapter 1: General Information

    PROFIBUS, Analog, RS 485, Ether CAT or USB Process Interface Power Supply and Readout Units The MF1 can be ordered as an analog version and thus can interface to complementary MKS equipment which are available as single channel, dual channel, 4- and 8-channel units to display the flow signal and to provide the power and set point commands.

  • Page 14: Conventions

    Chapter 1: General Information Conventions If not explicitly expressed differently at the respective place in this handbook all data are referenced to: Temperature in °C Gas type is nitrogen N2 Pressure in mbar or bar with index (a) relates to absolute pressure and whereas index (g) stands for gauge pressure, related to atmospheric and index (d) indicates differential pressure.

  • Page 15: Chapter 2: Shipment

    If you find any damage, please notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping.

  • Page 16: Label

    Gas type SiH4 (the range is related to this gas) Serial number 454145G20 CE mark Manufacturer MKS Instruments Deutschland GmbH SN:454145G20 MF1C039502RPV 500 sccm / SiH4 MKS Instruments Deutschland GmbH Figure 1 Model Code Label Across the housing and the meter/controller body there is a warranty void sticker to avoid access to the inside by unauthorized people.

  • Page 17: Chapter 3: Installation And Start Up

    Chapter 3: Installation Chapter 3: Installation and Start Up General Requirements Environmental Follow the guidelines below when installing and using your mass flow controller. Maintain the normal operating temperature between 0 – 40°C (32° to 104°F). Observe the pressure limits •...
  • Page 18 Chapter 3: Installation Install the flow controller in the gas stream such that the flow will be in the direction of the arrow on the side of the controller. Take into consideration the specified leak through the closed control valve in case of a mass flow controller.

  • Page 19: Leak Integrity

    Chapter 3: Installation Leak Integrity We recommend to check leak tightness of all ports and connections of the plumbing with a helium leak detector. Pressure Drop Test If a leak check at high pressure is intended then check for the highest allowable pressure for all parts involved.

  • Page 20: Figure 3 Front View - Dimensions (4 Vcr)

    Figure 4 Top View – Dimensions (flow from left to right) Order Code Fittings (compatible) L in mm MF1 _ ___ ___ R _ _ 0 4 VCR male 118.74 ± 1 107.6 ± 1 MF1 _ ___ ___ S _ _ 0 1/4 “...

  • Page 21: Figure 5 Bottom View - Dimensions

    Chapter 3: Installation Figure 5 Bottom View – Dimensions (flow from left to right) PROFIBUS SETUP Figure 6 Connector and Control Elements for Profibus unit (flow from left to right) Figure 7 Side view - Dimensions (DN 16 KF, Sub D connector and "single-part-body"; flow from left to right)

  • Page 22: Electrical Connections And Cables

    See for detailed information the section of the Process Interfaces. Power Supply / Readout Units of other Manufacturers Should you use power supplies / readout units of manufacturers other than MKS then make sure that these units fulfill the electrical specifications for use with the mass flow controllers/meters as described herein.

  • Page 23: Finishing The Installation

    Chapter 3: Installation Finishing the Installation Check all fittings and flanges for leaks. Do not proceed with the next step until you have not made sure that there are no leaks. Connect the interface cable(s) to the mass flow controller. Connect the other end of the cable to the power supply/control electronics.

  • Page 24: Start Up The Mass Flow Controller/Meter

    Operation of these functions is also possible via one of the digital interfaces. When using a control unit by MKS then you should use the zeroing means there. If the control unit does not provide enough compensation range then the ZERO button at the...

  • Page 25: Zero Button

    Chapter 3: Installation Zeroing should be done only on units that are installed in final position. Note It is recommended to completely stop the gas flow prior to any zero adjustment. If a pressure difference exists at the mass flow control unit then a small flow might occur even if the integrated control valve is closed.

  • Page 27: Chapter 4: Usb Setup Interface

    Chapter 4: USB Setup Interface Chapter 4: USB Setup Interface General • The USB Setup Interface, which is included for all process interface versions, is dedicated for setup purposes only • Process Interface is the interface to the tool host computer or controller. This interface is either a PROFIBUS-DP, RS 485, ModBus, USB, EtherCAT or an analog voltage interface.

  • Page 28: Configuration

    Chapter 4: USB Setup Interface Configuration The MF1 can appear on a PC as a mass storage device as well as a serial interface. The mode of operation can be changed either via a command in the respective other mode or by pressing the zero button for 7 seconds (7 x blink-acknowledgement by SI-LED).

