MKS 1150C Manuals

MKS 1150C Manuals

Manuals and User Guides for MKS 1150C. We have 1 MKS 1150C manual available for free PDF download: Instruction Manual

MKS 1150C Instruction Manual

MKS 1150C Instruction Manual (50 pages)

Mass Flow Controller

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents

Table of Contents
6
Mass Flow Controller Safety Information
10
Chapter One: General Information
14
- Introduction
  14
- How this Manual Is Organized
  15
- Customer Support
  15
Chapter Two: Installation
16
- How to Unpack the Type 1150 Unit
  16
  - Opening the Package
    16
  - Unpacking Checklist
    17
- Product Location and Requirements
  17
- Setup
  18
- Electrical Installation
  22
  - Power Requirements
    22
  - Connectors
    22
  - Table 2: Power (J9) Connector Pinout
    22
  - Table 3: Signal (J15) Connector Pinout
    23
- Interface Cables
  24
  - Table 4: Interface Cables
    24
  - Generic Shielded Cable Guidelines
    25
Chapter Three: Overview
26
- General Information
  26
  - System Operating Temperature
    26
- Changing the Range of the 1150 Unit
  26
- Calibration
  27
- Label
  27
- Figure 7: Warning Label
  27
- Analog Interface Signals
  28
Chapter Four: Operation
30
Chapter Five: Troubleshooting
38
- General Information
  38
Chapter Six: Maintenance
42
- General Information
  42
- Cleaning and Repair
  42
Appendix A: Product Specifications
44
- System Specifications
  44
- Mechanical Specifications
  44
- Electrical Specifications
  45
Appendix B: Calibration Data Sheet
46
Index
48

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