MKS Mass-Flo 1679B Manuals

Manuals and User Guides for MKS Mass-Flo 1679B. We have 1 MKS Mass-Flo 1679B manual available for free PDF download: Instruction Manual

MKS Mass-Flo 1679B Instruction Manual

MKS Mass-Flo 1679B Instruction Manual (61 pages)

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents

Table of Contents
6
Mass Flow Controller Safety Information
12
Chapter One: General Information
16
- Introduction
  16
  - Design Features
    17
  - Reliability
    17
  - Cleanliness Features
    17
- How this Manual Is Organized
  18
- Customer Support
  19
Chapter Two: Installation
20
- How to Unpack the Type 1679 Controller
  20
  - Opening the Package
    20
- Unpacking Checklist
  21
- Environmental Requirements
  21
- Setup
  22
  - Dimensions
    23
  - Figure 1: Outline Dimensions of the 1679 Flow Controller
    23
- Gas Line Connections
  24
- Mounting a Type 1679 MFC
  25
- Figure 3: Mounting Dimensions of the 1679 Flow Controller
  25
Chapter Three: Overview
26
Chapter Four: Operation
34
Chapter Five: Theory of Operation
38
- General Information
  38
- Flow Path
  38
- Measurement Technique
  38
- Control Circuitry
  39
Chapter Six: Maintenance
40
- General
  40
- Zero Adjustment
  40
- Repair
  41
Chapter Seven: Troubleshooting
42
- Troubleshooting Chart
  42
- Table 6: Troubleshooting Chart
  42
Appendix A: Product Specifications
44
- Performance Specifications
  44
- Environmental Specifications
  45
- Electrical Specifications
  45
- Physical Specifications
  46
Appendix B: Gas Correction Factors
48
Appendix C: MFC Sizing Guidelines
52

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