  • Page 29: Default Settings

    Chapter 4: USB Setup Interface • the response for setting or the actual value will be returned: > Value <CR> • in case off error, e.g. wrong type or not existing name a code is returned: ! Code <CR> • Command: * CommandName <CR>...
  • Page 30 Chapter 4: USB Setup Interface Standard Input 1179 Object [SmallRecv; ObjId=20] ResetStatus Inst 0 to 1 transition resets error status bits SelectGasTable Inst see SigProc - SelectGasTable EnGasCorrection Inst see Meter - EnGCF FlowSetpoint Inst in [FLOW_UNIT] in 10E-4 steps SetDefault Func Reset object to default values...
  • Page 31 Chapter 4: USB Setup Interface Full Output 1179 Object [FullSend; ObjId=22] Purge Inst see SmallSend - Purge OverTemperature Inst see SmallSend - OverTemperature ValveDriveAlarm Inst see SmallSend - ValveDriveAlarm CalibrationRecommended Inst see SmallSend - CalibrationRecommended Uncalibrated Inst see SmallSend - Uncalibrated ControllerError Inst see SmallSend - ControllerError...
  • Page 32 Func Reset object to default values Identity Object [Identity; ObjId=25] Par. Name Description Type DeviceType Inst MFC,MFM ProductCode Inst Manufacturer Inst MKS Instruments Model Inst MF1.. SerialNumber Inst G123456G20 SoftwareRevision Inst HardwareRevision Inst InterfaceType Inst [ANALOG, PB, DNET, RS485, ..]...
  • Page 33 Chapter 4: USB Setup Interface Password Object [Password; ObjId=26] UnlockFactoryStatus Inst [0=locked; 1=unlocked] SetDefault Func Reset object to default values Meter Object [Meter; ObjId=27] Par. Name Description Type FlowValueF Inst actual flow value as float in FlowUnit FlowValueI Inst actual flow value as int (in 10E-4 steps) in FlowUnit recalculate FlowUnit of CalTable to User defined FlowUnit FlowUnit Inst...
  • Page 34 Sensor Object [Sensor; ObjId=29] Par. Name Description Type FlowValue Inst Actual flow in % uncalibrated FullScaleN2 Inst Maximum flow of MF1 in sccm of N2 SetDefault Func Reset object to default values Actuator (Valve) Object [Valve; ObjId=30] Par. Name Description Type 0..100%...
  • Page 35 Chapter 4: USB Setup Interface Gas Calibration Object [CalTable; ObjId=32] Par. Name Description Type Instance Inst Show the Instance of the Object GasName Inst e.g N2 GasNumber Inst Gas Semi Number ZeroTempCoef Inst Zero Drift Compensation Factor SpanTempCoef Inst Span Drift Compensation Factor CalTemp Inst Internal Temperature while Calibration...
  • Page 36 Chapter 4: USB Setup Interface Acceleration Setup Object [AccelSetup; ObjId=34] StartMinFlow Inst Start min. Flow TempCoefOffset Inst reserved TempCoefGain Inst reserved SpeedupGain Inst Speedup Gain SpeedupTau Inst Speedup Tau SpeedupGainFlowInc Inst Speedup Gain Flow Increment SpeedupGainTempInc Inst Speedup Gain Temp Increment SpeedupTauTempInc Inst Speedup Tau Temp Increment...
  • Page 37 Chapter 4: USB Setup Interface Device Status Object [Status; ObjId=36] bit3 = ControllerError bit4 - bit7 = reserved DeviceExceptionDetailWarn Inst reserved bit0 = an power fail occurred bit1 = an setpoint overflow occurred ManufacturerExceptionDetailWarn Inst bit2 = an flow value overflow occurred bit3 - bit7 = reserved [disable, enable] AlarmEnable...
  • Page 38 Chapter 4: USB Setup Interface Com Interface Object [ComIfc; ObjId=39] Par. Name Description Type Address Inst Defines the device address by the rotary switches. f the software address is < 100 the rotary switches address is ignored and the SoftwareAddress Inst software configurable address is used.
  • Page 39 Chapter 4: USB Setup Interface Hardware Object [Hardware; ObjId=41] Value Inst actual raw value SetDefault Func Reset object to default values System Object [System; ObjId=42] Par. Name Description Type FirstError Inst reserved LastError Inst reserved RunHours Inst run time in hours TimeToCal Inst Time to cal counter...

