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Manuals and User Guides for MKS MC20A. We have
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MKS MC20A manual available for free PDF download: Manual
MKS MC20A Manual (79 pages)
High Flow Mass Flow Controller with Analog I/O
Brand:
MKS
| Category:
Controller
| Size: 0 MB
Table of Contents
German
3
Table of Contents
3
Mass Flow Controller Safety Information
7
Symbols Used in this Instruction Manual
7
Symbols Found on the Unit
7
Safety Procedures and Precautions
7
Sicherheitshinweise für das Massenflussgerät
9
In dieser Betriebsanleitung Vorkommende Symbole
9
Erklärung der am Gerät Angebrachten Symbole
9
Sicherheitsvorschriften und Vorsichtsmaßnahmen
9
French
7
Table 1: Definition of Symbols Found on the Unit
7
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
9
Informations de Sécurité Pour Appareils de Mesure/Contrôle de Débit Massique
11
Symboles Utilisés Dans Ce Manuel D'utilisation
11
Symboles Figurant Sur L'unité
11
Mesures de Sécurité Et Précautions
11
Tableau 3: Définition des Symboles Sur L'unité
11
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
13
Table 9: MKS Interface Cables
32
Table 10: Troubleshooting Chart
47
Table 11: Description of Digital Error Messages
48
Table 12: Gas Correction Factors
53
Table 13: Summary of User and Calibration Mode Capabilities
65
Spanish
13
Medidas de Seguridad del Dispositivo de Flujo de Masa
13
Símbolos Usados en Este Manual de Instrucciones
13
Símbolos Hallados en la Unidad
13
Procedimientos y Precauciones de Seguridad
13
Japanese
15
マスフロー機器の安全に関する情報
15
本取扱説明書のマーク
15
本機器のマーク
15
安全対策について
15
Korean
17
질량 유량 장치 안전 정보
17
본 지침 매뉴얼에 사용되는 기호들
17
장치에 표시된 기호들
17
안전 절차 및 예방조치
17
English
19
Chapter One: General Information
19
Introduction
19
How this Manual Is Organized
20
Customer Support
21
Chapter Two: Installation
23
How to Unpack the MC20A MFC
23
Product Location and Requirements
24
Setup
25
Figure 1: Front View of the MC20A MFC with 4 VCR Fittings
26
Figure 2: Front View of the MC20A MFC with 8 VCR Fittings (Includes Required Mounting Plate)
26
Figure 3: Bottom View of the MC20A MFC with 4 VCR Fittings
27
Figure 4: Bottom View of the MC20A MFC with 8 VCR Fittings (Includes Required Mounting Plate)
27
Figure 5: Inlet End View of the MC20A MFC
28
Figure 6: Top View of the MC20A MFC with 15-Pin Analog Interface
28
Figure 7: Serial Number Label
29
Electrical Connections
30
Table 7: 15-Pin Type "D" MFC Connector Pinout - Standard Assignments (Model Code B)
30
Table 8: 15-Pin Type "D" MFC Connector Pinout - Alternative Assignments (Model Code E)
31
Interface Cables
32
Chapter Three: Overview
35
General Information
35
How the MC20A MFC Works
36
Overview of Digital Operation
36
Tuning the MC20A MFC
37
Figure 8: Effects of the Proportional Term (Low Proportional Term)
38
Figure 9: Effects of the Proportional Term (High Proportional Term)
38
Figure 10: Effects of the Integral Term (Low Integral Term)
39
Figure 11: Effects of the Integral Term (High Integral Term)
39
Chapter Four: Operation
41
How to Start the MC20A MFC
41
How to Zero the Flow Controller
41
How to Override the Valve
43
The Optional Input
43
Chapter Five: Maintenance
45
General Information
45
Zero Adjustment
45
Calibration
45
Chapter Six: Troubleshooting
47
Troubleshooting Chart
47
Description of Digital Error Messages
48
Appendix A: Product Specifications
51
Performance Specifications
51
Physical Specifications
52
Environmental Specifications
52
Appendix B: Gas Correction Factors
53
Explanation of Gas Correction Factor (GCF)
53
Gas Correction Factors Table
54
Appendix C: Model Code Explanation
57
Model Code Description
57
Appendix D: Mass Flow Controller Sizing Guidelines
59
General Information
59
How to Determine the Flow Controller Range
59
Appendix E: MKS MC20A Digital MFC Graphical User Interface
61
Overview
61
Software Setup
61
Equipment Needed
62
Equipment Setup
62
Figure 12: Equipment Setup
62
Starting the GUI
63
Figure 13: Communications Window
63
Figure 14: MC20A MFC Main Control Panel
63
Exiting the GUI
64
Description of the Main Control Panel
64
User Mode and Calibration Mode
65
Calibration Mode Access
66
Figure 15: Change Password Window
66
Figure 16: Adding a Calibration Mode Password for a New User
67
Setting, Adding, and Deleting Gas Tables
68
Figure 17: Add/Select Gas
68
Figure 18: Accuracy Graphical Representation
70
Figure 19: Gas List
70
Figure 20: Copy Gas Table
71
Adjusting PID Tuning Parameters
72
Figure 21: Tuning Parameters
72
Viewing Identity Table
73
Reading Diagnostic Messages
73
Figure 22: Identity Table
73
Creating and Modifying Calibration Tables
74
Figure 23: Calibration Table Operations
74
Index
77
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