  • Page 40: Object Parameter Reference

    Chapter 4: USB Setup Interface Alias Params Object [AliasParams; ObjId=45] Par. Name Description Type AliasObjectInstance Inst SourceObjectId Inst SourceAttributeId Inst Object Parameter Reference Standard Input 1179 Object [SmallRecv] Obj. Slot Inst. Param. Name Access Type Default Min. Max. Store 20 148 0 ObjId uint8 20 -...
  • Page 41 Chapter 4: USB Setup Interface Standard Output 1179 Object [SmallSend] 21 1..n 3 High2LimitAlarm uint:1 1 NSTNV 21 1..n 4 Low2LimitAlarm uint:1 1 NSTNV 21 1..n 5 ValveClosed uint:1 1 NSTNV 21 1..n 6 Purge uint:1 1 NSTNV 21 1..n 7 OverTemperature uint:1 1 NSTNV...
  • Page 42 Chapter 4: USB Setup Interface Full Output 1179 Object [FullSend] 22 1..n 17 FlowTotalized long 2147483647 NSTNV 2147483647 22 - 100 SetDefault Standard Setup 1179 Object [SmallSetup] Obj. Slot Inst. Param. Name Access Type Default Min. Max. Store 23 151 0 ObjId uint8 23 -...
  • Page 43 STNV 25 1..n 1 ProductCode RWPF char[8] STNV 25 1..n 2 Manufacturer char[16] MKSI STNV 25 1..n 3 Model RWPF char[32] MF1 STNV 25 1..n 4 SerialNumber RWPF char[16] 123456 - STNV 25 1..n 5 SoftwareRevision char[8] 01.01.00 - STNV 25 1..n...
  • Page 44 Chapter 4: USB Setup Interface Password Object [Password] 26 154 4 ActInst uint8 26 1..n 0 SetPasswordDevice char[17] - STNV 26 1..n 1 UnlockDevice char[17] - NSTNV 26 1..n 2 UnlockFactory char[17] - NSTNV 26 1..n 3 UnlockDeviceStatus uint8 1 NSTNV 26 1..n 4 UnlockFactoryStatus uint8...
  • Page 45 Chapter 4: USB Setup Interface Controller Object [Controller] 28 156 3 NrOfInstances uint8 28 156 4 ActInst uint8 28 1..n 0 SetpointF float 0 -1,00E+038 1,00E+038 NSTNV 28 1..n 1 SetpointI long 2147483647 NSTNV 2147483647 28 1..n 2 FlowUnit uint8 15 NSTNV 28 1..n 3 FullScale...
  • Page 46 Chapter 4: USB Setup Interface Signal Processing Object [SigProc] 31 159 2 Length uint16 24 - 31 159 3 NrOfInstances uint8 31 159 4 ActInst uint8 31 1..n 0 TripPointHighAlarm uint:1 1 NSTNV 31 1..n 1 TripPointLowAlarm uint:1 1 NSTNV 31 1..n 2 TripPointHigh2Alarm uint:1...
  • Page 47 Chapter 4: USB Setup Interface Gas Calibration Object [CalTable] 32 1..n 53 Pointer RWPD uint8 20 STNV 32 - 100 SetDefault 32 - 101 StoreSensorValue Controller Calibration Object [ControllerTable] Obj. Slot Inst. Param. Name Access Type Default Min. Max. Store 33 161 0 ObjId uint8...
  • Page 48 Chapter 4: USB Setup Interface Gas Conversion Object [GasConv] Obj. Slot Inst. Param. Name Access Type Default Min. Max. Store 35 163 0 ObjId uint8 35 - 35 163 1 ObjName char[12] GasConv - 35 163 2 Length uint16 28 - 35 163 3 NrOfInstances uint8...
  • Page 49 Chapter 4: USB Setup Interface Device Status Object [Status] 36 1..n 16 SibDibComExcepCnt uint16 65535 STNV 36 1..n 17 WdDibCnt uint16 65535 STNV 36 - 100 SetDefault Analog Interface Object [Analog] Obj. Slot Inst. Param. Name Access Type Default Min. Max.
  • Page 50 Chapter 4: USB Setup Interface Com Interface Object [ComIfc] 39 1..n 2 Baudrate long 115200 3000000 STNV 39 1..n 3 Parity uint8 2 STNV 39 1..n 4 DataBits uint8 8 STNV 39 1..n 5 StopBits uint8 3 STNV 39 1..n 7 Config long 0 STNV...
  • Page 51 Chapter 4: USB Setup Interface Hardware Object [Hardware] 2.14748e+09 41 1..n 3 Value long 2147483647 NSTNV 2147483647 41 - 100 SetDefault System Object [System] Obj. Slot Inst. Param. Name Access Type Default Min. Max. Store 42 170 0 ObjId uint8 42 - 42 170 1 ObjName...
  • Page 52 Chapter 4: USB Setup Interface Alias Objects Object [AliasObjects] 44 172 2 Length uint16 14 - 44 172 3 NrOfInstances uint8 44 172 4 ActInst uint8 44 172 5 AliasObjectsDisabled uint:1 44 172 6 AliasObjectsAssembled uint:1 44 172 7 AliasObjectsConsistent uint:1 44 172 8 AssembleErrorMsg...

  • Page 53: Chapter 5 Process Interfaces

    Chapter 5: Process Interfaces Chapter 5 Process Interfaces Functions Beside the normal flow control mode the units are equipped with digital interfaces, which provide a number of helpful functions and useful information. Report Functions Calibration Date, Type, Model, Manufacturer, Serial No., Firmware/Hardware Revision, Product Code, Date of Factory Calibration, Full Scale Range, Flow Unit, Standard Temperature Standard Pressure, Valve Type, Valve Power Off Mode.

  • Page 54: Valve Drive Level

    Chapter 5: Process Interface Valve Drive Level The position of the valve is given in VALVE_DRIVE_LEVEL. 0% means that the valve is closed and 100% means that the valve is fully opened (e.g. at the PURGE command). A typical value under normal operating conditions is 40…60 % with new units. The value depends on many parameters, e.g.

  • Page 55: Profibus Process Interface

    Table 2 Profibus Interface Power supply The MF1 has to be powered via the Phönix MC-Series connector below the Zero switch. Therefore a mating connector is included in the delivery. For the correct power supply specification see the technical specification in Appendix A.

  • Page 56: Cable

    Chapter 5: Process Interface Cable It is recommended to use cables, which fulfil the EN 50170 type A: 135 … 165 at 3 ..20 MHz Wave impedance [Ω] < 100 Loop resistance [Ω/ km] Core diameter > 0,64 Nom. Capacitance Conductor to Shield [pF/m] <...

  • Page 57: Operation

    Chapter 5: Process Interfaces Operation Address If the software address setting is 126, the address is set via the rotary switches (up to address 99). Otherwise the rotary switch setting is irrelevant and the software address setting is used. Configuration (GSD) For the configuration of the MFC with a PC a GSD file is required.

  • Page 58: Protocol (Profibus Cyclic Telegrams)

    Protocol ( Data Interface The MF1 with PROFIBUS have a small data interface with a basic function set and a full data interface with the full function set of the device. The selection between small and full functionality is made at setup time with the type of configuration data, which is loaded down, to the device.

  • Page 59: Small Receive Data

    Chapter 5: Process Interfaces EN_GAS_CORRECTION uint:1 0 = disabled, 1 = enabled Reserved uint:1 FLOW_SETPOINT long in [FLOW_UNIT] in 10E-4 steps valve switched off if setpoint < 1% valve switched on if setpoint > 2% If the device is in the analog mode (i.e. set point is taken from the analog interface) some functions are not active: 1.

  • Page 60: Small Setup

    Chapter 5: Process Interface THERMAL_MASS_FLOW long in [FLOW_UNIT] in 10E-4 steps _RATE INTERNAL_TEMP long temperature in ° C VALVE_DRIVE_LEVEL 10:0 long 0 .. 100% (in 10E-4 steps) 0% = valve is closed 100% = valve is in purge position (full open) FLOW_TOTALIZED 14:0 long...

  • Page 61: Small Diagnostics (For Dpv0 Only)

    Exception Status ALARM_DEVICE_ uint:1 specific to network (e.g. power fail) COMMON ALARM_DEVICE_ uint:1 specific to flow device (e.g. r/w EPROM) SPECIFIC ALARM_MKS_SPECIFIC uint:1 specific to MKS ALARM_TABLE_ERROR uint:1 Reports cal. Table errors Reserved uint:4 Identification: PRODUCT_CODE uint16 1179 REVISION_CODE uint8...

  • Page 62: Full Diagnostics (For Dpv0 Only)

    0x21 (SMALL_DIAG) ALARM_DEVICE_ uint:1 specific to network (e.g. power fail) COMMON ALARM_DEVICE_ uint:1 specific to flow device (e.g. r/w EPROM) SPECIFIC ALARM_MKS_SPECIFIC uint:1 specific to MKS (LinTab error) ALARM_TABLE_ERROR uint:1 Reports cal. Table errors Reserved uint:4 PRODUCT_CODE uint16 1179 REVISION_CODE uint8...

  • Page 63: Calibration Table (For Dpv0 Only)

    Chapter 5: Process Interfaces Calibration Table (for DPV0 only) Calibration table Name Add. Type Comment STRUCT_ID uint8 0x12 or 0x22 for diagnosis GAS_TABLE_IDX uint8 0..14 GAS_CODE uint8 0..254 255 resets to factory setup POINT_NUM uint8 2..15 = table with 2 .. 15 points 0 = disables table 1 = enables table GAS_NAME...

  • Page 64: Analog Process Interface

    Scaling the Signal The scaling of the MF1 analog output signal could be changed via the USB Setup interface. The scaling range is 0 to 2 V for the zero signal (0%) and 5 to 10 V for the F.S. signal (100%), which means an output signal 2 to 7 V or 0 to 10 V could be setup.

  • Page 65: Power Supply

    Table 5 Analog Interface Power supply The MF1 could be powered via the Phönix MC-Series connector below the Zero switch or via the Sub D connector. Therefore a mating connector is included in the delivery. For the correct power supply specification see the technical specification in Appendix A. The Pin 5 of the 9 Pin Sub D connector is connected with the Phönix connector Pin “-“.

  • Page 66: Rs485 And Usb Interfaces

    Pin-9 Power supply The MF1 has to be powered via the Phönix MC-Series connector below the Zero switch. Therefore a mating connector is included in the delivery. For the correct power supply specification see the technical specification in Appendix A.

  • Page 67: Cable For Rs485

    Connect the braid to the metal hoods at both ends of the cable with the end for power supply connected to earth ground. Cable for USB The MF1 with USB process interface supports the full speed USB 2.0 connections. Therefore the maximum cable length is limited to 5 meters. Standard USB 2.0 cable must be used. Operation Address Defines the device address by the rotary switches.
  • Page 68 Chapter 5: Process Interface Expected Baud Actual Baud Error Comment Rate Rate (Clock Divider) 60069 27304 300,01 10011 599,97 5006 -0,01 1200 1199,93 2503 -0,01 2400 2400,82 1251 0,03 4800 4797,81 -0,05 9600 9595,62 -0,05 14400 14370,47 -0,21 19200 19252,75 0,27 28800 28879,12...
  • Page 69 Chapter 5: Process Interfaces Failsafe Timeout The timeout value is defined in milliseconds. If the value is > 0 the timeout function is active. If the time for the next command is bigger then the timeout time a Timeout Error occurred. If a Timeout Error occurred, the operation LED switch to red and the valve is shutdown.

  • Page 70: Feedback And Diagnostics

    Feedback and Diagnostics Error Codes For every command that is send to the MF1 the device send a return message. If a command is not existing, can not be executed, the value is out of range or missed or a framing error occurred the MF1 will send an error message back.

  • Page 71: Protocol ("Human Readable Protocol")

    Err: Error Sign '-' = No error 'E' = an MF1 error Occurred 'U' = an Communication error occurred 'B' = an MF1 and Communication error occurred Val: Valve Override Mode 'N' = Normal 'C' = Close 'P' = Purge...

  • Page 72: Command Reference List

    MF1 returns the actual flow value (F) as acknowledge. Only if the command can not be executed or an error occurred the MF1 sends an error message (E). So in normal mode it is guaranteed that the application receives the actual flow in every cyclic step.

  • Page 73: Get Temperature (T)

    Chapter 5: Process Interfaces Get Temperature (T) send: not required receive: Internal Temperature [°C] Get Valve Drive Level (V) send: not required receive: Valve Drive Level [%] Set Flow Setpoint, Get Actual Flow (S) send: Setpoint [calibrated flow unit e.g. sccm] receive: Actual Flow [calibrated flow unit e.g.

  • Page 74: Set Valve Override Normal (N)

    Chapter 5: Process Interface Set Valve Override Normal (N) send: not required receive: Actual Flow [calibrated flow unit e.g. sccm] Set Valve Override Close (C) send: not required receive: Actual Flow [calibrated flow unit e.g. sccm] Set Valve Override Purge (P) send: not required receive:...

  • Page 75: Set Winkstatus (W)

    Chapter 5: Process Interfaces Set WinkStatus (W) send: not required receive: Actual Flow [calibrated flow unit e.g. sccm] Select Gas Table Index (G send: Gas Table Index 0..14 receive: Actual Flow [calibrated flow unit e.g. sccm] Get Gas Table Index (g) send: not required receive:...

  • Page 76: Get Device Status (D)

    High Limit Alarm 1 Low Limit Alarm 1 High Limit Alarm 2 Low Limit Alarm 2 Valve Closed Purge Calibration is Recomended Get MF1 Error Status (M) send: not required receive: Error Messages 0 => not occurred 1 => occurred...

  • Page 77: Get Communication Status (U Or U)

    Chapter 5: Process Interfaces Get Communication Status (U or u) send: U or u not required receive: U or u Error Messages 0 => not occurred 1 => occurred reserved An Error Telegram Occurred Timeout Occurred After reading the Communication Status with 'U' the status is reset. For leaving the communication without a timeout error, send the 'U' cmd.

  • Page 78: Modbus Interface

    Chapter 5: Process Interface Modbus Interface Installation Pinout 2W-Modbus Pinout IDv Signal EIA/TIA 485 Description Name Sub D 9-poles, PIN 1 PIN 5 socket PIN 6 PIN 9 Port Mode Control Open 2W-Mode Low level (connected with Common) 4W-Mode B/B’ Transceiver terminal 1, V1 Voltage (V1 >...

  • Page 79: Power

    PMC will switch the port into 4W-MODBUS Mode. Power The MF1 could be powered via the Phönix MC-Series connector below the Zero switch or via the Sub D connector. Therefore a mating connector is included in the delivery. For the correct power supply specification see the technical specification in Appendix A.

  • Page 80: Operation

    Chapter 5: Process Interface Operation Address MODBUS compatible addressing description The first 255 bytes of cyclic input and cyclic output data are available over the MODBUS addressing. If the software address is < 248 in ASCII Modbus mode or < 99 in RTU Modbus mode, the rotary switches are ignored and the software configurable address is used.
  • Page 81 Chapter 5: Process Interfaces Define the stop bits. 0 => 1,5 Stop Bits 1 => 1 Stop Bit 2 => 2 Stop Bits Failsafe Timeout This configures the timeout between characters at ASCII mode, at RTU mode this parameter is not used.The timeout value is defined in milliseconds.

  • Page 82: Feedback And Diagnostics

    Chapter 5: Process Interface Rounding the CD to an integer and calculate now the error ∗ ∗ ⎛ ⎞ ExpectedBa udRate ∗ − ⎜ ⎟ Error ⎝ ⎠ 48054857 Feedback and Diagnostics Error Codes Standard Modbus Error codes are used. LED Functions LED Functions Item...

  • Page 83: Protocol (Modbus Compatible)

    Chapter 5: Process Interfaces Protocol (Modbus compatible) Holding Registers The address of the Holding Register starts at 1. The Holding Registers are read- and writable. The Holding Register represent the selected input object (default: Standard Input 1179 Object) byte by byte. One Holding Register is an 16 bit Value and represent two bytes of the selected input object Example with the “Standard Input 1179 Object”...

  • Page 84: Input Registers

    Chapter 5: Process Interface Example with the “Standard Input 1179 Object” MODBUS Coil Address Parameter 1..2 ValveOverride Autozero 4...6 ReportDiag (not used at Modbus) WinkStatus EnableTotalizer ResetTotalizer ResetStatus 11..14 SelectGasTable EnGasCorrection Not used 17...32 FlowSetpoint LSB (Byte 1 + 2) 33...64 FlowSetpoint MSB (Byte 3 + 4) Input Registers...

  • Page 85: Discrete Inputs

    Chapter 5: Process Interfaces Example with the “Standard Output 1179 Object” MODBUS Input Parameter Register Address HighLimitAlarm LowLimitAlarm SystemError High2LimitAlarm Low2LimitAlarm ValveClose Purge OverTemperature ValveDriveAlarm CalibrationRecommended Uncalibrated ControllerError MemoryFailure UnexpectedCondition 15 .. 16 Not used 1...16 ThermalMassFlowRate LSB (Byte 1 + 2) 1...16 ThermalMassFlowRate MSB (Byte 3 + 4) 1...16...
  • Page 86 Chapter 5: Process Interface Example with the “Standard Output 1179 Object” MODBUS Discrete Input Parameter Address HighLimitAlarm LowLimitAlarm SystemError High2LimitAlarm Low2LimitAlarm ValveClose Purge OverTemperature ValveDriveAlarm CalibrationRecommended Uncalibrated ControllerError MemoryFailure UnexpectedCondition 15 .. 16 Not used 17...32 ThermalMassFlowRate LSB (Byte 1 + 2) 33...64 ThermalMassFlowRate MSB (Byte 3 + 4) 65...80...

  • Page 87: Ethercat

    PE via a filter circuit in the interface. Power supply The MF1 has to be powered via the Phönix MC-Series connector below the Zero switch. Therefore a mating connector is included in the delivery. For the correct power supply specification see the technical specification in Appendix A.

  • Page 88: Operation

    Chapter 5: Process Interface Shielding S/FTP, S/FTQ, S/STP Transfer Impedance < 50 mΩ/m at 10 MHz Installation Type Flexible, occasional movement or vibration Outer cable diameter 5,5 mm – 8 mm Wire cross section AWG 22/7 Wire diameter 1,5 mm ± 0,1 mm Delay scew ≤...

  • Page 89: Protocol

    Flashing blue Flow Indicator: Flashes proportional to actual flow Blue on 100% Flow Protocol The MF1 with EtherCAT interface supports the CAN application layer over EtherCAT (CoE) protocol and the Process Data Objects (PDO) protocol. Data Format Data Type Comment...

  • Page 90: Can Application Layer Over Ethercat (Coe) - Objects

    USINT MemoryFailure 0x34f8 USINT UnexpectedCondition 0x34f9 USINT ThermalMassFlowRate 0x34fa DINT InternalTemperature 0x34fb DINT ValveDriveLevel 0x34fc DINT RxPdo (0x1600) - Available RxPDOs of the MF1 Name Index SubIndex DataType ValveOverride 0x33ed USINT Autozero 0x33ee USINT ReportDiag 0x33ef USINT WinkStatus 0x33f0 USINT...
  • Page 91 Chapter 5: Process Interfaces Identity Identity USINT Vendor ID UDINT Product Code UDINT Revision Number UDINT 0x1018 Serial Number UDINT No. of mapped application No. of mapped DO RxPDO-Map USINT objects (0.. 254) objects in PDO 0x1600 1 … n Mapped object 1 …...
  • Page 92 Chapter 5: Process Interface 0..14; 15 = default gas table 0x33F4 SelectGasTable SelectGasTable USINT is used enable global GCF [0 = disabled, 1 = 0x33F5 EnGasCorrection EnGasCorrection USINT enabled] in [FLOW_UNIT] 0x33F6 FlowSetpoint FlowSetpoint DINT in 10E-4 steps (flow > HIGH_LIMIT), Hysteresis = 0x34EC...
  • Page 93 100% = valve is in purge position (flull open) see Valve - 0x34FC ValveDriveLevel ValveDriveLevel DINT ValvePosition STRING(32 0x38EB Model Model MF1.. STRING(16 0x38EC SerialNumber SerialNumber G123456G20 Date of 0x38F2 CalDate CalDate STRING(7) calibration STRING(32 any 32 character 0x38F3...

  • Page 94: Chapter 6: Gas Correction Factor (Gcf)

    Chapter 6: Gas Correction Factor (GCF) Chapter 6: Gas Correction Factor (GCF) The Gas Correction Factor (GCF): A Gas Correction Factor (GCF) is used to indicate the ratio of flow rates of different gases which will produce the same output signal from a mass flow meter / controller. The GCF is a function of specific heat, density, and the molecular structure of the gases.

  • Page 95: How To Calculate The Gcf For Gas Mixtures

    The linearity and accuracy may be improved by calibrating the unit with the process gas or using a gas with equivalent properties (surrogate gas). Contact MKS for more information. All MKS readouts have gas correction adjustment controls to provide direct readout.

  • Page 96: Example

    Chapter 6: Gas Correction Factor (GCF) Example Calculate the GCF for a gas mixture of argon (gas 1) flowing at 150 sccm and nitrogen (gas 2) flowing at 50 sccm, where: Argon (Ar) Nitrogen (N 150 = 0.75 0.25 1.030 1.000 1.782 g/l 1.250 g/l...

  • Page 97: Mass Flow Rate At A Different Reference Temperature

    GCF value using the following equation: where: = actual reference temperature in Kelvin K = international standard temperature 273.15 K ( = 0° C) All MKS readouts have gas correction adjustment controls to provide Note direct readout. The analog setpoint output signal is generated accordingly.

  • Page 98: Chapter 7: Theory Of Operation

    Plug Figure 11: Assembly The flow controller type MF1 measures and controls the gas flow rate according to a given setpoint signal, which may be an analog signal or a digital command when using a MF1 with digital interface. The control range is from 2 % to 100% of full scale. The accuracy of the flow...

  • Page 99: Flow Path

    Typical settle time is 0.8 s, for faster tuning contact MKS. The control valve is closed when no power is applied (Normally Closed, N.C.). Controlling flow is done by levitating the valve plug from the valve orifice.

  • Page 100: Control Valve

    Chapter 7: Theory of Operation Control Valve The control valve is a specially designed solenoid driven valve. The armature is suspended by two radial springs. This design provides frictionless movement and thus precise control. Mounted at the front end of the cylindrical armature is the valve plug which incorporates the seal disc of FKM or NBR or FFKM (ref.

  • Page 101: Chapter 8: Maintenance

    - readjusting it. Checks and Recalibration Checks and recalibrations can be done by any service center of MKS (refer to section Repair). If nothing else is specified or shorter intervals are necessary we recommend annual maintenance and recalibration at a service center of MKS.

  • Page 102: Profibus Support Kit

    Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers, listed at the end of this manual. In addition, MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers.

  • Page 103: Troubleshooting

    Chapter 8: Maintenance Troubleshooting Symptoms Possible Cause Remedy No output or overrange at zero Improper cable Check cable for type (after warm-up) Valve override function applied Disconnect / disable valve (Mass flow controller) override Electronics malfunctioning Return for service Unit indicates a negative flow Unit installed in gas stream Reinstall unit in proper flow backwards...
  • Page 104 Chapter 8: Maintenance...

  • Page 105: Appendix A: Product Specifications

    Appendix A: Specifications Appendix A: Product Specifications Specifications Full Scale Ranges (nitrogen equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, All metal sensor 10000, 20000 sccm MEMS sensor 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm Accuracy (with calibration gas) ±...

  • Page 106: Environmental Specifications

    Appendix A: Specifications (continued from previous page) Operating Differential Pressure (MFC only) 10 to 5000 sccm 0.7 bar (g) to 2.75 bar (g) 10000 to 20000 sccm 1 bar (g) to 2.75 bar (g) Pressure Coefficient < 0.02 % of reading/psi Operating Temperature Range 0 –...

  • Page 107: Physical Specifications

    ® ® Optional Cajon 4-VCO male compatible 1/4“ Swagelok compatible DN 16 KF MKS Surface Mount Leak Integrity (mbar·l/s He) External < 1 x 10 Through closed Valve (MFC only) < 1 x 10 Materials Wetted All Metal Sensor: Mass Flow Controller: 1.4301 SST, FKM , Nickel...

  • Page 108: Appendix B: Model Code

    Appendix B: Order Code Appendix B: Model Code The model is identified as follows: MF1 X YYY ZZZ C A E O Variant Gas Identification Full Scale Range Fittings (compatible with) Interface Seals Variant (X) Variant Ordering Code Controller with all metal sensor...
  • Page 109 Appendix B: Model Code Carbonyl Sulfide Chlorine Chlorine Trifluoride ClF3 Chlorodifluoromethane (R-22) CHClF2 Chloroform (Trichloromethane) CHCl3 Chloropentafluoroethane (R-115) C2ClF5 Chlorotrifluoromethane (R-13) CClF3 Cyclopropane C3H6 Deuterium Diborane B2H6 Dichlorodifluoromethane (R-12) CCl2F2 Dichlorofluoromethane (R-21) CHCl2F Dichlorosilane SiH2Cl2 1,2-Dichlorotetrafluoroethane (R-114) C2Cl2F4 Disilane Si2H6 Ethane C2H6 Ethanol...

  • Page 110: Full Scale Range Sccm Nitrogen ) (Zzz)

    Appendix B: Order Code Propylene C3H6 Silane SiH4 Silicon Tetrachloride SiCl4 Silicon Tetrafluoride SiF4 Sulfur Dioxide Sulfur Hexafluoride Sulfuryl Fluoride SO2F2 Tetrafluoroethane (R-134a) C2H2F4 Titanium Tetrachloride TiCl4 Trichlorofluoromethane (R-11) CCl3F Trichlorosilane SiHCl3 Trichlorotrifluoroethane (R-113) C2Cl3F3 Trifluoromethane (Fluoroform R-23) CHF3 Tungsten Hexafluoride Xenon Full Scale Range (sccm Nitrogen) (ZZZ) The full scale range is indicated by three digits.

  • Page 111: Fittings (C)

    Ordering Code Swagelok 4 VCR male 1/4" Swagelok compatible 6 mm Swagelok compatible Swagelok 4 VCO male DN 16 KF MKS Surface Mount Interface (A) Interface Type Ordering Code Profibus DPV1 Profibus DPV0 (1179B compatible) Analog, 9 Pin Sub D Connector...

  • Page 112: Appendix C: Gas Correction Factors

    Appendix C: Gas Correction Factors Appendix C: Gas Correction Factors Please read also the instructions in Chapter 6: Gas Correction Factor (GCF)and the notes at the end of this table. SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR - - - 0.240...
  • Page 113 Appendix C: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Dichlorosilane 0.150 4.506 0.40 1,2-Dichlorotetrafluoroethane 0.160 7.626 0.22 (Freon - 114) 1,1-Difluoroethylene 0.224 2.857 0.43 (Freon - 1132A) 2,2-Dimethylpropane 0.3914 3.219 0.22 Ethane...
  • Page 114 2 or Trifluoroethane (Freon - 113) 0.0810 13.28 0.25 Tungsten Hexafluoride 0.0378 5.858 1.32 Xenon Empirically defined Consult MKS Instruments, Inc. for special applications. NOTE: Standard Pressure is defined as 1013,25 mbar (760 mmHg;14.7 psia), Standard Temperature is defined as 0...

  • Page 115: Appendix D: Ce Declaration Of Conformity

    Appendix C: Gas Correction Factors Appendix D: CE Declaration of Conformity...

  • Page 116: Mks Worldwide Calibration & Service Centers

    MKS Instruments, Taiwan Crewe, Cheshire 10F, No.93, Shoei-Yuan Street CW1 6AE, England Hsinchu City 300 Tel. 44-1270 253400 Taiwan, R.O.C. 44-1270 848382 Tel. 886-3-575 3040 886-3-575 3048 Next page: Declaration of Contamination. Contact your MKS location if the form is missing.

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